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Picosecond sonar used to characterize copper processes

Authors :
Tas, Guray
Morath, Chris
Celgan, Michael
Collins, George
Clerico, Jana
Source :
Solid State Technology. September, 2001, Vol. 44 Issue 9, pS15
Publication Year :
2001

Abstract

Rudolph Rudolph Technologies Inc., Flanders, New Jersey OVERVIEW In an industry where process control has always been critical in maximizing yield, the switch to copper interconnects makes process control even […]

Details

Language :
English
ISSN :
0038111X
Volume :
44
Issue :
9
Database :
Gale General OneFile
Journal :
Solid State Technology
Publication Type :
Periodical
Accession number :
edsgcl.78403014