29 results on '"van den Brink, Martin"'
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2. Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond
3. Holistic lithography in the age of the Artificial Intelligence of Things
4. Holistic lithography and metrology's importance in driving patterning fidelity
5. Lithography continues to drive Moore's law
6. Continuing to shrink: Next-generation lithography - Progress and prospects.
7. Holistic efficiency optimization: how to help in a downturn
8. Step-and-scan and step-and-repeat: a technology comparison
9. Wide-field deep-UV wafer stepper for 0.35-μm production
10. Matching of multiple-wafer steppers for 0.35-μm lithography using advanced optimization schemes
11. Evaluation of high-numerical-aperture wide-field steppers for 0.35-micron design rules
12. Overlay and field-by-field leveling in wafer steppers using an advanced metrology system
13. Performance of a step-and-scan system for DUV lithography.
14. Step-and-scan and step-and-repeat: a technology comparison.
15. Matching of multiple-wafer steppers for 0.35-m lithography using advanced optimization schemes.
16. Wide-field deep-UV wafer stepper for 0.35-m production.
17. Automatic on-line wafer stepper calibration system.
18. Deep-UV wafer stepper with through-the-lens wafer to reticle alignment.
19. New 0.54 aperture i-line wafer stepper with field-by-field leveling combined with global alignment
20. Automatic on-line wafer stepper calibration system
21. Deep-UV wafer stepper with through-the-lens wafer to reticle alignment
22. Resolution And Overlay Of Submicron I-Line Wafer Steppers
23. Progress in I-line Stepper Technology for Half-Micron
24. 2009 Executive Outlook: Survival and Opportunities in 2009.
25. SEMICON West 2008 Executive Outlook.
26. SEMICON West 2007 Executive Outlook.
27. Lithography Executive Viewpoints.
28. Holistic lithography and metrology's importance in driving patterning fidelity
29. Litho Roadmap Shows Difficult Terrain (Part 2).
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