1. Charge Trapping and Transconductance Degradation in Irradiated 3-D Sequentially Integrated FDSOI MOSFETs.
- Author
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Toguchi, Shintaro, Zhang, En Xia, Fleetwood, Daniel M., Schrimpf, Ronald D., Reed, Robert A., Moreau, Stephane, Cheramy, Severine, Batude, Perrine, Brunet, Laurent, Andrieu, Francois, and Alles, Michael L.
- Subjects
METAL oxide semiconductor field-effect transistors ,BUDGET process ,TRANSISTORS ,SILICON compounds ,HAFNIUM oxide - Abstract
Total-ionizing-dose (TID) effects are compared in 1) conventional high-temperature processed planar fully-depleted silicon-on-insulator (FD-SOI) p-channel MOSFETs, 2) 3-D sequentially integrated (3DSI) FD-SOI MOSFETs in the bottom layer with additional thermal budget and process flows due to the creation of the top layer, and 3) 3DSI low-temperature-processed FD-SOI MOSFETs in the top layer. When irradiated under worst case negative bias, 3DSI bottom-isolated transistors show significantly enhanced charge trapping and transconductance degradation than planar devices. The enhanced degradation for bottom-isolated devices is attributed primarily to increased interface- and border-trap formation at the buried oxide (BOX)/Si interface and/or lateral charge nonuniformities in the BOX. The radiation-induced transconductance degradation in top-isolated devices is attributed to the increased resistance of the portion of the channel that underlies the source/drain spacers. [ABSTRACT FROM AUTHOR]
- Published
- 2021
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