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2. In-Line Metrology for Characterization and Control of Extreme Wafer Thinning of Bonded Wafers.

3. Highly reliable TaOx ReRAM with centralized filament for 28-nm embedded application

4. A new complementary hetero-junction vertical Tunnel-FET integration scheme

6. Process-improved RRAM cell performance and reliability and paving the way for manufacturability and scalability for high density memory application

7. 10×10nm2 Hf/HfOx crossbar resistive RAM with excellent performance, reliability and low-energy operation

9. Record low contact resistivity to n-type Ge for CMOS and memory applications

10. High yield sub-0.1µm2 6T-SRAM cells, featuring high-k/metal-gate finfet devices, double gate patterning, a novel fin etch strategy, full-field EUV lithography and optimized junction design & layout

11. A 400GHz fMAX fully self-aligned SiGe:C HBT architecture

12. Record ION/IOFF performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalability

13. Low-voltage 6T FinFET SRAM cell with high SNM using HfSiON/TiN gate stack, fin widths down to 10nm and 30nm gate length

14. A Novel Fully Self-Aligned SiGe:C HBT Architecture Featuring a Single-Step Epitaxial Collector-Base Process

15. Gatestacks for scalable high-performance FinFETs

16. A Low-Power Multi-Gate FET CMOS Technology with 13.9ps Inverter Delay, Large-Scale Integrated High Performance Digital Circuits and SRAM

17. Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography

18. Doubling or quadrupling MuGFET fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency

24. A 0.314μm/sup 2/ 6T-SRAM cell build with tall triple-gate devices for 45nm node applications using 0.75NA 193nm lithography

25. High yield sub-0.1µm2 6T-SRAM cells, featuring high-k/metal-gate finfet devices, double gate patterning, a novel fin etch strategy, full-field EUV lithography and optimized junction design & layout.

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