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In Quest of a Reliable Method of Characterization of the Mechanical Properties of Silicon Micro-Robots

Authors :
Belfiore, Nicola P.
Marco, Balucani
Andrea, Cappellani
Mohammad Emami Meibodi
Rocco, Crescenzi
Paolo, Nenzi
Alessio, Tamburrano
Francesco, Mura
Verotti, Matteo
Konstantin, Kholostov
Publication Year :
2012
Publisher :
ESA Edizioni Scientifiche e Artistiche, 2012.

Subjects

Subjects :
MEMS
Silicon
SEM
Micro-Robots
Nano-Manipulator

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.od......3710..e22769391788ed0def396b68a41772f7

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