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Low-temperature plasma production is possible as a result of photoionization using high-intensity extreme ultraviolet (EUV) and soft X-ray (SXR) pulses. Plasma of this type is also present in outer space, e.g., aurora borealis. It also occurs when high-velocity objects enter the atmosphere, during which period high temperatures can be produced locally by friction. Low-temperature plasma is also formed in an ambient gas surrounding the hot laser-produced plasma (LPP). In this work, a special system has been prepared for investigation of this type of plasma. The LPP was created inside a chamber filled with a gas under a low pressure, of the order of 1–50 mbar, by a laser pulse (3–9 J, 1–8 ns) focused onto a gas puff target. In such a case, the SXR/EUV radiation emitted from the LPP was partially absorbed in the low-density gas. In this case, high- and low-temperature plasmas (T e ~100 eV and ~1 eV, respectively) were created locally in the chamber. Investigation of the EUV-induced plasmas was performed mainly using spectral methods in ultraviolet/visible (UV/VIS) light. The measurements were performed using an echelle spectrometer, and additionally, spatial–temporal measurements were performed using an optical streak camera. Spectral analysis was supported by the PGOPHER numerical code.

Optics express 30(26), 47867 (2022). doi:10.1364/OE.477726, Published by Optica, Washington, DC

Optical coherence tomography (OCT) with the use of soft x-rays (SXR) and extreme ultraviolet (EUV) has been recently demonstrated [Fuchs et al. Sci. Rep. 6, 20658 (2016)10.1038/srep20658; Fuchs et al. Optica 4, 903 (2017)10.1364/OPTICA.4.000903]. This new imaging technique, named XCT, makes it possible to obtain cross-sectional and tomographic images of objects with nanometer spatial resolution. The article presents a newly developed laboratory system for XCT using a compact laser plasma light source operating in the SXR and EUV spectral ranges. The source is based on a gas puff target containing Kr gas or a Kr/Xe gas mixture irradiated with nanosecond laser pulses from an Nd:YAG laser. The use of the gas puff target enables efficient emission of SXR and EUV radiation without generating target debris associated with laser ablation when using a solid target. The system is equipped with an ellipsoidal mirror to collect radiation from the source and focus on the imaged object. The XCT measurements are made by processing the spectrum of the radiation reflected from the object recorded with a transmission grating spectrometer equipped with an identical focusing mirror and a CCD camera. The paper presents the characterization and optimization of the new XCT system and its application to the measurements of layered nanostructures.

The effect of EUV modification of WC-Co indexable knives on the tool life during particleboard milling. The paper presents the results of lifetime tests of WC-Co composite blades after modification of their flank surfaces using intense pulses of extreme ultraviolet (EUV). Wear tests consisting in milling a three-layer particleboard with constant cutting parameters were carried out on a CNC machining center. A statistically insignificant increase in the lifetime of modified tools was demonstrated, as well as an inversely proportional relationship with the duration of the EUV pulses. The EUV modification increased the coefficient of variation in the lifetime of WC-Co indexable knives.

A near 1-keV photons from the Xe/He plasma produced by the interaction of laser beam with a double stream gas puff target were employed for studies of L absorption edges of period 4 transitional metals with atomic number Z from 26 to 30. The dual-channel, compact NEXAFS system was employed for the acquisition of the absorption spectra. L1–3 absorption edges of the samples were identified in transmission mode using broadband emission from the Xe/He plasma to show the applicability of such source and measurement system to the NEXAFS studies of the transition metals, including magnetic materials.

Polyetheretherketone (PEEK), due to its excellent mechanical and physico-chemical parameters, is an attractive substitute for hard tissues in orthopedic applications. However, PEEK is hydrophobic and lacks surface-active functional groups promoting cell adhesion. Therefore, the PEEK surface must be modified in order to improve its cytocompatibility. In this work, extreme ultraviolet (EUV) radiation and two low-temperature, EUV induced, oxygen and nitrogen plasmas were used for surface modification of polyetheretherketone. Polymer samples were irradiated with 100, 150, and 200 pulses at a 10 Hz repetition rate. The physical and chemical properties of EUV and plasma modified PEEK surfaces, such as changes of the surface topography, chemical composition, and wettability, were examined using atomic force microscopy (AFM), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), and goniometry. The human osteoblast-like MG63 cells were used for the analysis of cell viability and cell adhesion on all modified PEEK surfaces. EUV radiation and two types of plasma treatment led to significant changes in surface topography of PEEK, increasing surface roughness and formation of conical structures. Additionally, significant changes in the chemical composition were found and were manifested with the appearance of new functional groups, incorporation of nitrogen atoms up to ~12.3 at.% (when modified in the presence of nitrogen), and doubling the oxygen content up to ~25.7 at.% (when modified in the presence of oxygen), compared to non-modified PEEK. All chemically and physically changed surfaces demonstrated cyto-compatible and non-cytotoxic properties, an enhancement of MG63 cell adhesion was also observed.

In this work, the time development of plasmas produced by interaction of laser pulses, with a nitrogen gas, was investigated. The interaction took place inside a small portion of dense nitrogen gas injected temporarily into a chamber filled with the gas under low pressure. High-temperature plasmas produced directly by the laser pulse were a source of soft x rays and charged particles, ionizing and exciting the surrounding gas. In this way, low-temperature plasmas were produced. The formation of high-temperature plasmas was studied using soft x-ray spectroscopy and x-ray streak imaging. Low-temperature plasmas formed at various distances from the laser focus were investigated using an optical streak camera. Interpretation of the experimental data was supported by numerical modeling of the laser-produced plasma hydrodynamics. It was concluded that depending on the distance from the focal spot, the formation of the low-temperature plasmas was dominated by ion streams or by soft x-ray radiation.

Understanding cancer cell adhesion could help to diminish tumor progression and metastasis. Adhesion mechanisms are currently the main therapeutic target of TNBC-resistant cells. This work shows the distribution and size of adhesive complexes determined with a common fluorescence microscopy technique and soft X-ray contact microscopy (SXCM). The results presented here demonstrate the potential of applying SXCM for imaging cell protrusions with high resolution when the cells are still alive in a physiological buffer. The possibility to observe the internal components of cells at a pristine and hydrated state with nanometer resolution distinguishes SXCM from the other more commonly used techniques for cell imaging. Thus, SXCM can be a promising technique for investigating the adhesion and organization of the actin cytoskeleton in cancer cells.

This work is to study the relationship between the exposure conditions and the quality of cell imaging with soft X-ray contact microscopy (SXCM). It is a crucial step in the efficient visualization of cell structures. Three different human cell lines: DU145 prostate carcinoma cells, HCC38 breast cancer cells, and Poietics mesenchymal stem cells were used to establish the optimal exposure conditions in SXCM. The image quality depended on the soft X-ray (SXR) absorbed energy and photoresist development conditions. At lower SXR energy (200 or 400 SXR pulses), sharp cell edges, membrane projections, and cell&ndash, cell connections were visible. In contrast, higher energy (600 or 800 SXR pulses) allowed observation of the cytoskeleton and the nucleus in a cell type-dependent manner (the influence of cell thickness and internal complexity was noted).

In this work, the effect of extreme ultraviolet (EUV) radiation and the combination of EUV radiation and low-temperature nitrogen plasma on the physico-chemical properties of polyetheretherketone (PEEK) surfaces were presented. The laser-plasma EUV source based on a double gas puff target was used in this experiment to irradiate PEEK surfaces with nanosecond pulses of EUV radiation and to produce low-temperature plasma through the photoionization of nitrogen with EUV photons. The changes in surface morphology on irradiated polymer samples were examined using atomic force microscopy (AFM) and scanning electron microscopy (SEM). Chemical changes of the PEEK surfaces were analysed using X-ray photoelectron spectroscopy (XPS). EUV radiation and nitrogen plasma treatment caused significant changes in the topography of modified PEEK&rsquo, s surfaces and an increase in their average roughness. Strong chemical decomposition, appearance of new functional groups as well as incorporation of nitrogen atoms up to ~17 at.% on the PEEK&rsquo, s surface were observed.

A standard Fricke dosimeter was used to measure the absorbed dose via the oxidation yields of Fe3+ ions in an aqueous environment induced by soft X rays within the "water window" spectral range. We also exploited the property of a neutral solution containing terephthalic acid as a tool for selective detection of OH radicals. Both dosimetric systems were irradiated using the experimental pulsed laser-plasma soft X-ray source as well as conventional 1.25-MeV gamma rays. Radiation chemical yields of Fe3+ ions and OH radicals were determined to be (5.13 ± 0.94) × 10-1 µmol·J-1 (4.95 ± 0.91 100eV-1) and (2.33 ± 0.35) × 10-2 µmol·J-1 (0.23 ± 0.03 100eV-1), respectively. Measurements were supported by Monte Carlo simulations to estimate the linear energy transfer of the water window radiation. The simulation results are in good agreement with expected linear energy transfer of ions inducing the same Fe3+ ion and OH radical radiation chemical yield.

Over the last decades, remarkable efforts have been made to improve the resolution in photon-based microscopes. The employment of compact sources based on table-top laser-produced soft X-ray (SXR) in the “water window” spectral range (λ = 2.3–4.4 nm) and extreme ultraviolet (EUV) plasma allowed to overcome the limitations imposed by large facilities, such as synchrotrons and X-ray free electron lasers (XFEL), because of their high complexity, costs, and limited user access. A laser-plasma double stream gas-puff target source represents a powerful tool for microscopy operating in transmission mode, significantly improving the spatial resolution into the nanometric scale, comparing to the traditional visible light (optical) microscopes. Such an approach allows generating the plasma efficiently, without debris, providing a high flux of EUV and SXR photons. In this review, we present the development and optimization of desktop imaging systems: a EUV and an SXR full field microscope, allowing to achieve a sub-50 nm spatial resolution with short exposure time and an SXR contact microscope, capable to resolve internal structures in a thin layer of sensitive photoresist. Details about the source, as well as imaging results for biological applications, will be presented and discussed.

We present a near edge X-ray fine structure (NEXAFS) spectromicroscopy, that was developed based on a compact laboratory laser-plasma soft X-ray light source. The presented approach to spectromicroscopy is different from the usual synchrotron-based one when the series of full-field microscopy images are obtained at different energies. Herein, spatially localized NEXAFS spectra are obtained using a broad-band SXR emission, and the microscopic image is obtained by a raster scanning. The plasma is formed by the interaction of nanosecond laser pulses with a double stream gas puff target. The laser plasma source was optimized for efficient soft X-ray emission from a krypton plasma in the range ~2 nm to 5 nm wavelength radiation (energy of ~250 eV – 620 eV). This emission is used to acquire simultaneously emission and absorption spectra of soft X-ray light from the source and from the investigated sample. The spectra were acquired from a small area of PET polymer ~30 × 30 μm2 in size. A raster scanning was implemented to obtain 2-D elemental composition maps. A chemical (elemental) composition of EUV-irradiated PET was investigated. The data are in agreement with the reference measurements and the theoretical values. EUV irradiated PET spectra are showing hydrogen decrease in the PET structure due to the EUV irradiation. In the paper, a detailed information about the source, the system, the spectral measurements and the results are presented and discussed.

We present optical coherence tomography (OCT) with 2 nm axial resolution using broadband soft X-ray radiation (SXR) from a compact laser plasma light source. The laser plasma was formed by the interaction of nanosecond laser pulses with a gaseous target in a double stream gas puff target approach. The source was optimized for efficient SXR emission from the krypton/helium gas puff target in the 2 to 5 nm spectral range, encompassing the entire “water-window” spectral range from 2.3 nm to 4.4 nm wavelength. The coherence parameters of the SXR radiation allowed for the OCT measurements of a bulk multilayer structure with 10 nm period and 40% bottom layer thickness to period ratio, with an axial resolution of about 2 nm and detect multilayer interfaces up to a depth of about 100 nm. The experimental data are in agreement with OCT simulations performed on ideal multilayer structure. In the paper, detailed information about the source, its optimization, the optical system, OCT measurements and the results are presented and discussed.

In this paper, we present the application of partially spatially coherent extreme ultraviolet (EUV) radiation from xenon plasma from a laser-plasma source, based on a double stream gas puff target, in coherent imaging. The radiation at the wavelength of 13.5 ± 0.5 nm was employed to record Gabor-type holograms. An iterative algorithm, based on a phase retrieval technique, was developed and used to remove the twin image from the reconstructed EUV image of test objects. Using partially coherent radiation from a compact, laser-plasma source based on a double stream gas puff target, which is intrinsically incoherent, a Gabor EUV holography was successfully demonstrated.

Spectral lines for Kr/Ne/H2 photoionized plasma in the ultraviolet and visible (UV/Vis) wavelength ranges have been created using a laser-produced plasma (LPP) EUV source. The source is based on a double-stream gas puff target irradiated with a commercial Nd:YAG laser. The laser pulses were focused onto a gas stream, injected into a vacuum chamber synchronously with the EUV pulses. Spectral lines from photoionization in neutral Kr/Ne/H2 and up to few charged states were observed. The intense emission lines were associated with the Kr transition lines. Experimental and theoretical investigations on intensity variations for some ionic lines are presented. A decrease in the intensity with the delay time between the laser pulse and the spectrum acquisition was revealed. Electron temperature and electron density in the photoionized plasma have been estimated from the characteristic emission lines. Temperature was obtained using Boltzmann plot method, assuming that the population density of atoms and ions are considered in a local thermodynamic equilibrium (LTE). Electron density was calculated from the Stark broadening profile. The temporal evaluation of the plasma and the way of optimizing the radiation intensity of LPP EUV sources is discussed.

Characterization of Xe emission in the spectral range between 1 and 1.5 keV is presented in the case when the laser-plasma is generated by nanosecond laser pulse irradiation of a double stream Xe/He gas-puff target. Gas target density was estimated using extreme ultraviolet (EUV) radiography. Emission spectral characteristics in the wavelength range from 0.8 to 5.2 nm were determined by using a flat field SXR spectrometer. Significant emission was recorded in two high-energy bands, the first one at wavelengths 0.8–1.6 nm (photon energy range 0.78–1.5 keV) and the second one at 1.6–2.5 nm (0.5–0.78 keV). Both plasma size and photon yield in each band were measured separately to individually assess radiation and source characteristics. Moreover, a proof-of-principle experiment for near-edge X-ray absorption fine structure spectroscopy of metallic sample near the L2,3 absorption edge was performed to show one of the applicability areas of such a compact source.

Laser plasma sources of soft X-rays and extreme ultraviolet (EUV) have been developed for application in various fields of science and technology. The sources are based on a gas puff target irradiated with a nanosecond laser pulse. The targets are created using an electromagnetic valve system equipped with a double-nozzle. The valve system, which is supplied with two different gases, produces a double-stream gas puff target which consists of an elongated stream of high-Z gas surrounded by a stream of low-Z gas. The double-stream gas puff target approach secures high conversion efficiency of laser energy into soft X-ray and EUV energy without degradation of the nozzle. The targets are irradiated with laser pulses produced by commercial Nd:YAG lasers (EKSPLA) with a duration of 1 ns to 10 ns, energy in the pulse from 0.5 J to 10 J with a repetition of 10 Hz. The sources have been applied in various fields, including metrology, processing of materials, nanoimaging, radiography and tomography, photoionized plasma studies, and radiobiology. In this paper the recent results on application of the sources in X-ray absorption spectroscopy and optical coherence tomography (OCT) are presented. The use of the source in laboratory systems for the near-edge X-ray absorption fine structure (NEXAFS) spectroscopy is demonstrated. The NEXAFS system was applied for 2-D elemental mapping of EUV-modified polymer samples. A single-shot exposure NEXAFS spectroscopy is presented. Application of the source in X-ray optical coherence tomography (XCT) has been also demonstrated. The preliminary results on XCT imaging of Mo/Si multilayers with 2 nm axial resolution, using broad-band soft X-ray emission, are presented.

New instruments and methods for nanoimaging with the use of a compact laser plasma soft X-ray source are presented. The source is based on a double-stream gas puff target irradiated with nanosecond laser pulses from a Nd:YAG laser. Three imaging instruments, operating in the soft X-ray ‘water window’ range, namely two soft X-ray transmission microscopes and a soft X-ray contact microscope, have been developed. The transmission microscopes are based on grazing incidence Wolter type or diffractive Fresnel type optics. Application of these instruments for nanoimaging of hydrated and dry biological samples is presented. A new method for X-ray nanoimaging based on optical coherence tomography (OCT) technique using broad-band soft X-ray emission from the laser plasma source is also demonstrated.

In the paper recently developed microscopes operating in the soft X-rays and extreme ultraviolet (EUV) spectral regions are presented. Soft X-rays and EUV were generated using laser plasma light sources with a double-stream gas puff target. Compact Nd:YAG lasers, generating 4 ns pulses with energy up to 0.8 J at 10 Hz repetition rate, were used to irradiate the targets. Two full-field microscopes based on Fresnel optics have been developed with the use of these sources. The EUV microscope was operating at the wavelength of 13.8 nm and used for imaging of nanostructures with sub-100 nm spatial resolution. The soft X-ray microscope was operating at the wavelength of 2.8 nm and was used for imaging of dry and hydrated biological samples with spatial resolution below 100 nm. The third microscope is based on soft X-ray contact microscopy (SXCM) approach. The new microscopes and their application for imaging at the nanoscale are presented and discussed.

The optical coherence tomography (OCT), typically used in the visible wavelength range, due to relatively long wavelength is limited by the axial resolution to approximately a few hundreds of nanometers to a micron. Visible light is also incapable of resolving multilayered structures of tens of nanometers periods. Thus, the extension of the OCT to shorter wavelengths, such as the extreme ultraviolet (EUV) and soft X-ray (SXR), in the so-called X-ray coherence tomography (XCT), allows mitigating those problems. We present a nanometer resolution XCT using broadband SXR radiation with 2 nm axial resolution using a compact laser plasma soft X-ray source. The laser-produced Kr/He plasma was formed by the interaction of nanosecond laser pulses with a gaseous target in a double stream gas puff target approach, emitting 2 to 5 nm wavelength broadband radiation. The coherence parameters of the SXR radiation allowed for the OCT measurements of a bulk multilayer structure composed of Mo/Si multilayers with 10 nm period, with an axial resolution of about 2 nm, the interface position accuracy of sub-nm and detection of multilayer interfaces up to a depth of about 100 nm. The experimental data were compared to the OCT simulations.

In this work investigations concerning interaction of intense, nanosecond EUV pulses with matter were performed. Various laser-produced plasma radiation sources were employed for creation of the driving EUV pulses. The sources were based on two different laser systems with pulse energies ranging from 0.8 J to 10J and pulse duration 4 ÷ 10 ns. They were equipped with the EUV collectors for focusing of the radiation. This way radiation fluence up to 0.5 J/cm2 in the interaction region was obtained. In our experiments solid material samples or gases injected into the vacuum chamber synchronously with the EUV pulses were irradiated. Irradiation of the gases resulted in ionization and excitation of atoms and molecules forming low temperature plasmas with a relatively high electron density. Emission spectra obtained from these plasmas, contained spectral lines corresponding to radiative transitions in atoms, molecules, atomic or molecular ions. For analysis of the EUV spectra numerical simulations were performed, using a collisional-radiative PrismSPECT code. For computer simulations of the molecular spectra measured in the UV/VIS range a LIFBASE and Specair codes were employed. This way ionization states together with various thermodynamic parameters were deduced. Irradiation of solid samples resulted in melting of a thin near-surface layer or, in some cases its ablation or even conversion to a low temperature plasma. It depended on physico-chemical properties of the material and its thickness. In case of organic polymers, usually ablation connected with fragmentation of the polymer molecules, took place. In case of thick samples of inorganic solids, a thin near surface layer was heated up to a high temperature exceeding melting or even boiling point. In most cases different kinds of micro- or nanostructures were created, modifying the surface morphology. Except the EUV interaction with solid materials, simultaneous EUV and the EUV induced plasma treatment was investigated. Plasmas were created in gases injected close to the exposed surface. Part of the EUV radiation was absorbed in the injected gas forming the low temperature plasma near the surface, while the other part of radiation, that was not absorbed, interacted with the surface material. This way additional atoms could be incorporated into the molecular structure of the exposed material, or reactive etching took place. Especially interesting results were obtained using molecular gases for creation the reactive plasmas.

We present a brief review of radiography technique (shadowgraphy) and its extension to tomography. We used both techniques to characterize i.e. multi-jet gas puff target for different gases with a variable number of jets for various applications. The characterization measurements have been performed with the use of EUV shadowgraphy at 13.5 nm wavelength. Pulses of the EUV radiation were produced with a laser plasma EUV source based on a double-stream gas puff target. The shadowgrams of the characterized gas puff targets were registered using a back-illuminated CCD camera, sensitive to the EUV radiation. The gas density maps were calculated based on 2D transmission map and an atomic photoabsorption cross-section. To obtain 3D tomography reconstruction of multi-jet gas puff target we acquired projections at different viewing angles and performed the reconstruction numerically. This unique technique based on a compact laser-produced plasma source allows imaging 2D and 3D objects having a density 3 orders of magnitude smaller than the density of water.

Tomography is a 3-D imaging method, which allows producing 3-D images by image stacking and numerical refocusing, a spatially localized probing or by sample rotation. Usually, those methods are employed at visible range wavelengths of electromagnetic radiation. It is the simplest, most developed and most common approach since visible light is the part of electromagnetic radiation, which is the closest to humans. There are, however, certain limitations to the visible light methods, such as diffraction limit in the range of hundreds of nanometers, the incapability of direct imaging low-density objects, such as gasses, or the objects being completely opaque to the visible light radiation. Thus, the extension of those methods to the extreme ultraviolet (EUV) and soft X-ray (SXR) spectral ranges allows mitigating those problems. A few examples of such tomographic 3-D imaging experiments employing EUV and SXR compact, tabletop laser plasma sources will be presented and discussed.

A desktop tomography system, based on laser-interaction with a gas puff target, which results in efficient plasma formation emitting in the soft X-ray (SXR, λ = 0.1 - 10 nm) region, was developed at IOE-WAT (Warsaw, Poland). The system, coupled with an ellipsoidal condenser and a Fresnel zone-plate and working in the "water window" spectral range (λ = 2.3 - 4.4 nm) at the quasi-monochromatic He-like nitrogen spectral line (λ=2.88nm), allows acquiring images approaching a resolution of few microns. The development of such setup offers the possibility to obtain a reconstruction of three-dimensional images in a laboratory environment, without the involvement of large "photon facilities". Details about the system and its optimization as well as some imaged samples will be presented and discussed.

Surface modification of polymers is often required to make the material suitable for specific application. Physical and chemical properties can be altered using a number of well developed techniques, such as plasma treatment, excimer lasers, chemical treatment, surface coating, plasma immersion ion implantation-deposition and laser surface structuring. Extreme ultraviolet radiations have limited penetration depth as they are readily absorbed even in low dense medium. However, their interaction with polymer surfaces is very strong due to high energy level of these photons. Therefore, EUV photons can be used to induce surface modifications in the polymer surfaces. This study is focused on the use of EUV photons for chemical surface modification of Polyethylene terephthalate (PET) films to incorporate nitrogen atoms. Nitrogen doping is often desirable in biomaterials to enhance the biocompatibility. EUV treated PET films in the presence of nitrogen and helium environments were studied using X-ray photoelectron spectroscopy (XPS) to examine the EUV induce chemical modifications.Surface modification of polymers is often required to make the material suitable for specific application. Physical and chemical properties can be altered using a number of well developed techniques, such as plasma treatment, excimer lasers, chemical treatment, surface coating, plasma immersion ion implantation-deposition and laser surface structuring. Extreme ultraviolet radiations have limited penetration depth as they are readily absorbed even in low dense medium. However, their interaction with polymer surfaces is very strong due to high energy level of these photons. Therefore, EUV photons can be used to induce surface modifications in the polymer surfaces. This study is focused on the use of EUV photons for chemical surface modification of Polyethylene terephthalate (PET) films to incorporate nitrogen atoms. Nitrogen doping is often desirable in biomaterials to enhance the biocompatibility. EUV treated PET films in the presence of nitrogen and helium environments were studied using X-ray photoelectr...

Low temperature plasmas induced by irradiation of molecular gases with extreme ultraviolet (EUV) pulses were studied. The EUV pulsed beams of high intensity, were formed using laser-produced plasma (LPP) sources, based on Nd:YAG laser systems and a double-stream Xe/He gas-puff target. The EUV beams were used for irradiation of small portions of gases, injected into a vacuum chamber synchronously with the radiation pulses. Low temperature plasmas produced this way in oxygen, nitrogen or sulfur hexafluoride gas emitted radiation in a wide spectral range. The corresponding EUV spectra were dominated by emission lines originating from singly charged, atomic ions. In case of spectra recorded in an optical range, emission lines, corresponding to radiative transitions in atomic or molecular species, were detected. Taking into account a Stark broadening of F I emission lines an electron density was estimated. Its value exceeded 1017cm-3, which is a few orders of magnitude higher comparing to plasmas produced in standard generators. Employing the SF6 – based plasmas an experiment concerning plasma treatment of a silicon surface was performed. A possibility to create different kinds of nanostructures was demonstrated.

In this work, a near edge X-ray fine structure spectroscopy (NEXAFS) based on a laser-plasma compact soft X-ray (SXR) source is presented. The NEXAFS spectrum was acquired simultaneously for all energies near the absorption edge, using a broadband emission from krypton plasma, in contrary to the existing, synchrotron-based spectroscopic systems. In such SXR source, a plasma is produced by an interaction of a laser beam with a double stream gas puff target. The plasma efficiently emits SXR radiation from 2-5 nm wavelength (250-620 eV photon energy). Such broadband emission allows acquiring simultaneously a sample and a reference spectra, to obtain optical density spectrum of the sample near C-Kα absorption edge, due to a special construction of the SXR spectrometer. The NEXAFS spectra were obtained using PET polymer test sample, from both, the large area and spatially localized to ~30×30 μm2 area. The spatially localized spectra were used to construct 2-D spectromicroscopic maps of sample constituents. Single-shot spectra were also acquired with laser pulse energies of ~10 times larger than in the case of multiple exposures. A short overview of those NEXAFS experiments will be presented.

Recently, extreme ultraviolet (EUV) radiation has been increasingly used to modify polymers. Properties such as the extremely short absorption lengths in polymers and the very strong interaction of EUV photons with materials may play a key role in achieving new biomaterials. The purpose of the study was to examine the impact of EUV radiation on cell adhesion to the surface of modified polymers that are widely used in medicine: poly(tetrafluoroethylene) (PTFE), poly (vinylidene fluoride) (PVDF), and poly-L-(lactic acid) (PLLA). After EUV surface modification, which has been performed using a home-made laboratory system, changes in surface wettability, morphology, chemical composition and cell adhesion polymers were analyzed. For each of the three polymers, the EUV radiation differently effects the process of endothelial cell adhesion, dependent of the parameters applied in the modification process. In the case of PVDF and PTFE, higher cell number and cellular coverage were obtained after EUV radiation with oxygen. In the case of PLLA, better results were obtained for EUV modification with nitrogen. For all three polymers tested, significant improvements in endothelial cell adhesion after EUV modification have been demonstrated.