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Charge separation in an electron cyclotron resonance plasma.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1995, Vol. 13 Issue 2, p327-331, 5p
- Publication Year :
- 1995
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 13
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 74333052
- Full Text :
- https://doi.org/10.1116/1.579417