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52. A review of rapid thermal annealing (RTA) of B, BF 2and As ions implanted into silicon

53. Boron pile up and clustering in silicon-on-insulator films.

54. Mechanism for the reduction of interstitial supersaturations in MeV-implanted silicon.

55. Ultrathin silicon oxynitride film formation by plasma immersion nitrogen implantation.

56. Local structure of 1.54-mum-luminescence Er[sup 3+] implanted in Si.

57. Density of amorphous Si.

58. Impurity trapping and gettering in amorphous silicon.

61. Epitaxial silicides

69. Rapid Thermal Annealing in Si

71. Ion implantation in GaAs

76. Mechanism of silicon exfoliation by hydrogen implantation and He, Li and Si co-implantation [SOI technology]

80. Buried ultra-low-energy gate implants for sub-0.25 micron CMOS technology

81. A symmetric 0.25 μm CMOS technology for low-power, high-performance ASIC applications using 248 nm DUV lithography

100. Gettering of Co in Si by high-energy B ion-implantation and by p/p[sup +] epitaxial Si.

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