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444 results on '"Bodermann, Bernd"'

55. Comparison of far field characterisation of DOEs with a goniometric DUV-scatterometer and a CCD-based system

Author

Wurm Matthias, Bonifer Stefanie, Bodermann Bernd, and Gerhard Michael

Subjects
doe, optical diffuser, scatterometry, 193 nm, scattering, Applied optics. Photonics, TA1501-1820, Optics. Light, QC350-467
Abstract

We have measured far field diffraction patterns of different diffractive optical elements at an illumination wavelength of 193 nm using a new type of goniometric DUV (deep ultraviolet) scatterometer. This system offers both a high dynamic range and angular resolution. The scatterometer is especially suitable to analyse weak background light like stray light and local variations of the diffraction patterns over the DOEs (diffractive optical element). The measurement results are compared with measurements using a CCD (charge-coupled device)-based imaging DOE measurement system. An excellent agreement of the measured far field distributions is demonstrated.

Published
2011
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60. Large Area Metasurface Lenses in the NIR Region

Author

Kenney, Mitchell Guy, Grant, James, Hao, Danni, Docherty, Kevin, Mills, Gordon, Jeffrey, Graham, Macleod, Donald, Henry, David, MacKay, Peter, Sorel, Marc, Lamb, Robert A., Cumming, David, Bodermann, Bernd, Frenner, Karsten, and Silver, Richard M.

Abstract

Metasurfaces have revolutionized the definition of compact optics. Using subwavelength periodic structures of nanostructured dielectrics, the refractive index and absorption properties of metasurfaces – which are 2D metamaterials – can manipulate light to a degree not possible with conventional bulk glasses and crystals. The phase, polarization, spin (for circularly polarized light), amplitude and wavelength of light can all be manipulated and crafted to user-specified values to mimic the action of a lens, which we refer to as a metalens (ML). MLs have four major advantages over traditional refractive lenses – superior resolution, lighter weight, miniaturization and cost. Many metasurfaces with useful functionalities have been proposed in recent years, yet although novel in their approach have few real-world applications. One such market is the use within infrared laser systems, such as laser designators. In this work, we demonstrate metasurface lenses working at a wavelength of λ = 1064 nm, with aperture d = 1 mm and four different Fnumbers (focal length f = 0.5, 1, 2 and 5 mm). The lenses are composed of 700nm high a-Si pillars – ranging from 70- 360 nm diameter – which are fabricated using electron beam lithography (EBL) and reactive ion etching processes, on top of a fused silica substrate. Such lenses are shown to have diffraction-limited performance, with focal spot-size agreeing with theoretical values of λ‧f/d. Furthermore, we have designed large area lenses with aperture d = 10 mm, where the number of pillars per lens exceeds 550 million. By using an efficient Python script, we are able to produce these 100 mm2 samples with just 14 hours of EBL writing time.

Published
2019

86. Evaluation of the aberrations of a PDMS lens

Author

Bodermann, Bernd, Frenner, Karsten, Silver, Richard M., Campos-García, Manuel, Martínez-Rodríguez, Ángel Eugenio, Huerta-Carranza, Oliver, Vargas-Alfredo, Celestino, Santiago-Alvarado, Agustín, and Moreno-Oliva, Victor Iván

Published
2019
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