159 results on '"Muller, R.S."'
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2. Diamagnetically Levitated MEMS Accelerometers.
3. Stretched-film micromirrors for improved optical flatness.
4. Monolithic integrated zinc-oxide on silicon pyroelectric anemometer.
5. Characteristics of short-channel MOSFETs in the breakdown regime.
6. A unified model for hot-electron currents in MOSFET's.
7. Thin Zinc-Oxide Film Array for Programmable Filter and Scanned Receiving Transducer.
8. Ultrasonic Receiving Array Having Power Response.
9. Design and performance of resistive-gated MOSFETs for analog integrated circuits.
10. Fabrication and characterization of ZnO piezoelectric films for sensor devices.
11. Integrated Ultrasonic Transducer.
12. Complementary DMOS process for LSI.
13. Surface-micromachined Mirrors For Laser-beam Positioning.
14. Magnetic Microactuation Of Torsional Polysilicon Structures.
15. A Thermal Absolute-pressure Sensor With On-chip Digital Front-end Processor.
16. Thermal conductivity of heavily doped LPCVD polysilicon.
17. A silicon magneto-coupler using a carrier-domain magnetometer.
18. Integrated Zinc oxide-on-silicon tactile-sensor array.
19. Integrated resonant-microbridge vapor sensor.
20. Integrating sensors and electronics—New challenges for silicon.
21. Spiral microstructures for the measurement of average strain gradients in thin films.
22. Measurement of Young's modulus on microfabricated structures using a surface profiler.
23. Residual strain effects on large aspect ratio micro-diaphragms (capacitance transducer).
24. IC-processed micro-motors: design, technology, and testing.
25. Polysilicon microgripper.
26. Pyroelectric Properties and Applications of Sputtered Zinc-Oxide Thin Films.
27. IDT-Generated Ultrasonic Lamb Waves in a Very Thin Membrane.
28. Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners.
29. Laterally grown porous polycrystalline silicon: a new material for transducer applications.
30. Micromechanical electrostatic voltmeter.
31. Overhung electrostatic microgripper.
32. Improved IC-compatible piezoelectric microphone and CMOS process.
33. Design and performance of constant-temperature circuits for microbridge-sensor applications.
34. Fabrication and performance of a fully integrated mu -pirani pressure gauge with digital readout.
35. IC-processed electrostatic micro-motors.
36. A bistable snapping microactuator.
37. Vacuum-sealed silicon micromachined incandescent light source.
38. Integrated microphone with CMOS circuits on a single chip.
39. Fracture strain of LPCVD polysilicon.
40. As-deposited low-strain LPCVD polysilicon.
41. A constant-temperature gas flowmeter with a silicon micromachined package.
42. Fluidic self-assembly of micromirrors onto microactuators using capillary forces.
43. Surface-micromachined microoptical elements and systems.
44. Surface micromachining for microelectromechanical systems.
45. Magnetic microactuation of polysilicon flexure structures.
46. Porous polycrystalline silicon: a new material for MEMS.
47. Piezoelectric microphone with on-chip CMOS circuits.
48. Front-to-backside alignment using resist-patterned etch control and one etching step.
49. Silicon-processed overhanging microgripper.
50. Electrical and optical characteristics of vacuum-sealed polysilicon microlamps.
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