Effect of W-doping on the structure and properties of DLC films prepared by combining physical and chemical vapor deposition

Subjects

Subjects :

Mechanical Engineering
Materials Chemistry
General Chemistry
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Details

ISSN :

09259635

Volume :

132

Database :

OpenAIRE

Journal :

Diamond and Related Materials

Accession number :

edsair.doi...........f75d7ad6a19e3d9d652b18853b8e047f

Full Text :

https://doi.org/10.1016/j.diamond.2023.109687