30 results on '"Chunqing Huo"'
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2. Cellulose Isolated From Waste Rubber Wood and Its Application in PLA Based Composite Films
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Zhiqiang Ou, Qi Zhou, Xin Rao, Haifeng Yang, Chunqing Huo, and Xueyu Du
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rubber wood cellulose ,cellulose nanocrystals ,acetylation ,polylactic acid ,composite film ,Biotechnology ,TP248.13-248.65 - Abstract
Waste rubber wood (RW) is the castoff of rubber plantation with abundant reservation but without high-value utilization. In this study, cellulose with high purity has been efficiently isolated from waste RW and further processed into cellulose nanocrystals. By means of acetylation, more hydrophobic cellulose-based products, namely acetylated rubber wood cellulose (Ac–RWC) and acetylated rubber wood cellulose nanocrystals (Ac–RW–CNC) had been attempted as reinforcing fillers for fabricating two series of PLA-based composite films via spin coating instead of currently prevailing melt compounding technique. To ensure a uniformed dispersion of fillers in PLA matrix, the addition of reinforcing filler should be equal to or less than 5% based on the film dry weight. Compared with pure PLA film, the Ac–RWC reinforced PLA composite films are more thermally stable, while the Ac–RW–CNC reinforced PLA composite films on the other hand exhibit more enhanced performance in mechanical properties and the degree of crystallinity. The highest tensile strength (55.0 MPa) and Young’s modulus (3.9 GPa) were achieved for 5%Ac–RW–CNC/PLA composite film.
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- 2021
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3. Thermal Conductivity of Graphitic Carbon Nitride Nanotubes: A Molecular Dynamics Study
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Hui Guo, Chunqing Huo, Liang Yang, and Shiwei Lin
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Physics ,QC1-999 - Abstract
Graphitic carbon nitride (g-C3N4) nanotubes are recently gaining increasing interest due to their extraordinary physicochemical properties. In the following, we report on simulations using a method of nonequilibrium molecular dynamics and focus on the thermal conductivity variation of g-C3N4 nanotubes with respect to different temperatures, diameters, and chiral angles. In spite of the variation of diameters and chiral angles, the structure of nanotubes possesses high stability in the temperature range from 200 K to 600 K. Although there is little change of the thermal conductivity per unit arc length for nanotubes with the same diameter at different temperatures, it decreases significantly with increasing diameters at the same temperature. The thermal conductivity at different chiral angles has little to do with how temperature changes. Simulation results show that the vibrational density of states of nanotubes distributed, respectively, at ∼11 THz and ∼32 THz, indicating that heat in nanotubes is mostly carried by phonons with frequencies lower than 10 THz.
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- 2021
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4. High-Performance and Water Resistant PVA-Based Films Modified by Air Plasma Treatment
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Xin Rao, Qi Zhou, Qin Wen, Zhiqiang Ou, Lingying Fu, Yue Gong, Xueyu Du, and Chunqing Huo
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air plasma ,PVA film ,surface modification ,water resistance ,crosslinking ,Chemical technology ,TP1-1185 ,Chemical engineering ,TP155-156 - Abstract
Plasma treatment is considered a straightforward, cost-effective, and environmental-friendly technique for surface modification of film materials. In this study, air plasma treatment was applied for performance improvement of pure PVA, cellulose nanocrystal (CNC)/PVA, and CNC/oxalic acid (OA)/PVA films. Compared with the original performance of pure PVA, the mechanical properties and water resistance of air plasma treated films were greatly improved. Among them, the CNC/OA/PVA film treated by three minutes of air plasma irradiation exhibits the most remarkable performance in mechanical properties (tensile strength: 132.7 MPa; Young’s modulus: 5379.9 MPa) and water resistance (degree of swelling: 47.5%; solubility: 6.0%). By means of various modern characterization methods, the wettability, surface chemical structure, surface roughness, and thermal stability of different films before and after air plasma treatment were further revealed. Based on the results obtained, the air plasma treatment only changed the surface chemical structure, surface roughness, and hydrophobicity, while keeping the inner structure of films intact.
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- 2022
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5. Chemical combination of nano‐silica and alkaline lignin for property enhancement of polylactic acid‐based composite films
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Yue Gong, Lingying Fu, Zhiqiang Ou, Qi Zhou, Xin Rao, Songbin Wang, Chunqing Huo, and Xueyu Du
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Polymers and Plastics ,Materials Chemistry ,General Chemistry ,Surfaces, Coatings and Films - Published
- 2023
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6. A Facile and Environmental‐Friendly Approach to Synthesize S‐Doped Fe/Ni Layered Double Hydroxide Catalyst with High Oxygen Evolution Reaction Efficiency in Water Splitting
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Shijie Xie, Changsheng Liu, Runwei Song, Yingxi Ji, Zhaohui Xiao, Chunqing Huo, and Shiwei Lin
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Electrochemistry ,Catalysis - Published
- 2022
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7. Lignin-carbohydrate complexes from coconut (Cocos nucifera) coir: Fractionation, structural elucidation, and potential applications
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Qi Zhou, Zhiqiang Ou, Xin Rao, Yi Liu, Chen Liang, Liming Zhang, Chunqing Huo, and Xueyu Du
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Environmental Engineering ,Bioengineering ,Waste Management and Disposal - Abstract
Coconut coir, a major type of tropical lignocellulosic waste, has been restricted from higher-value applications due to its chemical complexity and inherent variability. To better disclose the chemical relationships between polysaccharides and lignin in coir and further exploit its high value-added bio-based materials, two lignin-carbohydrate complexes (LCCs) designated as glucan-lignin (GL) and xylan-lignin (XL) were successively isolated from coir via a simplified and quantitative fractionation method. The characterization of chemical composition, molecular weight distribution, and constituent substructures of the isolated LCC fractions were examined, and the lignin-carbohydrate (LC) chemical linkages were revealed as γ-esters by a 2D heteronuclear singular quantum correlation (HSQC) NMR technique. Furthermore, XL was demonstrated as a more competitive candidate than GL for 2,2-diphenyl-1-picryl-hydrazyl (DPPH) removal in comparison with 2,6-di-tert-butyl-4-methylphenol (BHT, a commercial antioxidant), and was also featured as a more promising reinforcing agent for elevating the adsorption property of polyacrylamide-based hydrogels via the synergistic effect of physical and hydrogen bonding adsorptions.
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- 2020
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8. Antioxidant and ultraviolet shielding performance of lignin-polysaccharide complex isolated from spent coffee ground
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Lingying Fu, Yue Gong, Qi Zhou, Zhiqiang Ou, Xin Rao, Songbin Wang, Chunqing Huo, and Xueyu Du
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Structural Biology ,General Medicine ,Molecular Biology ,Biochemistry - Published
- 2023
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9. Effect of W-doping on the structure and properties of DLC films prepared by combining physical and chemical vapor deposition
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Runwei Song, Sen Chen, Zhongwei Liu, Chunqing Huo, and Qiang Chen
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Mechanical Engineering ,Materials Chemistry ,General Chemistry ,Electrical and Electronic Engineering ,Electronic, Optical and Magnetic Materials - Published
- 2023
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10. Tunable photoluminescence effect from ZnO films of Ag-decorated localized surface plasmon resonance by varying positions of Ag nanoparticles
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Xinke Liu, Wenjun Liu, Fang Jia, Xu Wangying, Shun Han, Youming Lu, Zeng Yuxiang, Deliang Zhu, Chunqing Huo, Hua Jiang, and Peijiang Cao
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Photoluminescence ,Materials science ,business.industry ,Tunable photoluminescence ,Mechanical Engineering ,Semiconductor materials ,Ag nanoparticles ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Emission intensity ,0104 chemical sciences ,Mechanics of Materials ,Optoelectronics ,General Materials Science ,Surface plasmon resonance ,0210 nano-technology ,business - Abstract
By employing localized surface plasmon resonance (LSPR), the near band edge (NBE) emission intensity of ZnO films were greatly varied, while defect emission remained almost the same. This photoluminescence (PL) intensity enhancement or reduction is tunable by changing the position of Ag nanoparticles (NPs) relative to the ZnO films. The remarkable variation of the NBE emission was investigated deeply. These experimental results reveal that the Ag NPs play a key role in tuning the PL performance of the semiconductor material, where LSPR occurs.
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- 2019
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11. Tailoring of electroluminescence from n-ZnO/p-GaN heterojunctions
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Shun Han, Deyong Zhu, Chunqing Huo, Wenjun Liu, Fang Jia, Hua Zeng, P. J. Cao, X. K. Liu, Y. X. Zeng, and Y. M. Lu
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010302 applied physics ,Diffraction ,Materials science ,Photoluminescence ,business.industry ,Biophysics ,Heterojunction ,02 engineering and technology ,General Chemistry ,Substrate (electronics) ,Electroluminescence ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Biochemistry ,Atomic and Molecular Physics, and Optics ,Pulsed laser deposition ,0103 physical sciences ,Optoelectronics ,0210 nano-technology ,Luminescence ,business ,Visible spectrum - Abstract
In this study, electroluminescence (EL) from n-ZnO/p-GaN heterojunctions is investigated and tailored. The heterojunctions were obtained by depositing high-quality ZnO films on the p-GaN substrate through pulsed laser deposition (PLD), and the characteristics were analyzed by X-ray diffraction (XRD), photoluminescence (PL) spectra at room-temperature (RT, 300 K), current-voltage (I-V) characteristics curves, and the EL spectra. By means of the band energy theory, a simple and effective way to tailor the luminescent properties of the heterojunction was discussed. The ultra-violet (UV) emission from the n-ZnO was obtained through the improvement of the electrical properties of the films and the substrates. The visible light emissions were tailored through the transition of different defect caused color emissions. Besides, an unexpected yellow light (YL) emission caused by Ga-O interlayer was also studied.
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- 2018
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12. Polyvinyl alcohol based bio‐composite films reinforced by liquefaction products and cellulose nanofibrils from coconut coir
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Fanrong Meng, Jihui Li, Chunqing Huo, Shuying Xu, Jun Wu, Xueyu Du, and Dun Wang
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chemistry.chemical_compound ,Polymers and Plastics ,Chemical engineering ,Chemistry ,Composite number ,Materials Chemistry ,Liquefaction ,General Chemistry ,Cellulose ,Coir ,Polyvinyl alcohol ,Surfaces, Coatings and Films - Published
- 2021
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13. On Electron Heating In Magnetron Sputtering Discharges
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Chunqing Huo, Tiberiu Minea, Nils Brenning, Michael A. Raadu, Jon Tomas Gudmundsson, and Daniel Lundin
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Materials science ,Ionization ,Secondary emission ,Plasma ,Sputter deposition ,Thin film ,High-power impulse magnetron sputtering ,Atomic physics ,Joule heating ,Secondary electrons - Abstract
The magnetron sputtering discharge is a highly successful tool for deposition of thin films and coatings. It has been applied for various industrial applications for over four decades. Sustaining a plasma in a magnetron sputtering discharge requires energy transfer to the plasma electrons. In the past, the magnetron sputtering discharge has been assumed to be maintained by cathode sheath acceleration of secondary electrons emitted from the target, upon ion impact. These highly energetic electrons then either ionize the atoms of the working gas directly or transfer energy to the local lower energy electron population that subsequently ionizes the working gas atoms. This leads to the well-known Thornton equation, which in its original form [1] is formulated to give the minimum required voltage to sustain the discharge. However, recently we have demonstrated that Ohmic heating of electrons outside the cathode sheath is typically of the same order as heating due to acceleration across the sheath in dc magnetron sputtering (dcMS) discharges [2]. The secondary electron emission yield $\gamma _{see}$ is identified as the key parameter determining the relative importance of the two processes. In the case of dcMS Ohmic heating is found to be more important than sheath acceleration for secondary electron emission yields below around 0.1. For the high power impulse magnetron sputtering (HiPIMS) discharge we find that direct Ohmic heating of the plasma electrons is found to dominate over sheath acceleration by typically an order of magnitude, or in the range of 87 – 99 % of the total electron heating. A potential drop of roughly 100 – 150 V, or 15 – 25% of the discharge voltage, always falls across the plasma outside the cathode sheath [3].
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- 2017
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14. Facile approaches to prepare n-ZnO/(i-ZnO)/p-GaN heterojunction light-emitting diodes with white-light-electroluminescence
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Peijiang Cao, Wangying Xu, Xinke Liu, Youming Lu, Fang Jia, Zeng Yuxiang, Deliang Zhu, Chunqing Huo, Shun Han, Hua Zeng, and Wenjun Liu
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010302 applied physics ,Fabrication ,Materials science ,business.industry ,General Engineering ,General Physics and Astronomy ,Heterojunction ,02 engineering and technology ,Electroluminescence ,021001 nanoscience & nanotechnology ,01 natural sciences ,Pulsed laser deposition ,law.invention ,law ,0103 physical sciences ,Optoelectronics ,Light emission ,0210 nano-technology ,business ,Layer (electronics) ,Light-emitting diode ,Diode - Abstract
White light-emitting diode (LED) with effective energy conservation and long service life could be employed in numerous applications. In this study, the high-performance n-ZnO films were first prepared via pulsed laser deposition on p-GaN substrates and then the n-ZnO/p-GaN heterojunction LED was fabricated. This LED exhibits blue and yellow light emission, and their emission intensities can be tuned by adjustment of the fabrication parameters (e.g., oxygen pressure) and/or by introduction of a semi-insulating i-ZnO layer to form a p-GaN/i-ZnO/n-ZnO heterojunction. Thus, a facile approach has been proposed for the preparation of white LED.
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- 2019
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15. An ionization region model of the reactive Ar/O 2 high power impulse magnetron sputtering discharge
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Daniel Lundin, Tiberiu Minea, Jon Tomas Gudmundsson, Chunqing Huo, Michael A. Raadu, Nils Brenning, Laboratoire de physique des gaz et des plasmas (LPGP), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), School of Electrical Engineering [Stockholm], and Royal Institute of Technology [Stockholm] (KTH )
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010302 applied physics ,Electron density ,Materials science ,02 engineering and technology ,Plasma ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Charged particle ,Ion ,Sputtering ,[PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] ,Ionization ,0103 physical sciences ,High-power impulse magnetron sputtering ,Atomic physics ,0210 nano-technology ,ComputingMilieux_MISCELLANEOUS ,A titanium - Abstract
A new reactive ionization region model (R-IRM) is developed to describe the reactive Ar/O-2 high power impulse magnetron sputtering (HiPIMS) discharge with a titanium target. It is then applied to ...
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- 2016
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16. Preparation and photoluminescence of ZnO with nanostructure by hollow-cathode discharge
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Chunqing Huo, Qiang Chen, Yue-fei Zhang, and Xinchao Bian
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Nanostructure ,Materials science ,Photoluminescence ,Crucible ,chemistry.chemical_element ,Nanotechnology ,Zinc ,Cathode ,Nanomaterials ,law.invention ,Chemical engineering ,chemistry ,law ,General Materials Science ,Nanorod ,Forming gas - Abstract
Without the use of a metal catalyst in the process, ZnO with nanostructures was successfully prepared on Si (100) substrate by simple chemical vapor-deposition method. In our work, Ar was used as the plasma forming gas, O2 was the reactive gas and metal zinc powder (99.99% purity) vaporized by cylinder hollow-cathode discharge (HCD) acted as the zinc source. The crystal structures of the as-synthesized ZnO nanostructures were characterized by X-ray diffraction (XRD); the ZnO sample growing on the wall of the crucible showed a ‘comb-like’ nanostructure, while the other one at the bottom of the crucible showed a ‘rod-like’ structure, which can be attributed to the difference of the oxygen content. The measurement on the photoluminescence (PL) performance of the ZnO nanostructures was carried out at room temperature. The results indicated that the ‘comb-shape’ ZnO nanomaterial possessed a remarkably strong ultraviolet emission peak centered at 388 nm, while ZnO nanorods, except better ultraviolet emission, also had relatively strong blue-green emission ranging from 470 to 600 nm due to the existence of oxygen vacancies. The growth mechanism of ZnO with nanostructures is also discussed in this paper.
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- 2008
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17. Particle-balance models for pulsed sputtering magnetrons
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Daniel Lundin, James W. Bradley, Michael A. Raadu, Jon Tomas Gudmundsson, Chunqing Huo, and Nils Brenning
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010302 applied physics ,Argon ,Acoustics and Ultrasonics ,chemistry.chemical_element ,Plasma ,Electron ,Condensed Matter Physics ,01 natural sciences ,Charged particle ,010305 fluids & plasmas ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Ion ,chemistry ,Sputtering ,Ionization ,0103 physical sciences ,Particle ,Atomic physics - Abstract
The time-dependent plasma discharge ionization region model (IRM) has been under continuous development during the past decade and used in several studies of the ionization region of high-power imp ...
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- 2017
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18. Magnetron sputtering synthesis silver and organic PEO nanocomposite
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Jing Weng, Yabo Fu, Chunqing Huo, Lei Yue, Yuefei Zhang, Fenyan Xie, Meili Zhou, and Qiang Chen
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Materials science ,Nanocomposite ,technology, industry, and agriculture ,Analytical chemistry ,macromolecular substances ,Surfaces and Interfaces ,General Chemistry ,Sputter deposition ,Condensed Matter Physics ,Silver nanoparticle ,Surfaces, Coatings and Films ,law.invention ,Chemical engineering ,Sputtering ,Transmission electron microscopy ,law ,Cavity magnetron ,Materials Chemistry ,Crystallization ,Fourier transform infrared spectroscopy - Abstract
A nanocomposite, silver nanoparticles embedded into polyethylene oxide (PEO) is synthesized by magnetron sputtering. The embedded silver in PEO matrix is confirmed by transmission electron microscopy (TEM) image, X-ray diffraction (XRD) pattern, and atomic force microscopy (AFM) analysis. By TEM image the sizes of silver nanoparticles are found to be tunable, and the silver crystallization is preferentially grown in facet of (111) by varying the plasma parameters, especially the working pressure. The crystal statue is evidenced by UV–visible spectra where the peak of plasmon absorption is located at ca. 400 nm. This characterization is very important for silver nanocomposite application as an antibacterial reagent based on previous antimicrobial results. By Fourier transform infrared spectroscopy (FTIR) the functional group of C–O–C in PEO films is depicted to be enough retained from the monomer in MS plasma.
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- 2008
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19. Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields
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Tiberiu Minea, Chunqing Huo, Catalin Vitelaru, Gabriel Stancu, Nils Brenning, Daniel Lundin, Michael A. Raadu, and Ulf Helmersson
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Direct current magnetron sputtering ,Chemistry ,business.industry ,Analytical chemistry ,Condensed Matter Physics ,Power (physics) ,Deposition rate ,Ionization ,Electric field ,Teknik och teknologier ,Optoelectronics ,Engineering and Technology ,High-power impulse magnetron sputtering ,business - Abstract
The lower deposition rate for high power impulse magnetron sputtering (HiPIMS) compared with direct current magnetron sputtering for the same average power is often reported as a drawback. The often invoked reason is back-attraction of ionized sputtered material to the target due to a substantial negative potential profile, sometimes called an extended presheath, from the location of ionization toward the cathode. Recent studies in HiPIMS devices, using floating-emitting and swept-Langmuir probes, show that such extended potential profiles do exist, and that the electric fields E-z directed toward the target can be strong enough to seriously reduce ion transport to the substrate. However, they also show that the potential drops involved can vary by up to an order of magnitude from case to case. There is a clear need to understand the underlying mechanisms and identify the key discharge variables that can be used for minimizing the back-attraction. We here present a combined theoretical and experimental analysis of the problem of electric fields E-z in the ionization region part of HiPIMS discharges, and their effect on the transport of ionized sputtered material. In particular, we have investigated the possibility of a sweet spot in parameter space in which the back-attraction of ionized sputtered material is low. It is concluded that a sweet spot might possibly exist for some carefully optimized discharges, but probably in a rather narrow window of parameters. As a measure of how far a discharge is from such a window, a Townsend product Pi(Townsend) is proposed. A parametric analysis of Pi(Townsend) shows that the search for a sweet spot is complicated by the fact that contradictory demands appear for several of the externally controllable parameters such as high/low working gas pressure, short/long pulse length, high/low pulse power and high/low magnetic field strength. Funding Agencies|Swedish Research Council||Swedish Foundation for Strategic Research||European Collaboration in Science and Technology (COST Action)|MP0804|ANR HiPPoPP (French Government Research Agency)||Romanian ministry of Education, Research, Youth and Sport|IDEI 540/2009
- Published
- 2012
20. An ionization region model for high-power impulse magnetron sputtering discharges
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Jon Tomas Gudmundsson, Chunqing Huo, Ingvar Axnäs, Nils Brenning, and Michael A. Raadu
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Materials science ,ARGON ,PLASMAS ,Plasma ,Sputter deposition ,Impulse (physics) ,ALUMINUM ,Condensed Matter Physics ,Fusion, Plasma and Space Physics ,Fusion, plasma och rymdfysik ,Physics::Plasma Physics ,Ionization ,GLOBAL-MODEL ,ELECTRON-EMISSION ,METALS ,High-power impulse magnetron sputtering ,Atomic physics ,DENSITIES - Abstract
A time-dependent plasma discharge model has been developed for the ionization region in a high-power impulse magnetron sputtering (HiPIMS) discharge. It provides a flexible modeling tool to explore, e. g., the temporal variations of the ionized fractions of the working gas and the sputtered vapor, the electron density and temperature, and the gas rarefaction and refill processes. A separation is made between aspects that can be followed with a certain precision, based on known data, such as excitation rates, sputtering and secondary emission yield, and aspects that need to be treated as uncertain and defined by assumptions. The input parameters in the model can be changed to fit different specific applications. Examples of such changes are the gas and target material, the electric pulse forms of current and voltage, and the device geometry. A basic version, ionization region model I, using a thermal electron population, singly charged ions, and ion losses by isotropic diffusion is described here. It is fitted to the experimental data from a HiPIMS discharge in argon operated with 100 mu s long pulses and a 15 cm diameter aluminum target. Already this basic version gives a close fit to the experimentally observed current waveform, and values of electron density n(e), the electron temperature T(e), the degree of gas rarefaction, and the degree of ionization of the sputtered metal that are consistent with experimental data. We take some selected examples to illustrate how the model can be used to throw light on the internal workings of these discharges: the effect of varying power efficiency, the gas rarefaction and refill during a HiPIMS pulse, and the mechanisms determining the electron temperature. QC 20120125
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- 2011
21. Internal current measurements in high power impulse magnetron sputtering
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Chunqing Huo, Daniel Lundin, Seham Al Sahab, Nils Brenning, and Ulf Helmersson
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Materials science ,business.industry ,Sputter deposition ,Impulse (physics) ,Condensed Matter Physics ,Charged particle ,Sputtering ,Electrical equipment ,Naturvetenskap ,Optoelectronics ,High-power impulse magnetron sputtering ,Atomic physics ,business ,Natural Sciences ,Current density ,Rogowski coil - Abstract
The transport of charged particles in a high power impulse magnetron sputtering (HiPIMS) discharge is of great interest when optimizing this promising deposition technique with respect to deposition rate and control of the ion acceleration. In this study the internal current densities Jϕ (azimuthal direction) and JD⊥ (axial direction) have therefore been spatially and temporally resolved in the bulk plasma region above a cylindrical magnetron using Rogowski coils. From the measurements a phenomenological model has been constructed describing the evolution of the current density in this pulsed plasma. The core of the model is based on six different types of current systems, which characterize the operating transport mechanisms, such as current transport along and across magnetic field lines, as well as the initiation, buildup and steady-state of a HiPIMS plasma. Furthermore, the data also shows that there are spatial and temporal variations of the key transport parameter Jϕ/JD⊥ , governing the cross-B resistivity and also the energy of the charged particles. The previously reported faster-than-Bohm cross-B electron transport is here verified, but is not found to be present during the whole discharge regime as well as for all locations. These results on the plasma dynamics are essential input when modeling the axial electric field, governing the back-attraction of ionized sputtered material, and might furthermore provide a link between the different resistivities reported in HiPIMS, pulsed-DC, and DC magnetron discharges. Funding agencies|Swedish Research Council||Swedish Foundation for Strategic Research
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- 2011
22. On the road to self-sputtering in high power impulse magnetron sputtering: particle balance and discharge characteristics
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Chunqing Huo, Daniel Lundin, Jon Tomas Gudmundsson, André Anders, Michael A. Raadu, and Nils Brenning
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Materials science ,business.industry ,Sputtering ,Analytical chemistry ,Optoelectronics ,Plasma ,Sputter deposition ,High-power impulse magnetron sputtering ,Impulse (physics) ,Condensed Matter Physics ,business - Abstract
The onset and development of self-sputtering (SS) in a high power impulse magnetron sputtering (HiPIMS) discharge have been studied using a plasma chemical model and a set of experimental data, tak ...
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- 2014
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23. On sheath energization and Ohmic heating in sputtering magnetrons
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Nils Brenning, Chunqing Huo, Daniel Lundin, Michael A. Raadu, André Anders, and Jon Tomas Gudmundsson
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Chemistry ,law ,Sputtering ,Secondary emission ,Ionization ,Plasma ,Sputter deposition ,High-power impulse magnetron sputtering ,Atomic physics ,Condensed Matter Physics ,Joule heating ,Cathode ,law.invention - Abstract
In most models of sputtering magnetrons, the mechanism for energizing the electrons in the discharge is assumed to be sheath energization. In this process, secondary emitted electrons from the cathode surface are accelerated across the cathode sheath into the plasma, where they either ionize directly or transfer energy to the local lower energy electron population that subsequently ionizes the gas. In this work, we present new modeling results in support of an alternative electron energization mechanism. A model is experimentally constrained, by a fitting procedure, to match a set of experimental data taken over a large range in discharge powers in a high-power impulse magnetron sputtering (HiPIMS) device. When the model is matched to real data in this way, one finding is that the discharge can run with high power and large gas rarefaction without involving the mechanism of secondary electron emission by twice-ionized sputtered metal. The reason for this is that direct Ohmic heating of the plasma electrons is found to dominate over sheath energization by typically an order of magnitude. This holds from low power densities, as typical for dc magnetrons, to so high powers that the discharge is close to self-sputtering, i.e. dominated by the ionized vapor of the sputtered gas. The location of Ohmic heating is identified as an extended presheath with a potential drop of typically 100–150 V. Such a feature, here indirectly derived from modeling, is in agreement with probe measurements of the potential profiles in other HiPIMS experiments, as well as in conventional dc magnetrons.
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- 2013
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24. Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses
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Jon Tomas Gudmundsson, Chunqing Huo, Nils Brenning, André Anders, Daniel Lundin, and Michael A. Raadu
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Chemistry ,Plasma chemistry ,Analytical chemistry ,Time evolution ,Gas dynamics ,Plasma ,Impulse (physics) ,High-power impulse magnetron sputtering ,Atomic physics ,Sputter deposition ,Condensed Matter Physics - Abstract
Model studies of 400 mu s long discharge pulses in high-power impulse magnetron sputtering have been made to study the gas dynamics and plasma chemistry in this type of pulsed processing plasma. Da ...
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- 2012
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25. Different Shapes of Nano-ZnO Crystals Grown in Catalyst-Free DC Plasma
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Chunqing, Huo, primary, Yuefei, Zhang, additional, Fuping, Liu, additional, Qiang, Chen, additional, and Yuedong, Meng, additional
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- 2009
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26. Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses.
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Chunqing Huo, Raadu, Michael A., Lundin, Daniel, Gudmundsson, Jon Tomas, Anders, André, and Brenning, Nils
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MAGNETRON sputtering , *ELECTRIC discharges , *PLASMA chemistry , *PLASMA dynamics , *IONIZATION (Atomic physics) , *PHYSICAL constants , *ELECTRIC transients - Abstract
Model studies of 400 µs long discharge pulses in high-power impulse magnetron sputtering have been made to study the gas dynamics and plasma chemistry in this type of pulsed processing plasma. Data are taken from an experiment using square voltage pulses applied to an Al target in an Ar atmosphere at 1.8 Pa. The study is limited to low power densities, <0.5 kW cm−2, in which the discharge is far away from the runaway self-sputtering mode. The model used is the ionization region model, a time-dependent plasma chemistry discharge model developed for the ionization region in magnetron sputtering discharges. It gives a close fit to the discharge current during the whole pulse, both an initial high-current transient and a later plateau value of constant lower current. The discharge current peak is found to precede a maximum in gas rarefaction of the order of ΔnAr/nAr,0 ≈ 50%. The time durations of the high-current transient, and of the rarefaction maximum, are determined by the time it takes to establish a steady-state diffusional refill of process gas from the surrounding volume. The dominating mechanism for gas rarefaction is ionization losses, with only about 30% due to the sputter wind kick-out process. During the high-current transient, the degree of sputtered metal ionization reaches 65–75%, and then drops to 30–35% in the plateau phase. The degree of self-sputtering (defined here as the metal ion fraction of the total ion current to the target) also varies during the pulse. It grows from zero at pulse start to a maximum of 65–70% coinciding in time with the maximum gas rarefaction, and then stabilizes in the range 40–45% during the plateau phase. The loss in deposition rate that can be attributed to the back-attraction of the ionized sputtered species is also estimated from the model. It is low during the initial 10–20 µs, peaks around 60% during the high-current transient, and finally stabilizes around 30% during the plateau phase. [ABSTRACT FROM AUTHOR]
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- 2012
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27. Facile approaches to prepare n-ZnO/(i-ZnO)/p-GaN heterojunction light-emitting diodes with white-light-electroluminescence.
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Chunqing Huo, Youming Lu, Hua Zeng, Peijiang Cao, Shun Han, Wenjun Liu, Fang Jia, Yuxiang Zeng, Xinke Liu, Wangying Xu, and Deliang Zhu
- Abstract
White-light-emitting diode (LED) with effective energy conservation and long service life could be employed in numerous applications. In this study, the high-performance n-ZnO films were first prepared via pulsed laser deposition on p-GaN substrates and then the n-ZnO/p-GaN heterojunction LED was fabricated. This LED exhibits blue and yellow light emission, and their emission intensities can be tuned by adjustment of the fabrication parameters (e.g. oxygen pressure) and/or by introduction of a semi-insulating i-ZnO layer to form a p-GaN/i-ZnO/n-ZnO heterojunction. Thus, a facile approach has been proposed for the preparation of white LED. [ABSTRACT FROM AUTHOR]
- Published
- 2019
- Full Text
- View/download PDF
28. Particle-balance models for pulsed sputtering magnetrons.
- Author
-
Chunqing Huo, D Lundin, J T Gudmundsson, M A Raadu, J W Bradley, and N Brenning
- Subjects
- *
MAGNETRON sputtering , *PLASMA flow , *SECONDARY electron emission - Abstract
The time-dependent plasma discharge ionization region model (IRM) has been under continuous development during the past decade and used in several studies of the ionization region of high-power impulse magnetron sputtering (HiPIMS) discharges. In the present work, a complete description of the most recent version of the IRM is given, which includes improvements, such as allowing for returning of the working gas atoms from the target, a separate treatment of hot secondary electrons, addition of doubly charged metal ions, etc. To show the general applicability of the IRM, two different HiPIMS discharges are investigated. The first set concerns 400 μs long discharge pulses applied to an Al target in an Ar atmosphere at 1.8 Pa. The second set focuses on 100 μs long discharge pulses applied to a Ti target in an Ar atmosphere at 0.54 Pa, and explores the effects of varying the magnetic field strength. The model results show that -ions contribute negligibly to the production of secondary electrons, while -ions effectively contribute to the production of secondary electrons. Similarly, the model results show that for an argon discharge with Al target the contribution of Al+-ions to the discharge current at the target surface is over 90% at 800 V. However, at 400 V the Al+-ions and Ar+-ions contribute roughly equally to the discharge current in the initial peak, while in the plateau region Ar+-ions contribute to roughly of the current. For high currents the discharge with Al target develops almost pure self-sputter recycling, while the discharge with Ti target exhibits close to a 50/50 combination of self-sputter recycling and working gas-recycling. For a Ti target, a self-sputter yield significantly below unity makes working gas-recycling necessary at high currents. For the discharge with Ti target, a decrease in the B-field strength, resulted in a corresponding stepwise increase in the discharge resistivity. [ABSTRACT FROM AUTHOR]
- Published
- 2017
- Full Text
- View/download PDF
29. An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge.
- Author
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J T Gudmundsson, D Lundin, N Brenning, M A Raadu, Chunqing Huo, and T M Minea
- Subjects
IONIZATION (Atomic physics) ,MAGNETRON sputtering ,GLOW discharges ,ELECTRON density ,MAGNETIC fields - Abstract
A new reactive ionization region model (R-IRM) is developed to describe the reactive Ar/O
2 high power impulse magnetron sputtering (HiPIMS) discharge with a titanium target. It is then applied to study the temporal behavior of the discharge plasma parameters such as electron density, the neutral and ion composition, the ionization fraction of the sputtered vapor, the oxygen dissociation fraction, and the composition of the discharge current. We study and compare the discharge properties when the discharge is operated in the two well established operating modes, the metal mode and the poisoned mode. Experimentally, it is found that in the metal mode the discharge current waveform displays a typical non-reactive evolution, while in the poisoned mode the discharge current waveform becomes distinctly triangular and the current increases significantly. Using the R-IRM we explore the current increase and find that when the discharge is operated in the metal mode Ar+ and Ti+ -ions contribute most significantly (roughly equal amounts) to the discharge current while in the poisoned mode the Ar+ -ions contribute most significantly to the discharge current and the contribution of O+ -ions, Ti+ -ions, and secondary electron emission is much smaller. Furthermore, we find that recycling of atoms coming from the target, that are subsequently ionized, is required for the current generation in both modes of operation. From the R-IRM results it is found that in the metal mode self-sputter recycling dominates and in the poisoned mode working gas recycling dominates. We also show that working gas recycling can lead to very high discharge currents but never to a runaway. It is concluded that the dominating type of recycling determines the discharge current waveform. [ABSTRACT FROM AUTHOR]- Published
- 2016
- Full Text
- View/download PDF
30. Internal current measurements in high power impulse magnetron sputtering.
- Author
-
Daniel Lundin, Seham Al Sahab, Nils Brenning, Chunqing Huo, and Ulf Helmersson
- Subjects
MAGNETRON sputtering ,MAGNETIC fields ,SPATIO-temporal variation ,PHENOMENOLOGY ,ELECTRIC resistance ,PLASMA dynamics - Abstract
The transport of charged particles in a high power impulse magnetron sputtering (HiPIMS) discharge is of considerable interest when optimizing this promising deposition technique with respect to deposition rate and control of the ion acceleration. In this study the internal current densities Jph (azimuthal direction) and Jz (axial direction) have therefore been spatially and temporally resolved in the bulk plasma region above a cylindrical magnetron using Rogowski coils. From the measurements a phenomenological model has been constructed describing the evolution of the current density in this pulsed plasma. The core of the model is based on three different types of current systems, which characterize the operating transport mechanisms, such as current transport along and across magnetic field lines. There is a gradual change between these current systems during the initiation, build-up and steady state of a HiPIMS plasma. Furthermore, the data also show that there are spatial and temporal variations of the key transport parameter Jph/Jz, governing the cross-B resistivity and also the energy of the charged particles. The previously reported faster-than-Bohm cross-B electron transport is verified here, but not for all locations. These results on the plasma dynamics are essential input when modeling the axial electric field, governing the back-attraction of ionized sputtered material, and might furthermore provide a link between the different resistivities reported in HiPIMS, pulsed-DC, and DC magnetron discharges. [ABSTRACT FROM AUTHOR]
- Published
- 2011
- Full Text
- View/download PDF
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