116 results on '"D. A. Kudryashov"'
Search Results
2. Influence of electromagnetic waves on the penetration of an antiseptic in the dentine of the tooth root in experimental conditions
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N. N. Solomatina, M. A. Postnikov, D. A. Trunin, S. E. Chigarina, A. O. Solomatina, D. N. Kudryashov, and A. M. Golovachev
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гипохлорит натрия ,электромагнитные колебания ,корневой канал ,микроканалы ,Dentistry ,RK1-715 - Abstract
Aims. To analyse the impact of electromagnetic oscillations in the sound range on diffusion the 3.25 % solution of sodium hypochlorite in the dentine of the tooth root.Materials and methods. A pilot study on diffusion of 3.25% of solution of sodium hypochlorite with dye fuchsine red was executed on 100 extracted teeth of the person. The control group was made by 40 teeth, the introduction of an antiseptic was conducted without use of sound waves. The main group of 60 teeth was divided into 3 subgroups. For the purpose of intensifying of the penetration of an antiseptic in each subgroup, electromagnetic oscillations (frequency range around 20,000 Hz) were applied with exposition time respectively 1 minute, 2 minutes, 3 minutes.Results. Application of sound waves in the canal of a tooth root led to augmentation of penetration of an antiseptic in the system of dentinal canaliculus and microchannels of the tooth root dentine.Conclusions. This process took place most effectively in single-root teeth when exposed to sound vibrations, smaller efficiency is revealed in multirooted teeth that indicates the difference in physical properties of the tissues of the various groups of the teeth.
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- 2023
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- View/download PDF
3. The effectiveness of antibacterial treatment of the root canal in chronic apical periodontitis using an erbium-chromium laser
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M. A. Postnikov, A. Yu. Rozenbaum, S. E. Chigarina, D. N. Kudryashov, M. B. Khaikin, I. V. Khramova, and G. N. Belanov
- Abstract
Aim. To evaluate the effectiveness of antibacterial treatment of root canals in chronic apical periodontitis with an erbiumchromium laser.Materials and methods. Group I consisted of 16 patients – antibacterial treatment of root canals was carried out with 10 ml of 3% solution of sodium hypochlorite «Belodez». Group II – 29 patients – antibacterial treatment was carried out with an erbium-chromium laser Waterlase MD in the following mode: wavelength – 2780 nm, power – 1.5 W, pulse duration – 140 μs, frequency – 40 Hz. Antibacterial efficacy was assessed by the results of microbiological studies of samples from the root canal before and after antibacterial treatment. Results. During antibacterial treatment with an erbium-chromium laser, a statistically significant decrease in the concentration of Escherichia coli, Staphylococcus aureus, Moraxella lacunata, Actinomyces israelii, Streptococcus mutans, Corynebacterium xerosis occurred in comparison with the control group.Conclusions. The dynamics of clinical signs in patients of the two groups indicates the anti-inflammatory effect of the Waterlase MD erbium-chromium laser, which confirms a pronounced antibacterial effect against Escherichia coli, Corynebacterium xerosis, Actinomyces israelii, Streptococcus mutans, Staphylococcus aureus, Moraxella lacunata.
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- 2022
4. Measuring the geometry of catenary devices
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E. V. Dobrynin, T. V. Kharitonova, and D. A. Kudryashov
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- 2023
5. Admittance Spectroscopy of Solar Cells Based on Selective Contact MoOx/Si Junction
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A. I. Baranov, D. A. Kudryashov, A. V. Uvarov, I. A. Morozov, A. A. Maksimova, E. A. Vyacheslavova, and A. S. Gudovskikh
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Physics and Astronomy (miscellaneous) - Published
- 2021
6. Formation of Heterostructures of GaP/Si Photoconverters by the Combined Method of MOVPE and PEALD
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A. V. Uvarov, A. I. Baranov, E. A. Vyacheslavova, N. A. Kalyuzhnyi, D. A. Kudryashov, A. A. Maksimova, I. A. Morozov, S. A. Mintairov, R. A. Salii, and A. S. Gudovskikh
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Physics and Astronomy (miscellaneous) - Published
- 2021
7. COMBINED THERMAL DESIGN SIMULATION STAR SENSOR
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P. N. Razzhivalov, D. D. Kudryashov, and S. A. Shatalova
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Materials science ,business.industry ,Thermal ,Aerospace engineering ,business ,Star sensor - Published
- 2021
8. Using MoOx/p-Si Selective Contact for Evaluation of the Degradation of a Near-Surface Region of Silicon
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A. A. Maksimova, A. V. Uvarov, Ivan A. Morozov, D. A. Kudryashov, Artem Baranov, and Alexander S. Gudovskikh
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inorganic chemicals ,010302 applied physics ,Materials science ,Physics and Astronomy (miscellaneous) ,Silicon ,technology, industry, and agriculture ,Analytical chemistry ,chemistry.chemical_element ,02 engineering and technology ,Sputter deposition ,equipment and supplies ,021001 nanoscience & nanotechnology ,complex mixtures ,01 natural sciences ,Highly sensitive ,stomatognathic diseases ,chemistry ,0103 physical sciences ,Degradation (geology) ,0210 nano-technology ,Silicon oxide ,Layer (electronics) ,Deposition (law) - Abstract
It is shown that the degree of damage of the near-surface layer of p-silicon can be estimated with the aid of a MoOx/p-Si selective contact, the current–voltage characteristics of which are highly sensitive to states on the silicon surface formed during the deposition of silicon oxide by method of magnetron sputtering.
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- 2020
9. A Selective BP/Si Contact Formed by Low-Temperature Plasma-Enhanced Atomic Layer Deposition
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Artem Baranov, D. A. Kudryashov, Ivan A. Morozov, Alexander S. Gudovskikh, and A. V. Uvarov
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010302 applied physics ,Materials science ,Physics and Astronomy (miscellaneous) ,Silicon ,Analytical chemistry ,chemistry.chemical_element ,Low temperature plasma ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,law.invention ,chemistry.chemical_compound ,Atomic layer deposition ,chemistry ,law ,0103 physical sciences ,Solar cell ,Boron phosphide ,0210 nano-technology - Abstract
It is shown for the first time that thin boron phosphide (BP) layers on silicon substrates can be formed by low-temperature plasma-enhanced atomic layer deposition at 250°C. Experiments demonstrated the possibility of using these BP/Si interfaces as selective hole contacts to silicon in solar cells.
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- 2021
10. Peculiarities of Magnetron Sputtering of Nickel Oxide Thin Films for Use in Perovskite Solar Cells
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Alexey M. Mozharov, Alexey D. Bolshakov, D. A. Kudryashov, Ivan Mukhin, Sergey V. Makarov, and A. S. Aglikov
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010302 applied physics ,Materials science ,Physics and Astronomy (miscellaneous) ,Band gap ,Nickel oxide ,Analytical chemistry ,Molar absorptivity ,Sputter deposition ,01 natural sciences ,010305 fluids & plasmas ,Extinction (optical mineralogy) ,Electrical resistivity and conductivity ,0103 physical sciences ,sense organs ,Thin film ,Perovskite (structure) - Abstract
Use of inorganic oxides as transport layer material is a promising way to increase the efficiency of perovskite solar cells. Results of the studies of the influence of the gas mix composition in the plasma discharge used during magnetron sputtering on the optical, electrical, and structural parameters of deposited thin nickel oxide films are reported. Addition of oxygen or nitrogen to pure argon atmosphere (up to 30 vol %) was shown to change the growth rate (1.2–2.3 nm/min), resistivity of the samples (8.5–208 Ω cm), material band gap (2.85–3.43 eV), and the spectral dependence of the extinction coefficient, while the structural and morphological parameters of synthesized thin films were not affected. The lowest extinction coefficients were found in films deposited in pure argon atmosphere, which determines the capabilities of their usage in photovoltaic converters based on perovskite compounds.
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- 2019
11. Multijunction solar cells concept based on GaP/Si nanostructures
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Artem Baranov, A. V. Uvarov, K. S. Zelentsov, Ivan A. Morozov, Alexander S. Gudovskikh, and D. A. Kudryashov
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010302 applied physics ,Materials science ,Nanostructure ,business.industry ,Band gap ,Superlattice ,Photovoltaic system ,Heterojunction ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Plasma-enhanced chemical vapor deposition ,0103 physical sciences ,Optoelectronics ,Wafer ,0210 nano-technology ,business ,Quantum well - Abstract
The lattice-matched GaP/Si superlattice is proposed to be used as an active material for top junction, which is grown on n–GaP/p-Si heterojunction bottom sub cell. Computer simulations demonstrate that GaP/Si structures with 1-2 nm Si quantum wells allow one to obtain a material with an effective band gap of 1.4–1.6 eV. GaP/Si nanostructures were grown at 380 °C by plasma deposition using PE-ALD and PECVD for GaP and Si layers growth, respectively. Structural, optical and electrical properties of GaP/Si nanostructures grown on Si and GaP wafers are reported and discussed in terms of photovoltaic application.
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- 2019
12. Precision Chemical Etching of GaP(NAs) Epitaxial Layers for the Formation of Monolithic Optoelectronic Devices
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Artem Baranov, D. A. Kudryashov, and Alexander S. Gudovskikh
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010302 applied physics ,Materials science ,business.industry ,Etching rate ,technology, industry, and agriculture ,chemistry.chemical_element ,Hydrochloric acid ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Epitaxy ,01 natural sciences ,Isotropic etching ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,chemistry.chemical_compound ,Semiconductor ,chemistry ,Etching (microfabrication) ,0103 physical sciences ,Calibration ,Optoelectronics ,0210 nano-technology ,business ,Arsenic - Abstract
The results of studying the applicability of various etchants for the precision wet etching of structures of monolithic optoelectronic devices containing GaPNAs layers are presented. It is shown that an etchant based on potassium iodide and hydrochloric acid is best suited for this purpose. The presence of nitrogen (up to 4%) and arsenic in the semiconductor composition does not greatly affect the etchant action but requires additional calibration experiments to refine the etching rate in each particular case. Examples of the practical application of precision etching to measure the characteristics of GaPNAs-based solar cells are presented.
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- 2018
13. MODEL OF THE DRIVE MOVEMENT IN THE MODE OF LOWERING THE CONTROL BODY UNDER THE ACTION OF ITS OWN WEIGHT
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A. Yu. Smirnov, E. N. Alexandrova, and D. A. Kudryashov
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- 2021
14. Hydrogen passivation of the n-GaN nanowire/p-Si heterointerface
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Vladimir V. Fedorov, A. V. Uvarov, Alexey M. Mozharov, G E Cirlin, K. Yu Shugurov, V. Yu. Mikhailovskii, Alexey D. Bolshakov, Artem Baranov, Vladimir Neplokh, D. A. Kudryashov, Igor Shtrom, Maria Tchernycheva, Ivan Mukhin, and G. A. Sapunov
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Materials science ,Photoluminescence ,Passivation ,business.industry ,Mechanical Engineering ,Electron beam-induced current ,Doping ,Nanowire ,Bioengineering ,Heterojunction ,02 engineering and technology ,General Chemistry ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Mechanics of Materials ,Optoelectronics ,General Materials Science ,Electrical and Electronic Engineering ,0210 nano-technology ,business ,Ohmic contact ,Molecular beam epitaxy - Abstract
The influence of hydrogen plasma treatment on electrical and optical properties of the vertical GaN nanowires (NWs)/Si heterostructures synthesized via plasma assisted molecular beam epitaxy is studied. The effect of the treatment is thoroughly studied via variation of the passivation duration. Photoluminescence (PL) investigation demonstrates that the passivation affects the doping of the GaN NWs. The samples were processed as photodiodes with top transparent electrode to obtain detailed information about the n-GaN NWs/p-Si heterointerface under illumination. Electron beam induced current (EBIC) measurements demonstrated the absence of the potential barriers between active parts of the diode and the contacts, indicating ohmic behavior of the latter. I-V characteristics obtained in the dark and under illumination show that hydrogen can effectively passivate the recombination centers at the GaN NWs/Si heterointerface. The optimum passivation duration providing improved electrical properties is found to be 10 minutes within taken passivation regimes. It is demonstrated that the longer treatment causes degradation of the electrical properties. The discovered phenomenon is discussed in details.
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- 2020
15. Defect properties of solar cells with layers of GaP based dilute nitrides grown by molecular beam epitaxy
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D. A. Kudryashov, Artem Baranov, Jean-Paul Kleider, Sylvain Le Gall, Alexander S. Gudovskikh, Anton Yu. Egorov, Saint Petersburg National Research Academic University RAS, Laboratoire Génie électrique et électronique de Paris (GeePs), and CentraleSupélec-Sorbonne Université (SU)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)
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Materials science ,Silicon ,General Physics and Astronomy ,chemistry.chemical_element ,02 engineering and technology ,Nitride ,Epitaxy ,7. Clean energy ,01 natural sciences ,0103 physical sciences ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,010302 applied physics ,business.industry ,Doping ,[SPI.NRJ]Engineering Sciences [physics]/Electric power ,Photoelectric effect ,021001 nanoscience & nanotechnology ,chemistry ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,Quantum efficiency ,0210 nano-technology ,business ,Indium ,Molecular beam epitaxy - Abstract
International audience; Dilute nitrides lattice-matched to GaP were studied to explore the possibilities to improve their properties by additional indium or arsenic content in the GaPN alloy for further utilization in solar cells. Admittance spectroscopy shows that intrinsic layers of GaPNAs and InP/GaPN grown by molecular-beam epitaxy have unintentional background silicon donor doping. Deep-level transient spectroscopy allowed us to reveal several defect levels. In GaPNAs, two defect levels were detected at Ec − 0.58 eV and Ev + 0.44 eV, with respective concentrations of 4 × 1015 cm−3 and 2 × 1015 cm−3. After thermal annealing, these could be reduced by a factor of two and by more than one order of magnitude, respectively, leading to an increase of external quantum efficiency and open-circuit voltage of solar cells. The InP/GaPN layer exhibits a defect level at Ec − 0.44 eV (with a concentration of 2 × 1014 cm−3), which is of similar nature as the one at Ec − 0.58 eV in GaPNAs. Furthermore, unlike in GaPNAs, defect levels close to midgap were also detected in the InP/GaPN layer. These non-radiative recombination centers lead to poorer photoelectric properties of solar cells based on InP/GaPN as compared to those based on GaPNAs. Therefore, the introduction of arsenic in the compound and post-growth thermal annealing allowed us to reduce the defect concentrations in dilute nitrides and improve photoelectrical properties for photovoltaic applications.
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- 2020
16. Formation of Cu2O and ZnO Crystal Layers by Magnetron Assisted Sputtering and Their Optical Characterization
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N. G. Filosofov, V. F. Agekyan, E. V. Borisov, A. Yu. Serov, D. A. Kudryashov, A Monastyrenko, and Alexander S. Gudovskikh
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010302 applied physics ,Materials science ,Silicon ,Scanning electron microscope ,Analytical chemistry ,Oxide ,chemistry.chemical_element ,02 engineering and technology ,Substrate (electronics) ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Copper ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,symbols.namesake ,chemistry.chemical_compound ,chemistry ,Sputtering ,0103 physical sciences ,symbols ,Crystallite ,0210 nano-technology ,Raman spectroscopy - Abstract
Copper (I) oxide and zinc oxide films are formed on silicon and glassy quartz substrates by magnetron assisted sputtering. The thickness of the films is tens and hundreds of nanometers. The films are grown at different substrate temperatures and different oxygen pressures in the working chamber. The film samples are studied by the X-ray diffraction technique, scanning electron microscopy, and optical methods. It is established that an increase in the substrate temperature yields a change in the surface morphology of copper (I) oxide films towards the formation of well-pronounced crystallites. The reflectance and Raman spectra suggest that the quality of such films is close to that of bulk Cu2O crystals produced by the oxidation of copper. As concerns ZnO films, an increase in the substrate temperature and an increase in the partial oxygen pressure make it possible to produce films, for which a sharp exciton structure is observed in the reflectance spectra and the emission of excitons bound at donors is observed in the luminescence spectra.
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- 2018
17. Space charge capacitance study of GaP/Si multilayer structures grown by plasma deposition
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A S Gudovskikh, A I Baranov, A V Uvarov, D A Kudryashov, and J-P Kleider
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Acoustics and Ultrasonics ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials - Abstract
Microcrystalline gallium phosphide (GaP)/Si multilayer structures grown on GaP substrates using combination of plasma enhanced atomic layer deposition (PE-ALD) for GaP and plasma-enhanced chemical vapor deposition for Si layers deposition are studied by three main space charge capacitance techniques: capacitance versus voltage (C-V) profiling, admittance spectroscopy (AS) and deep level transient spectroscopy (DLTS), which have been used on Schottky barriers formed on the GaP/Si multilayer structures. C-V profiling qualitatively demonstrates an electron accumulation in the Si/GaP wells. However, quantitative determination of the concentration and spatial position of its maximum is limited by the strong frequency dependence of the capacitance caused by electron capture/emission processes in/from the Si/GaP wells. These processes lead to signatures in AS and DLTS with activation energies equal to 0.39 ± 0.05 and 0.28 ± 0.05 eV, respectively, that are linked to the energy barrier at the GaP/Si interface. It is shown that the value obtained by AS (0.39 ± 0.05 eV) is related to the response from Si/GaP wells located in the quasi-neutral region of the Schottky barrier, and it corresponds to the conduction band offset at the GaP/Si interface, while DLTS rather probes wells located in the space charge region closer to the Schottky interface where the internal electric field yields to a lowering of the effective barrier in the Si/GaP wells. Two additional signatures were detected by DLTS, which are identified as defect levels in GaP. The first one is associated to the SiGa + VP complex, while the second was already detected in single microcrystalline GaP layers grown by PE-ALD.
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- 2021
18. Study of GaP/Si electron-selective contact deposited by plasma
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A A Maksimova, A I Baranov, A V Uvarov, A S Gudovskikh, D A Kudryashov, I A Morozov, and M V Bogdanova
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History ,Computer Science Applications ,Education - Abstract
The article is based on an important characterization task to accurately evaluate the properties of the layers, their interfaces with c-Si, and to select the best candidates to integrate them into a c-Si-based solar cell. The work has shown that GaP could be doped with n-type doping, thus providing a selective contact for the electrons, and has a significant valence band offset with c-Si, making it an excellent candidate as a selective contact, without requiring an additional ITO layer.
- Published
- 2021
19. Conformality of a-Si:H deposited by low temperature PECVD for solar cells application
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A V Uvarov, A I Baranov, I A Morozov, D A Kudryashov, A A Maksimova, E A Vyacheslavova, and A S Gudovskikh
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History ,Computer Science Applications ,Education - Abstract
This work is devoted to the study of the deposition of a-Si:H by the PECVD method in continuous and pulsed regime on test structures in the form of trenches with a high aspect ratio. The thicknesses of the layers obtained in these modes were investigated by the method of scanning electron microscopy. It was shown that the layers obtained in the pulsed mode, as compared with the continuous one, have better conformity.
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- 2021
20. Optimization of (p)a-Si:H/p-Si ohmic contact for solar cells
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D A Kudryashov, A I Baranov, A V Uvarov, I A Morozov, A O Monastyrenko, and A S Gudovskikh
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History ,Computer Science Applications ,Education - Abstract
In this work last results on optimization of (p)a-Si:H/p-Si ohmic contact made by PECVD method are presented. A strong effect of growth temperature and trimethylboron flow on charge carriers transport was demonstrated. An optimized (p)a-Si:H layer also was successfully applied as an emitter layer to a heterojunction solar cell fabrication where a measured open circuit voltage of 0.65 V was obtained.
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- 2021
21. InGaN/GaN QDs Nanorods: Processing and Properties
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K. P. Kotlyar, V. V. Lysak, I. P. Soshnikov, T. N. Berezovskaya, D. A. Kudryashov, Ivan A. Morozov, and N. V. Kryzhanovskaya
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Nanostructure ,Materials science ,Passivation ,Physics::Instrumentation and Detectors ,Physics::Optics ,02 engineering and technology ,01 natural sciences ,law.invention ,Condensed Matter::Materials Science ,Etching (microfabrication) ,law ,0103 physical sciences ,010302 applied physics ,business.industry ,Heterojunction ,Semiconductor device ,Condensed Matter::Mesoscopic Systems and Quantum Hall Effect ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,Computer Science::Other ,Electronic, Optical and Magnetic Materials ,Quantum dot ,Optoelectronics ,Nanorod ,0210 nano-technology ,business ,Light-emitting diode - Abstract
InGaN/GaN nanorod structure is presented for the fabrication of light-emitting diodes by means of plasma-chemical etching. Processes of the etching of nanorods and the defect passivation in a planar InGaN/GaN quantum dot heterostructure are studied. The obtained results allow creating the light-emitting diode nanostructure with a greater efficiency compared to the classical planar technology.
- Published
- 2018
22. Investigation of defects in structures based on BP/Si heterojunction
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A A Maksimova, A I Baranov, A V Uvarov, D A Kudryashov, and A S Gudovskikh
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History ,Computer Science Applications ,Education - Abstract
In this work the properties of the BP/Si heterojunction interface were investigated by capacitance methods, the deep levels transient spectroscopy method and admittance spectroscopy. Admittance spectroscopy did not detect any defects, but the deep level transient spectroscopy showed response with activation energy of 0.33 eV and capture cross-section σn=(1-10)·10-19 cm2 and defect concentration (NT) is in the order of 1013 cm-3. This defect level is a trap for electron with position of 0.33 eV below the conduction band in region near the BP/Si interface.
- Published
- 2021
23. Plasma enhanced chemical vapor deposition of gallium phosphide at low temperature
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A V Uvarov, I A Morozov, A I Baranov, A A Maximova, E A Vyacheslavova, D A Kudryashov, and A S Gudovskikh
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History ,Computer Science Applications ,Education - Abstract
This article is devoted to the formation and study of the properties of amorphous gallium phosphide layers obtained by plasma-chemical deposition at a temperature of 250 °C. The optical and structural properties of the obtained layers on fused silica and silicon substrates were investigated. The possibility of the formation of a homogeneous amorphous gallium phosphide with a smooth surface at a low temperature and low power of RF plasma was shown.
- Published
- 2021
24. Impact of Interface Recombination on Quantum Efficiency of a‐Si:H/c‐Si Solar Cells Based on Si Wires
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A. V. Uvarov, D. A. Kudryashov, A. A. Maksimova, Artem Baranov, Demid A. Kirilenko, Ekaterina Vyacheslavova, Alexander S. Gudovskikh, Ivan A. Morozov, and Alexey M. Mozharov
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Materials science ,business.industry ,Interface (Java) ,Materials Chemistry ,Optoelectronics ,Quantum efficiency ,Surfaces and Interfaces ,Electrical and Electronic Engineering ,Condensed Matter Physics ,business ,Recombination ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials - Published
- 2021
25. Multijunction a-Si:H/c-Si solar cells with vertically-aligned architecture based on silicon nanowires
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D. A. Kudryashov, E.V. Nikitina, Vladimir Sivakov, Alexander S. Gudovskikh, and Ivan A. Morozov
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010302 applied physics ,Plasma etching ,Materials science ,Silicon ,business.industry ,Nanocrystalline silicon ,chemistry.chemical_element ,Nanotechnology ,Heterojunction ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Monocrystalline silicon ,chemistry ,Etching (microfabrication) ,0103 physical sciences ,Optoelectronics ,Quantum efficiency ,Crystalline silicon ,0210 nano-technology ,business - Abstract
The new design for full silicon multi-junction solar cells, which consists of combination of silicon nanowires (SiNWs) and conventional silicon-based hetero-junctions, is proposed in the paper. A top junction is based on SiNWs covered by a-Si:H p-i-n structures while bottom junction is based on amorphous/crystalline silicon (a-Si:H/c-Si) hetero-junctions. Vertically-aligned design of top p-i-n junction is a way to enhance absorption in a-Si:H without rising its thickness and therefore it allows one to increase short circuit current. This is a key issue for current match with bottom a-Si:H/c-Si heterojunction. Silicon wires of submicron diameters and micron length are formed by etching. A cost effective technology to form the periodic SiNWs on the silicon front surface was developed based on dry plasma etching using submicron size polystyrene spheres as a mask. A significant photocurrent increase was experimentally demonstrated for a-Si:H p-i-n top sub-cells deposited on SiNWs. While bottom a–Si:H/c–Si heterojunction sub-cells formed on the surface with SiNWs demonstrate strong light trapping effect, which leads to enhanced external quantum efficiency in the long wavelength region compared to planar reference cell.
- Published
- 2017
26. Nanoscale Cu2O films: Radio-frequency magnetron sputtering and structural and optical studies
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E. V. Borisov, A. Yu. Serov, A. V. Babichev, D. A. Kudryashov, A. V. Filimonov, V. F. Agekyan, N. G. Filosofov, Alexander S. Gudovskikh, and Alexey M. Mozharov
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Diffraction ,Copper oxide ,Materials science ,Silicon ,Oxide ,chemistry.chemical_element ,02 engineering and technology ,Substrate (electronics) ,01 natural sciences ,Condensed Matter::Materials Science ,chemistry.chemical_compound ,symbols.namesake ,Sputtering ,Condensed Matter::Superconductivity ,0103 physical sciences ,010302 applied physics ,business.industry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Crystallography ,chemistry ,Cavity magnetron ,symbols ,Optoelectronics ,0210 nano-technology ,business ,Raman spectroscopy - Abstract
Nanoscale copper (I) oxide layers are formed by magnetron-assisted sputtering onto glassy and silicon substrates in an oxygen-free environment at room temperature, and the structural and optical properties of the layers are studied. It is shown that copper oxide formed on a silicon substrate exhibits a lower degree of disorder than that formed on a glassy substrate, which is supported by the observation of a higher intensity and a smaller half-width of reflections in the diffraction pattern. The highest intensity of reflections in the diffraction pattern is observed for Cu2O films grown on silicon at a magnetron power of 150 W. The absorption and transmittance spectra of these Cu2O films are in agreement with the well-known spectra of bulk crystals. In the Raman spectra of the films, phonons inherent in the crystal lattice of cubic Cu2O crystals are identified.
- Published
- 2017
27. Fabrication of the structures with autocatalytic CdTe nanowires using magnetron sputtering deposition
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K. P. Kotlyar, Volodymyr V. Lysak, I. P. Soshnikov, P. Yu. Belyavskii, A. V. Nashchekin, G. E. Cirlin, Alexander A. Semenov, Igor Shtrom, S. I. Pavlov, and D. A. Kudryashov
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Fabrication ,Materials science ,Photoluminescence ,Solid-state physics ,Nanowire ,Nanotechnology ,02 engineering and technology ,Sputter deposition ,010402 general chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Cadmium telluride photovoltaics ,0104 chemical sciences ,Electronic, Optical and Magnetic Materials ,Cavity magnetron ,0210 nano-technology ,Deposition (law) - Abstract
We report the possibility of autocatalytic synthesis of highly crystalline perfect CdTe nanowires by magnetron presputtering deposition through the windows in ultrathin layers of SiO2. The photoluminescence spectra of obtained CdTe nanowires exhibit an emission band in the 1.4–1.7 eV region, indicating crystalline perfection of the nanowires.
- Published
- 2016
28. Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
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D. A. Kudryashov, K. S. Zelentsov, A. V. Uvarov, Aurore Brézard-Oudot, Jean-Paul Kleider, Arouna Darga, Ivan A. Morozov, Artem Baranov, Sylvain Le Gall, Alexander S. Gudovskikh, Alexandre Jaffré, Saint Petersburg University (SPBU), Laboratoire Génie électrique et électronique de Paris (GeePs), Université Paris-Sud - Paris 11 (UP11)-CentraleSupélec-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), PRC PacSific, and Russian Scientific Foundation 17-19-01482
- Subjects
Materials science ,02 engineering and technology ,Epitaxy ,7. Clean energy ,01 natural sciences ,law.invention ,Atomic layer deposition ,law ,0103 physical sciences ,Solar cell ,Materials Chemistry ,Electrical and Electronic Engineering ,010302 applied physics ,Open-circuit voltage ,business.industry ,Heterojunction ,Surfaces and Interfaces ,Plasma ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Amorphous solid ,Microcrystalline ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,Optoelectronics ,0210 nano-technology ,business - Abstract
International audience; The properties of n‐GaP/p‐Si interface as well as their influence on solar cell performance are studied for GaP layers grown by low‐temperature (380 °C) plasma‐enhanced atomic layer deposition (PE‐ALD). The influence of different plasma treatments and RF power values are explored. The increase of RF power leads to a growth transition from amorphous (a‐GaP) to microcrystalline GaP (μc‐GaP) with either amorphous‐GaP/Si or epitaxial‐GaP/Si interface, respectively. However, when continuous hydrogen plasma is used the amorphous‐GaP/Si interface exhibits better photovoltaic performance compared to the epitaxial one. Values of open circuit voltage, Voc = 0.45–0.55 V and internal quantum efficiencies, IQE > 0.9 are obtained for amorphous‐GaP/Si interfaces compared to Voc = 0.25–0.35 V and IQE
- Published
- 2019
29. Influence of cryogenic dry etching on minority carriers lifetime in vertically aligned silicon nanostructures
- Author
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K. P. Kotlyar, Sergey Pavlov, Alexei Nashchekin, A. V. Uvarov, Alexander S. Gudovskikh, Alexey Lihachev, D. A. Kudryashov, and Ivan A. Morozov
- Subjects
Plasma etching ,Materials science ,Silicon ,Passivation ,business.industry ,technology, industry, and agriculture ,chemistry.chemical_element ,Substrate (electronics) ,Carrier lifetime ,chemistry ,Etching (microfabrication) ,Optoelectronics ,Dry etching ,Inductively coupled plasma ,business - Abstract
The paper presents the results of the study of the effect of plasma etching of n-type silicon spin-coated with polystyrene balls on bulk silicon properties using careful surface chemical treatments and passivation. Plasma etching was carried out under different substrate temperatures (up to -140 °C). Photoluminescence decay time imaging was used to evaluate effective carrier lifetime in silicon samples after dry etching and a-Si:H passivation. According to the results obtained, plasma etching of n-Si(100) spin-coated with polystyrene balls within the temperature up to -140 °C in gas mixture of SF6/O2, RF and ICP plasma power of 30 W and 1000 W, respectively leads to minority carrier lifetime decrease. The difference in the rate of carrier lifetime degradation with etching time was found.
- Published
- 2019
30. InGaN/GaN QDs nanorods for light emitters: Processing and properties
- Author
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I. P. Soshnikov, G. E. Cirlin, A. I. Lihachev, T. N. Berezovskaya, Ivan A. Morozov, K. Yu. Shubina, Anna S. Dragunova, D. A. Kudryashov, A. V. Nashchekin, N. V. Kryzhanovskaya, and Konstantin P. Kotlyar
- Subjects
Nanostructure ,Planar ,Materials science ,Fabrication ,Passivation ,Etching (microfabrication) ,business.industry ,Optoelectronics ,Nanorod ,business ,Diode - Abstract
InGaN/GaN QDs nanorod structure for the fabrication of light-emitting diodes by means of plasma-chemical etching is presented. Processes of the etching of nanorods and the defect passivation are studied. The obtained results can be used to create the light-emitting diode nanostructure with a greater efficiency compared to the classical planar technology.
- Published
- 2019
31. Femtosecond Laser Fabrication of Hybrid Metal-Dielectric Structures with Nonlinear Photoluminescence
- Author
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Eduard Ageev, Sergei Koromyslov, Ekaterina Ponkratova, Vadim P. Veiko, Filipp E. Komissarenko, D. A. Kudryashov, Dmitry Zuev, Aleksandr A. Kuchmizhak, and Ivan Mukhin
- Subjects
lcsh:Applied optics. Photonics ,Photoluminescence ,Fabrication ,Materials science ,Nanostructure ,Nanophotonics ,broadband photoluminescence ,02 engineering and technology ,010402 general chemistry ,01 natural sciences ,symbols.namesake ,Radiology, Nuclear Medicine and imaging ,Instrumentation ,business.industry ,lcsh:TA1501-1820 ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,0104 chemical sciences ,laser-induced hybrid structures ,metal-dielectric structures ,second harmonic generation (SHG) ,Hybrid system ,Femtosecond ,dewetting ,symbols ,Optoelectronics ,Photonics ,0210 nano-technology ,business ,Raman scattering - Abstract
Fabrication of hybrid micro- and nanostructures with a strong nonlinear response is challenging and represents a great interest due to a wide range of photonic applications. Usually, such structures are produced by quite complicated and time-consuming techniques. This work demonstrates laser-induced hybrid metal-dielectric structures with strong nonlinear properties obtained by a single-step fabrication process. We determine the influence of several incident femtosecond pulses on the Au/Si bi-layer film on produced structure morphology. The created hybrid systems represent isolated nanoparticles with a height of 250–500 nm exceeding the total thickness of the Au-Si bi-layer. It is shown that fabricated hybrid nanostructures demonstrate enhancement of the SHG signal (up to two orders of magnitude) compared to the initial planar sample and a broadband photoluminescence signal (more than 200 nm in width) in the visible spectral region. We establish the correlation between nonlinear signal and phase composition provided by Raman scattering measurements. Such laser-induced structures have significant potential in optical sensing applications and can be used as components for different nanophotonic devices.
- Published
- 2021
32. Plasma-enhanced atomic layer deposition of Zn-doped GaP
- Author
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A. V. Uvarov, Artem Baranov, Ivan A. Morozov, Alexander S. Gudovskikh, and D. A. Kudryashov
- Subjects
History ,Atomic layer deposition ,Materials science ,Analytical chemistry ,Plasma ,Zn doped ,Computer Science Applications ,Education - Abstract
The formation of p-type GaP by plasma-enhanced atomic layer deposition at a temperature of 380 °C has been studied. The incorporation of Zn impurity was detected by the method of glow discharge optical emission spectroscopy (GDOES). Strong band bending was confirmed by electrical measurements performed for the p-n homojunctions formed by deposition of p-GaP on the surface of n-type GaP substrates, which indicates the acceptor behavior of the impurity. It has been shown that p-type GaP deposited by PE-ALD can be used to form photovoltaic converters.
- Published
- 2021
33. InP nanowires on Si(111) for piezotronic applications
- Author
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I. P. Soshnikov, G. E. Cirlin, K. P. Kotlyar, A. V. Vershinin, D. A. Kudryashov, V. V. Lysak, and Yuri Samsonenko
- Subjects
History ,Materials science ,business.industry ,Nanowire ,Optoelectronics ,business ,Computer Science Applications ,Education - Abstract
III-V nanowires (NWs) are a promising technology for piezotronic and nanooptoelctronic applications. In this work, we investigate the processes of fabricating a structure with InP NW arrays on a silicon substrate for piezotronic applications. The coating of the NW array with a polymer and the fabrication of a transparent electrical contact to NWs is studied. The piezoelectric effect for the structures with a nonzero piezoelectric modulus d 33 is demonstrated in an oil environment at voltage amplitudes of about 100 mV. The experimental electromechanical coupling is about 0.049, which is close to the theoretical estimate of 0.053.
- Published
- 2021
34. Plasma-enhanced atomic layer deposition of GaP/GaN digital alloys
- Author
-
A. V. Uvarov, Alexander S. Gudovskikh, D. A. Kudryashov, Artem Baranov, and Ivan A. Morozov
- Subjects
History ,Atomic layer deposition ,Materials science ,business.industry ,Optoelectronics ,Plasma ,business ,Computer Science Applications ,Education - Abstract
This article is concerned with plasma-enhanced atomic layer deposition of GaPN in the form of a GaP/GaN digital alloy at 380°C on a silicon substrate. It was found that the GaP/GaN digital alloy has a uniform structure without significant mechanical stresses and defects at the interface with the substrate. EDX and Raman scattering study confirmed deposition of a monolithic GaPN crystalline material with a total nitrogen content of 7.8%.
- Published
- 2021
35. Tools for promoting a scientific article: Computer Optics journal case study
- Author
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D. V. Kudryashov
- Subjects
History ,Engineering ,business.industry ,Engineering ethics ,Scientific article ,business ,Computer Science Applications ,Education - Abstract
The author analyzes the main tools for promoting scientific articles that are used most often by the editorial board of the Computer Optics journal to promote the publication in international scientometric databases and popularize the ideas of science. It is noted that the use of these tools allowed the publication to increase significantly the “portfolio” of articles, the number of articles published per year, including the articles in English, increase significantly the citation of journal articles in other scientific publications, as well as expand the geographical spread of authors.
- Published
- 2021
36. Capacitance characterization of silicon nanowires formed by cryogenic dry etching
- Author
-
Artem Baranov, A. V. Uvarov, L N Dvoretckaia, E. A. Vyacheslavova, Alexander S. Gudovskikh, Ivan A. Morozov, K. Yu Shugurov, and D. A. Kudryashov
- Subjects
History ,Materials science ,business.industry ,Optoelectronics ,Dry etching ,business ,Silicon nanowires ,Capacitance ,Computer Science Applications ,Education ,Characterization (materials science) - Abstract
Arrays of silicon nanowires were fabricated by dry etching in the ICP mode in a mixture of SF6/O2 gases at a temperature of-140 °C. Defects located near the wafer surface with E a =0.30 eV, σ=(1–10)×10−14 cm2 and E a =0.68–0.74 eV, σ=1×10−15 cm2 were detected by admittance spectroscopy and deep-level transient spectroscopy. An increase in the dry etching time from 3.5 min (for the 1st sample) to 4.5 min (for the 2nd sample) leads to an rise of their concentration, but additional stage of wet etching in 4% KOH during 30 s leads to a vanish of the response from the first sample (N T ˂1011 cm−3), while for the second sample the defect concentration becomes in two times lower.
- Published
- 2020
37. Application of selective contacts for study of silicon surface degradation
- Author
-
Artem Baranov, Ivan A. Morozov, A. V. Uvarov, D. A. Kudryashov, Alexander S. Gudovskikh, and A. A. Maksimova
- Subjects
History ,Materials science ,Silicon ,chemistry ,Chemical engineering ,Degradation (geology) ,chemistry.chemical_element ,Computer Science Applications ,Education - Abstract
In this work an application of selective contacts p-Si/MoOx for evaluation of silicon surface degradation is shown. Using a method of I-V measurements the effect of silicon surface degradation during SiO2 magnetron deposition was demonstrated.
- Published
- 2020
38. Defect properties of multilayer GaP/Si nanoheterostructures grown by plasma deposition
- Author
-
Alexander S. Gudovskikh, D. A. Kudryashov, Ivan A. Morozov, A. V. Uvarov, and Artem Baranov
- Subjects
History ,Materials science ,business.industry ,Optoelectronics ,Plasma deposition ,business ,Computer Science Applications ,Education - Abstract
Periodic nanoheterostructures GaP/Si grown by PE-ALD with argon plasma treatment on GaP wafers were studied by capacitance methods. The response from silicon quantum well was clearly observed by capacitance-voltage characteristics as peak on profile of concentration of free charge carriers in sample GaP (50 cycles)/Si (22 s) with 7 wells. It is explained by higher doping of GaP layers due to higher total time of silane flow in growth process unlike samples with smaller numbers of silicon wells or lower time of silicon deposition. Further, response from defect level was observed with capture cross-section (1–10)×10−15 cm−2, and its energetic level decreases from 0.51 eV to 0.39 eV under conduction band with increasing of total time of silane flow.
- Published
- 2020
39. Electrical properties of InGaN nanostructures with branched morphology synthesized via MBE on p-type Si(111)
- Author
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B R Borodin, Vladislav O. Gridchin, G E Cirlin, Prokhor A. Alekseev, Rodion R. Reznik, K. P. Kotlyar, and D. A. Kudryashov
- Subjects
History ,Materials science ,Morphology (linguistics) ,Nanostructure ,Tandem ,business.industry ,Water splitting ,Optoelectronics ,Conductivity ,business ,Quantum tunnelling ,Computer Science Applications ,Education - Abstract
The work is devoted to the study of electrical properties of InGaN nanostructures with branched morphology (NSs) on p-type Si substrates. It was found that the IV curves between InGaN NSs and p-Si are close to linear, which could indicate a tunneling conductivity. Such unique structures as InGaN NSs on p-Si can be used as building blocks for water splitting devices and tandem solar cells.
- Published
- 2020
40. Formation of SiO2 hard mask using dry etching and nanosphere lithography
- Author
-
A.S. Gudovskikh, E. A. Vyacheslavova, Ivan A. Morozov, and D A Kudryashov
- Subjects
History ,Materials science ,business.industry ,Optoelectronics ,Nanosphere lithography ,Dry etching ,business ,Hard mask ,Computer Science Applications ,Education - Abstract
The features of the formation of a SiO2 hard mask using dry etching and nanosphere lithography are considered in the paper. A series of experiments was carried out using a variation of plasma etching parameters such as ICP and RF power, pressure as well as a substrate temperature. As a result, optimal parameters were found to obtain both good selectivity and high etching rate.
- Published
- 2020
41. Optical properties of dry etched vertically aligned silicon structures with different geometry
- Author
-
A. V. Uvarov, E. A. Vyacheslavova, Artem Baranov, D. A. Kudryashov, Ivan A. Morozov, and Alexander S. Gudovskikh
- Subjects
History ,Materials science ,Silicon ,chemistry ,business.industry ,Optoelectronics ,chemistry.chemical_element ,business ,Computer Science Applications ,Education - Abstract
In this paper, we study the effect of the height and diameter of vertically aligned silicon structures on their optical properties. Structures with different geometry were formed using nanosphere lithography and dry etching. Nanosphere lithography was realized with 0.9 and 2 μm latex spheres. The etching process was carried out through a formed mask (template) composed of 0.9 and 2 μm latex spheres, respectively. The diameter of the spheres and the etching time determined the size of the formed structures and their optical properties. A significant reduction of the total reflection with height as well as blue shift of the minimum with diameter decrease were observed.
- Published
- 2020
42. Investigation of the temperature dependences of the I-V characteristics of p-Si/MoOx selective contacts
- Author
-
Alexander S. Gudovskikh, A. A. Maksimova, Artem Baranov, and D. A. Kudryashov
- Subjects
History ,Materials science ,Analytical chemistry ,Computer Science Applications ,Education - Abstract
In this article the temperature dependences of selective contacts based on MoOx were studied. The p-Si/MoOx/Al structure was fabricated. Current-voltage and capacitance-voltage characteristics in the temperature range from 80 to 300K were measured. Band diagram was also calculated to reveal potential barriers location and its influence on charge carrier transport.
- Published
- 2020
43. Influence of wet etching in KOH on defects in silicon nanowires formed by cryogenic dry etching
- Author
-
K. Yu Shugurov, A. V. Uvarov, Artem Baranov, D. A. Kudryashov, Alexander S. Gudovskikh, and Ivan A. Morozov
- Subjects
History ,Materials science ,Chemical engineering ,Dry etching ,Silicon nanowires ,Computer Science Applications ,Education - Abstract
The work is devoted to exploration of arrays of vertical aligned silicon nanowires (SiNWs) obtained by cryogenic dry etching in ICP mode with height of 4.5-5.5 μm and aspect ratio of 7. It was shown that geometry of nanowires has crucial influence on rate of wet etching in KOH since it is higher for 3D objects than for planar wafer, and the diameter should be the same along the nanowire for controlled wet etching. Wet etching in 4% KOH solution during 30 s allowed to save array of uniformity vertical aligned SiNWs with height of 4 μm and diameter of 500 nm. Such treatment reduced concentration of defects detected by deep-level transient spectroscopy, particularly, it drops as minimum in two times for deep level with £0=0.68-0.74 eV placed near to surface of wafer.
- Published
- 2020
44. Numerical simulation of the properties of solar cells based on GaPNAs/Si heterostructures and GaN nanowires
- Author
-
Alexander S. Gudovskikh, Ivan Mukhin, Alexey D. Bolshakov, Alexey M. Mozharov, G. E. Cirlin, and D. A. Kudryashov
- Subjects
010302 applied physics ,Materials science ,Computer simulation ,business.industry ,Alloy ,Nanowire ,Heterojunction ,02 engineering and technology ,engineering.material ,Quantum dot solar cell ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Planar ,Anti-reflective coating ,law ,0103 physical sciences ,engineering ,Optoelectronics ,Charge carrier ,0210 nano-technology ,business - Abstract
Using methods of numerical simulation, the modes of operation are considered and structures are determined for solar cells of combined dimension based on a planar GaPNAs/Si heterostructure and an array of GaN nanowires. It is shown that the array of GaN nanowires features antireflective properties at a level no lower than 2.5% under illumination with the AM1.5D solar spectrum. The efficiency of solar cells is affected to the greatest extent by the lifetimes of minority charge carriers and the thickness of photoactive layers. It is demonstrated that the efficiency of two-junction solar cells composed of GaPNAs alloy layers and an array of GaN nanowires on a Si substrate can be as high as 32% for AM1.5D.
- Published
- 2016
45. Simulation of characteristics of double-junction solar cells based on ZnSiP2 heterostructures on silicon substrate
- Author
-
Zh. I. Alferov, D. A. Kudryashov, Ivan Mukhin, Alexey D. Bolshakov, Alexander S. Gudovskikh, and Alexey M. Mozharov
- Subjects
010302 applied physics ,Theory of solar cells ,Materials science ,Physics and Astronomy (miscellaneous) ,business.industry ,02 engineering and technology ,Carrier lifetime ,Hybrid solar cell ,Quantum dot solar cell ,021001 nanoscience & nanotechnology ,01 natural sciences ,Polymer solar cell ,Monocrystalline silicon ,Solar cell efficiency ,0103 physical sciences ,Optoelectronics ,Plasmonic solar cell ,0210 nano-technology ,business - Abstract
Design and operation modes of double-junction monolithic lattice-matched solar cells based on the ZnSiP2/Si system of materials have been calculated. The effect of the photoactive region thickness and minority carrier lifetime in ZnSiP2 layers on the efficiency of conversion of the incident solar light energy into electrical power was determined. It is shown that solar cells based on ZnSiP2/Si heterostructures can provide efficiencies of 28.8% at AM1.5D, 100 mW/cm2, and 33.3% at AM1.5D, 200 W/cm2.
- Published
- 2015
46. Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
- Author
-
Alexander S. Gudovskikh, A. V. Uvarov, Artem Baranov, D. A. Kudryashov, Jean-Paul Kleider, Ivan A. Morozov, V. N. Nevedomskiy, National Research Academic University, Russian Academy of Science, Khlopina 8- 3,194021, St.-Petersburg, Russia, A.F. Ioffe Physical-Technical Institute, Russian Academy of Sciences [Moscow] (RAS), Laboratoire Génie électrique et électronique de Paris (GeePs), and CentraleSupélec-Sorbonne Université (SU)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Deep-level transient spectroscopy ,Materials science ,Acoustics and Ultrasonics ,Analytical chemistry ,02 engineering and technology ,Epitaxy ,01 natural sciences ,[SPI.MAT]Engineering Sciences [physics]/Materials ,chemistry.chemical_compound ,Atomic layer deposition ,0103 physical sciences ,Gallium phosphide ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,ComputingMilieux_MISCELLANEOUS ,010302 applied physics ,Plasma activation ,[SPI.NRJ]Engineering Sciences [physics]/Electric power ,Plasma ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry ,Transmission electron microscopy ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,0210 nano-technology ,Layer (electronics) - Abstract
An approach for epitaxial growth of GaP layer on Si substrate at low temperature (380°C) by plasma-enhanced atomic layer deposition (PEALD) is explored. A significant improvement of the crystalline properties of the GaP layers was obtained using additional in-situ Ar plasma treatment. The epitaxial growth for the first 20-30 nm of GaP on the Si substrate could be achieved according to transmission electron microscopy. Moreover, use of in-situ Ar plasma treatment during PEALD process allows one to increase the growth rate per cycle from 0.9±0.1 A/cycle to 1.9±0.1 A/cycle and reduce RMS roughness from 3.76 nm to 1.88 nm. The effect of Ar plasma treatment on the electronic properties of the GaP/Si interface is studied by deep level transient spectroscopy (DLTS). A defect level at (0.33±0.03) eV below the conduction band is observed in the underlayer of Si for the GaP/Si structure grown under Ar plasma treatment. However, the defect response observed by DLTS vanishes after rapid thermal annealing at 500 oC in nitrogen ambient.
- Published
- 2020
47. GaN nanowires/ p-Si interface passivation by hydrogen plasma treatment
- Author
-
Ivan Mukhin, A. V. Uvarov, Alexey M. Mozharov, K. Yu Shugurov, Vladimir V. Fedorov, Alexey D. Bolshakov, G E Cirlin, V. Yu. Mikhailovskii, and D. A. Kudryashov
- Subjects
History ,Materials science ,Hydrogen ,Passivation ,business.industry ,Nanowire ,chemistry.chemical_element ,Electron ,Plasma ,Computer Science Applications ,Education ,chemistry ,Optoelectronics ,business ,Ohmic contact ,Molecular beam epitaxy ,Diode - Abstract
The effect of hydrogen plasma treatment on the electrical and optical properties of GaN NWs/Si based vertical hetero structures synthesized by the method of plasma molecular beam epitaxy is studied. The effect of treatment has been carefully studied by variation of the passivation duration. Measurements of the electron beam-induced current (EBIC) technique showed the absence of potential barriers between the active parts of the diode and the contacts, which indicates the ohmic behavior of the latter. The current - voltage characteristics show that hydrogen can efficiently passivate recombination centers at the GaN NWs/Si heterointerface. It is established that the optimal passivation duration, providing improved electrical properties, is 10 minutes in the adopted passivation modes. It is shown that a longer treatment causes a deterioration in electrical properties.
- Published
- 2020
48. Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
- Author
-
Artem Baranov, D. A. Kudryashov, A. V. Uvarov, Alexander S. Gudovskikh, and Ivan A. Morozov
- Subjects
History ,Materials science ,business.industry ,Optoelectronics ,Heterojunction ,Plasma ,business ,Isotype ,Computer Science Applications ,Education - Abstract
The work is devoted to studying the influence of an additional step of argon plasma treatment on the quality of the GaP/n-Si isotype heterojunction grown by plasma-enhanced atomic-layer deposition (PE-ALD). Deep-level transient spectroscopy measurements demonstrated that argon plasma leads to the formation of defects with a high concentration in silicon wafers, unlike the PE-ALD mode without a step of hydrogen or argon plasma treatment. In addition, GaP layers obtained by PE-ALD have defects with an activation energy of 0.40 eV and 0.62 eV for processes with and without argon plasma treatment, respectively.
- Published
- 2020
49. Study of GaP Nucleation Layers Grown on Si by Plasma‐Enhanced Atomic Layer Deposition
- Author
-
G Yakovlev, Jean-Paul Kleider, D. A. Kudryashov, Artem Baranov, A. V. Uvarov, V. I. Zubkov, Ivan A. Morozov, Sergey A. Mintairov, Nikolay A. Kalyuzhnyy, Anton Bukatin, and Alexander S. Gudovskikh
- Subjects
Materials science ,Nucleation ,Surfaces and Interfaces ,Plasma ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,Atomic layer deposition ,Chemical engineering ,law ,Solar cell ,Materials Chemistry ,Electrical and Electronic Engineering - Published
- 2019
50. Photovoltaic properties of InP NWs/p-Si heterostructure
- Author
-
D. A. Kudryashov, G. E. Cirlin, I. P. Soshnikov, K. P. Kotlyar, R. R. Reznik, A. A. Karaborchev, Alexey M. Mozharov, A. V. Vershinin, S. I. Pavlov, I. S. Mukhin, and K. S. Zelentsov
- Subjects
History ,Materials science ,business.industry ,Photovoltaic system ,Optoelectronics ,Heterojunction ,business ,Computer Science Applications ,Education - Abstract
The experimental and modelling results of the investigation of photovoltaic properties of the InP nanowires grown on p-Si substrate are presented. It is shown that InP 2D-layer between nanowires on Si is II-type heterojanction. The resulting structure exhibits an open-circuit voltage (Voc) of 0,37 V, a short-circuit current density (Jsc) of 10.6 mA/cm2, a fill factor (FF) of 0.61 and efficiency of 2.4% at 1 sun. The InP/p-Si structure can be applied as prototype for solar cells or the photosensitive component in an integrated circuit based on silicon technology.
- Published
- 2019
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