16 results on '"Julien Keraudy"'
Search Results
2. A nanostructured NiO/cubic SiC p–n heterojunction photoanode for enhanced solar water splitting
- Author
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Mikael Syväjärvi, Jianwu Sun, Ulf Helmersson, Jing-Xin Jian, Rositsa Yakimova, Sebastian Ekeroth, Julien Keraudy, and Yuchen Shi
- Subjects
Photocurrent ,Annan kemi ,Materials science ,Renewable Energy, Sustainability and the Environment ,business.industry ,Non-blocking I/O ,Heterojunction ,02 engineering and technology ,General Chemistry ,021001 nanoscience & nanotechnology ,7. Clean energy ,Nanoclusters ,Semiconductor ,Reversible hydrogen electrode ,Optoelectronics ,Water splitting ,General Materials Science ,Other Chemistry Topics ,0210 nano-technology ,business ,Faraday efficiency - Abstract
Photoelectrochemical (PEC) water-splitting offers a promising method to convert the intermittent solar energy into renewable and storable chemical energy. However, the most studied semiconductors generally exhibit a poor PEC performance including low photocurrent, small photovoltage, and/or large onset potential. In this work, we demonstrate a significant enhancement of photovoltage and photocurrent together with a substantial decrease of onset potential by introducing electrocatalytic and p-type NiO nanoclusters on an n-type cubic silicon carbide (3C-SiC) photoanode. Under AM1.5G 100 mW cm(-2) illumination, the NiO-coated 3C-SiC photoanode exhibits a photocurrent density of 1.01 mA cm(-2) at 0.55 V versus reversible hydrogen electrode (V-RHE), a very low onset potential of 0.20 V-RHE and a high fill factor of 57% for PEC water splitting. Moreover, the 3C-SiC/NiO photoanode shows a high photovoltage of 1.0 V, which is the highest value among reported photovoltages. The faradaic efficiency measurements demonstrate that NiO also protects the 3C-SiC surface against photo-corrosion. The impedance measurements evidence that the 3C-SiC/NiO photoanode facilitates the charge transfer for water oxidation. The valence-band position measurements confirm the formation of the 3C-SiC/NiO p-n heterojunction, which promotes the separation of the photogenerated carriers and reduces carrier recombination, thus resulting in enhanced solar water-splitting. Funding Agencies|Swedish Research Council (Vetenskapsradet) [621-2014-5461, 2018-04670, 621-2014-5825]; Swedish Research Council for Environment, Agricultural Sciences and Spatial Planning (FORMAS) [2016-00559]; Swedish Foundation for International Cooperation in Research and Higher Education (STINT) [CH2016-6722]; AForsk Foundation [16-399]; Stiftelsen Olle Engkvist Byggmastare [189-0243]; EU project CHALLENGE; Knut and Alice Wallenberg Foundation [KAW 2014.0276]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO Mat LiU) [2009 00971]
- Published
- 2019
3. Low temperature growth of stress-free single phase alpha-W films using HiPIMS with synchronized pulsed substrate bias
- Author
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Ulf Helmersson, Julien Keraudy, Tetsuhide Shimizu, Robert D. Boyd, Ming Yang, Kazuki Takahashi, Rommel Paulo B. Viloan, and Daniel Lundin
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010302 applied physics ,Materials science ,General Physics and Astronomy ,chemistry.chemical_element ,Biasing ,02 engineering and technology ,Substrate (electronics) ,Tungsten ,021001 nanoscience & nanotechnology ,01 natural sciences ,Stress (mechanics) ,Annan materialteknik ,chemistry ,Electrical resistivity and conductivity ,0103 physical sciences ,Other Materials Engineering ,Texture (crystalline) ,Thin film ,Composite material ,High-power impulse magnetron sputtering ,0210 nano-technology - Abstract
Efficient metal-ion-irradiation during film growth with the concurrent reduction of gas-ion-irradiation is realized for high power impulse magnetron sputtering by the use of a synchronized, but delayed, pulsed substrate bias. In this way, the growth of stress-free, single phase alpha -W thin films is demonstrated without additional substrate heating or post-annealing. By synchronizing the pulsed substrate bias to the metal-ion rich portion of the discharge, tungsten films with a 110 oriented crystal texture are obtained as compared to the 111 orientation obtained using a continuous substrate bias. At the same time, a reduction of Ar incorporation in the films are observed, resulting in the decrease of compressive film stress from sigma =1.80-1.43GPa when switching from continuous to synchronized bias. This trend is further enhanced by the increase of the synchronized bias voltage, whereby a much lower compressive stress sigma =0.71GPa is obtained at U-s=200V. In addition, switching the inert gas from Ar to Kr has led to fully relaxed, low tensile stress (0.03GPa) tungsten films with no measurable concentration of trapped gas atoms. Room-temperature electrical resistivity is correlated with the microstructural properties, showing lower resistivities for higher U-s and having the lowest resistivity (14.2 mu Omega cm) for the Kr sputtered tungsten films. These results illustrate the clear benefit of utilizing selective metal-ion-irradiation during film growth as an effective pathway to minimize the compressive stress induced by high-energetic gas ions/neutrals during low temperature growth of high melting temperature materials. Funding Agencies|Swedish Research CouncilSwedish Research CouncilEuropean Commission [VR 2018-04139]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [2009-00971]; Japan Society for the Promotion of Science (JSPS)Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT)Japan Society for the Promotion of Science [17KK0136]
- Published
- 2021
4. Tuning the stress in TiN films by regulating the doubly charged ion fraction in a reactive HiPIMS discharge
- Author
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Ulf Helmersson, Rommel Paulo B. Viloan, Julien Keraudy, and Daniel Lundin
- Subjects
Compressive stress ,Materials science ,Thin films ,Analytical chemistry ,General Physics and Astronomy ,chemistry.chemical_element ,02 engineering and technology ,Mass spectrometry ,01 natural sciences ,Ion ,law.invention ,Magazine ,law ,0103 physical sciences ,Fysik ,010302 applied physics ,Plasma dynamics ,Plasma ,Sputter deposition ,021001 nanoscience & nanotechnology ,chemistry ,Physical Sciences ,High-power impulse magnetron sputtering ,0210 nano-technology ,Tin ,Stoichiometry ,Magnetron sputtering - Abstract
In the present study, we investigate the impact of pulse power (Ppulse) on the ion flux and the properties of TiN films using reactive high-power impulse magnetron sputtering. Ppulse was adjusted in the range of 5–25 kW, while keeping the total average power constant through regulating the pulsing frequency. It is found that the required N2 flow, to produce stoichiometric TiN, decreases as Ppulse is increased, which is due to a decrease in the deposition rate. The plasma conditions when stoichiometric TiN is formed were investigated in detail. In situ ion mass spectrometry measurements of the ion energy distribution functions reveal two distinct ion populations, ions originating from sputtered atoms (Ti+, Ti2+, and N+) and ions originating from the working gas (Ar+, Ar2+, and N2+). The average ion energies (Eave) of the sputtered ions show an increase with increasing Ppulse, while Eave for the gas ions remains almost unaffected. The relative flux intensity Ti2+/Ti+ showed an increasing trend, from 0.28 to 0.47, as Ppulse was increased from 5 to 25 kW. The ion flux changes affect the growth of the TiN film such that 111-textured films are grown for low Ppulse while higher Ppulse results in mixed orientations. In addition, the hardness of the deposited film increases with increasing Ppulse, while the compressive film stress increases significantly at a higher Ppulse. In this way, optimum deposition conditions were identified at Ppulse = 8.3 kW, where a relatively low compressive stress of 0.89 GPa and high hardness of 22.67 GPa were measured. Funding agencies: Swedish Research CouncilSwedish Research Council [VR 2018-04139]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at the Linkoping University (Faculty Grant SFO-Mat-LiU) [2009-00971]
- Published
- 2020
5. Phase separation within NiSiN coatings during reactive HiPIMS discharges: A new pathway to grow NixSi nanocrystals composites at low temperature
- Author
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P.-Y. Jouan, Tetsuhide Shimizu, Julien Keraudy, Ulf Helmersson, and Robert D. Boyd
- Subjects
010302 applied physics ,Materials science ,Nanocomposite ,Nanostructure ,General Physics and Astronomy ,02 engineering and technology ,Surfaces and Interfaces ,General Chemistry ,Sputter deposition ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Microstructure ,01 natural sciences ,Surfaces, Coatings and Films ,Amorphous solid ,0103 physical sciences ,Crystallite ,High-power impulse magnetron sputtering ,Thin film ,Composite material ,0210 nano-technology - Abstract
The precise control of the growth nanostructured thin films at low temperature is critical for the continued development of microelectronic enabled devices. In this study, nanocomposite Ni-Si-N thin films were deposited at low temperature by reactive high-power impulse magnetron sputtering. A composite Ni-Si target (15 at.% Si) in combination with a Ar/N2 plasma were used to deposit films onto Si(0 0 1) substrates, without any additional substrate heating or any post-annealing. The films microstructure changes from a polycrystalline to nanocomposite structure when the nitrogen content exceeds 16 at.%. X-ray diffraction and (scanning) transmission electron microscopy analyses reveal that the microstructure consists of nanocrystals, NixSi (x > 1) 7–8 nm in size, embedded in an amorphous SiNx matrix. It is proposed that this nanostructure is formed at low temperatures due to the repeated-nucleation of NixSi nanocrystals, the growth of which is restricted by the formation of the SiNx phase. X-ray photoelectron spectroscopy revealed the trace presence of a ternary solid solution mainly induced by the diffusion of Ni into the SiNx matrix. Four-probe electrical measurements reveal all the deposited films are electrically conducting.
- Published
- 2018
6. Nitrogen doping on NiO by reactive magnetron sputtering: A new pathway to dynamically tune the optical and electrical properties
- Author
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Pierre-Yves Jouan, Antoine Goullet, Mireille Richard-Plouet, A. Ferrec, Jonathan Hamon, Julien Keraudy, Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), and Université de Nantes (UN)-Université de Nantes (UN)
- Subjects
Materials science ,Non-blocking I/O ,Doping ,Analytical chemistry ,Oxide ,General Physics and Astronomy ,02 engineering and technology ,Surfaces and Interfaces ,General Chemistry ,Sputter deposition ,010402 general chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,0104 chemical sciences ,Surfaces, Coatings and Films ,chemistry.chemical_compound ,X-ray photoelectron spectroscopy ,chemistry ,Sputtering ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,Atomic ratio ,Thin film ,0210 nano-technology ,ComputingMilieux_MISCELLANEOUS - Abstract
N-doped nickel oxide (NiO:N) thin films were deposited on glass and silicon substrates by reactive DC magnetron sputtering in Ar/O 2 /N 2 gas atmosphere with a series of N 2 /O 2 gas ratio ranging from 0 to 80%. X-ray diffraction measurements have revealed that the films are constituted of Ni 1-x O grains and showed enhanced polycrystalline features with increasing N-doping concentration. For the first time, we report here that N-doping in the Ni-deficient NiO (Ni 1-x O) film leads to a band-gap narrowing from 3.6 to 2.3 eV. X-ray photoelectron spectroscopy (XPS) measurements proved that up to 4 atomic percent (at.%) nitrogen can be incorporated at least at the surface of the NiO:N samples. In addition, XPS valence band spectra and UV–vis transmission measurements have demonstrated that the band-gap narrowing may originates from the contribution of an intermediate band (IB) ∼2.4 eV just above the valence band maximum and the up-shifting of the valence band edge (∼0.3 eV) due to the introduction of occupied N 2 p states. Local I–V measurements, carried out by conductive AFM (C-AFM), have revealed that the extrinsic doping of N atoms within the oxide can be a good way to precisely control the electrical conductivity of such p- type materials.
- Published
- 2017
7. Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)
- Author
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Ulf Helmersson, Daniel Lundin, Michelle Marie S. Villamayor, Tetsuhide Shimizu, and Julien Keraudy
- Subjects
010302 applied physics ,Materials science ,0103 physical sciences ,General Materials Science ,02 engineering and technology ,Surfaces and Interfaces ,021001 nanoscience & nanotechnology ,0210 nano-technology ,01 natural sciences ,Instrumentation ,Spectroscopy - Published
- 2017
8. Synthesis of a Cu-infiltrated Zr-doped SBA-15 catalyst for CO2hydrogenation into methanol and dimethyl ether
- Author
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Fredrik Söderlind, Magnus Odén, Aylin Atakan, Julien Keraudy, Emma M. Björk, and Peter Mäkie
- Subjects
Solid-state chemistry ,Doping ,General Physics and Astronomy ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Large pore ,Catalysis ,chemistry.chemical_compound ,chemistry ,Organic chemistry ,Dimethyl ether ,Methanol ,Physical and Theoretical Chemistry ,0210 nano-technology ,Mesoporous material ,Nuclear chemistry - Abstract
A catalytically active nanoassembly comprising Cu-nanoparticles grown on integrated and active supports (large pore Zr-doped mesoporous SBA-15 silica) has been synthesized and used to promote CO2hydrogenation.
- Published
- 2017
9. Electrochemical characteristics of NixN thin films deposited by DC and HiPIMS reactive magnetron sputtering
- Author
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Baptiste Girault, P.-Y. Jouan, L. Athouel, Mireille Richard-Plouet, David Gloaguen, Jonathan Hamon, Julien Keraudy, Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), and Université de Nantes (UN)-Université de Nantes (UN)
- Subjects
010302 applied physics ,Materials science ,Metals and Alloys ,Analytical chemistry ,02 engineering and technology ,Surfaces and Interfaces ,021001 nanoscience & nanotechnology ,Electrochemistry ,01 natural sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,X-ray photoelectron spectroscopy ,Sputtering ,0103 physical sciences ,Electrode ,Materials Chemistry ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,Thin film ,Cyclic voltammetry ,High-power impulse magnetron sputtering ,0210 nano-technology ,Spectroscopy ,ComputingMilieux_MISCELLANEOUS - Abstract
This study deals with the DC and HiPIMS reactive magnetron deposition process using a pure nickel target (99.995%) in an Ar-N2 gas mixture with varied nitrogen gas flow and bias voltage (floating or -100 V). The characterization of the NiN films has been carried out by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS) and Energy dispersive X-ray Spectroscopy (EDXS). XRD measurements have highlighted the deformation of the Ni cubic cell as a function of nitrogen content, and a mixture of nitrided phases (Ni4N, Ni3N and Ni2N) appears for 20% N2 in the discharge. XPS and EDX are well correlated and permit us to determine three zones: metallic between 0 and 20% N2, Ni4N between 20% and 42% N2 and finally Ni3N for N2 above 50%. These three zones are in good agreement with deposition rates and optical emission spectroscopy measurements. Cyclic voltammetry has been performed in a conventional three-electrode cell using neutral, alkaline and acidic aqueous electrolytes. The NixN electrochemical behavior shows a pseudocapacitive charge storage mechanism in LiNO3 and KOH electrolytes using an appropriate voltage window, suitable for supercapacitors, whereas NixN exhibits reversible faradaic redox peaks beyond one potential in KOH, depicting NixN film as a battery-type electrode.
- Published
- 2019
10. Bipolar high power impulse magnetron sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias
- Author
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Julien Keraudy, Liuhe Li, Ulf Helmersson, Robert D. Boyd, Jiabin Gu, and Rommel Paulo B. Viloan
- Subjects
Materials science ,chemistry.chemical_element ,FOS: Physical sciences ,02 engineering and technology ,Substrate (electronics) ,Applied Physics (physics.app-ph) ,Titanium nitride ,01 natural sciences ,Ion energy distribution function tuning ,0103 physical sciences ,Materials Chemistry ,Fysik ,Voltage pulse ,Thin film ,010302 applied physics ,Condensed Matter - Materials Science ,Pulse (signal processing) ,business.industry ,Metals and Alloys ,Materials Science (cond-mat.mtrl-sci) ,High power impulse magnetron sputtering ,Surfaces and Interfaces ,Physics - Applied Physics ,021001 nanoscience & nanotechnology ,Ion bombardment ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Bipolar HiPIMS ,chemistry ,Physical Sciences ,Optoelectronics ,High-power impulse magnetron sputtering ,0210 nano-technology ,Tin ,business - Abstract
The effect of applying a positive voltage pulse (Urev = 10 - 150 V) directly after the negative high power impulse magnetron sputtering (HiPIMS) pulse (bipolar HiPIMS) is investigated for the reactive sputter deposition of TiN thin films. Energy-resolved mass spectroscopy analyses are performed to gain insight in the effect on the ion energy distribution function of the various ions. It is demonstrated that the energy of a large fraction of the ions can be tuned by a reverse target potential and gain energy corresponding to the applied Urev. Microscopy observations and x-ray reflectometry reveal densification of the films which results in an increase in the film hardness from 23.9 to 34 GPa as well as an increase in compressive film stress from 2.1 GPa to 4.7 GPa when comparing conventional HiPIMS with bipolar HiPIMS (Urev = 150 V).
- Published
- 2019
11. Low-Loss and Tunable Localized Mid-Infrared Plasmons in Nanocrystals of Highly Degenerate InN
- Author
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Jan Eric Stehr, Davide Mariotti, Jan Benedikt, Ulf Helmersson, Sadegh Askari, and Julien Keraudy
- Subjects
Indium nitride ,plasma ,nanocrystals ,plasmonics ,low-loss ,Electron mobility ,Solid-state chemistry ,Nanostructure ,Materials science ,Infrared ,Materialkemi ,Bioengineering ,02 engineering and technology ,010402 general chemistry ,01 natural sciences ,chemistry.chemical_compound ,Materials Chemistry ,General Materials Science ,Surface plasmon resonance ,Plasmon ,business.industry ,Mechanical Engineering ,Doping ,General Chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,0104 chemical sciences ,chemistry ,Optoelectronics ,0210 nano-technology ,business - Abstract
Plasmonic response of free charges confined in nanostructures of plasmonic materials is a powerful means for manipulating the light-material interaction at the nanoscale and hence has influence on various relevant technologies. In particular, plasmonic materials responsive in the mid-infrared range are technologically important as the mid-infrared is home to the vibrational resonance of molecules and also thermal radiation of hot objects. However, the development of the field is practically challenged with the lack of low-loss materials supporting high quality plasmons in this range of the spectrum. Here, we demonstrate that degenerately doped InN nanocrystals (NCs) support tunable and low-loss plasmon resonance spanning the entire midwave infrared range. Modulating free-carrier concentration is achieved by engineering nitrogen-vacancy defects (InN1-x, 0.017 amp;lt; x amp;lt; 0.085) in highly degenerate NCs using a nonequilibrium gas-phase growth process. Despite the significant reduction in the carrier mobility relative to intrinsic InN, the mobility in degenerate InN NCs (amp;gt;60 cm(2)/(V s)) remains considerably higher than the carrier mobility reported for other materials NCs such as doped metal oxides, chalcogenides, and noble metals. These findings demonstrate feasibility of controlled tuning of infrared plasmon resonances in a low-loss material of III-V compounds and open a gateway to further studies of these materials nanostructures for infrared plasmonic applications. Funding Agencies|Knut and Alice Wallenberg Foundation [KAW 14.0276]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (faculty Grant SFO-Mat-LiU) [2009-00971]; EPSRC [EP/M024938/1]
- Published
- 2018
12. Process- and optoelectronic-control of NiOx thin films deposited by reactive high power impulse magnetron sputtering
- Author
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Christophe Payen, Julien Keraudy, Benoit Corraze, Brice Delfour-Peyrethon, Pierre-Yves Jouan, Antoine Goullet, Javier García Molleja, Jonathan Hamon, Mireille Richard-Plouet, A. Ferrec, Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), and Université de Nantes (UN)-Université de Nantes (UN)
- Subjects
010302 applied physics ,Materials science ,Argon ,business.industry ,Non-blocking I/O ,Analytical chemistry ,General Physics and Astronomy ,chemistry.chemical_element ,02 engineering and technology ,Partial pressure ,021001 nanoscience & nanotechnology ,01 natural sciences ,Oxygen ,Ion ,chemistry ,0103 physical sciences ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,Optoelectronics ,High-power impulse magnetron sputtering ,Thin film ,0210 nano-technology ,business ,Stoichiometry ,ComputingMilieux_MISCELLANEOUS - Abstract
In this contribution, based on the analyses of the discharge behavior as well as final properties of the deposited Ni-O films during reactive high power impulse magnetron sputtering discharge, we have demonstrated that monitoring the oxygen flow rate leads to 4 different regimes of discharge. Tuning the oxygen partial pressure allows deposition of a large range of chemical compositions from pure nickel to nickel-deficient NiOx (x > 1) in the poisoned mode. Investigation of the plasma dynamics by time-resolved optical emission spectroscopy suggests that the discharge behavior in the poisoned mode principally comes from the higher contribution of both oxygen and argon ions in the total ionic current, leading to a change in the ion induced secondary electron emission coefficient. Additionally, material characterizations have revealed that optoelectronic properties of NiOx films can be easily tuned by adjusting the O/Ni ratio, which is influenced by the change of the oxygen flow rate. Stoichiometric NiO films...
- Published
- 2017
13. Low-energy ion irradiation in HiPIMS to enable anatase TiO2 selective growth
- Author
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Makoto Tsukamoto, Vinícius Gabriel Antunes, Daniel Lundin, Tiberiu Minea, Fernando Alvarez, Ulf Helmersson, F. Cemin, Julien Keraudy, Laboratoire de physique des gaz et des plasmas (LPGP), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Instituto de Fisica Gleb Wataghin (IFGW), Universidade Estadual de Campinas (UNICAMP), Centro de Fisica de Materiales (CFM), and Universidad del Pais Vasco / Euskal Herriko Unibertsitatea [Espagne] (UPV/EHU)-Consejo Superior de Investigaciones Científicas [Madrid] (CSIC)
- Subjects
010302 applied physics ,Anatase ,Materials science ,Acoustics and Ultrasonics ,Analytical chemistry ,02 engineering and technology ,Substrate (electronics) ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Microstructure ,01 natural sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Amorphous solid ,chemistry.chemical_compound ,chemistry ,[PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] ,Rutile ,Phase (matter) ,0103 physical sciences ,Titanium dioxide ,High-power impulse magnetron sputtering ,0210 nano-technology ,ComputingMilieux_MISCELLANEOUS - Abstract
High power impulse magnetron sputtering (HiPIMS) has already demonstrated great potential for synthesizing the high-energy crystalline phase of titanium dioxide (rutile TiO2) due to large quantities of highly energetic ions present in the discharge. In this work, it is shown that the metastable anatase phase can also be obtained by HiPIMS. The required deposition conditions have been identified by systematically studying the phase formation, microstructure and chemical composition as a function of mode of target operation as well as of substrate temperature, working pressure, and peak current density. It is found that films deposited in the metal and transition modes are predominantly amorphous and contain substoichiometric TiO x compounds, while in compound mode they are well-crystallized and present only O2− ions bound to Ti4+, i.e. pure TiO2. Anatase TiO2 films are obtained for working pressures between 1 and 2 Pa, a peak current density of ~1 A cm−2 and deposition temperatures lower than 300 °C. Rutile is favored at lower pressures ( 2 A cm−2), while amorphous films are obtained at higher pressures (5 Pa). Microstructural characterization of selected films is also presented.
- Published
- 2018
14. Vibrational Energy Harvesting
- Author
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Ronan Hinchet, Alessandro Bertacchini, Dhiman Mallick, Francesco Guido, Teresa Todaro, Saibal Roy, Gustavo Ardila, Massimo De Vittorio, Julien Keraudy, Pranay Podder, Luca Larcher, Dipartimento di Scienze e Metodi dell'Ingegneria [Reggio Emilia] (DISMI), Università degli Studi di Modena e Reggio Emilia = University of Modena and Reggio Emilia (UNIMORE), Tyndall National Institute [Cork], Istituto Nanoscienze [Lecce] (NNL), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Università degli Studi di Roma 'La Sapienza' = Sapienza University [Rome] (UNIROMA), Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS), Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), F. Balestra, European Project: 257375,ICT,FP7-ICT-2009-5,NANOFUNCTION(2010), Università degli Studi di Modena e Reggio Emilia (UNIMORE), Consiglio Nazionale delle Ricerche (CNR), Università degli Studi di Roma 'La Sapienza' = Sapienza University [Rome], Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), and Université de Nantes (UN)-Université de Nantes (UN)
- Subjects
010302 applied physics ,Microelectromechanical systems ,energy harvesting ,Computer science ,Mechanical engineering ,02 engineering and technology ,Transduction (psychology) ,021001 nanoscience & nanotechnology ,01 natural sciences ,7. Clean energy ,Piezoelectricity ,Computer Science::Other ,Vibration ,Modeling and simulation ,MEMS ,Transducer ,0103 physical sciences ,energy harvesting, MEMS ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,0210 nano-technology ,Energy harvesting ,Energy (signal processing) - Abstract
chap 6; International audience; Vibration‐powered generators are typically inertial spring and mass systems which employ three main transduction mechanisms to extract energy from vibrations: piezoelectric, electromagnetic and electrostatic. This chapter presents a short overview of the microelectromechanical systems (MEMS) energy harvesters employing both piezoelectric and electromagnetic effects both proposed in the literature and developed in the framework of the Nanofunction project. It presents a short overview of state‐of‐the‐art vibration energy transducers employing the piezoelectric effect. The chapter illustrates the near‐field characterization techniques as well as electromechanical modeling and simulation required for the design of the energy harvesting transducers. It reviews the electromagnetic generators presented in the literature including large‐scale discrete devices and integrated versions, where the results achieved on vibration energy harvester exploiting both electromagnetic and piezoelectric effects are derived. Modeling and simulation results are presented to demonstrate the feasibility of the proposed device concepts.
- Published
- 2014
15. Scaling rules of piezoelectric nanowires in view of sensor and energy harvester integration
- Author
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E. Pauliac-Vaujour, Gustavo Ardila, Mireille Mouis, Laurent Montès, Julien Keraudy, Julien Ferreira, and Ronan Hinchet
- Subjects
Materials science ,Transducer ,business.industry ,Nanowire ,Electronic engineering ,Optoelectronics ,Energy transformation ,business ,Energy harvesting ,Scaling ,Piezoelectricity ,Mechanical energy ,Energy harvester - Abstract
This paper presents for the first time the scaling rules of piezoelectric nanowires (NWs), as the active transducer element for sensors and mechanical energy harvesters. Moreover, to keep close to realistic structures, non-linear effects associated to large displacements were taken into account, as well as the influence of NW variability, based on experimental data. We demonstrate that well-above-state-of-the-art sensitivities and resolutions can be achieved for sensing applications, and that large energy conversion efficiencies can be obtained for mechanical energy harvesters (about 7 times larger than that of their bulk counterpart).
- Published
- 2012
16. Low-energy ion irradiation in HiPIMS to enable anatase TiO2 selective growth.
- Author
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Felipe Cemin, Makoto Tsukamoto, Julien Keraudy, Vinícius Gabriel Antunes, Ulf Helmersson, Fernando Alvarez, Tiberiu Minea, and Daniel Lundin
- Subjects
IRRADIATION ,TITANIUM dioxide - Abstract
High power impulse magnetron sputtering (HiPIMS) has already demonstrated great potential for synthesizing the high-energy crystalline phase of titanium dioxide (rutile TiO
2 ) due to large quantities of highly energetic ions present in the discharge. In this work, it is shown that the metastable anatase phase can also be obtained by HiPIMS. The required deposition conditions have been identified by systematically studying the phase formation, microstructure and chemical composition as a function of mode of target operation as well as of substrate temperature, working pressure, and peak current density. It is found that films deposited in the metal and transition modes are predominantly amorphous and contain substoichiometric TiOx compounds, while in compound mode they are well-crystallized and present only O2− ions bound to Ti4+ , i.e. pure TiO2 . Anatase TiO2 films are obtained for working pressures between 1 and 2 Pa, a peak current density of ~1 A cm−2 and deposition temperatures lower than 300 °C. Rutile is favored at lower pressures (<1 Pa) and higher peak current densities (>2 A cm−2 ), while amorphous films are obtained at higher pressures (5 Pa). Microstructural characterization of selected films is also presented. [ABSTRACT FROM AUTHOR]- Published
- 2018
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