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On the road to self-sputtering in high power impulse magnetron sputtering: particle balance and discharge characteristics
- Source :
- Plasma Sources Science and Technology. 23:025017
- Publication Year :
- 2014
- Publisher :
- IOP Publishing, 2014.
-
Abstract
- The onset and development of self-sputtering (SS) in a high power impulse magnetron sputtering (HiPIMS) discharge have been studied using a plasma chemical model and a set of experimental data, tak ...
Details
- ISSN :
- 13616595 and 09630252
- Volume :
- 23
- Database :
- OpenAIRE
- Journal :
- Plasma Sources Science and Technology
- Accession number :
- edsair.doi...........d912fd2ffe579cf6653cb937c577952b
- Full Text :
- https://doi.org/10.1088/0963-0252/23/2/025017