201. Germanium Photodiode Arrays on Silicon-On-Insulator With On-Chip Bias Circuit
- Author
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Steven M. Bowers, Robert Costanzo, Keye Sun, Junyi Gao, Andreas Beling, and Ta-Ching Tzu
- Subjects
Waveguide (electromagnetism) ,Materials science ,Silicon ,business.industry ,chemistry.chemical_element ,Silicon on insulator ,Germanium ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Photodiode ,law.invention ,chemistry ,law ,Optoelectronics ,Radio frequency ,Electrical and Electronic Engineering ,Resistor ,business ,Electronic circuit - Abstract
Foundry-enabled Ge-on-Si waveguide (WG) photodiodes (PDs) with on-chip bias circuit are demonstrated. While a single-element PD has a 52-GHz bandwidth (BW) and a radio frequency (RF) saturation power of −11 dBm at 40 GHz, PD arrays composed of 2 and 4 PDs have RF saturation powers of −6.7 dBm at 40 GHz and −2.3 dBm at 27 GHz, respectively. The bias circuits are analyzed.
- Published
- 2021