Characterization of 100 MHz inductively coupled plasma (ICP) by comparison with 13.56 MHz ICP.

Details

Language :

English

ISSN :

07342101

Volume :

17

Issue :

4

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films

Publication Type :

Academic Journal

Accession number :

74335485

Full Text :

https://doi.org/10.1116/1.581845