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Broadband multilayer polarizers for the extreme ultraviolet
- Source :
- Journal of Applied Physics. 99:056108
- Publication Year :
- 2006
- Publisher :
- AIP Publishing, 2006.
-
Abstract
- Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. Their performances have been characterized using the high precision eight-axis soft x-ray polarimeter at the BESSY facility. Different multilayers have measured s-polarized reflectivities of 27% at 13.1nm and higher than 15% over the wavelength range of 13–19nm. Nearly constant s reflectivity, up to 37%, is observed over the 15–17nm wavelength range, where the degree of polarization is more than 98%. Furthermore, these multilayer polarizers also show high s reflectivity and polarization over a broad angular range at fixed wavelength.
- Subjects :
- Materials science
Silicon
business.industry
Physics::Optics
General Physics and Astronomy
chemistry.chemical_element
Polarimeter
Polarizer
Polarization (waves)
law.invention
Condensed Matter::Materials Science
Wavelength
Optics
chemistry
law
Sputtering
Extreme ultraviolet
Optoelectronics
Degree of polarization
business
Subjects
Details
- ISSN :
- 10897550 and 00218979
- Volume :
- 99
- Database :
- OpenAIRE
- Journal :
- Journal of Applied Physics
- Accession number :
- edsair.doi...........cbe86825aa8b97f1e130012d4d44904c