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Automated surface positioning for a non-null test interferometer

Authors :
Wolfram Lyda
Eugenio Garbusi
Goran Baer
Wolfgang Osten
Source :
Optical Engineering. 49:095602
Publication Year :
2010
Publisher :
SPIE-Intl Soc Optical Eng, 2010.

Abstract

An automatic method for the positioning of the test surface in a non-null interferometer is presented. A major task in the interferometric testing of surfaces is to avoid the introduction of surface aberrations due to an incorrect placement of the test object in the interferometer cavity. In the case of plane and spherical surfaces, adjustment errors can usually be distinguished from surface figure errors and therefore removed, but in the case of aspherical surfaces this task becomes nontrivial. In this work, the effect on the measured phase due to lateral and axial displacements of the aspherical surface is calculated, and an adjustment method for the positioning of the surface at a predefined measurement location presented. Experimental results showing the feasibility of the proposed procedure are shown.

Details

ISSN :
00913286
Volume :
49
Database :
OpenAIRE
Journal :
Optical Engineering
Accession number :
edsair.doi...........29a35a30146ed3ea25889a6558266542
Full Text :
https://doi.org/10.1117/1.3488051