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Engine for characterization of defects, overlay, and critical dimension control for double exposure processes for advanced logic nodes.
- Source :
- Proceedings of SPIE; Nov2009, Issue 1, p727305-727305-13, 13p
- Publication Year :
- 2009
Details
- Language :
- English
- ISSN :
- 0277786X
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 67394936
- Full Text :
- https://doi.org/10.1117/12.828483