1. Size Dependence of Surface-Roughness-Limited Mobility in Silicon-Nanowire FETs
- Author
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S. Poli, G. Baccarani, Marco G. Pala, Thierry Poiroux, Simon Deleonibus, Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS), Domenget, Chahla, S. Poli, M.G. Pala, T. Poiroux, S. Deleonibu, and G. Baccarani
- Subjects
Electron density ,Materials science ,[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Nanowire ,SILICON NANOWIRE (SI-NW) ,02 engineering and technology ,Surface finish ,01 natural sciences ,Ballistic conduction ,0103 physical sciences ,Surface roughness ,EFFECTIVE MOBILITY ,Electrical and Electronic Engineering ,NONEQUILIBRIUM GREEN'S FUNCTIONS (NEGFS) ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,ComputingMilieux_MISCELLANEOUS ,010302 applied physics ,Condensed matter physics ,Scattering ,SURFACE ROUGHNESS ,QUASI-BALLISTIC TRANPORT ,021001 nanoscience & nanotechnology ,Electrical contacts ,Electronic, Optical and Magnetic Materials ,Field-effect transistor ,0210 nano-technology - Abstract
Lateral size effects on surface-roughness-limited mobility in silicon-nanowire FETs are analyzed by means of a full- quantum 3-D self-consistent simulation. A statistical analysis is carried out by considering different realizations of the potential roughness at the Si-SiO2 interfaces. Nanowires with lateral section varying from 3 times 3 to 7 times 7 nm2 are considered. Effective mobility is computed by evaluating the electron density in a reduced channel region to eliminate parasitic effects from contacts. It is found that transport in wires with the smallest section is dominated by scattering due to potential fluctuations, resulting in a larger standard deviation of the effective mobility, whereas it is dominated by transverse-mode coupling in wires with larger section, resulting in a stronger influence of surface roughness at high gate voltages.
- Published
- 2008