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Protons are now increasingly used to treat pediatric medulloblastoma (MB) patients. We designed and characterized a setup to deliver proton beams for in vivo radiobiology experiments at a TOP-IMPLART facility, a prototype of a proton-therapy linear accelerator developed at the ENEA Frascati Research Center, with the goal of assessing the feasibility of TOP-IMPLART for small animal proton therapy research. Mice bearing Sonic-Hedgehog (Shh)-dependent MB in the flank were irradiated with protons to test whether irradiation could be restricted to a specific depth in the tumor tissue and to compare apoptosis induced by the same dose of protons or photons. In addition, the brains of neonatal mice at postnatal day 5 (P5), representing a very small target, were irradiated with 6 Gy of protons with two different collimated Spread-Out Bragg Peaks (SOBPs). Apoptosis was visualized by immunohistochemistry for the apoptotic marker caspase-3-activated, and quantified by Western blot. Our findings proved that protons could be delivered to the upper part while sparing the deepest part of MB. In addition, a comparison of the effectiveness of protons and photons revealed a very similar increase in the expression of cleaved caspase-3. Finally, by using a very small target, the brain of P5-neonatal mice, we demonstrated that the proton irradiation field reached the desired depth in brain tissue. Using the TOP-IMPLART accelerator we established setup and procedures for proton irradiation, suitable for translational preclinical studies. This is the first example of in vivo experiments performed with a “full-linac” proton-therapy accelerator.

Irradiation of lithium fluoride with protons causes the formation of electronic defects, known as colour centres, in the crystal lattice. Two stable defects among them, the F2 and F3+ aggregate ones, under blue light simultaneous excitation show broad photoluminescence in the red and green visible spectral ranges, respectively, their peculiar characteristics being well known for applications in optically-pumped tuneable lasers, broad-band miniaturized light-emitting photonic devices and passive radiation imaging detectors. Recently, exploitation of their radiophotoluminescence has been successfully proposed for proton-beam advanced diagnostics and dosimetry, even at low dose values typical of radiotherapy. In the present study, lithium fluoride crystals were irradiated with 2.3 MeV protons in the dose range from ∼104 to ∼107 Gy and their dynamic range, that is the capability of detecting the widest possible range of radiophotoluminescence intensity emitted by the colour centres, was found to be 114 dB at the F2 peak emission wavelength of 675 nm under continuous-wave laser excitation at 445 nm. Moreover, after including in the analysis a set of lithium fluoride crystals irradiated with 26.1 MeV protons in the dose range from 0.5 to 48 Gy at a much lower dose-rate, it was found that the radiophotoluminescence intensity of the F2 colour centres shows a linear dependence with dose from 0.5 to ∼2 × 105 Gy.

In a medical accelerator, real-time monitoring systems of the beam and dose delivered to the patient are mandatory. In this work, we present a compact current profile detector that has been designed and tested in the framework of the TOP-IMPLART (Intensity Modulated Proton Linear Accelerator for RadioTerapy) project. This project foresees the realization of a proton linear accelerator, currently under construction at ENEA Frascati, for proton therapy applications. The linac produces a pulsed proton beam with 3 µs duration at 50 Hz repetition rate with a pulse current between 0.5 and 50 μA. A large dynamic range and spatial constraints make the use of usual noninterceptive beam diagnostics unfeasible. Therefore, the use of a beam current monitor based on a passive RF cavity working in the TM010 mode has been proposed. This paper reports the electromagnetic design of the device guided by a simplified analytical model. A prototype of such a device has been realized, characterized, and tested on the linac with a 35 MeV beam varying the beam current. The test results in air and in vacuum, together with the signal detection systems used, are presented.

Solid-state radiation detectors based on the visible photoluminescence of radiation-induced F2 and F3+ color centers in lithium fluoride crystals have been used for advanced diagnostics of 18 and 27 MeV proton beams, produced by the TOP-IMPLART linear accelerator, which is under development for protontherapy applications at ENEA C.R. Frascati, Italy. Visible fluorescence microscopy was successfully used to read the latent proton beam images stored in the lithium fluoride crystals, thanks to high emission efficiency of the F2 and F3+ color centers obtained by simultaneous optical excitation in the blue spectral range. High intrinsic spatial resolution and wide dynamic range of these novel LiF detectors allow obtaining two-dimensional images of both the beam transverse intensity distribution and of the Bragg curve. By using a simple defect formation model that takes into account the energy released in the material and the saturation of defect concentration, not only the two-dimensional dose map was obtained from the beam transverse intensity distribution image, but also the full Bragg curve was reconstructed, allowing the thorough characterization of proton beams produced by the accelerator.

This contribution describes the methods developed for the characterization in air of the proton beam at the TOP-IMPLART linear accelerator of ENEA Frascati Research Centre. Beam energy and spectrum, transverse homogeneity, fluence and flux are assessed both experimentally and by numerical calculations. Here we present an application of these methods for the characterization of set-ups relevant for electronic and space components testing.

To demonstrate the large potential of proton minibeam radiotherapy (pMBRT) as a new method to treat tumor diseases, a preclinical proton minibeam radiation facility was designed. It is based on a tandem Van-de-Graaff accelerator providing a 16 MeV proton beam and a 3 GHz linac post-accelerator (designs: AVO-ADAM S.A, Geneva, Switzerland and ENEA, Frascati, Italy). To enhance the transmission of the tandem beam through the post-accelerator by a factor of 3, two drift tube buncher units were designed and constructed: A brazed 5-gap structure (adapted SCDTL tank of the TOP-IMPLART project (ENEA)) and a non-brazed low budget 4-gap structure. Both are made of copper. The performance of the two differently manufactured units was evaluated using a 16 MeV tandem accelerator beam and a Q3D magnetic spectrograph. Both buncher units achieve the required summed voltage amplitude of 42 kV and amplitude stability at a power feed of less than 800 W.

We present the first results of a novel collaboration activity between ENEA Frascati Particle Accelerator Laboratory and University La Sapienza Guidance and Navigation Laboratory in the field of Radiation Hardness Assurance (RHA) for space applications. The aim of this research is twofold: (a) demonstrating the possibility to use the TOP-IMPLART proton accelerator for radiation hardness assurance testing, developing ad hoc dosimetric and operational procedures for RHA irradiations; (b) investigating system level radiation testing strategies for Commercial Off The Shelf (COTS) components of interest for SmallSats space missions, with focus on devices and sensors of interest for guidance, navigation and control, through simultaneous exploration of Total Ionizing Dose (TID), Displacement Damage (DD) dose and Single-Event Effects (SEE) with proton beams. A commercial 6-axis integrated Micro Electro-Mechanical Systems (MEMS) inertial navigation system (accelerometer, gyroscope) was selected as first Device Under Test (DUT). The results of experimental tests aimed to define an operational procedure and the characterization of radiation effects on the component are reported, highlighting the consequence of the device performance degradation in terms of the overall navigation system accuracy. Doses up to 50 krad(Si) were probed and cross sections for Single-Event Functional Interrupt (SEFI) evaluated at a proton energy of 30 MeV.

This paper presents the experimental results on the Terapia Oncologica con Protoni-Intensity Modulated Proton Linear Accelerator (TOP-IMPLART) beam that is currently accelerated up to 35 MeV, with a final target of 150 MeV. The TOP-IMPLART project, funded by the Innovation Department of Regione Lazio (Italy), is led by Italian National Agency for New Technologies, Energy and Sustainable Economic Development (ENEA) in collaboration with the Italian Institute of Health and the Oncological Hospital Regina Elena-IFO. The accelerator, under construction and test at ENEA-Frascati laboratories, employs a commercial 425 MHz, 7 MeV injector followed by a sequence of 3 GHz accelerating modules consisting of side coupled drift tube linac (SCDTL) structures up to 71 MeV and coupled cavity linac structures for higher energies. The section from 7 to 35 MeV, consisting on four SCDTL modules, is powered by a single 10 MW klystron and has been successfully commissioned. This result demonstrates the feasibility of a ``fully linear'' proton therapy accelerator operating at a high frequency and paves the way to a new class of machines in the field of cancer treatment.

The Intensity Modulated Proton Linear Accelerator for Cancer Therapy (TOP-IMPLART) is under development and construction by ENEA in collaboration with the Italian Institute of Health (ISS) and the Oncological Hospital Regina Elena-IFO with financial support of Regione Lazio. Its peculiar time structure (few microseconds pulse width) and very high peak intensity (≍ 109 proton/pulse) demand for ad hoc dose delivery monitors (DDM). The TOP-IMPLART DDM is based on ionization gas chambers. One segmented chamber prototype uses Micro Pattern Gaseous Detector technology for the 2-dimensional simultaneous x/y readout; the charge collected from each active segment (strips with pad-like shape) is readout by a dedicated gain-adaptable electronics. Two small, highly sensitive, integral ionization chambers, using the same electronics, complement the 2D chamber for the monitor of the single pulse beam charge, down to 1 pC/pulse. While under development and deployment of its accelerating modular cavities, the linear TOP-IMPLART beam is improved thanks also to the continuous monitoring and characterization by these devices, whose responses are periodically compared to calibrated dosimetric detectors such as real-time active microDiamond sensor, passive Alanine pellets, intrinsically stable integral Faraday Cup. Different calibration campaigns have been recently conducted to measure the recombination and dose-rate effects on the above ionization chambers. The outcome of these measurements shows clear electron-ion recombination in the chamber active volume, largely related to the high beam intensity and its small transverse cross section. Those effects can be taken into account and used to correct the actual measurement of the DDM. In this paper, the TOP-IMPLART project and the DDM devices are shortly presented and details of the above experimental studies are discussed.

Passive solid-state radiation detectors, based on the radiophotoluminescence of stable color centers in nominally pure lithium fluoride (LiF) crystals, have been used for advanced diagnostics of the segment up to 35 MeV of the TOP-IMPLART proton linear accelerator for protontherapy applications, under development at ENEA Frascati. In LiF, proton beams generate a spatial distribution of F2 and F3+ aggregate color centers, which efficiently emit radiophotoluminescence in the red-green spectral range under optical pumping around 450 nm. LiF crystals were irradiated with 35 MeV nominal energy protons at several doses of interest for protontherapy (from 0.5 to 50 Gy). For the first time is shown here the possibility of measuring the radiophotoluminescence spectra of proton irradiated LiF even at such low doses and how the signal showed a linear behavior with dose with a good signal-to-noise ratio. A Bragg-curve image, stored as color-center distribution in a LiF crystal after a 50 Gy-dose irradiation in a particular geometry, was acquired in a conventional fluorescence microscope. After appropriate image processing, the signal intensity resulted to be proportional to the linear energy transfer along the whole Bragg curve. By best-fitting it with an ad-hoc analytical formula, the depth-dose distribution was reconstructed and the proton beam energy and energy spread were estimated.

MOS-Modelle und Parameterextraktion Arbeitskreis MOS-AK is a European, independent compact modelling forum created by a group of engineers, researchers and compact modelling enthusiasts to promote advanced compact modelling techniques and model standardization using high-level behavioural modelling languages such as VHDL-AMS and Verilog-A. This invited paper summarizes recent MOS-AK open-source compact model standardization activities and presents advanced topics in metal-oxide-semiconductor field-effect transistor modelling, focusing in particular on analogue/radio frequency applications. The paper discusses links between compact models and design methodologies, finally introducing elements of compact model standardization. The open-source computer-aided design tools Qucs, QucsStudio and ngspice all support Verilog-A as a hardware description language for compact model standardization. Latter sections of this paper describe a Verilog-A implementation of the EKV3 MOS transistor model. Additionally, the simulated radio frequency model performance is evaluated and compared with experimental results for 90nm CMOS technology. Copyright © 2014 John Wiley & Sons, Ltd.

Terahertz image sensors have large potential in time-domain spectroscopy, radio astronomy, security control, communications, and biomedical imaging. We present a new structure for THz imaging, obtained by the combination of a CMOS photodetector, and a rectennas composed by a tapered μ-helix monopole and a rectifying device. The antenna consists in a truncated conical helix extruded from a planar spiral and in a nanometric metallic whisker connected to one of its edges. We introduce the new structure together with an accurate study of the effect of electric field enhancement and of parasitic elements which affect the overall sensitivity of the device.

Solid-state radiation detectors based on the photoluminescence of stable point defects in lithium fluoride crystals have been used for advanced diagnostics during the commissioning of the segment up to 27 MeV of the TOP-IMPLART proton linear accelerator for proton therapy applications, under development at ENEA C.R. Frascati, Italy. The LiF detectors high intrinsic spatial resolution and wide dynamic range allow obtaining two-dimensional images of the beam transverse intensity distribution and also identifying the Bragg peak position with micrometric precision by using a conventional optical fluorescence microscope. Results of the proton beam characterization, among which, the estimation of beam energy components and dynamics, are reported and discussed for different operating conditions of the accelerator. © 2017 Elsevier B.V.

Copper (II) sulfate was used as a source of copper to achieve uniform distribution of Cu particles deposited on porous silicon. Layers of the porous silicon were formed by electrochemical anodization of Si wafers in a mixture of HF, C3H7OH and deionized water. The well-known chemical displacement technique was modified to grow the copper particles of specific sizes. SEM and XRD analysis revealed that the outer surface of the porous silicon was covered with copper particles of the crystal orientation inherited from the planes of porous silicon skeleton. The copper crystals were found to have the cubic face centering elementary cell. In addition, the traces of Cu2O cubic primitive crystalline phases were identified. The dimensions of Cu particles were determined by the Feret's analysis of the SEM images. The sizes of the particles varied widely from a few to hundreds of nanometers. A phenomenological model of copper deposition was proposed.

This article presents the study of the electrochemical deposition of zinc oxide from the non-aqueous solution based on dimethyl sulfoxide and zinc chloride into the porous silicon matrix. The features of the deposition process depending on the thickness of the porous silicon layer are presented. It is shown that after deposition process the porous silicon matrix is filled with zinc oxide nanocrystals with a diameter of 10–50 nm. The electrochemically deposited zinc oxide layers on top of porous silicon are shown to have a crystalline structure. It is also shown that zinc oxide crystals formed by hydrothermal method on the surface of electrochemically deposited zinc oxide film demonstrate ultra-violet luminescence. The effect of the porous silicon layer thickness on the morphology of the zinc oxide is shown. The structures obtained demonstrated two luminescence bands peaking at the 375 and 600 nm wavelengths. Possible applications of ZnO nanostructures, porous and continuous polycrystalline ZnO films such as gas sensors, light-emitting diodes, photovoltaic devices, and nanopiezo energy generators are considered. Aspects of integration with conventional silicon technology are also discussed.

We report the first experiment aimed at the demonstration of low-energy protons acceleration by a high-efficiency S-band RF linear accelerator. The proton beam has been accelerated from 7 to 11.6 MeV by a 1 meter long SCDTL (Side Coupled Drift Tube Linac) module powered with 1.3 MW. The experiment has been done in the framework of the Italian TOP-IMPLART (Oncological Therapy with Protons-Intensity Modulated Proton Therapy Linear Accelerator for Radio-Therapy) project devoted to the realization of a proton therapy centre based on a proton linear accelerator for intensity modulated cancer treatments to be installed at IRE-IFO, the largest oncological hospital in Rome. It is the first proton therapy facility employing a full linear accelerator scheme based on high-frequency technology. © CopyrightEPLA, 2015.

In recent years, terahertz (THz) radiation has been widely used in a variety of applications: medical, security, telecommunications and military areas. However, few data are available on the biological effects of this type of electromagnetic radiation and the reported results, using different genetic or cellular assays, are quite discordant. This multidisciplinary study focuses on potential genotoxic and cytotoxic effects, evaluated by several end-points, associated with THz radiation. For this purpose, in vitro exposure of human foetal fibroblasts to low frequency THz radiation (0.1-0.15. THz) was performed using a Compact Free Electron Laser. We did not observe an induction of DNA damage evaluated by Comet assay, phosphorylation of H2AX histone or telomere length modulation. In addiction, no induction of apoptosis or changes in pro-survival signalling proteins were detected. Moreover, our results indicated an increase in the total number of micronuclei and centromere positive micronuclei induction evaluated by CREST analysis, indicating that THz radiation could induce aneugenic rather than clastogenic effects, probably leading to chromosome loss. Furthermore, an increase of actin polymerization observed by ultrastructural analysis after THz irradiation, supports the hypothesis that an abnormal assembly of spindle proteins could lead to the observed chromosomal malsegregation. © 2015 Elsevier B.V.

In this work the design and characteristics of an extended hemispherical dielectric lens applied to a non-planar antenna for the detection of THz radiation is presented. Antenna and lens behavior is numerically investigated in a large frequency range around the central frequency of 1 THz. Common printable materials widely characterized at THz range are used for the lens realization. Numerical results of the full-wave electromagnetic analysis of some proposed structures are reported and discussed.

In this work we report the application of the selective wet processing technique based on dynamic liquid meniscus for copper pillar bumps (CPB) plating. The industrial plating of copper for CPB process is typically carried out at 2 μm/min. A much higher copper deposition rate is necessary to improve throughput for this process. To achieve higher deposition rates of copper the hydrodynamic issue that is natural for all conventional plating baths processes must be solved. A number of solutions is proposed towards realization of high speed and high throughput CPB plating process. Uniformity of copper pillar over a 6-inches silicon wafer is presented and the morphology and shapes of pillars are investigated by scanning electron microscopy (SEM). Copper pillar height and dimension are investigated within different topology over the wafer showing the robustness of the process for the thickness uniformity. Preliminary investigation of the CPB plating shows the uniformity of better than 2 % within 6” silicon wafer.

A tapered helix monopole as a part of a rectenna for the detection of terahertz radiation is proposed. The antenna consists of a truncated conical helix extruded from a planar spiral and in a nanometric metallic whisker connected to one of its edges. The whisker faces a semiconductor substrate constituting the antenna ground plane. The structure is designed to be combined with a rectifying junction, realized just below the whisker base, which produces the direct conversion of terahertz electromagnetic field into dc current. The figure of merit of the structure is the electric field enhancement factor at the metallic whisker/semiconductor interface. Numerical full-wave simulations show that, for the tapered helix monopole, the field enhancement factor value can be higher than 26 000, which is approximately one order of magnitude greater than previously reported values in the literature. Detailed description of the fabrication process and investigation of antenna performances for different values of geometrical parameters are presented.

A new selective processing technique based on a confined dynamic liquid drop\meniscus is presented. This approach is represented by the localized wet treatment of silicon wafers using dynamic liquid drop that while is in contact with the wafer forms a dynamic liquid meniscus. The main scientific innovation and relevance introduced by this work have been applied to industrial solar cell production and on silicon wafer metal bumps formation for the IC interconnection (i.e. copper pillars). Such new technique allows to touch in specific defined positions the silicon wafer in order to perform any kind of wet processing (e.g. etching, cleaning and/or plating) without the need of any protective resist. To investigate on pendant dynamic liquid drops and dynamic liquid meniscus use of computational fluid dynamic technique (i.e. numerical techniques to accurately predict fluid flows) was followed and is presented. An experimental setup has been built to validate the calculations. Numerical results showed a good agreement with experimental ones. Prototypes heads, using stereo-lithography systems, were developed and localized selective plating without the need of lithography step was performed on silicon.

In this work we present a new design for a three-dimensional vibration energy harvester, which is made by Micro-Electro-Mechanical Systems (MEMS) technology, and which can convert electric energy through transverse mode piezoelectric effect. The presented power generator is based on a long, thick-film, piezoelectric beam configured as a conical helix structure and located between two metal electrodes. The design of the combined antenna/energy harvester (comvester, from communication and energy harvester) device addresses both electromagnetic and mechanical issues as it radiates electromagnetic energy and converts mechanical energy into electric energy. Both functions are translated directly into dimensional constraints of the structure. In this work, we concentrate on millimeter waves communications in the 60 GHz frequency band because of their availability for low-power CMOS radio circuits. In order to realize comvester on a silicon wafer we used Controlled Release Metal Layer (CRML) technology, which is a transfer layer technology that uses porous silicon as sacrificial material. The advantage of CRML technology is high repeatability and resolution and its compatibility with back-end of line processes of the integrated circuit industry. New type of piezoelectric material consisted of the array of separated vertical polyvinylidene fluoride (PVDF) microrods is suggested. Such periodic microrods structure became possible to realize using the template of the structured macroporous silicon.

A new plane parallel micro-manipulator is presented in this paper, together with the numerical procedure that has been used in order to optimize some kinetostatic performance indices, among which the kinematic condition number and the mechanical advantage. The approach is based on a refined simplification of the direct kinematic problem and it is applied to the pseudo-rigid body model of the original compliant mechanism, with an acceptable approximation. The method has been iterated several times to evaluate a fitness function that has been used by an Evolutionary Method of computation for the search of global optimum, namely, a Genetic Algorithm. The results will be used for refining the geometric design of the parallel micro-manipulator, which will be built by means of MEMS-Based technologies in silicon.

In this work we propose a detailed investigation of the Al - Si interdiffusion that occurs during the firing process of the Al-Si back contact of silicon based solar cells. The investigation is based on high resolution scanning electron microscopy (SEM) and compositional microanalysis with energy dispersive X-Ray microanalysis (EDX). We have found a dependence of Si precipitation in the Al matrix depending on the microstructure of the Al screen printable paste. We suggest a gettering effect promoted by the larger Al particles lying within the Al paste being able to affect the Al paste resistivity, the Al distribution within the BSF region of the solar cell, thus affecting the solar cell performances and finally the Al paste thermal expansion coefficient. Finally we demonstrate that the presence of the glass frit reduces the surface tension and, homogenizes the diffusion process. Reduction of surface tension decreases the internal pressure and increases the Si interdiffusion in Al. © 2013 The Authors.

Electroporation is an effective method to deliver drugs into tumor cells to kill them, by applying a pulsed electric field to the cellular membrane. Existing electrodes consist of clamping claws or arrays of needles and can be effectively applied only to small areas. New electrodes that can treat large areas are sought; flexibility is needed to adapt to irregular tumor shape and, to be folded to enter from small surgical opening. In this work we present the design and test of a 16 cm2 flexible electrode for electroporation with biosensing capabilities, built with standard flexible circuit technologies enclosed in a biocompatible package. The electrode contains electronics to provide cryptography-based identification to the electroporation machine to avoid setup errors and protection against use of counterfeited electrodes. In-vitro tests of the electrode show that electroporation occurs up to a depth of 8 mm with 100% electroporation efficiency over the 30% of electrode area. Temperature rise on the electrode during treatment does not exceed 6 degrees celsius, a value that not causes damage to the cells.

A new selective processing technique based on a confined dynamic liquid drop\meniscus is presented. This approach is based on localized wet treatment of silicon wafers using confined and dynamic liquid drop that while in contact with the wafer forms a dynamic liquid meniscus. Such new technique allows to touch in specific defined positions the silicon wafer (front and/or back) in order to perform any kind of wet processing without the need of protective photo-resist. The new selective processing technique allows the metallizations (front and back) of mono and multi crystalline silicon solar cells. The front grid contacts are obtained by locally etching the silicon nitride, forming in a thin layer of meso-porous silicon and totally filling the meso-porous layer by pulse reverse plating a Nickel film. Copper and Tin are then electroplated using the same selective processing. This technology provides an effective solution to avoid silver pastes for front contact grid, as it guarantees low specific contact resistivity (550 μΩcm2 on a 75 Ω/□ n-type doped emitter) and good adhesion to the silicon substrate (i.e. greater than 550 g/mm). The Al back side of the solar cell are also treated by the new selective process. Tin is directly deposited on Aluminum back contact showing adhesion higher than silver on silicon (i.e. > 1N/mm). © 2013 The Authors.

In this work the design of a broadband, high gain conical helical antenna is presented. The antenna is realized using a MEMS process that guarantees the high repeatability and throughput necessary for industrial applications. The designed antenna works in the 55GHz to 85GHz frequency range and has a gain greater than 8 dBi. This antenna presents potential applications in the emerging 60GHz communication band (assigned to WPAN) and in 76GHz RADAR applications for the automotive industry. The design procedure, mechanical and electromagnetic simulations are presented.

In this work it is described an high-density contacting technology that can replace wire bonding in power electronic applications, to overcome known limitation of bond wires liftoff occurring after several power cycles due to the difference in the coefficient of thermal expansion of silicon and aluminum. In the presented technology, MEMS (micro-electro-mechanics systems) micro-fabrication processes are used to realize contact structures that, pressed against the silicon dice, provide a reliable compliant contact. One advantage of this technology is that the contacts can be hosted on a printed circuit board that integrates the control circuitry for the power devices. This will reduce the footprint of power systems, like Integrated High Power Modules (IHPM). Reduced footprints are beneficial in applications where space is a concern, like the automotive industry. The description of the technological steps for building the contacting assembly is reported together with process conditions and electrical performances of two test structures.

In this work a new class of integrated 3D antennas is presented: the u-helix antenna class. U-helix is a truncated conical helix built using a novel MEMS (micro electro mechanical systems) technology directly realized on a silicon substrate, extruded from a planar spiral. The antenna is characterized by high gain (>6 dBi) and wide fractional bandwidth (0.4) in the 100 GHz to 1 THz frequency range. Fabrication processes of the antenna and simulated performances are reported, and its possible use in a THz rectifying device is presented.

Different copper nanostructures have been deposited onto porous silicon (PS) by using HF-based solutions of CuSO4 and immersion technique. The variation of the porous template parameters and deposition regimes has been found to allow obtaining of copper nanoparticles, copper rough films and porous copper layers. The dimensions, roughness, structural parameters and phase composition of the obtained copper nanostructures have been established.

Nickel nanowires have been formed by the stationary electrochemical deposition of nickel into mesoporous silicon from the modified Watts bath. The polycrystalline nature of the Ni deposit has been established as well as expansion of its lattice parameter in comparison with bulk nickel. Control of the potential of porous silicon during electrochemical deposition allows to determine the moment of complete filling of pore space with Ni. The maximum achieved filling factor was 67% of the pores. The pore dimensions have been found to define the length and the diameter of the Ni nanowires that have equaled to 10 um and 100-120 nm, respectively.

The electrochemotherapy is an effective treatment that requires the application of an intense electric field to the tumoral tissue to open the cellular membrane and deliver drugs. This work will present the results of the ongoing research project, showing a new technology and design geometry that allows to realize flexible electrodes able to wrap biological tissues bringing the necessary electric field intensity for the electroporation of cells to reach a unique penetration depth to the centimeter range. The flexible electrode is realized by conversion of porous silicon into nano-porous metals (copper and/or gold) filled by a biocompatible thermoplastic polymer.

Most power electronic modules are specifically designed for the customer and this entails intense labour during the production phase. The monolithic integration for power electronic devices in the form of power IC has not proven to be efficient, neither from a technical, nor from an economic point of view. In a typical high power module the power devices are assembled on a heatsink and, driver, sensor and protection circuits are mounted on separate PCBs assembled to the power devices. This results in low performance and high cost. Higher integrated power modules are produced assembling power devices in die format onto a DCB (Direct Copper Bonding) substrate and interconnect them by wire bonding technique [1]. The relative driver, sensor and protection circuits are surface mounted on a separate PCB assembled with the former.

Initial stages of Cu immersion deposition in the presence of hydrofluoric acid on bulk and porous silicon were studied. Cu was found to deposit both on bulk and porous silicon as a layer of nanoparticles which grew according to the Volmer-Weber mechanism. It was revealed that at the initial stages of immersion deposition, Cu nanoparticles consisted of crystals with a maximum size of 10 nm and inherited the orientation of the original silicon substrate. Deposited Cu nanoparticles were found to be partially oxidized to Cu2O while CuO was not detected for all samples. In contrast to porous silicon, the crystal orientation of the original silicon substrate significantly affected the sizes, density, and oxidation level of Cu nanoparticles deposited on bulk silicon.

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The application of porous silicon as a template for the fabrication of nanosized copper objects is reported. Three different types of nanostructures were formed by displacement deposition of copper on porous silicon from hydrofluoric acid-based solutions of copper sulphate: (1) copper nanoparticles, (2) quasi-continuous copper films, and (3) free porous copper membranes. Managing the parameters of porous silicon (pore sizes, porosity), deposition time, and wettability of the copper sulphate solution has allowed to achieve such variety of the copper structures. Elemental and structural analyses of the obtained structures are presented. Young modulus measurements of the porous copper membrane have been carried out and its modest activity in surface enhanced Raman spectroscopy is declared.