Back to Search
Start Over
Piezoelectric microphone with on-chip CMOS circuits.
- Source :
- Journal of Microelectromechanical Systems; 1993, Vol. 2 Issue 3, p111-120, 10p
- Publication Year :
- 1993
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 2
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 93211340
- Full Text :
- https://doi.org/10.1109/84.260255