1. Molecular beam epitaxy of free‐standing bulk wurtzite Al x Ga 1‐x N layers using a highly efficient RF plasma source
- Author
-
S-L Sahonta, Rachel A. Oliver, Colin J. Humphreys, C. T. Foxon, C.R. Staddon, and Sergei V. Novikov
- Subjects
010302 applied physics ,Materials science ,business.industry ,02 engineering and technology ,Plasma ,Nitride ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,medicine.disease_cause ,7. Clean energy ,01 natural sciences ,law.invention ,law ,Lattice (order) ,0103 physical sciences ,medicine ,Optoelectronics ,0210 nano-technology ,business ,Ultraviolet ,Wurtzite crystal structure ,Molecular beam epitaxy ,Bulk crystal ,Light-emitting diode - Abstract
Recent developments with group III nitrides suggest AlxGa1-xN based LEDs can be new alternative commer-cially viable deep ultra-violet light sources. Due to a sig-nificant difference in the lattice parameters of GaN and AlN, AlxGa1-xN substrates would be preferable to either GaN or AlN for ultraviolet device applications. We have studied the growth of free-standing wurtzite AlxGa1-xN bulk crystals by plasma-assisted molecular beam epitaxy (PA-MBE) using a novel RF plasma source. Thick wurtz-ite AlxGa1-xN films were grown by PA-MBE on 2-inch GaAs (111)B substrates and were removed from the GaAs substrate after growth to provide free standing AlxGa1-xN samples. Growth rates of AlxGa1-xN up to 3 μm/h have been demonstrated. Our novel high efficiency RF plasma source allowed us to achieve free-standing bulk AlxGa1-xN layers in a single day’s growth, which makes our MBE bulk growth technique commercially vi-able.
- Published
- 2016