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1. Herausforderungen und Lösungsansätze für die fertigungsnahe Qualitätskontrolle mittels optischer 3D-Messtechnik

2. Implementation and analysis of an automated multiscale measurement strategy for wafer scale inspection of micro electromechanical systems

3. Verlässlichkeitsanalyse von Indikator-Funktionen in einem Automatisierten Multiskalen-Messsystem

4. Model-Based Control of a High-Precision Measurement Machine for Multiscale Inspection Tasks

5. Fusion multimodaler Daten am Beispiel eines Mikrolinsen-Arrays (Multimodal Data Fusion Exemplified on a Microlens Array)

6. itom: an open source metrology, automation, and data evaluation software

7. Automated Multi-sensor Inspection of 3D Objects

8. Object Depending Measurement Uncertainty of Confocal Sensors

9. itom – An Open Source Measurement, Automation and Evaluation Software Suite

10. Making, testing, applying: some progress in the field of micro-optics at ITO

11. Robust signal evaluation for Chromatic Confocal Spectral Interferometry

12. Model-based, active inspection of three-dimensional objects using a multi-sensor measurement system

13. Improved signal model for confocal sensors accounting for object depending artifacts

14. Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system

15. Multilevel optical sectioning based on digital holography with a femtosecond frequency comb laser

17. Automated alignment of aspheric and freeform surfaces in a non-null test interferometer

18. Assistant systems for efficient multiscale measurement and inspection

19. Conceptual consideration for the process integration of optical sensors

20. Combining rigorous diffraction calculation and GPU accelerated nonsequential raytracing for high precision simulation of a linear grating spectrometer

21. Interferometrische Messung von Freiform-Schneidkanten auf einer Diamantwerkzeug-Bearbeitungsmaschine

22. Optical metrology: from the laboratory to the real world

23. Rapid ideal template creation for the inspection of MEMS based on self-similarity characteristics

24. An assistance system for the selection of sensors in multi-scale measurement systems

25. Optical metrology for process control: modeling and simulation of sensors for a comparison of different measurement principles

26. Chromatic confocal spectral interferometry for technical surface characterization

28. Open-source graphics processing unit–accelerated ray tracer for optical simulation

29. Genetic programming applied to automatic algorithm design in multi-scale inspection systems

30. Advantages of chromatic-confocal spectral interferometry in comparison to chromatic confocal microscopy

31. Laterally chromatically dispersed, spectrally encoded interferometer

32. Fourier descriptors for defect indication in a multiscale and multisensor measurement system

33. Automated surface positioning for a non-null test interferometer

34. Fourier descriptors for defect indication in a multiscale and multisensor measurement system.

35. Automated surface positioning for a non-null test interferometer.

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