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Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping
- Source :
- IEEE Journal of Selected Topics in Quantum Electronics, IEEE Journal of Selected Topics in Quantum Electronics, Institute of Electrical and Electronics Engineers, 2014, 21 (4), pp.Article number 2700308. ⟨10.1109/JSTQE.2014.2369743⟩, IEEE Journal of Selected Topics in Quantum Electronics, 2014, 21 (4), pp.Article number 2700308. ⟨10.1109/JSTQE.2014.2369743⟩
- Publication Year :
- 2014
- Publisher :
- HAL CCSD, 2014.
-
Abstract
- In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III–V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.
- Subjects :
- Fabrication
Materials science
polymer
02 engineering and technology
VCSEL
law.invention
Vertical-cavity surface-emitting laser
[SPI.MAT]Engineering Sciences [physics]/Materials
020210 optoelectronics & photonics
collective fabrication
law
Microsystem
self-alignment
0202 electrical engineering, electronic engineering, information engineering
Micro-Opto-Electro-Mechanical Systems
Electrical and Electronic Engineering
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
microlens fabrication
Microelectromechanical systems
Multi-mode optical fiber
business.industry
021001 nanoscience & nanotechnology
Atomic and Molecular Physics, and Optics
SU-8
[SPI.TRON]Engineering Sciences [physics]/Electronics
Lens (optics)
MOEMS
MEMS
microoptics
Resist
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Optoelectronics
0210 nano-technology
business
electro-thermal actuation
Subjects
Details
- Language :
- English
- ISSN :
- 1077260X
- Database :
- OpenAIRE
- Journal :
- IEEE Journal of Selected Topics in Quantum Electronics, IEEE Journal of Selected Topics in Quantum Electronics, Institute of Electrical and Electronics Engineers, 2014, 21 (4), pp.Article number 2700308. ⟨10.1109/JSTQE.2014.2369743⟩, IEEE Journal of Selected Topics in Quantum Electronics, 2014, 21 (4), pp.Article number 2700308. ⟨10.1109/JSTQE.2014.2369743⟩
- Accession number :
- edsair.doi.dedup.....00ec31fa0ba62ddb1fd988d8586e2a94