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18 results on '"Tas, Guray"'

1. Coherent Raman spectroscopy of nanoshocks

Author

Tas, Guray, Hambir, Selezion A., Franken, Jens, Hare, David E., and Dlott, Dana D.

Subjects
Nanotechnology -- Research, Raman spectroscopy -- Methods, Physics
Abstract

Picosecond laser pulses can be used in an innovative procedure to generate and probe 4.2 GPa nanoshocks in polymeric and polycrystalline solids at a rapid rate of 100 per second. Coherent Raman spectroscopy during nanoshock propagation in a 700-nm-thick layer of polycrystalline anthracene, otherwise known as an optical nanogauge, establishes the nanoshock wave form consists of a shock front risetime, shock falltime, peak pressure and velocity. Nanoshock technology could be applied to a number of processes in shock-induced meterial transformation and mechanical deformation.

Published
1997

3. Picosecond sonar used to characterize copper processes

Author

Tas, Guray, Morath, Chris, Celgan, Michael, Collins, George, and Clerico, Jana

Subjects
Microcomputer industry, Computer industry, Rudolph Technologies Inc. -- Product information, Testing equipment -- Product information, Computer industry -- Product information, Instrument industry -- Product information, Computerized instruments -- Product information, Control equipment industry -- Product information
Abstract

Rudolph Rudolph Technologies Inc., Flanders, New Jersey OVERVIEW In an industry where process control has always been critical in maximizing yield, the switch to copper interconnects makes process control even […]

Published
2001

4. An ultrasonic laser sonar technique for copper damascene CMP metrology

Author

Colgan, Michael, Morath, Chris, Tas, Guray, and Grief, Malcolm

Abstract

OVERVIEW The picosecond sonar technique has proven to be a powerful tool for process development and production process monitoring for copper dual damascene fabrication. Along with demonstrated capability to measure […]

Published
2001

5. Successful use of low-k films requires measuring Young's modulus

Author

Leary, Sean, Tas, Guray, and Johnson, Tim

Subjects
Semiconductor industry, Technology application, Semiconductor industry -- Technology application
Abstract

IC manufacturers switching over to low-k interlevel dielectric (ILD) materials from Si[O.sub.2] and fluorinated silica glass (FSG) have encountered a variety of problems, including delamination, peeling, and cracking. Many of […]

Published
2003

6. Characterization of Copper Line Array Erosion with Picosecond Ultrasonics

Author

Pic, Nicolas, primary, Bennedine, Karim, additional, Tas, Guray, additional, Alliata, Dario, additional, Clerico, Jana, additional, Seiler, David G., additional, Diebold, Alain C., additional, McDonald, Robert, additional, Garner, C. Michael, additional, Herr, Dan, additional, Khosla, Rajinder P., additional, and Secula, Erik M., additional

Published
2007
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7. Non-Destructive Testing Using Picosecond Ultrasonics.

Author

Maris, Humphrey J., Antonelli, G. Andrew, Ford, Wayne K., Morath, Christopher J., Stoner, Robert J., and Tas, Guray

Subjects
NONDESTRUCTIVE testing, ULTRASHORT laser pulses, METROLOGY, SEMICONDUCTORS, THIN films
Abstract

Picosecond ultrasonics has become a widely used metrology tool in the semiconductor device industry. It provides an accurate method for the measurement of the thickness of thin films, can determine the quality of the bonding between a film and a substrate, and gives information about mechanical properties. We describe the development of this technology starting from work in the research laboratory and following through to the development of an automated instrument for use in computer chip fabrication. © 2006 American Institute of Physics [ABSTRACT FROM AUTHOR]

Published
2006
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8. Recent progress in picosecond ultrasonic process metrology.

Author

Stoner, Robert J., Morath, Christopher J., Tas, Guray, Mair, Robin, Merchant, Sailesh M., and Maris, Humphrey J.

Subjects
ULTRASONIC testing, ACOUSTICAL engineering
Abstract

We discuss the use of the picosecond ultrasonics technique for characterizing several challenging processes which are common in sub-0.18 micron processes. Specific processes considered are reactive TaN, RTP-CoSi[sub 2], and damascene copper. We describe the transition from one- to two-dimensional acoustical excitations in damascene copper lines, and show how picosecond ultrasonics measurements can be used in to make high throughput, all-optical copper line CD measurements. [ABSTRACT FROM AUTHOR]

Published
2001

16. Picosecond Ultrasonics Provides CoSi Characterization.

Author

Tas, Guray, Morath, Chris, Stoner, Robert, Lavoie, Christian, Cabral Jr., Cyril, Harper, James, Huang, Yaw-Lin, Huang, Donald, and Chen, Ren

Subjects
COBALT compounds, SILICIDES, METAL oxide semiconductors
Abstract

Discusses various aspects of cobalt silicide, which is made use of in metal oxide semiconductors. Factors to be considered during processing of cobalt silicide films; Effect of anneal temperature on the sheet resistance of cobalt silicide; Utility of picosecond ultrasonic technology in monitoring the production process of cobalt silicide.

Published
2003

17. Thin-Film Characterization.

Author

Tas, Guray, Howard, Brian, Mukundhan, Priya, Johnson, Timothy A., and Hambir, Selezion A.

Subjects
OPTOELECTRONIC devices, GALLIUM arsenide
Abstract

Analyzes the characterization of Gallium Arsenide optoelectronic devices. Capability of picosecond sonar in characterizing compound semiconductors; Implication of market growth for optoelectronics manufacturing; Features of picosecond sonar. INSET: PULSE Technology.

Published
2001

18. Metrology's link to materials.

Author

Tas, Guray

Subjects
*MEASUREMENT, *ELLIPSOMETRY, *REFLECTOMETER
Abstract

Discusses the implementation of acoustic metrology. Use of ellipsometry with deep-ultraviolet reflectometry; Differentiation between the metallization layer of interest and the underlying structure through acoustic metrology; Refinement of acoustic techniques for measuring high-aspect-ratio submicron and dense line arrays.

Published
2002

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