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Fabrication and performance of a fully integrated mu -pirani pressure gauge with digital readout.
- Source :
- TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers; 1991, p245-248, 4p
- Publication Year :
- 1991
Details
- Language :
- English
- ISBNs :
- 9780879425852
- Database :
- Complementary Index
- Journal :
- TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers
- Publication Type :
- Conference
- Accession number :
- 92361651
- Full Text :
- https://doi.org/10.1109/SENSOR.1991.148848