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Atom probe tomography and secondary ion mass spectrometry were used to investigate the effects of carbon (C) co-implantation and subsequent annealing at 600 to 1200 °C on the behavior of implanted boron (B) atoms in silicon. When B alone was implanted, annealing at 600 to 800 °C caused it to form clusters in the peak region (1020 cm−3) of the concentration profile, and diffusion only occurred in the low-concentration tail region (<1018 cm−3), which is thought to be the well-known transient enhanced diffusion. However, when co-implantation with C was performed, this diffusion was almost completely suppressed in the same annealing temperature range. In the absence of C implantation, annealing at 1000 °C caused B clusters to begin to dissolve and B to diffuse out of the peak concentration region. However, this diffusion was also suppressed by C implantation because C atoms trapped B atoms in the kink region found at the B concentration level of 2 × 1019 cm−3. At 1200 °C, B clusters were totally dissolved and a strong B diffusion occurred. In contrast to lower annealing temperatures, this diffusion was actually enhanced by C implantation. It is believed that Si interstitials play an important role in the interaction between B and C. This kind of comprehensive investigation yields important information for optimizing ion implantation and annealing processes. [ABSTRACT FROM AUTHOR]

The spectrally controllable enhancement of the transverse magneto-optical Kerr effect is realized in 2D hybrid metal-dielectric magnetoplasmonic metasurfaces. The light diffracted at different interfaces allows one to manipulate light phase in the condition of plasmonic and waveguiding resonance excitation controllable via the azimuthal angle. The multimodal nature of the system provides the flexible tunability of its magneto-optical response. [ABSTRACT FROM AUTHOR]

We have investigated valence band and conduction band electronic structures and interfacial chemical bonding states of nitrogen-plasma-treated HfSiON/SiON gate stacks on Si substrates with and without rapid thermal annealing by photoelectron spectroscopy and x-ray absorption spectroscopy to correlate them with electrical properties. We have found that the N3 component in N 1s can be correlated with electron trapping. Photoelectron spectra and O K-edge absorption spectra confirm the existence of the SiO2-rich phase-separated area in HfSiON films. Band offsets for the HfSiON/Si and the SiO2-rich HfSiON/Si are determined to be 2.5 and 4.2 eV for valence band and 1.7 and 3.6 eV for conduction band, respectively. [ABSTRACT FROM AUTHOR]

By utilizing a sharp magnetic needle made of a sintered Nd2Fe14B permanent magnet, we were able to produce a strong magnetic field of up to approximately 560 kA/m in a transmission electron microscope and succeeded in observing the magnetization reversal in a thin film of sintered Nd2Fe14B by in situ Lorentz microscopy. The increase in the magnetic field induced by the magnetic needle led to a pair of straight magnetic domain walls forming abruptly from the grain boundary. The successive nucleation in the neighboring grain started at the grain boundary adjacent to the magnetic domain wall formed first. Eventually, the magnetic domain walls in the neighboring grains connected and moved continuously and finally disappeared. [ABSTRACT FROM AUTHOR]

Surface potential and the amount of charging on an insulator surface under electron beam irradiation have been quantitatively measured. For these measurements, a special sample holder was developed. The surface potential was measured using a secondary electron method. The measurement of the surface potential revealed that the sample behaves as a resistor, enabling the present technique to be applied for mapping microarea resistance. The results of measuring the amount of charging revealed that the amounts of charging obtained with different beam currents are the same in spite of different surface potentials. This strongly suggests that the charging phenomenon depends on the distribution of the charge trapping sites. [ABSTRACT FROM AUTHOR]

Propagation characteristics of the zeroth-order symmetric (S[sub 0]) mode shear-horizontal (SH) wave in a cell structure containing a thermotropic liquid crystal layer with chiral smectic-C (SmC[sup *]), smectic-A (SmA), chiral nematic (N[sup *]) and isotropic (Iso) phase states, are examined. The SH wave propagation is numerically analyzed with consideration of the directional dependence of the viscosity and elastic constant of the SmA liquid crystal. Temperature dependencies of acoustic phase delay and propagation loss of the SH wave are observed. The critical behavior of the acoustic phase delay and the propagation loss of the SO mode SH wave in the vicinity of the N[sup *]-SmA phase transition temperature are explained by the existence of the elastic constant related to layer compression. The layer compression elasticity is predominant in the SmA phase, and is determined from the comparison of numerical analysis with experimental results. [ABSTRACT FROM AUTHOR]

The nematic liquid-crystal director-orientation in the vicinity of the interface between a liquid-crystal layer and a glass substrate is evaluated in various orientations under an applied electric field, using shear horizontal (SH) wave propagation. The measured acoustic phase delay is related to numerical analysis of the propagation characteristics of the SH wave in a trilayer structure containing a nematic liquid-crystal layer (4-cyano-4′-pentylbiphenyl: 5CB) between two glass plates. This technique using SH wave propagation in a liquid-crystal cell is promising for evaluating the nematic liquid-crystal director angle in the vicinity of the interface. [ABSTRACT FROM AUTHOR]

Provides information on a study wherein the photo-induced transient thermoelectric effect was measured for bismuth single crystals. Methods; Results; Conclusion.

The magneto-optical (MO) imaging is one of the methods for visualizing the magnetization distribution corresponding to the leakage magnetic fields. In general, the MO imaging requires high-spatial resolution and high-contrast imaging. The spatial resolution of the MO imaging depends on the magnetic domain size. In this study, we used the polycrystalline garnet films with a domain size of about 50 nm for the high-resolution imaging. We also demonstrated MO imaging using the magnetophotonic crystal (MPC) with polycrystalline garnet films in order to improve the MO image contrast. The MO images of a carbon steel surface can be observed by means of the MPC. As a result, the high-spatial resolution and high-contrast MO image was obtained by MPC. [ABSTRACT FROM AUTHOR]

In this study, we investigated the magnetization response of the polycrystalline magnetic garnet film for stress. The calculation suggests that the balance of the magnetic anisotropic energy under magnetic field is an essential factor to modulate the magnetization by stress. We fabricated the magnetophotonic crystal based voltage driven type magneto-optic spatial light modulator, and measured the magneto-optic response for stress. The experimental results had a good agreement with our calculation. In our results, the magnitude and linearity of the modulation by stress was depending on static bias field, stress, and magnetostriction constant. The obtained results implied that the calculation could estimate the device performance by deciding material composition and prepare stress inside garnet. [ABSTRACT FROM AUTHOR]

We have studied the optical and magneto-optical properties of bismuth-substituted yttrium iron garnet (Bi:YIG) films with Au nanoparticles dispersed on their top surfaces. These structures exhibit surface plasmon resonances due to light coupling to Au nanoparticles, showing, for any direction of polarization of the incoming light beam, an absorption band in the spectral range of 500–750 nm. For transmitted light beams with the plasmon-resonant wavelengths, the plane of polarization rotates slightly when the structure is not magnetized. Polarization-resolved transmission spectra show that this rotation is due to anisotropy of light propagation through the array of Au nanoparticles. For the structure comprising the 90-nm-thick Bi:YIG film and the array of Au nanoparticles of several tens of nanometers, the Faraday rotation angle enhances as compared with that for the original Bi:YIG film of the same thickness. [ABSTRACT FROM AUTHOR]

A magneto-optical spatial light modulator (MOSLM) is a real-time programmable device for modulating the amplitude and/or phase of two-dimensional optical signals at a high speed. Recently, we reported the development of the transmission-type MOSLM (T-MOSLM) based on a one-dimensional magnetophotonic crystal (MPC) with a high driving performance. However, further improvement of the T-MOSLM is required. The structure of the T-MOSLM has low optical efficiency due to weakening of transmittance through electrodes; furthermore, the fabrication of the driving electrodes is a very complicated process. In this study, we suggest a new design of the MPC for a reflection-type MOSLM (R-MOSLM). The idea of a reflection-type MPC (R-MPC) is to replace one of the Bragg mirrors with an aluminum reflection film. The structure is glass/(Ta2O5/SiO2)k/Bi:YIG/Al, where k is the repetition number. The approach of the optimal structure of the R-MPC was done by the calculation of the matrix approach method. In the calculation of the newly designed R-MPC, Kerr rotation of -10° was obtained. This result implied that the performance of the R-MOSLM using the MPC could be highly improved. According to the optimization of the calculation, the R-MPC was fabricated and its Kerr rotation was -2.2°. This means that Kerr rotation was enhanced by using the new design of the reflection-type MPC. In addition, surface reflection was the reason for the low reflectance and deterioration of Kerr rotation. [ABSTRACT FROM AUTHOR]

Thin-film-type magneto-optical spatial light modulator has been developed by combining one-dimensional magnetophotonic crystal (MPC) and micropatterned drive lines. The use of MPC is expected to be effective because the apparent Faraday effect, which is directly proportional to pixel contrast, is largely enhanced by the light localization of light in the vicinity of the magnetic defect in magnetophotonic crystal. The magnetophotonic crystal had a multilayer structure of (Ta2O5/SiO2)k/Bi: yttrium iron garnet/(SiO2/Ta2O5)k formed on a glass substrate, where k is the repetition number and one of optimization parameters in this study. The transmittance T decreased with an increase of k, while Faraday rotation θF increased, indicating that the enhancement of light modulation rate would be achieved by optimizing the figure of merit F defined by F≈T sin 2θF. At k=6, the maximum F=8.8 was obtained, which is about 20 times larger than that of single layer structure. [ABSTRACT FROM AUTHOR]

Hydrogen (H) plays an important role in determining the reliability and performance of HfO2- and Al2O3-based high-k dielectric electronic devices. In order to understand H behavior, deuterium (D), an isotope of H, was introduced into the poly-Si cap of Al2O3/HfxSi1-xO2/SiO2 high-k stacks by ion implantation. Atom probe tomography was used to image the D distribution in samples annealed under different conditions. The results clearly demonstrated that the D atoms were trapped at the interface of poly-Si and Al2O3 after annealing at 900 K for 10 min. Thus, it is possible that Al2O3 blocks the H atoms at the surface, preventing them from diffusing into the high-k dielectrics during the H2 annealing process in current fabrication technology. The current work also exhibits an example of investigating H behavior in semiconductors by atom probe tomography. [ABSTRACT FROM AUTHOR]

Co43Pt57 nanoparticle dispersion was synthesized by using the polyol process, and monolayer film of the particles with [3-(2-aminoethylamino)propyl]trimethoxysilane coupling layer on a silicon substrate was fabricated and characterized. After the film was annealed at 873 K, the Co43Pt57 nanoparticles transformed from their as-deposited fcc phase to L10 structure. However, the resulting c/a ratio was only 0.993, indicating incomplete transformation. Grain size of the annealed film was 4.9 nm against 4.1 nm for the as-deposited state. The annealed film showed the presence of high anisotropic phase with the remanence coercivity of 4.2 kOe and anisotropy field over 25 kOe at RT. [ABSTRACT FROM AUTHOR]

This article reports the preparation of submicrometric magnetic particles which are promising parts for fabrication of three-dimensional magneto-photonic crystals. In our experiments SiO2 spheres with diameter of about 260 nm were coated with Fe3O4 fine particles from an aqueous solution at room temperature. It is found that spheres coated with Fe3O4 fine particles with a diameter of about 20 nm are synthesized when the ratio of Fe3+/Fe2+ is in the range 50%–100% and the pH value is in the range 8–10. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR]

Magnetization-induced second-harmonic (SH) generation is studied in magnetophotonic crystals formed from a magnetic garnet spacer located between two dielectric Bragg reflectors, at the resonance of the fundamental radiation with the cavity mode. Longitudinal nonlinear magneto-optical Kerr effect manifests itself in the rotation of the polarization plane of a reflected SH wave which reaches a value up to 250°/μm. A magnetization-induced variation of the SH intensity is observed in transversal configuration with magnetic contrast up to 0.3. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR]

We fabricated and experimentally investigated three-dimensional magnetophotonic crystals (3D MPCs) based on artificial opals. Opal samples with three-dimensional dielectric lattices were impregnated with different types of magnetic material. Magnetic and structural properties of 3D MPCs were studied by field emission scanning electron microscopy, x-ray diffraction analysis, and vibrating sample magnetometer. We have shown that magnetic materials synthesized in voids of opal lattices and the composites obtained have typical magnetic properties. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR]

Structural, magnetic, magnetotransport, optical, and magneto-optical properties of (FePt)1-X(SiO2)X thin films in as-deposited state and after annealing were investigated. Magneto-optical properties were measured in the transversal Kerr effect (TKE) geometry. Magneto-optical spectra in nanocomposites (FePt)1-X(SiO2)X depend greatly on volume fraction of metal and annealing conditions. The TKE reaches the maximum value for compositions close to the percolation threshold X≈57% in as-deposited samples, as well as a maximum of the magnetoresistance. After annealing at 700 °C the TKE value significantly increases and the maximum of the magneto-optical response is observed at X≈70%. The magneto-optical spectra transformation after annealing is mainly due to the disorder-order phase transitions in FePt granules, changes in the mean granular size, and alloy microstructure. The TKE spectra calculated in the framework of the effective medium approximation for as-deposited samples are in good agreement with the experiment. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR]

By the sterolithography technique and the ferrite plating, we fabricated three types of magnetic micromachines which coated Fe[SUB3]O[SUB4], Co[SUB0.39]Fe[SUB2.61]O[SUB4], and Co[SUB0.45]Fe[SUB2.55]O[SUB4], respectively. The stereolithography technique enables one to form the spiral-shape resinous templates and the ferrite plating enables one to coat the ferrites uniformly onto these templates from an aqueous solution. The total machine weight is light because a resin of the template body is almost the same density as water. We verified that the machines swim freely and wirelessly in water by applying a rotational magnetic field. As these machines coated with ferrites have the biocompatibility, there is the possibility of medical microrobots which swim in the human body for medical operations. [ABSTRACT FROM AUTHOR]

We magneto-optically investigate the switching properties of the grooved pixels. The switching field of the 70%-grooved pixel achieves a factor of over two reductions more than that of the 100%-grooved pixel. The switching properties of the geometric pixel arrays for the magneto-optic spatial light modulators are very sensitive to the depth of the pixel groove, and also depend on the state of individual pixel, in additions to the state of the neighbors in two-dimensional pixel arrays. Optimally grooved pixels can allow high amounts of bismuth in the iron garnet film, and actually reduce the driving current of the magneto-optic spatial light modulator due to a low switching threshold field. [ABSTRACT FROM AUTHOR]

A magneto-optic spatial light modulator driven by an electric field is fabricated by using the electrostrictive effect of [Pb(Zr[SUB0.52]Ti[SUB0.48])O[SUB3]] (PZT) thin film. As the stress field induced by the PZT thin film reduces the anisotropy energy of the structured garnet film, we find that the pixels can be easily switched in accordance with or without the small external bias field. When peak-to-peak 8 V at the X and Y conductors is applied with the external bias field of 40 Oe at the fabricated device, the selected pixel is switched independently. [ABSTRACT FROM AUTHOR]

Effects of pixel groove depth and patterned permalloy assist film for the magnetization switching of LPE-garnet film were studied experimentally. The results showed that the magnetization field to switch a structured pixel could be reduced by controlling the pixel groove depth. It was also found that the permalloy assist film creates a unique pair-domain pattern within a single garnet pixel, which is useful for realizing a new type of magneto-optic spatial light modulator with high resistivity to noise. [ABSTRACT FROM AUTHOR]

The effect of a magnetic field on the electrode potential of Fe, Co, Ni, and Cu in different electrolytes was investigated. The electrolytes used were iron(III) chloride (0.02-0.6 M/l), iron (III) nitrate (0.06 M/l), caustic soda (8 M/l), hydrochloric acid (0.1 M), and sulphuric acid (0.1 M). All measurements were made at room temperature in magnetic fields of up to 4 kOe. Results from experiments with nickel and cobalt ferromagnetic electrodes and different electrolytes showed no effect of magnetic field. On the contrary, magnetic field caused a proportional change in the potential of the ferromagnetic iron electrode in solutions of iron(III) chloride and nitrate, and caustic soda. A significant long-time drift of the potential was found in all electrolytes. The electrode magnetization change gives the change of the potential, which is not proportional to magnetization. [ABSTRACT FROM AUTHOR]

We fabricated a one-dimensional magnetophotonic crystal (MPC), in which a magnetic layer of Co–ferrite (∼40 nm in thickness) is sandwiched by a couple of dielectric multilayer reflectors with (SiO[sub 2]/TiO[sub 2])×7 structure. The Co–ferrite layer was synthesized by ferrite plating from aqueous solution at 90 °C. The MPC is so designed to enhance magneto-optical Faraday rotation θ[sub F] at the Fabry–Pe´rot resonance wavelength λ of the multilayer structure. θ[sub F] was observed to increase by factor of ∼5.4, but at λ=∼620 nm which is deviated from the target resonance (λ=740 nm) and at very weak transmissivity. This may be because the Co–ferrite layer is rough in surface and smaller in thickness than the target thickness at which Fabry–Pe´rot resonance is designed to occur. © 2000 American Institute of Physics. [ABSTRACT FROM AUTHOR]

Investigates the magnetic properties of multilayer films composed of FeRhIr, silver and iron multilayers. Experimental details; Results and discussion.

We have developed three-dimensional magneto-optic spatial light modulators (3D-MOSLMs) that use magnetic domains as submicron scale pixels to represent holograms. Our display system uses a submicron-scale magnetic pixel array on an amorphous TbFe film to create a wide viewing angle hologram. However, in previous work the reconstructed images had a low intensity and a low optical contrast; brightness of the reconstructed image was 4.4×10-2cd/m² with 532 nm illumination light at 10.8 mW/cm², while display standard ISO13406 recommends 100 cd/m² or more. In this paper, we describe our development of a 3D-MOSLM composed of an artificial magnetic lattice structure of magnetophotonic crystals (MPCs). The MPCs enhance the diffraction efficiency of reconstructed 3D images and reduce the power consumption for controlling the magnetic pixels by a light localization effect. We demonstrate reconstructed 3D images using the MPC and show significant brightness improvement. [ABSTRACT FROM AUTHOR]

Horizontal orientation of the emission transition dipole moments achieved in glassy vapor-deposited organic thin films leads to an enhancement of the light out-coupling efficiency in organic lightemitting diodes (OLEDs). Here, our combined study of variable angle spectroscopic ellipsometry and angle dependent photoluminescence demonstrates that such a horizontal orientation can be achieved in glassy spin-coated organic films based on a composite blend of a heptafluorene derivative as a dopant and a 4,4'-bis(N-carbazolyl)-1,1'-biphenyl as a host. Solution-processed fluorescent OLEDs with horizontally oriented heptafluorene emitters were then fabricated and emitted deep blue electroluminescence with an external quantum efficiency as high as 5.3%. [ABSTRACT FROM AUTHOR]

An intermediate for immobilizing biofunctional molecules, 3-aminopropyltrimethoxysilane (APTMS) was anchored to ZnO nanorod arrays which had been grown by an aqueous solution method with microwave-assisted heating on a-plane sapphire substrates. X-ray photoelectron spectroscopy analysis revealed that the quantity of APTMS anchored on the ZnO nanorod arrays was more than that on a flat ZnO layer. Also, annealing of the APTMS anchored to ZnO nanorods at 500 °C showed that the amino groups were disappeared while Si atoms remained after the annealing probably due to strong Si–O bonding. [ABSTRACT FROM AUTHOR]

Imprint lithography has been included on the ITRS Lithography Roadmap at the 32 and 22 nm nodes. Step and flash imprint lithography (S-FIL™) is a unique method for printing sub-100-nm geometries. Relative to other imprinting processes S-FIL has the advantage that the template is transparent, thereby facilitating conventional overlay techniques. Further, S-FIL provides sub-100-nm feature resolution without the significant expense of multielement, high quality projection optics or advanced illumination sources. However, since the technology is 1X, it is critical to address the infrastructure associated with the fabrication of templates. With respect to inspection, although defects as small as 70 nm have been detected using optical techniques, it is clear that it will be necessary to take advantage of the resolution capabilities of electron beam inspection techniques. This article reports the first systematic study of die-to-database electron beam inspection of patterns that were imprinted using an Imprio 250 system. The die-to-database inspection of the wafers was performed on an NGR2100 inspection system. Metal 1 and logic patterns with dimensions as small as 70 nm were inspected. Using a pixel address of 3 nm and a defect threshold of 20 nm, problem areas in the design of the pattern layout were clearly identified. Ultimately, the most desirable solution is to directly inspect the fused silica template. This article also reports the results on the first experiments of direct inspection fused silica substrates at data rates of 200 MHz. [ABSTRACT FROM AUTHOR]

We prepared the reflection type magnetophotonic crystals (R-MPC) to enhance the magneto-optic property of magneto-optic spatial light phase modulator (MOSLM). Magnetophotonic crystals have a localized wavelength by using a defect layer in which the magneto-optic property can be increased tremendously. By the calculation, it was revealed clearly that Kerr rotation can be enhanced with increasing the repetition number (k) which is the number of dielectric layer. In this study, Dy1.0Bi1.5Y1.0Fe3.8Al1.2O12(DyBi:YIG) garnet material, of which Faraday rotation angle is about -3 deg/μm, was utilized as a defect layer. At the designed wavelength of 532 nm and k=5, SGGG/ [SiO2 /Ta2O5]2 /DyBi:YIG/ [SiO2 /Ta2O5]k structure fabricated with garnet thickness of 347.6 nm showed Kerr rotation angle of 26° and reflectivity of 0.2% which is coincident considerably with the results (θk=30° and R=0.59%) calculated by the matrix approach method. The fabricated R-MPC-MOSLM structure exhibited the magneto-optic property of about 25 times higher than single garnet film in consideration of the thickness of magneto-optic material. [ABSTRACT FROM AUTHOR]

Describes the development of a matrix-type semiconductor x-ray detector for the purpose of determining measurements of temporally and spatially resolved electron temperatures during a single plasma shot. Specifications for the semiconductor detector; Testing of the device in the GAMMA 10 tandem mirror; Achievement of plasma profiles.