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Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films
- Source :
- Proceedings, Proceedings, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩, Proceedings, MDPI, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩
- Publication Year :
- 2017
- Publisher :
- HAL CCSD, 2017.
-
Abstract
- International audience; This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sizedsamples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.
- Subjects :
- 0209 industrial biotechnology
VCSELs
Fabrication
Materials science
dynamic beam shaping
Nanotechnology
02 engineering and technology
Photoresist
01 natural sciences
[SPI.MAT]Engineering Sciences [physics]/Materials
020901 industrial engineering & automation
Planar
Microfluidic channel
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Laser beams
Microlens
chemistry.chemical_classification
business.industry
010401 analytical chemistry
Polymer
0104 chemical sciences
SU-8
[SPI.TRON]Engineering Sciences [physics]/Electronics
MOEMS
micro-optics
Resist
chemistry
dry thick resist film
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Optoelectronics
wafer-scale fabrication
business
Subjects
Details
- Language :
- English
- ISSN :
- 25043900
- Database :
- OpenAIRE
- Journal :
- Proceedings, Proceedings, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩, Proceedings, MDPI, 2017, 1 (4), pp.551. ⟨10.3390/proceedings1040551⟩
- Accession number :
- edsair.doi.dedup.....1bc4b59037735c0f27f42cec9138fd61