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Front-to-backside alignment using resist-patterned etch control and one etching step.
- Source :
- Journal of Microelectromechanical Systems; 1992, Vol. 1 Issue 2, p95-99, 5p
- Publication Year :
- 1992
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 1
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 93211316
- Full Text :
- https://doi.org/10.1109/84.157364