IC-processed micro-motors: design, technology, and testing.

Details

Language :

English

Database :

Complementary Index

Journal :

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines & Robots'

Publication Type :

Conference

Accession number :

92418987

Full Text :

https://doi.org/10.1109/MEMSYS.1989.77950