Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)

Authors :: Ulf Helmersson
Daniel Lundin
Michelle Marie S. Villamayor
Tetsuhide Shimizu
Julien Keraudy
Source :: Journal of the Vacuum Society of Japan. 60:346-351
Publication Year :: 2017
Publisher :: The Vacuum Society of Japan, 2017.

Subjects :: 010302 applied physics
Materials science
0103 physical sciences
General Materials Science
02 engineering and technology
Surfaces and Interfaces
021001 nanoscience & nanotechnology
0210 nano-technology
01 natural sciences
Instrumentation
Spectroscopy

Tools