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Picosecond sonar used to characterize copper processes
- Source :
- Solid State Technology. September, 2001, Vol. 44 Issue 9, pS15
- Publication Year :
- 2001
-
Abstract
- Rudolph Rudolph Technologies Inc., Flanders, New Jersey OVERVIEW In an industry where process control has always been critical in maximizing yield, the switch to copper interconnects makes process control even […]
- Subjects :
- Microcomputer industry
Computer industry
Rudolph Technologies Inc. -- Product information
Testing equipment -- Product information
Computer industry -- Product information
Instrument industry -- Product information
Computerized instruments -- Product information
Control equipment industry -- Product information
Subjects
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 44
- Issue :
- 9
- Database :
- Gale General OneFile
- Journal :
- Solid State Technology
- Publication Type :
- Periodical
- Accession number :
- edsgcl.78403014