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96 results on '"Véronique Bardinal"'

1. Optical Feedback Interferometry Based Microfluidic Sensing: Impact of Multi-Parameters on Doppler Spectral Properties

Author

Yu Zhao, Thierry Camps, Véronique Bardinal, and Julien Perchoux

Subjects
optical feedback interferometry, microfluidics, optical simulation, VCSELs, spectral imaging, sensing mechanisms, Technology, Engineering (General). Civil engineering (General), TA1-2040, Biology (General), QH301-705.5, Physics, QC1-999, Chemistry, QD1-999
Abstract

As a compact and simple sensing technique, optical feedback interferometry (OFI) can be a promising flowmetry method in various microfluidic applications. In this paper, OFI-based flowmetry sensor performance in a microscale flow scheme is studied theoretically and experimentally. An innovating model and different numerical methods are investigated, where the scattering light angle distribution is involved to predict the Doppler frequency distribution. For the first time, our model describes the influences of multiple OFI sensor system characteristics, such as flowing particle size, concentration, channel interface reflectivity and channel dimension, on the OFI signal spectral performances. In particular, a significant OFI signal level enhancement was achieved by deposing a high reflectivity gold layer on the rear channel interface due to the increased forward scattered light reflection. The consistent experimental validation associated with the simulations verifies this numerical simulation method’s reliability. The numerical methods presented here provide a new tool to design novel microfluidic reactors and sensors.

Published
2019
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2. Optical Feedback Interferometry Flowmetry Sensor in Microfluidics Chip

Author

Yu Zhao, Julien Perchoux, Thierry Camps, and Véronique Bardinal

Subjects
optical feedback interferometry, microfluidics, laser sensors, ray tracing simulation, General Works
Abstract

Optical feedback interferometry (OFI) applied to microscale flow sensing is studied theoretically and experimentally. A new model is investigated that predicts the OFI signal. This model is based on the Lang-Kobayashi equations and highlights the importance of the laser beam propagation and the laser-particle scattering performances. For the first time, the angle distribution of the scattered light is involved in the model. The model evaluates the impact on the OFI signal of the light propagation in the micro-scale channel geometry. The flow rate measurement shows good agreement with the model.

Published
2017
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4. Thermal characterization of a nematic liquid crystal suited for the fabrication of NIR spectrally-tunable vertical cavity surface emitting lasers

Author

Benjamin Boisnard, Andrea Simaz, Julien Lumeau, Pierluigi Debernardi, Thomas Begou, Véronique Bardinal, Benjamin Reig, Alberto Tibaldi, Thierry Camps, Jean Baptiste Doucet, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), RCMO (RCMO), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Department of Electronics and Telecommunications = DET Dipartimento di Elettronica e Telecomunicazioni [Politecnico di Torino] (DET), Politecnico di Torino = Polytechnic of Turin (Polito), Istituto di Elettronica e di Ingegneria dell'Informazione e delle Telecomunicazioni (IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), and ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015)

Subjects
Fabrication, Materials science, business.industry, Laser, Electronic, Optical and Magnetic Materials, Characterization (materials science), law.invention, Liquid crystal, law, Thermal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, [PHYS.COND.CM-SCM]Physics [physics]/Condensed Matter [cond-mat]/Soft Condensed Matter [cond-mat.soft]
Abstract

International audience; In this work, the thermo-optical properties of a nematic liquid crystal are determined through reflectance measurements performed on a high finesse tunable filter fabricated using a polymer-based microcell technology. The final aim is to insert such material in the optical cavity of a 850 nm tunable VCSEL device, in which local self-heating due to CW pumping must be taken into account. These localized interferometric experiments are performed in the near-infra-red range and at temperatures up to 115 °C. A thermal model is derived from the acquired data. Finally, we demonstrate that the birefringence of QYPDLC-36 liquid crystal remains higher than 0.18 at 60 °C, feature well suited to real device operation.

Published
2022

5. Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications

Author

David Bourrier, Douglas Silva de Vasconcellos, Kata Hajdu, Thierry Leichle, Jean-Olivier Durand, Véronique Bardinal, Yingning He, Frédérique Cunin, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut Charles Gerhardt Montpellier - Institut de Chimie Moléculaire et des Matériaux de Montpellier (ICGM), Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Institut de Chimie du CNRS (INC)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Georgia Institute of Technology [Atlanta], Georgia Tech Lorraine [Metz], Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), ANR-17-CE09-0024,LabPSi,Membranes de silicium poreux latérales comme solution générique de préparation d'échantillon et biodétection pour les laboratoires sur puce(2017), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Institut Charles Gerhardt Montpellier - Institut de Chimie Moléculaire et des Matériaux de Montpellier (ICGM ICMMM), Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Université Montpellier 1 (UM1)-Université Montpellier 2 - Sciences et Techniques (UM2)-Institut de Chimie du CNRS (INC), Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Microfluidics, 02 engineering and technology, 010402 general chemistry, Porous silicon, 01 natural sciences, [SPI]Engineering Sciences [physics], Planar, Astronomical interferometer, [CHIM]Chemical Sciences, Wafer, Electrical and Electronic Engineering, Instrumentation, business.industry, Metals and Alloys, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Interferometry, Membrane, Transducer, Optoelectronics, 0210 nano-technology, business
Abstract

International audience; Most porous silicon-based interferometric sensors targeting biosensing applications consist of vertical porous silicon layers created into a silicon wafer by electrochemical anodization and operate in a flow-over configuration. In this work, we present an alternative porous silicon interferometer based on porous silicon with horizontally oriented pores. This architecture permits the integration of flow-through porous silicon membranes within planar microfluidics. Fourier-transform infrared spectroscopy was used to obtain interference spectra from fabricated lateral porous silicon membranes and red shifts were observed upon filling microfluidic chips integrating the porous membranes with solvents of higher optical indices. This work proves that lateral porous silicon membranes are typical Fabry-Pérot interferometers with a sensitivity of more than 150 nm/RIU and a limit of detection less than 10−3 RIU, that is comparable to vertical porous silicon layers. Moreover, we have conducted simulation studies showing that the addition of Bragg mirrors on the membranes results in spectra with narrower fringes and lateral porous silicon interferometers with improved performances. After appropriate biofunctionalization of the porous silicon surface, lateral porous silicon membrane interferometers should offer alternative solutions for the development of porous silicon flow-through biosensors monolithically integrated on-chip.

Published
2021

6. 33 nm wavelength tuning of a 1550 nm VCSEL in CW operation based on the liquid crystal micro-cells technology

Author

Laurent Dupont, Véronique Bardinal, Mehdi Alouini, Jean Baptiste Doucet, Benjamin Boisnard, Sophie Bouchoule, Christophe Levallois, Nicolas Chevalier, Thierry Camps, Karine Tavernier, Cyril Paranthoen, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)

Subjects
photodetection, Liquid crystal devices, Materials science, business.industry, Photodetection, semiconductor lasers, VCSEL, Vertical-cavity surface-emitting laser, Semiconductor laser theory, Wavelength, Liquid crystal, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, tunable, liquid crystal devices, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business
Abstract

International audience; We present CW operation of a tunable InP based Vertical Cavity Surface Emitting Laser, integrating a liquid crystal (LC) micro-cell. In comparison with previous work, a larger 33 nm (vs 23 nm) tuning and stable operation are obtained, according to major improvements presented in this paper.

Published
2021

7. Anisotropic Transverse Confinement Design for Electrically Pumped 850 nm VCSELs Tuned by an Intra Cavity Liquid-Crystal Cell

Author

Francesco Bertazzi, Benjamin Boisnard, Thierry Camps, Jean-Baptiste Doucet, Benjamin Reig, Véronique Bardinal, Andrea Simaz, Alberto Tibaldi, Pierluigi Debernardi, Michele Goano, CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Department of Electronics and Telecommunications [Torino] (DET), Politecnico di Torino = Polytechnic of Turin (Polito), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
Materials science, Multiphysics, Physics::Optics, Optical power, 02 engineering and technology, semiconductor lasers, Grating, 01 natural sciences, 7. Clean energy, law.invention, Vertical-cavity surface-emitting laser, Semiconductor laser theory, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, Liquid crystal, law, 0103 physical sciences, Vertical cavity surface emitting lasers, liquid crystal devices, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, 021001 nanoscience & nanotechnology, Laser, simulation, Atomic and Molecular Physics, and Optics, [SPI.TRON]Engineering Sciences [physics]/Electronics, Transverse plane, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Liquid crystal devices, Semiconductor lasers, Simulation, 0210 nano-technology, business
Abstract

International audience; Relying on preliminary experiments, in this work we design a tunable 850 nm laser based on a hybrid combination of a liquid crystal micro-cell with nanoimprinted grating and an electrically-pumped GaAs half-VCSEL. The optical design is challenging due to the inherent tolerances of this hybrid technology, the presence of metals in the cavity and the need for single fundamental extraordinary mode emission over the whole tuning range. To ensure proper operation, we introduce for the first time the new concept of anisotropic transverse confinement design. The overall performance is verified by our multiphysics VCSEL suite. Beyond tuning features, we predict side mode suppression ratio and optical power under all working conditions, comparing the performance of liquid crystals with different clearing temperatures. The results qualifies these lasers as viable tunable sources with interesting performance and complementary features compared to other technologies.

Published
2021

9. Near infrared photopolymer for micro‐optics applications

Author

Carole Ecoffet, Ihab Dika, Jean-Baptiste Doucet, Benjamin Reig, Jean-Pierre Malval, Olivier Soppera, Frédéric Diot, Thierry Camps, Aurélien Bruyant, David Barat, Véronique Bardinal, Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace, Centre National de la Recherche Scientifique (CNRS)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Strasbourg (UNISTRA)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Université de Strasbourg (UNISTRA), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Université Fédérale Toulouse Midi-Pyrénées, Lumière, nanomatériaux et nanotechnologies (L2n), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), and Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM)

Subjects
optical fiber, Optical fiber, Materials science, Fabrication, Polymers and Plastics, 02 engineering and technology, waveguide, 010402 general chemistry, 01 natural sciences, law.invention, Photopolymer, Optics, microlenses, law, Materials Chemistry, Physical and Theoretical Chemistry, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, Near-infrared spectroscopy, NIR, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Core (optical fiber), [CHIM.POLY]Chemical Sciences/Polymers, Single-core, Photonics, 0210 nano-technology, business, Waveguide, Microfabrication
Abstract

International audience; Near infrared (NIR) activable photopolymers suitable for versatile fabrication of micro-optical elements were developed. The first main objective of this paper is to show that these new photopolymers can be used for microfabrication and investigate the parameters governing the microfabrication process. The impact of photonic, physico-chemical and chemical parameters is discussed. High quality microstructures with a good control over their size and shape are demonstrated. The second main objective is to show practical examples of microlenses and waveguides implemented on single core and multiple core optical fibers, VCSELs, and glass slides are then presented. The NIR photosensitivity of this negative tone photoresists allows using the device source itself as to start the crosslinking process, which constitutes a convenient approach for micro-optics self-positioning on NIR sources and justifies the interest of such NIR photopolymer for the fabrication micro-optical elements and optical interconnects. 2

Published
2020

10. CW Operation of a Tunable 1550-nm VCSEL Integrating Liquid-Crystal Microcells

Author

Cyril Paranthoen, S. Pes, Pierluigi Debernardi, Thierry Camps, Véronique Bardinal, K. Tavernier, Sophie Bouchoule, Christophe Levallois, Laurent Dupont, Benjamin Boisnard, B. Sadani, Mehdi Alouini, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Direction Générale de l’Armement (DGA), French National Research Agency (ANR), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), and Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR)

Subjects
Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optical pumping, 020210 optoelectronics & photonics, Liquid crystal, law, 0202 electrical engineering, electronic engineering, information engineering, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, Birefringence, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Vertical-cavity surface-emitting lasers, Liquid crystal devices, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, business, Lasing threshold, Refractive index
Abstract

International audience; An InP-based Vertical-Cavity Surface-Emitting 1 Laser (VCSEL) with a liquid crystal (LC) microcell monolithically integrated on its surface for spectral tuning is investigated. Unlike tunable VCSELs integrating a movable membrane, here the physical length of the cavity remains unchanged and only the voltage applied on the LC ensures a refractive index modification for a particular polarization emitted by the VCSEL. This tunable VCSEL operates in CW at room temperature and exhibits more than 23 nm wavelength tuning around 1.55 µm at a maximum applied voltage of 20 V. The measured laser threshold around 6.5 mW is still comparable to VCSEL without LC microcell, a clear indication that the optical losses related to the LC are very low. On the other hand, for this first optically pumped device, the lasing characteristics suggest that the LC birefringence is lower than expected. To assess this hypothesis, thermo-optical simulations have been conducted.

Published
2020

11. Thermal Characterization of the Birefringence of Nematic Liquid Crystals for the Design of Widely-tunable LC-VCSELs

Author

Jean-Baptiste Doucet, Alberto Tibaldi, Thierry Camps, Pierluigi Debernardi, Véronique Bardinal, Andrea Simaz, Benjamin Boisnard, B. Reig, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Politecnico di Torino = Polytechnic of Turin (Polito), Université Toulouse III - Paul Sabatier (UT3), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Birefringence, Materials science, business.industry, 02 engineering and technology, 01 natural sciences, Reflectivity, Spectral line, [SPI.MAT]Engineering Sciences [physics]/Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Vertical-cavity surface-emitting laser, Characterization (materials science), 010309 optics, 020210 optoelectronics & photonics, Operating temperature, Liquid crystal, 0103 physical sciences, Thermal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, 0202 electrical engineering, electronic engineering, information engineering, Optoelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business
Abstract

International audience; In this work, the thermo-optical properties of nematic liquid crystals are investigated through localized reflectance spectra measurements performed on a tunable LC-filter. The final aim is to insert such LC in the cavity of a tunable VCSEL device, in which local self-heating due to optical or electrical pumping must be taken into account. We demonstrate that, whereas standard LC E7 is not suited for real device operation, the maximal operating temperature of QYDPLC-36 LC is 95°C, with a birefringence at 1.55 μm higher than 0.18 at 60°C.

Published
2020

12. Optical Design Issues in Electrically Pumped Tunable Liquid-Crystal VCSELs

Author

Jean-Baptiste Doucet, Alberto Tibaldi, B. Reig, Véronique Bardinal, Francesco Bertazzi, Michele Goano, Thierry Camps, Benjamin Boisnard, Andrea Simaz, Pierluigi Debernardi, Politecnico di Torino = Polytechnic of Turin (Polito), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse III - Paul Sabatier (UT3), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Liquid crystal devices, Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 03 medical and health sciences, 020210 optoelectronics & photonics, 0302 clinical medicine, Optical coherence tomography, Liquid crystal, law, Vertical cavity surface emitting lasers, Liquid crystal devices, Semiconductor lasers, Simulation, Vertical cavity surface emitting lasers, 0202 electrical engineering, electronic engineering, information engineering, medicine, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, medicine.diagnostic_test, business.industry, Solver, Laser, [SPI.TRON]Engineering Sciences [physics]/Electronics, 030221 ophthalmology & optometry, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, Lasing threshold, Simulation
Abstract

International audience; In this work we investigate a tunable 850nm laser based on a hybrid combination of a liquid crystal micro-cell and a half GaAs VCSEL. The target application is optical coherence tomography. The inherent tolerances of the hybrid technology, the presence of metals in the cavity and the need for a pure extraordinary mode lasing make challenging the optical design of this laser. Hence, VELM, a full 3D and vectorial VCSEL optical solver, is utilized to understand loss mechanisms and provide an optimized design.

Published
2020

13. Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Author

Jean-Baptiste Doucet, Benjamin Reig, Yu Zhao, Qingyue Li, Julien Perchoux, Fabien Mesnilgrente, Véronique Bardinal, Clément Tronche, Pierre-François Calmon, Thierry Camps, Beijing University of Technology, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Service Instrumentation Conception Caractérisation (LAAS-I2C), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Equipe Capteurs optiques et systèmes intégrés intelligents (LAAS-OASIS), Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, laser beam shaping, Microfluidics, microfluidic, 02 engineering and technology, 01 natural sciences, VCSEL, Collimated light, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Vertical-cavity surface-emitting laser, doppler, 010309 optics, law, 0103 physical sciences, General Materials Science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, laser sensing, Fluid Flow and Transfer Processes, micro-nano, business.industry, Process Chemistry and Technology, General Engineering, 021001 nanoscience & nanotechnology, Laser, Chip, [SPI.TRON]Engineering Sciences [physics]/Electronics, Computer Science Applications, Lens (optics), Interferometry, Resist, technology, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, integrated microoptics, 0210 nano-technology, business
Abstract

Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 &micro, m &times, 200 &micro, 150 &micro, m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.

Published
2019
Full Text
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14. Optical Feedback Interferometry Based Microfluidic Sensing: Impact of Multi-Parameters on Doppler Spectral Properties

Author

Julien Perchoux, Yu Zhao, Véronique Bardinal, Thierry Camps, Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
medicine.medical_specialty, VCSELs, Materials science, microfluidics, spectral imaging, 01 natural sciences, 7. Clean energy, Signal, lcsh:Technology, optical feedback interferometry, Light scattering, 010309 optics, lcsh:Chemistry, symbols.namesake, Optics, 0103 physical sciences, medicine, General Materials Science, sensing mechanisms, Instrumentation, lcsh:QH301-705.5, Microscale chemistry, Fluid Flow and Transfer Processes, Computer simulation, business.industry, lcsh:T, Process Chemistry and Technology, 010401 analytical chemistry, General Engineering, lcsh:QC1-999, 0104 chemical sciences, Computer Science Applications, Spectral imaging, optical simulation, Interferometry, lcsh:Biology (General), lcsh:QD1-999, 13. Climate action, lcsh:TA1-2040, symbols, Reflection (physics), [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, business, lcsh:Engineering (General). Civil engineering (General), Doppler effect, lcsh:Physics
Abstract

As a compact and simple sensing technique, optical feedback interferometry (OFI) can be a promising flowmetry method in various microfluidic applications. In this paper, OFI-based flowmetry sensor performance in a microscale flow scheme is studied theoretically and experimentally. An innovating model and different numerical methods are investigated, where the scattering light angle distribution is involved to predict the Doppler frequency distribution. For the first time, our model describes the influences of multiple OFI sensor system characteristics, such as flowing particle size, concentration, channel interface reflectivity and channel dimension, on the OFI signal spectral performances. In particular, a significant OFI signal level enhancement was achieved by deposing a high reflectivity gold layer on the rear channel interface due to the increased forward scattered light reflection. The consistent experimental validation associated with the simulations verifies this numerical simulation method&rsquo, s reliability. The numerical methods presented here provide a new tool to design novel microfluidic reactors and sensors.

Published
2019

15. InP-based devices integrating liquid crystals microcells for a tunable laser emission or a wavelength selective photodetection

Author

B. Sadani, Laurent Dupont, Sophie Bouchoule, Cyril Paranthoen, Thierry Camps, Mehdi Alouini, Benjamin Boisnard, Christophe Levallois, Véronique Bardinal, S. Pes, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Centre de Nanosciences et Nanotechnologies (C2N (UMR_9001)), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and IMT Atlantique (IMT Atlantique)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Optical communication, Photodetection, 7. Clean energy, Vertical-cavity surface-emitting laser, Photodiode, law.invention, Wavelength, law, Liquid crystal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Photonics, business, Tunable laser
Abstract

International audience; Photonic devices with wavelength tuning capabilities are investigated with the use of liquid crystal microcells monolithically integrated onto the surfaces of photodiodes or VCSEL fabricated on InP based materials. For these two devices, we demonstrated that the detected or emitted wavelength can be selected on a tuning range of more than 70 nm in the case of the photodiode, and of more than 20 nm in the case of VCSEL.

Published
2019

16. Lateral Porous Silicon Interferometric Transducer for Sensing Applications

Author

Adrian Laborde, Thierry Leichle, Yingning He, Xavier Dollat, Ludovic Salvagnac, Douglas Silva de Vasconcellos, David Bourrier, Eric Imbernon, Véronique Bardinal, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Service Instrumentation Conception Caractérisation (LAAS-I2C), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and ANR-17-CE09-0024,LabPSi,Membranes de silicium poreux latérales comme solution générique de préparation d'échantillon et biodétection pour les laboratoires sur puce(2017)

Subjects
Microscope, Materials science, business.industry, 010401 analytical chemistry, 02 engineering and technology, 021001 nanoscience & nanotechnology, Porous silicon, 01 natural sciences, Signal, 0104 chemical sciences, law.invention, Interferometry, [SPI]Engineering Sciences [physics], Transducer, Interference (communication), law, Optoelectronics, 0210 nano-technology, business, Biosensor, Refractive index
Abstract

International audience; In this work, we demonstrate the transducing ability of lateral porous silicon membranes (LPSi) using optical interferometry. To this aim, we carry out Fourier-transform infrared spectroscopy measurements using a microscope equipped with an appropriate objective in order to overcome the difficulty to obtain interference signal from LPSi membranes with small dimensions. Reflectance spectra are recorded while filling the membrane with various solvents and their analysis provide estimations of the effective optical thicknesses and the resulting index of refraction of the fillers in the NIR range. The results show that the various solvents can appropriately be identified and discriminated through the derived refractive indices, thus providing a proof-of-concept of the LPSi interferometric transducer.

Published
2018

17. Liquid crystal-based tunable photodetector operating in the telecom C-band

Author

Mehdi Alouini, Benjamin Boisnard, Christophe Levallois, Laurent Dupont, Sophie Bouchoule, Benattou Sadani, Véronique Bardinal, Salvatore Pes, Cyril Paranthoen, Thierry Camps, Jean-Baptiste Doucet, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-14-ASTR-0007-01, Agence Nationale de la Recherche, ARED-VELOCE 8917, Conseil Régional de Bretagne, Direction Générale de l’Armement, ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)

Subjects
Photocurrent, Amplified spontaneous emission, Materials science, business.industry, Photodetector, 02 engineering and technology, LC circuit, 01 natural sciences, Atomic and Molecular Physics, and Optics, Photodiode, law.invention, 010309 optics, Laser linewidth, 020210 optoelectronics & photonics, Optics, Liquid crystal, law, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business, Tunable laser
Abstract

International audience; Liquid crystal (LC) microcells monolithically integrated on the surface of InGaAs based photodiodes (PDs) are demonstrated. These LC microcells acting as tunable Fabry-Perot filters exhibit a wavelength tunability of more than 100 nm around 1550 nm with less than 10V applied voltage. Using a tunable laser operating in the S and C bands, photocurrent measurements are performed. On a 70 nm tuning range covered with a driving voltage lower than 7V, the average sensitivity for the PD is 0.4 A/W and the spectral linewidth of the LC filter remains constant, showing a FWHM of 1.5 nm. Finally, the emission spectrum from an Er-doped fiber is acquired by using this tunable PD as a micro-spectrometer.

Published
2018

18. Liquid crystal based tunable PIN-photodiodes for detection around 1.55-µm

Author

Laurent Dupont, Véronique Bardinal, Benattou Sadani, Benjamin Boisnard, Christophe Levallois, Jean-Baptiste Doucet, Mehdi Alouini, Thierry Camps, Sophie Bouchoule, Cyril Paranthoen, Salvatore Pes, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), DGA-MRIS and Région Bretagne (grant ARED-VELOCE 8917), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)

Subjects
Materials science, Photodetector, 02 engineering and technology, Photodetection, 01 natural sciences, law.invention, 010309 optics, 020210 optoelectronics & photonics, WDM, law, Liquid crystal, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Photodiodes, business.industry, Optical communications, Photodetectors, Integrated optics, Laser, Photodiode, Full width at half maximum, Wavelength, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Liquid-crystal, business, Tunable laser
Abstract

International audience; In this work, we report InGaAs based photodiodes integrating liquid crystal (LC) microcells resonant microcavity on their surface. The LC microcavities monolithically integrated on the photodiodes act as a wavelength selective filter for the device. Photodetection measurements performed with a tunable laser operating in the telecom S and C bands demonstrated a wavelength sweep for the photodiode from 1480 nm to 1560 nm limited by the tuning range of the laser. This spectral window is covered with a LC driving voltage of 7V only, corresponding to extremely low power consumption. The average sensitivity over the whole spectral range is 0.4 A/W, slightly lower than 0.6 A/W for similar photodiodes that do not integrate such a LC tunable filter. The quality of the filter integrated onto the surfaces of the photodiodes is constant over a large tuning range (70 nm), showing a FWHM of 1.5 nm.

Published
2018

19. Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices

Author

Jean-Baptiste Doucet, Laurent Dupont, Christophe Levallois, B. Sadani, Emmanuelle Daran, Véronique Bardinal, Cyril Paranthoen, Sophie Bouchoule, B. Boisnard, X. Lafosse, Thierry Camps, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), ANR-15-CE19-0012 DOCT VCSEL, Agence Nationale de la Recherche, ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS)-Université de Rennes 1 (UR1), and Université de Rennes (UNIV-RENNES)

Subjects
dry thick resist, Materials science, Fabrication, 02 engineering and technology, Grating, nanoimprint, film, 01 natural sciences, VCSEL, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, 020210 optoelectronics & photonics, grating, law, 0103 physical sciences, soft transfer, 0202 electrical engineering, electronic engineering, information engineering, Wafer, liquid crystal devices, Electrical and Electronic Engineering, tunable optical filter, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Resist, Optical cavity, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, wafer-scale fabrication, Photonics, business
Abstract

A simple technology is demonstrated for the wafer-scale fabrication of liquid-crystal (LC) microcells that can be integrated in active optoelectronic devices. Fabrication of 1.55- $\mu \text{m}$ tunable Fabry–Perot optical micro-filter arrays is achieved owing to the insertion of a single nanoimprinted polymer grating dedicated to LC alignment and to the soft thermal transfer of a dry thick resist film between two highly reflective mirrors. The filter exhibits a spectral tuning range of 102 nm with only 18 V applied, as well as negligible internal loss, which makes it suitable for being inserted in a laser cavity. This constitutes a key step toward the large-scale integration of widely tunable photonic devices such as vertical-cavity surface-emitting lasers using LC technology.

Published
2018

20. Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

Author

Thierry Camps, Jean-Baptiste Doucet, Benjamin Boisnard, Benjamin Reig, Emmanuelle Daran, Laurène Salvi, Sami Abada, Rémi Courson, Véronique Bardinal, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), RENATECH, ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
0209 industrial biotechnology, VCSELs, Fabrication, Materials science, dynamic beam shaping, Nanotechnology, 02 engineering and technology, Photoresist, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, 020901 industrial engineering & automation, Planar, Microfluidic channel, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Laser beams, Microlens, chemistry.chemical_classification, business.industry, 010401 analytical chemistry, Polymer, 0104 chemical sciences, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, MOEMS, micro-optics, Resist, chemistry, dry thick resist film, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, wafer-scale fabrication, business
Abstract

International audience; This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sizedsamples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.

Published
2017

21. Optical Feedback Interferometry Flowmetry Sensor in Microfluidics Chip

Author

Véronique Bardinal, Julien Perchoux, Yu Zhao, Thierry Camps, Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
Physics, Scattering, business.industry, Microfluidics, Flow (psychology), microfluidics, lcsh:A, Chip, optical feedback interferometry, Signal, laser sensors, Volumetric flow rate, Interferometry, ray tracing simulation, Optics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, lcsh:General Works, business, Microscale chemistry
Abstract

International audience; Optical feedback interferometry (OFI) applied to microscale flow sensing is studied theoretically and experimentally. A new model is investigated that predicts the OFI signal. This model is based on the Lang-Kobayashi equations and highlights the importance of the laser beam propagation and the laser-particle scattering performances. For the first time, the angle distribution of the scattered light is involved in the model. The model evaluates the impact on the OFI signal of the light propagation in the micro-scale channel geometry. The flow rate measurement shows good agreement with the model.

Published
2017

22. Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples

Author

Emmanuelle Daran, Véronique Bardinal, Rémi Courson, Laurène Salvi, Thierry Camps, Jean-Baptiste Doucet, Benjamin Reig, Sami Abada, Équipe MICrosystèmes d'Analyse ( LAAS-MICA ), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] ( LAAS ), Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ) -Institut National Polytechnique [Toulouse] ( INP ) -Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Université Paul Sabatier - Toulouse 3 ( UPS ) -Centre National de la Recherche Scientifique ( CNRS ), Service Techniques et Équipements Appliqués à la Microélectronique ( LAAS-TEAM ), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, Fabrication, [ SPI.MAT ] Engineering Sciences [physics]/Materials, 02 engineering and technology, 01 natural sciences, thickness uniformity, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, law, Lamination, lamination, Electrical and Electronic Engineering, Composite material, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Deposition (law), Thermal printing, chemistry.chemical_classification, Mechanical Engineering, 010401 analytical chemistry, Epoxy, Polymer, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, SU-8, [ SPI.TRON ] Engineering Sciences [physics]/Electronics, MOEMS, micro-optics, Surface coating, Resist, chemistry, Mechanics of Materials, visual_art, visual_art.visual_art_medium, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, dry thick resist film, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, wafer-scale fabrication, [ SPI.OPTI ] Engineering Sciences [physics]/Optics / Photonic, 0210 nano-technology
Abstract

International audience; A method called " soft thermal printing " (STP) was developed to ensure the optimal transfer of 50-µm-thick dry epoxy resist films (DF-1050) on small-sized samples. The aim was the uniform fabrication of high aspect ratio polymer-based MOEMS (micro-optical-electrical-mechanical system) on small and/or fragile samples, such as GaAs. The printing conditions were optimized, and the resulting thickness uniformity profiles were compared to those obtained via lamination and SU-8 standard spin-coating. Under the best conditions tested, STP and lamination produced similar results, with a maximum deviation to the central thickness of 3% along the sample surface, compared to greater than 40% for SU-8 spin-coating. Both methods were successfully applied to the collective fabrication of DF1050-based MOEMS designed for the dynamic focusing of VCSELs (vertical-cavity surface-emitting lasers). Similar, efficient electro-thermo-mechanical behaviour was obtained in both cases. 2

Published
2017

23. Performance Improvement of GaN-Based Flip-Chip White Light-Emitting Diodes with Diffused Nanorod Reflector and with ZnO Nanorod Antireflection Layer

Author

Yu Chang Lin, Yu-Ting Su, Hsin Ying Lee, Chia-Hsin Chao, Véronique Bardinal, National Cheng Kung University (NCKU), Industrial Technology Research Institute [Hsinchu], Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, Article Subject, Phosphor, Reflector (antenna), 02 engineering and technology, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Optics, lcsh:Technology (General), 0103 physical sciences, General Materials Science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Diode, 010302 applied physics, Total internal reflection, business.industry, Energy conversion efficiency, 021001 nanoscience & nanotechnology, [SPI.TRON]Engineering Sciences [physics]/Electronics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, lcsh:T1-995, Optoelectronics, Nanorod, 0210 nano-technology, business, Layer (electronics), Flip chip
Abstract

International audience; The GaN-based flip-chip white light-emitting diodes (FCWLEDs) with diffused ZnO nanorod reflector and with ZnO nanorod antireflection layer were fabricated. The ZnO nanorod array grown using an aqueous solution method was combined with Al metal to form the diffused ZnO nanorod reflector. It could avoid the blue light emitted out from the Mg-doped GaN layer of the FCWLEDs, which caused more blue light emitted out from the sapphire substrate to pump the phosphor. Moreover, the ZnO nanorod array was utilized as the antireflection layer of the FCWLEDs to reduce the total reflection loss. The light output power and the phosphor conversion efficiency of the FCWLEDs with diffused nanorod reflector and 250 nm long ZnO nanorod antireflection layer were improved from 21.15 mW to 23.90 mW and from 77.6% to 80.1% in comparison with the FCWLEDs with diffused nanorod reflector and without ZnO nanorod antireflection layer, respectively.

Published
2014

24. Lab-on-chip with microalgal based biosensor for water assessment

Author

Ludovic Salvagnac, Pierre Temple-Boyer, Eléna Bedel-Pereira, Jérôme Launay, F. Sekli Belaidi, Véronique Bardinal, Aliki Tsopela, Vincent Ventalon, Isabelle Séguy, Philippe Juneau, Ricardo Izquierdo, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Université du Québec à Montréal = University of Québec in Montréal (UQAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, [SDE.IE]Environmental Sciences/Environmental Engineering, Microfluidics, Nanotechnology, Electrochemical detection, Lab-on-a-chip, 01 natural sciences, 6. Clean water, law.invention, 010309 optics, law, 0103 physical sciences, OLED, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Biosensor
Abstract

International audience; The integration of optical source with microfluidics leads to promising low-cost, rapid and sensitive lab-on-a-chip analytical systems. This work deals with the optimization of the electrochemical sensors and the dedicated organic light-emitting diode (OLED) for the monitoring of herbicides though algal photosynthetic activities disturbances.. Various blue OLED are considered in order to achieve highest sensitivity in O 2 electrochemical detection during micro-algae photosynthesis.

Published
2016

25. Organic photodiode for detection of herbicides in water using microalgal photosynthesis

Author

Pierre Temple-Boyer, Ricardo Izquierdo, Eléna Bedel-Pereira, Isabelle Séguy, Aliki Tsopela, Philippe Juneau, V. Ventalon, F. Sekli, Véronique Bardinal, Ludovic Salvagnac, Jérôme Launay, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université du Québec à Montréal = University of Québec in Montréal (UQAM), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Fullerene, Materials science, 010401 analytical chemistry, Analytical chemistry, 02 engineering and technology, Lab-on-a-chip, 021001 nanoscience & nanotechnology, Photosynthesis, 01 natural sciences, Acceptor, 6. Clean water, 0104 chemical sciences, law.invention, Photodiode, [SPI]Engineering Sciences [physics], 13. Climate action, law, [SDE]Environmental Sciences, 0210 nano-technology, Luminescence, Diode, Dark current
Abstract

International audience; The growing interest for monitoring the quality of water has triggered the need of fast, portable and cheap detection systems. To answer this problematic, we developed a lab on a chip for herbicide detection based on micro algal photosynthesis. A blue organic light-emitting diode is used as the excitation source while the resulting algae luminescence is monitored using an organic photodiode (OPD). During the OPD optimization process, a correlation between fullerene acceptor concentration and dark current was supposed. Using a blend of DTS(PTTh2)2:PC60BM without interfacial layers result in dark current lower than 10-6 mA/cm2 at-2 V and EQE higher than 50% in the region of interest.

Published
2016

26. Optical feedback interferometry for microscale-flow sensing study: numerical simulation and experimental validation

Author

Lucie Campagnolo, Thierry Camps, Julien Perchoux, Yu Zhao, Reza Atashkhooei, Véronique Bardinal, Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Universitat Politècnica de Catalunya [Barcelona] (UPC), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Physics, [PHYS.PHYS.PHYS-FLU-DYN]Physics [physics]/Physics [physics]/Fluid Dynamics [physics.flu-dyn], Computer simulation, Forward scatter, business.industry, 02 engineering and technology, 01 natural sciences, Signal, Atomic and Molecular Physics, and Optics, Flow measurement, Volumetric flow rate, 010309 optics, Interferometry, OCIS codes: (2803340) Laser Doppler velocimetry, (2507260) Vertical cavity surface emitting lasers, (2803420) Laser sensors (2802490) Flow diagnostics, 020210 optoelectronics & photonics, Optics, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, Reflection (physics), business, Microscale chemistry
Abstract

International audience; Optical feedback interferometry (OFI) performance for microscale-flow sensing is studied theoretically and experimentally. A new numerical modeling approach for OFI flow meter spectrum reproduction is presented in this work to study the optical effect on the signal due to the micro-scale channel geometry. Two well-defined frequency peaks are found in the OFI spectrum, this phenomenon can be attributed to the reflection of the forward scattered light on the channel rear interface. The flow rate measurement shows good accuracy over a range of fluid velocities from 16.8 mm/s to 168 mm/s, thus providing a promising tool to study and to optimize the OFI microfluidic sensor system.

Published
2016

27. Near-infrared photopolymerization: Initiation process assisted by self-quenching and triplet–triplet annihilation of excited cyanine dyes

Author

Ihab Dika, Olivier Soppera, Arnaud Spangenberg, Véronique Bardinal, Colette Turck, Jean-Pierre Malval, David Barat, and Aurélien Bruyant

Subjects
Quenching (fluorescence), Materials science, Radical polymerization, Kinetics, General Physics and Astronomy, Photochemistry, Photobleaching, chemistry.chemical_compound, Monomer, Photopolymer, chemistry, Excited state, Physical and Theoretical Chemistry, Cyanine
Abstract

The mechanism of radical polymerization photoinitiated by a near-infrared absorbing indotricarbocyanine (HITC) was investigated using an indirect kinetics method based on the photobleaching dynamics of the dye. Despite similar photophysical features in glycerol and in pentaerythritol triacrylate monomer, HITC undergoes a very fast photobleaching in the acrylate resin which leads to photopolymerization at high power regime. The addition of an amine induces the decrease of photopolymerization threshold by a factor 5 with unexpected dye regeneration. These effects were correlated to the reactivity of the reduced and oxidized forms of HITC produced via triplet–triplet annihilation and ground state quenching processes.

Published
2011

28. Management of the electrical injection uniformity in broad-area top-emitting VCSELs

Author

Jean-Baptiste Doucet, Ludovic Salvagnac, Véronique Bardinal, M. Condé, E. Havard, Thierry Camps, Guilhem Almuneau, Sébastien Pinaud, and Chantal Fontaine

Subjects
Physics, Optics, business.industry, Optical physics, Nonlinear optics, Plasma, business, Layer (electronics), Atomic and Molecular Physics, and Optics, Power (physics)
Abstract

The electrical properties of broad-area 850 nm top emitting VCSELs have been investigated in order to improve carrier injection uniformity in their active zone. First, we have demonstrated using an electrical simulation tool that a multi-point localized injection design associated with a spreading layer at the top of the device (ITO) can lead to a significant improvement of carrier injection and on its spatial distribution. Secondly, the electrical contrast achievable by applying this method with localized etchings has been experimentally measured. Finally, stripe-shaped devices with output power up to 50 mW in a continuous-wave operation at room temperature have been demonstrated.

Published
2010

29. Lateral Waveguiding Properties of VCSELs for Integrated Optical Monitoring

Author

C. Amat, Chantal Fontaine, Guilhem Almuneau, Véronique Bardinal, Emmanuelle Daran, Charlotte Bringer, Thierry Camps, and M. Suleiman

Subjects
Materials science, business.industry, Physics::Optics, Optical power, Laser, Waveguide (optics), Signal, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, Optics, Transmission (telecommunications), law, Optoelectronics, Spontaneous emission, Electrical and Electronic Engineering, business
Abstract

We have investigated experimentally the optical behaviour of a Vertical-Cavity Surface-Emitting Lasers (VCSEL) when it is used as a lateral waveguide. This provides a better understanding of the mechanisms involved in VCSEL optical power monitoring by integrated lateral detection. The lateral optical spectra as well as the waveguide transmission spectrum have been measured. Their analysis and comparison demonstrate that the lateral signal is mostly coming from the spontaneous emission escaping laterally from the VCSEL and that light is filtered during the propagation and detection processes. This allows us to explain previous results obtained in two different configurations of lateral detection. These results are useful to optimize the lateral detection performances for concrete applications in monitoring or telemetry systems.

Published
2006

30. Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping

Author

Jean-Baptiste Doucet, Sami Abada, Véronique Bardinal, Benjamin Reig, Thierry Camps, Emmanuelle Daran, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), RENATECH (French Network of Major Technology Centers) within LAAS-CNRS for technological support and Region Midi-Pyrénées (FIAB SU-8 project), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Fabrication, Materials science, polymer, 02 engineering and technology, VCSEL, law.invention, Vertical-cavity surface-emitting laser, [SPI.MAT]Engineering Sciences [physics]/Materials, 020210 optoelectronics & photonics, collective fabrication, law, Microsystem, self-alignment, 0202 electrical engineering, electronic engineering, information engineering, Micro-Opto-Electro-Mechanical Systems, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, microlens fabrication, Microelectromechanical systems, Multi-mode optical fiber, business.industry, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Lens (optics), MOEMS, MEMS, microoptics, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, electro-thermal actuation
Abstract

In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III–V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.

Published
2014

31. Quantum wells of dilute nitrides grown on GaAs by molecular beam epitaxy

Author

Véronique Bardinal, Alexandre Arnoult, F Gonzalez-Posada, Chantal Fontaine, and S. Blanc

Subjects
Materials science, Photoluminescence, business.industry, chemistry.chemical_element, Substrate (electronics), Nitride, Condensed Matter Physics, Nitrogen, Atomic and Molecular Physics, and Optics, Optical quality, Electronic, Optical and Magnetic Materials, Secondary ion mass spectrometry, chemistry, Optoelectronics, business, Quantum well, Molecular beam epitaxy
Abstract

Dilute nitrides are promising alloys in view of extending potential micro- and opto-electronics applications of GaAs technology. Orientation effects on nitrogen incorporation in GaAs have been scarcely addressed. Here, GaAsN on (100) and on As(B)- and Ga(A)-rich (111) substrates was grown by molecular beam epitaxy at different substrate temperatures. Nitrogen content measured by secondary ion mass spectrometry as a function of the growth temperature highlights the influence of orientation on nitrogen incorporation. Furthermore, thermal annealing is shown to improve the optical quality of GaAsN quantum wells whatever their substrate orientations.

Published
2004

32. Uniform fabrication of thick SU-8 patterns on small-sized wafers for micro-optics applications

Author

Jean-Baptiste Doucet, Benjamin Reig, Stéphane Charlot, Thierry Camps, Emmanuelle Daran, Véronique Bardinal, and Sami Abada

Subjects
Fabrication, Materials science, business.industry, engineering.material, Nanoimprint lithography, law.invention, Optics, Coating, Resist, law, Thermal, engineering, Wafer, Photolithography, Air gap (plumbing), business
Abstract

This paper reports on an alternative method for precise and uniform fabrication of 100μm-thick SU-8 microstructures on small-sized or non-circular samples. Standard spin-coating of high-viscosity resists is indeed known to induce large edge beads, leading to an air gap between the mask and the SU-8 photo-resist surface during UV photolithography. This results in a non uniform thickness deposition and in a poor pattern definition. This problem becomes highly critical in the case of small-sized samples. To overcome it, we have developed a soft thermal imprint method based on the use of a nano-imprint equipment and applicable whatever sample fragility, shape and size (from 2cm to 6 inches). After final photolithography, the SU8 pattern thickness variation profile is measured. Thickness uniformity is improved from 30% to 5% with a 5μm maximal deviation to the target value over 2cm-long samples.

Published
2014

33. 3D optimization of a polymer MOEMS for active focusing of VCSEL beam

Author

Jean-Baptiste Doucet, Thierry Camps, Emmanuelle Daran, Benjamin Reig, S. Abada, and Véronique Bardinal

Subjects
Microlens, Optics, Materials science, Thermal conductivity, business.industry, Multiphysics, Joule effect, Optoelectronics, Vertical displacement, business, Actuator, Beam (structure), Vertical-cavity surface-emitting laser
Abstract

We report on the optimized design of a polymer-based actuator that can be directly integrated on a VCSEL for vertical beam scanning. Its operation principle is based on the vertical displacement of a SU-8 membrane including a polymer microlens. Under an applied thermal gradient, the membrane is shifted vertically due to thermal expansion in the actuation arms induced by Joule effect. This leads to a modification of microlens position and thus to a vertical scan of the laser beam. Membrane vertical displacements as high as 8μm for only 3V applied were recently experimentally obtained. To explain these performances, we developed a comprehensive tri-dimensional thermo-mechanical model that takes into account SU-8 material properties and precise MOEMS geometry. Out-of-plane mechanical coefficients and thermal conductivity were thus integrated in our 3D model (COMSOL Multiphysics). Vertical displacements extracted from these data for different actuation powers were successfully compared to experimental values, validating this modelling tool. Thereby, it was exploited to increase MOEMS electrothermal performance by a factor higher than 5.

Published
2014

34. AZO electrodes deposited by atomic layer deposition for OLED fabrication

Author

Marc Ternisien, Thierry Camps, Jean Baptiste Doucet, Benoit Dugrenil, Y.-S. Chiu, Yu-Cheng Lin, Eléna Bedel-Pereira, Ludovic Salvagnac, Véronique Bardinal, Isabelle Séguy, Ching-Ting Lee, Hsin Ying Lee, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), National Cheng Kung University (NCKU), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Lumière et Matière (LAPLACE-LM), LAboratoire PLasma et Conversion d'Energie (LAPLACE), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3)

Subjects
Materials science, 02 engineering and technology, 7. Clean energy, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Atomic layer deposition, Organic Light Emitting Diodes, Transparent Conductive Oxide, 0103 physical sciences, aluminium-doped Zinc Oxide, OLED, Indium Tin Oxide, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Sheet resistance, Transparent conducting film, 010302 applied physics, Organic electronics, business.industry, 021001 nanoscience & nanotechnology, Indium tin oxide, Anode, [SPI.TRON]Engineering Sciences [physics]/Electronics, Atomic Layer Deposition, Electrode, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business
Abstract

International audience; In this work, we present a comparative study of optimized AZO electrodes deposited by Atomic Layer Deposition (ALD) with commercial ITO in terms of electrical, optical and structural properties. Despite a lower figure of merit mainly due to a higher sheet resistance, AZO-based OLEDs are shown to present a current density five times higher than ITO-based ones for the same applied voltage. These AZO electrodes fabricated by ALD could thus be promising substitutes for conventional ITO anodes in organic electronic devices.

Published
2014

35. Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

Author

Aurélien Bruyant, M. Renault, Anna Rumyantseva, Thierry Camps, David Barat, Ihab Dika, Emmanuelle Daran, Véronique Bardinal, Jean-Baptiste Doucet, Benjamin Reig, Olivier Soppera, Jean-Pierre Malval, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Institut de Science des Matériaux de Mulhouse (IS2M), Matériaux et nanosciences d'Alsace, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Université Toulouse Capitole (UT Capitole), Institut National des Sciences Appliquées (INSA)-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse Capitole (UT Capitole), Université Fédérale Toulouse Midi-Pyrénées, Équipe Photonique (LAAS-PHOTO), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), Bardinal, Véronique, Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)

Subjects
Fabrication, Materials science, [SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Physics::Optics, 02 engineering and technology, [SPI.MAT] Engineering Sciences [physics]/Materials, Micro-optics, 01 natural sciences, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, Optics, law, 0103 physical sciences, Sensitivity (control systems), Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Diode, 010302 applied physics, Microlens, Quenching, business.industry, Laser writing, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, [SPI.TRON] Engineering Sciences [physics]/Electronics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Semiconductor, Polymerization, Photo-polymerization, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Maskless fabrication, 0210 nano-technology, business, Optical probing
Abstract

International audience; We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.

Published
2013

36. Precise growth of high uniformity vertical cavity devices using tunable dynamic optical reflectometry

Author

A. Muñoz‐Yagüe, Chantal Fontaine, F Van Dijk, Véronique Bardinal, and Eléna Bedel-Pereira

Subjects
Chemistry, business.industry, Optical reflectometry, Condensed Matter Physics, Epitaxy, Layer thickness, Optical microcavity, law.invention, Inorganic Chemistry, Optics, law, Materials Chemistry, Reflectometry, Ternary operation, business, Molecular beam epitaxy
Abstract

Precise control of epitaxial growth of (Ga, Al)As/AlAs vertical cavity devices with a real-time thickness monitoring technique, the tunable dynamic optical reflectometry (TDOR), is investigated. After the measurement at growth temperature of the optical indices of the ternary alloys involved in these multilayers, the procedure required to efficiently grow under TDOR the devices of interest is discussed. Finally, the results obtained from the structures grown will be presented, showing that a layer thickness accuracy in excess of 1% can be achieved.

Published
1999

37. Spontaneous emission and lateral photo-detection in 'vertical' micro-cavities

Author

Thierry Camps, Emmanuelle Daran, Véronique Bardinal, and Yann G. Boucher

Subjects
Physics, business.industry, Physics::Optics, General Physics and Astronomy, Micro cavities, Laser, law.invention, Vertical-cavity surface-emitting laser, Transverse plane, law, Optoelectronics, Spontaneous emission, Atomic physics, business
Abstract

Transverse guiding mechanisms enable one to monitor the laser behaviour of a VCSEL by measuring the photo-current in the neighbouring cavity. They are described by extended (3 x 3) transfer matrices including sources of spontaneous emission.

Published
2007

38. Optical amplification of Raman scattering in a GaAs bulk microcavity

Author

Robert Carles, Chantal Fontaine, Adnen Mlayah, J. R. Huntzinger, A. Munoz‐Yague, Véronique Bardinal, Antoine Zwick, and O Marco

Subjects
Materials science, Photoluminescence, Condensed matter physics, Condensed Matter::Other, Scattering, Physics::Optics, Resonance, Condensed Matter Physics, Optical microcavity, Molecular physics, law.invention, symbols.namesake, X-ray Raman scattering, law, symbols, General Materials Science, Coherent anti-Stokes Raman spectroscopy, Raman spectroscopy, Raman scattering
Abstract

We present photoluminescence, reflectivity and Raman scattering measurements on a GaAs Fabry-Perot bulk microcavity. A strong enhancement of the Raman scattering efficiency is observed when either the incident or the scattered photons are tuned to the cavity mode. Resonance curves are obtained for scattering by both transverse and longitudinal optical phonons, and analysed in terms of the optical amplification due to confinement of the electromagnetic field. Resonance effects as strong as that observed in microcavities with embedded quantum wells are observed. Single and double resonance Raman profiles are calculated and a good agreement with measurements is obtained.

Published
1998

39. Polymer optical MEMS integrated on VCSELs for biosensing

Author

Jean-Baptiste Doucet, Sami Abada, Emmanuelle Daran, Véronique Bardinal, Benjamin Reig, and Thierry Camps

Subjects
Microelectromechanical systems, chemistry.chemical_classification, Fabrication, Materials science, business.industry, Optical engineering, Physics::Optics, Polymer, Computer Science::Other, chemistry, Optoelectronics, business, Biosensor, Beam (structure), Laser beams, Microfabrication
Abstract

We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.

Published
2013

40. ENHANCED FOUR-WAVE MIXING DIFFRACTION EFFICIENCY IN BULK GaAs MICROCAVITIES AT ROOM TEMPERATURE

Author

M. Hübner, Véronique Bardinal, Chantal Fontaine, R. Legros, J.H. Collet, R. Buhleier, and J. Kuhl

Subjects
Materials science, Physics and Astronomy (miscellaneous), business.industry, Kinetics, Physics::Optics, Diffraction efficiency, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Four-wave mixing, Excited state, Femtosecond, Optoelectronics, Routing (electronic design automation), business, Ultrashort pulse, Excitation
Abstract

We present investigations on Degenerate Four Wave Mixing in bulk GaAs Fabry-Pérot microcavities at room temperature excited with femtosecond pulses. Due to increased interaction length and amplification of light fields in the cavity, the measured diffraction efficiency η≈2×10−3 at 878 nm is enhanced by a factor of roughly 30 compared to bulk GaAs without cavity. The results may be useful for exploiting the cavity enhancement effect for investigation of carrier kinetics at small excitation densities. For application purposes, the results renew the interest in ultrafast coherent deflectors for all-optical routing.

Published
1996

41. SUBNANOSECOND REFLECTIVITY MODULATION KINETICS IN GaAs/GaAlAs MICROCAVITIES

Author

R. Legros, Chantal Fontaine, J.L. Iehl, M. Pugnet, J.H. Collet, R. Grac, and Véronique Bardinal

Subjects
Materials science, Physics and Astronomy (miscellaneous), business.industry, Kinetics, Relaxation (NMR), Physics::Optics, Plasma, Condensed Matter::Mesoscopic Systems and Quantum Hall Effect, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Wavelength, Absorption edge, Modulation, Optoelectronics, business, Layer (electronics), Excitation
Abstract

We study the subnanosecond reflectivity kinetics of distributed Fabry-Pérot cavities composed of two GaAs/AlAs Bragg reflectors enclosing a central GaAs layer. The structure reflectivity exhibits a sharp minimum in the absorption edge of GaAs at the temperature of 300 K, around the wavelength of 885 nm. The photogeneration of an electron-hole plasma causes a shift of the cavity resonance. The switch energy and the recovery time are investigated. Switching capabilities are observed with excitation energies of few tens of μJ/cm2. We correlate the reflectivity kinetics to the plasma dynamics in the central GaAs zone of the structure, especially to the density and temperature relaxation.

Published
1996

42. Subnanosecond density dynamics of the electrondashhole plasma in GaAs/AlAs microcavities

Author

J.H. Collet, R. Buhleier, Véronique Bardinal, Chantal Fontaine, M. Pugnet, J.L. Iehl, R. Legros, and R. Grac

Subjects
Materials science, Band gap, business.industry, Physics::Optics, Bragg's law, Plasma, Condensed Matter Physics, Optical microcavity, Spectral line, Electronic, Optical and Magnetic Materials, law.invention, Condensed Matter::Materials Science, Optics, law, Stimulated emission, Electrical and Electronic Engineering, Atomic physics, business, Luminescence, Excitation
Abstract

We study the time-resolved reflectivity spectra of distributed Fabry-Perot (DFP) cavities following a picosecond laser excitation. The structures, which are composed of two GaAs/AlAs Bragg reflectors enclosing a central GaAs layer, exhibit a sharp reflectivity minimum slightly below the GaAs band gap. Due to the photogeneration of carriers in the central zone, we observe a red shift of 5–6 nm of the reflectivity minimum on a subnanosecond time scale. This effect enables one to deduce the plasma density from the spectra analysis. This method still works at low plasma density, i.e., for nondegerated plasma, when the standard luminescence method fails. The reflectivity of a photoexcited DFP is calculated by combining the absorption and index theory in the presence of thermalized carriers with a many-layer description of the structures (Abeles formalism). We trace the relaxation kinetics of the plasma density in the central zone of the microcavity and conclude the stimulated emission in the microcavity.

Published
1996

43. Miniaturized Scanning Near-Field Microscope Sensor Based on Optical Feedback Inside a Single-Mode Oxide-Confined Vertical-Cavity Surface-Emitting Laser

Author

Thierry Camps, P. Dubreuil, Jean-Baptiste Doucet, Christophe Gorecki, Charlotte Bringer, Chantal Fontaine, Véronique Bardinal, and Dominique Heinis

Subjects
Optical amplifier, Distributed feedback laser, Materials science, Microscope, Physics and Astronomy (miscellaneous), business.industry, General Engineering, Single-mode optical fiber, Physics::Optics, General Physics and Astronomy, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optical cavity, Optoelectronics, Near-field scanning optical microscope, business
Abstract

We propose and demonstrate an original concept of a near-field sensor using the optical feedback properties of a vertical cavity surface-emitting laser (VCSEL) as the detection principle. This is based on the monitoring perturbation induced in the laser cavity by the backscattered light coming from the specimen. Test images confirm the efficiency of the proposed scanning near-field optical microscopy (SNOM) and a solution for the integration of the proposed architecture is given.

Published
2003

44. A miniaturized VCSEL-based system for optical sensing in a microfluidic channel

Author

Véronique Bardinal, Emmanuelle Daran, Benjamin Reig, Jean-Baptiste Doucet, and Thierry Camps

Subjects
Microlens, Fabrication, Materials science, business.industry, Microfluidics, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optoelectronics, Micro-Opto-Electro-Mechanical Systems, business, Biosensor, Microfabrication
Abstract

We report on design and fabrication of a VCSEL-based Micro-Optical-Electrical-Mechanical-System (MOEMS) suited for portable optical biosensors. It is based on a tunable polymer microlens directly integrated on the surface of the VCSEL laser device. We demonstrate that this method leads to a VCSEL focusing at a working distance of ∼300μm suitable for optical analysis in a microfluidic channel. Moreover, as the microlens can be vertically moved up to 8μm with an applied power of only 43 mW (3V), a dynamic scan of the laser spot is possible over 100μm. This integrated approach opens new insights for the use of VCSEL arrays in miniaturized optical sensors.

Published
2012

45. Photo-chemical study and optical properties of microtips self- written on vertical laser diodes using NIR photo-polymerization

Author

Olivier Soppera, Thierry Camps, Ihab Dika, D. Barat, Jean-Baptiste Doucet, Jean-Pierre Malval, Aurélien Bruyant, Pierluigi Debernardi, M. Renault, Emmanuelle Daran, Véronique Bardinal, Beatriu Reig, Anna Rumyantseva, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Fabrication, Materials science, Optical fiber, Infrared Rays, Polymers, Surface Properties, High numerical aperture optics, Physics::Optics, Context (language use), 02 engineering and technology, 01 natural sciences, law.invention, Vertical-cavity surface-emitting laser, Molecular Imprinting, Optics, law, 0103 physical sciences, Vertical cavity surface emitting lasers, Wafer, Optical feedback, Diode, 010302 applied physics, business.industry, Single-mode optical fiber, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Refractometry, Scanning probe microscopy, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Lasers, Semiconductor, 0210 nano-technology, business, Scanning electron microscopy, Diode lasers
Abstract

International audience; Near infra-red (NIR) self-guided photo-polymerization is investigated in the context of micro-optics photo-fabrication on VCSELs (Vertical-Cavity Surface Emitting Lasers). We present the optimized process we have developed to allow for a collective fabrication on III-V devices wafers under real-time optical monitoring. The influence of photo-chemical parameters on final micro-elements dimensions is studied for two types of single mode 760nm VCSELs. The difference of the resulting tip shape between the two lasers is due to the strong differences of their emissions, as they are nicely reproduced by the computed near-field profiles. The tip shapes are also compared to those produced by the light emitted by an optical fiber and differences with VCSEL tips are discussed. Also the VCSEL characteristics with fabricated tips are discussed and found in good agreement with optical modeling.

Published
2012

46. Polymer tunable microlens arrays suitable for VCSEL beam control

Author

Thierry Camps, Christophe Levallois, Véronique Bardinal, Jean-Baptiste Doucet, Jérôme Launay, Emmanuelle Daran, Benjamin Reig, David Bourrier, Yann G. Boucher, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Rennes (UR)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Fabrication, polymer, 02 engineering and technology, 01 natural sciences, VCSEL, law.invention, Vertical-cavity surface-emitting laser, Optics, ABCD formalism, law, 0103 physical sciences, tunable lens, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010302 applied physics, Ray transfer matrix analysis, Microlens, business.industry, 021001 nanoscience & nanotechnology, Laser, SU-8, Lens (optics), micro-optics, MOEMS, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, wafer-scale integration, Refractive index
Abstract

We report on a simple method for the collective fabrication of polymer tunable microlens arrays suitable for VCSEL active beam shaping. Its principle is based on a SU-8 suspended membrane, surmounted by a polymer microlens, and thermally actuated to achieve a vertical displacement of lens plane. SU-8 resist presents many advantages for MOEMS fabrication, as this resist allows for high aspect ratio patterns and high transparency. In addition, it exhibits a thermal expansion coefficient suitable for thermal actuation. Moreover, this kind of polymer MOEMS can be fabricated on VCSEL arrays with footprints as low as 5 00x500µm² enabling a rapid, low co st and wafer-scale integration technology. We have successfully fabricated this MOEMS on a glass substrate by means of a SU-8 double exposure method and we report on a vertical di splacement of 8µm under an applied power of 43mW (3V). A good agreement with the theoretical thermo-mechanical behavi or is found. Moreover, optical measurem ents of microlens focus displacement under actuation are presented. We evaluate analytically the focus properties of the system under coherent laser illumination, using the classical ABCD matrix formalism of Gaussian transformation optics. The same approach enables one to assess its tolerance to opto-geometrical parameters, such as refractive index or dioptre curvature. As a wide range of initial gaps between the membrane and the substrate can be chosen, this MOEMS technology opens new insights for dynamic control of VCSEL beam or for tunable VCSELs fabrication. Keywords: VCSEL, micro-optics, tunable lens, polymer, SU-8, MOEMS, wafer-scale integration, ABCD formalism

Published
2012

47. VCSEL beam control with collective and self-aligned polymer technologies

Author

Thierry Camps, Emmanuelle Daran, Jean-Baptiste Doucet, Benjamin Reig, Olivier Soppera, Véronique Bardinal, Pierluigi Debernardi, and D. Barat

Subjects
Microelectromechanical systems, Microlens, Fabrication, Materials science, business.industry, Single-mode optical fiber, Laser, law.invention, Vertical-cavity surface-emitting laser, Lens (optics), Optics, law, Optical cavity, Optoelectronics, business
Abstract

We present recent results on the integration of polymer microlenses on single mode Vertical-Cavity Surface-Emitting Lasers (VCSELs) to achieve output beam control. We describe in particular low cost and collective fabrication methods developed to allow for a self-alignment of the lens with the laser source. These approaches are based either on surface tension effects or on a self-writing process using novel Near Infra-Red (NIR) photopolymers. Results on beam collimation at 850nm are presented and compared to a fully vectorial and three-dimensional optical model that takes into account the complete geometry of laser resonator is used. Results on short distance focusing using self-aligned microtips are presented. Considerations to achieve an active beam control by means of polymer-based MEMS (Micro-electro-mechanical System) are also discussed. Potential applications may concern the improvement of VCSEL insertion in optical interconnects or sensing systems, as well as the fabrication of optical micro-probes for near-field microscopy.

Published
2012

48. Polymer MEMS for the active control of VCSEL beam

Author

Thierry Camps, Jean-Baptiste Doucet, Véronique Bardinal, Emmanuelle Daran, Beatriu Reig, and D. Barat

Subjects
Microlens, Microelectromechanical systems, Materials science, business.industry, Physics::Optics, Laser, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optics, law, Physics::Accelerator Physics, Optoelectronics, Vertical displacement, business, Actuator, Beam (structure)
Abstract

Beam control of VCSELs (Vertical Cavity Surface Emitting Lasers) is a key topic to integrate these laser diodes in microsystems for instrumentation or biomedical application [1]. We report here on a simple method to control dynamically the beam shape of VCSELs devices. Our approach is based on an electro-thermal actuator including a polymer membrane, a heating electrode and a polymer microlens (fig.1 a). The operation principle is the following: the laser beam waist position can be tune thanks to the membrane vertical displacement induced by varying the applied current. Optical and thermo-mechanical optimizations of membrane geometry have been carried out. These studies point out that a vertical deflection of 2µm should be obtained with a thermal gradient of 100°C [2], leading to a corresponding waist displacement of few hundred microns.

Published
2011

49. Spotted Custom Lenses to Tailor the Divergence of Vertical-Cavity Surface-Emitting Lasers

Author

Christophe Levallois, Véronique Bardinal, Thierry Leichle, Guilhem Almuneau, Emmanuelle Daran, Corinne Vergnenègre, Thierry Camps, Benjamin Reig, Jean-Baptiste Doucet, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Cantilever, Fabrication, lens, polymer, Physics::Optics, 02 engineering and technology, Collimated light, law.invention, Semiconductor laser theory, 020210 optoelectronics & photonics, Optics, law, 0202 electrical engineering, electronic engineering, information engineering, vertical-cavity surface-emitting laser (VCSEL), Electrical and Electronic Engineering, business.industry, collimation, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, SU-8, Lens (optics), micro-optics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, 0210 nano-technology, business, Lasing threshold, Beam divergence
Abstract

International audience; We demonstrate the output beam collimation of GaAs-based vertical-cavity surface-emitting lasers by means of self-aligned polymer microlenses deposited on SU-8 pedestals using a cantilever-based spotter. We show that this fabrication technique ensures a reproducible lens shape because the contact angle and the deposited volume are constant for a given surface. Device properties are presented and compared to optical beam propagation modeling results. We demonstrate that the final beam divergence is only controlled by pedestal design parameters and can be reduced with this method by a factor 10 (to 1.2° for single-mode devices) with no significant lasing performance modification.

Published
2010

50. Design of active lens for VCSEL collimation

Author

David Bourrier, Corinne Vergnenègre, Emmanuelle Daran, Thierry Camps, B. Reig, and Véronique Bardinal

Subjects
Microlens, Materials science, business.industry, Physics::Optics, Collimated light, Displacement (vector), Vertical-cavity surface-emitting laser, Semiconductor laser theory, law.invention, Lens (optics), Optics, law, Optoelectronics, Actuator, business, Beam (structure)
Abstract

Active control of VCSELs beam properties is a key issue to improve their integration in microsystems. We have designed a micro-optical system that allows for a dynamic displacement of the VCSEL beam. It consists of a polymer microlens associated to a SU-8 membrane vertically moved by means of a thermal actuator. This approach is suitable with laser sources arrays. We present results on optical design demonstrating that a small deflection of the membrane (2μm) could lead to a large displacement of the beam waist vertical position (in the millimetric range). Thermomechanical modelling is performed to evaluate the maximum membrane displacement achievable with this system. Finally, first feasibility results are presented.

Published
2010

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