Design of soft x-ray multilayer polarizing elements

The status of polarizing optical elements for the soft x-ray range is reviewed. The criteria for optimum polarization of soft x-ray reflective analyzers, transmission polarizers and phase retarders based on multilayer interference structures are presented. Following these principles, soft x-ray polarizing optical elements have been designed. Designs of broad angular and wavelength range reflective analyzers based on a combination of analytical and numerical methods are also discussed.