1. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis
- Author
-
Valeria Toffoli, Sergio Carrato, Dongkyu Lee, Sangmin Jeon, and Marco Lazzarino
- Subjects
microelectromechanical system (MEMS) resonator ,mass sensing ,thermogravimetric analysis (TGA) ,microcapsules ,Chemical technology ,TP1-1185 - Abstract
The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.
- Published
- 2013
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