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Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method
- Source :
- Proceedings of SPIE; June 2021, Vol. 11783 Issue: 1 p117830N-117830N-4, 1060475p
- Publication Year :
- 2021
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11783
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs56966311
- Full Text :
- https://doi.org/10.1117/12.2592650