201. Angle alignment method for soft x-ray using double-periodic multilayer
- Author
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Xiaoqiang Wang, Xin Wang, Youwei Yao, Yi Huang, Qiushi Huang, Jingtao Zhu, Li Jiang, Jing Xu, Lingyan Chen, Moyan Tan, Shengzhen Yi, Baozhong Mu, Hongying Liu, and Zhanshan Wang
- Subjects
Range (particle radiation) ,Soft x ray ,Materials science ,Optics ,business.industry ,X-ray optics ,Absorption (electromagnetic radiation) ,business ,Full width ,Energy (signal processing) - Abstract
A double-periodic multilayer method was proposed to test KBA system of 4.75keV using 8keV source. Alignment of angle is the key for most of grazing incidence systems in x-ray range. But for soft x-ray, strong absorption makes the alignment have to be operated in vacuum, which is difficult enough. A double-periodic multilayer was used to experiment at 8keV in air replacing 4.75keV in vacuum. This multilayer includes two parts, the top and the bottom. The top is W/B 4 C multilayer with four bilayers and 6.93nm periods. The bottom is W/B 4 C multilayer with 10 bilayers and 3.95nm periods. For 8keV energy, x-ray will penetrate through the top and reflected by the bottom. While for 4.75keV, x-ray will be reflected by the top directly. The full width of half maximum is 0.1° at 8keV and 0.3° at 4.75keV, so it is accurate enough for 4.75keV to experiment at 8keV, which was also verified by the 1-D KBA experiment. This double-periodic multilayer provides a valid solution for alignment in soft x-ray range.
- Published
- 2009