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2. ArFi speckle reduction and impact on local CDU

4. Physical dose modeling and throughput optimization in EUV computational lithography

5. A holistic approach to model-based stochastic-aware computational lithography

7. A novel solution on KrF pixel layer with thick photo resist (PR) by single exposure multi-focal imaging (MFI) technique

10. A holistic approach to model-based stochastic-aware computational lithography

11. Full chip computational lithography for KrF multi-focal imaging (MFI) (Conference Presentation)

30. Bio-Inspired Enterprise Security

34. Towards manufacturing of advanced logic devices by double-patterning

36. Engine for characterization of defects, overlay, and critical dimension control for double exposure processes for advanced logic nodes

39. Separable OPC models for computational lithography

41. The use of EUV lithography to produce demonstration devices

46. Engine for characterization of defects, overlay, and critical dimension control for double exposure processes for advanced logic nodes.

49. Separable OPC models for computational lithography.

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