1. Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics
- Author
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Kenichiro Kusano, Shin Ogasahara, Minoru Watanabe, Tatsumi Ito, Harutoyo Hirano, Ippei Akita, Yasushi Fuwa, Masato Futagawa, and Mitsuru Komatsu
- Subjects
010302 applied physics ,Materials science ,Fabrication ,business.industry ,Metals and Alloys ,020206 networking & telecommunications ,02 engineering and technology ,Condensed Matter Physics ,Chip ,01 natural sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Shield ,0103 physical sciences ,Electromagnetic shielding ,Limit (music) ,Hardware_INTEGRATEDCIRCUITS ,0202 electrical engineering, electronic engineering, information engineering ,Prognostics ,Optoelectronics ,Electrical and Electronic Engineering ,Current (fluid) ,business ,Instrumentation ,Water content - Abstract
A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.
- Published
- 2018