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Ellipsometric characterizations of individual nanoform structures

Authors :
Hatsuzawa, Takeshi
Tutsch, Rainer
Yoshizawa, Toru
Kaeseberg, Tim
Grundmann, Jana
Teichert, Sven
Wurm, Matthias
Siefke, Thomas
Kroker, Stefanie
Bodermann, Bernd
Source :
Proceedings of SPIE; October 2021, Vol. 11927 Issue: 1 p119270O-119270O-3, 1073434p
Publication Year :
2021

Details

Language :
English
ISSN :
0277786X
Volume :
11927
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs58297032
Full Text :
https://doi.org/10.1117/12.2616273