1. Study of complex waveguide structure using soft X-ray reflectivity technique
- Author
-
Amol Singh, J.-M. André, P. Jonnard, Mohammed H. Modi, Rajnish Dhawan, K. Le Guen, Raja Ramanna Centre for Advanced Technology, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Soft x ray ,Materials science ,business.industry ,02 engineering and technology ,Surface finish ,021001 nanoscience & nanotechnology ,01 natural sciences ,Reflectivity ,Layered structure ,Optics ,Si substrate ,[PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other] ,0103 physical sciences ,Waveguide (acoustics) ,010306 general physics ,0210 nano-technology ,business ,ComputingMilieux_MISCELLANEOUS - Abstract
Grazing incidence x-ray reflectivity (GIXRR) technique is commonly used for structural investigation of layered structures. In case of complex x-ray waveguide structure it is difficult to obtain structural parameters using GIXRR technique owing to narrowly spaced Kiessig fringes. We used GIXRR and soft x-ray reflectivity (SXR) technique to study the x-ray waveguide structure composed of 4 layers Al/ZrC/Al/W on a Si substrate. Structural parameters of the stacks, density, thickness and roughness of the layers, are determined through fitting of SXR data. Advantages of SXR over GIXRR for such layered structure are shown.
- Published
- 2017