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1. Thermal characterization of a nematic liquid crystal suited for the fabrication of NIR spectrally-tunable vertical cavity surface emitting lasers

Author

Benjamin Boisnard, Andrea Simaz, Julien Lumeau, Pierluigi Debernardi, Thomas Begou, Véronique Bardinal, Benjamin Reig, Alberto Tibaldi, Thierry Camps, Jean Baptiste Doucet, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), RCMO (RCMO), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Department of Electronics and Telecommunications = DET Dipartimento di Elettronica e Telecomunicazioni [Politecnico di Torino] (DET), Politecnico di Torino = Polytechnic of Turin (Polito), Istituto di Elettronica e di Ingegneria dell'Informazione e delle Telecomunicazioni (IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), and ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015)

Subjects
Fabrication, Materials science, business.industry, Laser, Electronic, Optical and Magnetic Materials, Characterization (materials science), law.invention, Liquid crystal, law, Thermal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, [PHYS.COND.CM-SCM]Physics [physics]/Condensed Matter [cond-mat]/Soft Condensed Matter [cond-mat.soft]
Abstract

International audience; In this work, the thermo-optical properties of a nematic liquid crystal are determined through reflectance measurements performed on a high finesse tunable filter fabricated using a polymer-based microcell technology. The final aim is to insert such material in the optical cavity of a 850 nm tunable VCSEL device, in which local self-heating due to CW pumping must be taken into account. These localized interferometric experiments are performed in the near-infra-red range and at temperatures up to 115 °C. A thermal model is derived from the acquired data. Finally, we demonstrate that the birefringence of QYPDLC-36 liquid crystal remains higher than 0.18 at 60 °C, feature well suited to real device operation.

Published
2022

2. A New Miniaturized Gas Sensor Based on Zener Diode Network Covered by Metal Oxide

Author

Eve Hennequin, Thierry Camps, Vignesh Gunasekaran, Soffian Yjjou, Nicolas Mauran, Lionel Presmanes, Philippe Menini, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC), Service Instrumentation Conception Caractérisation (LAAS-I2C), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université Toulouse III - Paul Sabatier (UT3), and Université de Toulouse (UT)-Université de Toulouse (UT)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP)

Subjects
Materials science, Oxide, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, Article, chemistry.chemical_compound, Sputtering, Hardware_INTEGRATEDCIRCUITS, ZnO:Ga thin layer, TJ1-1570, Wafer, miniaturized gas sensor network, Mechanical engineering and machinery, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Diode, p-n junction, business.industry, [SDE.IE]Environmental Sciences/Environmental Engineering, Mechanical Engineering, metal oxide, 021001 nanoscience & nanotechnology, Chip, 0104 chemical sciences, chemistry, RF-sputtering, Control and Systems Engineering, Optoelectronics, Zener diode, 0210 nano-technology, business, p–n junction, Wireless sensor network
Abstract

International audience; The development of “portable, low cost and low consumption” gas microsensors is one of the strong needs for embedded portable devices in many fields such as public domain. In this paper, a new approach is presented on making, on the same chip, a network of head-to-tail facing PN junctions in order to miniaturize the sensor network and considerably reduce the required power for heating each cell independently. This paper is about recognizing a device that integrates both sensing and self-heating. This first study aims to evaluate the possibilities of this type of diode network for use as a gas sensor. The first part concerns the description of the technological process that is based on a doped polysilicon wafer in which a thin layer of metal oxide (a gallium-doped zinc oxide in our case) is deposited by RF sputtering. An electrical model will be proposed to explain the operation and advantage of this approach. We will show the two types of tests that have been carried out (static and dynamic) as well as the first encouraging results of these electrical characterizations under variable atmospheres.

Published
2021

3. 33 nm wavelength tuning of a 1550 nm VCSEL in CW operation based on the liquid crystal micro-cells technology

Author

Laurent Dupont, Véronique Bardinal, Mehdi Alouini, Jean Baptiste Doucet, Benjamin Boisnard, Sophie Bouchoule, Christophe Levallois, Nicolas Chevalier, Thierry Camps, Karine Tavernier, Cyril Paranthoen, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)

Subjects
photodetection, Liquid crystal devices, Materials science, business.industry, Photodetection, semiconductor lasers, VCSEL, Vertical-cavity surface-emitting laser, Semiconductor laser theory, Wavelength, Liquid crystal, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, tunable, liquid crystal devices, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business
Abstract

International audience; We present CW operation of a tunable InP based Vertical Cavity Surface Emitting Laser, integrating a liquid crystal (LC) micro-cell. In comparison with previous work, a larger 33 nm (vs 23 nm) tuning and stable operation are obtained, according to major improvements presented in this paper.

Published
2021

4. Anisotropic Transverse Confinement Design for Electrically Pumped 850 nm VCSELs Tuned by an Intra Cavity Liquid-Crystal Cell

Author

Francesco Bertazzi, Benjamin Boisnard, Thierry Camps, Jean-Baptiste Doucet, Benjamin Reig, Véronique Bardinal, Andrea Simaz, Alberto Tibaldi, Pierluigi Debernardi, Michele Goano, CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Department of Electronics and Telecommunications [Torino] (DET), Politecnico di Torino = Polytechnic of Turin (Polito), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
Materials science, Multiphysics, Physics::Optics, Optical power, 02 engineering and technology, semiconductor lasers, Grating, 01 natural sciences, 7. Clean energy, law.invention, Vertical-cavity surface-emitting laser, Semiconductor laser theory, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, Liquid crystal, law, 0103 physical sciences, Vertical cavity surface emitting lasers, liquid crystal devices, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, 021001 nanoscience & nanotechnology, Laser, simulation, Atomic and Molecular Physics, and Optics, [SPI.TRON]Engineering Sciences [physics]/Electronics, Transverse plane, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Liquid crystal devices, Semiconductor lasers, Simulation, 0210 nano-technology, business
Abstract

International audience; Relying on preliminary experiments, in this work we design a tunable 850 nm laser based on a hybrid combination of a liquid crystal micro-cell with nanoimprinted grating and an electrically-pumped GaAs half-VCSEL. The optical design is challenging due to the inherent tolerances of this hybrid technology, the presence of metals in the cavity and the need for single fundamental extraordinary mode emission over the whole tuning range. To ensure proper operation, we introduce for the first time the new concept of anisotropic transverse confinement design. The overall performance is verified by our multiphysics VCSEL suite. Beyond tuning features, we predict side mode suppression ratio and optical power under all working conditions, comparing the performance of liquid crystals with different clearing temperatures. The results qualifies these lasers as viable tunable sources with interesting performance and complementary features compared to other technologies.

Published
2021

5. Near infrared photopolymer for micro‐optics applications

Author

Carole Ecoffet, Ihab Dika, Jean-Baptiste Doucet, Benjamin Reig, Jean-Pierre Malval, Olivier Soppera, Frédéric Diot, Thierry Camps, Aurélien Bruyant, David Barat, Véronique Bardinal, Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace, Centre National de la Recherche Scientifique (CNRS)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Strasbourg (UNISTRA)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Université de Strasbourg (UNISTRA), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse 1 Capitole (UT1)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Université Fédérale Toulouse Midi-Pyrénées, Lumière, nanomatériaux et nanotechnologies (L2n), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), and Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM)

Subjects
optical fiber, Optical fiber, Materials science, Fabrication, Polymers and Plastics, 02 engineering and technology, waveguide, 010402 general chemistry, 01 natural sciences, law.invention, Photopolymer, Optics, microlenses, law, Materials Chemistry, Physical and Theoretical Chemistry, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, Near-infrared spectroscopy, NIR, 021001 nanoscience & nanotechnology, 0104 chemical sciences, Core (optical fiber), [CHIM.POLY]Chemical Sciences/Polymers, Single-core, Photonics, 0210 nano-technology, business, Waveguide, Microfabrication
Abstract

International audience; Near infrared (NIR) activable photopolymers suitable for versatile fabrication of micro-optical elements were developed. The first main objective of this paper is to show that these new photopolymers can be used for microfabrication and investigate the parameters governing the microfabrication process. The impact of photonic, physico-chemical and chemical parameters is discussed. High quality microstructures with a good control over their size and shape are demonstrated. The second main objective is to show practical examples of microlenses and waveguides implemented on single core and multiple core optical fibers, VCSELs, and glass slides are then presented. The NIR photosensitivity of this negative tone photoresists allows using the device source itself as to start the crosslinking process, which constitutes a convenient approach for micro-optics self-positioning on NIR sources and justifies the interest of such NIR photopolymer for the fabrication micro-optical elements and optical interconnects. 2

Published
2020

6. CW Operation of a Tunable 1550-nm VCSEL Integrating Liquid-Crystal Microcells

Author

Cyril Paranthoen, S. Pes, Pierluigi Debernardi, Thierry Camps, Véronique Bardinal, K. Tavernier, Sophie Bouchoule, Christophe Levallois, Laurent Dupont, Benjamin Boisnard, B. Sadani, Mehdi Alouini, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Centre de Nanosciences et de Nanotechnologies (C2N), Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Direction Générale de l’Armement (DGA), French National Research Agency (ANR), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), and Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR)

Subjects
Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optical pumping, 020210 optoelectronics & photonics, Liquid crystal, law, 0202 electrical engineering, electronic engineering, information engineering, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, Birefringence, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Vertical-cavity surface-emitting lasers, Liquid crystal devices, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, business, Lasing threshold, Refractive index
Abstract

International audience; An InP-based Vertical-Cavity Surface-Emitting 1 Laser (VCSEL) with a liquid crystal (LC) microcell monolithically integrated on its surface for spectral tuning is investigated. Unlike tunable VCSELs integrating a movable membrane, here the physical length of the cavity remains unchanged and only the voltage applied on the LC ensures a refractive index modification for a particular polarization emitted by the VCSEL. This tunable VCSEL operates in CW at room temperature and exhibits more than 23 nm wavelength tuning around 1.55 µm at a maximum applied voltage of 20 V. The measured laser threshold around 6.5 mW is still comparable to VCSEL without LC microcell, a clear indication that the optical losses related to the LC are very low. On the other hand, for this first optically pumped device, the lasing characteristics suggest that the LC birefringence is lower than expected. To assess this hypothesis, thermo-optical simulations have been conducted.

Published
2020

7. Thermal Characterization of the Birefringence of Nematic Liquid Crystals for the Design of Widely-tunable LC-VCSELs

Author

Jean-Baptiste Doucet, Alberto Tibaldi, Thierry Camps, Pierluigi Debernardi, Véronique Bardinal, Andrea Simaz, Benjamin Boisnard, B. Reig, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Politecnico di Torino = Polytechnic of Turin (Polito), Université Toulouse III - Paul Sabatier (UT3), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Birefringence, Materials science, business.industry, 02 engineering and technology, 01 natural sciences, Reflectivity, Spectral line, [SPI.MAT]Engineering Sciences [physics]/Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Vertical-cavity surface-emitting laser, Characterization (materials science), 010309 optics, 020210 optoelectronics & photonics, Operating temperature, Liquid crystal, 0103 physical sciences, Thermal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, 0202 electrical engineering, electronic engineering, information engineering, Optoelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business
Abstract

International audience; In this work, the thermo-optical properties of nematic liquid crystals are investigated through localized reflectance spectra measurements performed on a tunable LC-filter. The final aim is to insert such LC in the cavity of a tunable VCSEL device, in which local self-heating due to optical or electrical pumping must be taken into account. We demonstrate that, whereas standard LC E7 is not suited for real device operation, the maximal operating temperature of QYDPLC-36 LC is 95°C, with a birefringence at 1.55 μm higher than 0.18 at 60°C.

Published
2020

8. Optical Design Issues in Electrically Pumped Tunable Liquid-Crystal VCSELs

Author

Jean-Baptiste Doucet, Alberto Tibaldi, B. Reig, Véronique Bardinal, Francesco Bertazzi, Michele Goano, Thierry Camps, Benjamin Boisnard, Andrea Simaz, Pierluigi Debernardi, Politecnico di Torino = Polytechnic of Turin (Polito), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse III - Paul Sabatier (UT3), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Liquid crystal devices, Materials science, 02 engineering and technology, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 03 medical and health sciences, 020210 optoelectronics & photonics, 0302 clinical medicine, Optical coherence tomography, Liquid crystal, law, Vertical cavity surface emitting lasers, Liquid crystal devices, Semiconductor lasers, Simulation, Vertical cavity surface emitting lasers, 0202 electrical engineering, electronic engineering, information engineering, medicine, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Semiconductor lasers, medicine.diagnostic_test, business.industry, Solver, Laser, [SPI.TRON]Engineering Sciences [physics]/Electronics, 030221 ophthalmology & optometry, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, business, Lasing threshold, Simulation
Abstract

International audience; In this work we investigate a tunable 850nm laser based on a hybrid combination of a liquid crystal micro-cell and a half GaAs VCSEL. The target application is optical coherence tomography. The inherent tolerances of the hybrid technology, the presence of metals in the cavity and the need for a pure extraordinary mode lasing make challenging the optical design of this laser. Hence, VELM, a full 3D and vectorial VCSEL optical solver, is utilized to understand loss mechanisms and provide an optimized design.

Published
2020

9. Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Author

Jean-Baptiste Doucet, Benjamin Reig, Yu Zhao, Qingyue Li, Julien Perchoux, Fabien Mesnilgrente, Véronique Bardinal, Clément Tronche, Pierre-François Calmon, Thierry Camps, Beijing University of Technology, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Service Instrumentation Conception Caractérisation (LAAS-I2C), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Equipe Capteurs optiques et systèmes intégrés intelligents (LAAS-OASIS), Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Materials science, laser beam shaping, Microfluidics, microfluidic, 02 engineering and technology, 01 natural sciences, VCSEL, Collimated light, [SPI.MAT]Engineering Sciences [physics]/Materials, law.invention, Vertical-cavity surface-emitting laser, doppler, 010309 optics, law, 0103 physical sciences, General Materials Science, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Instrumentation, laser sensing, Fluid Flow and Transfer Processes, micro-nano, business.industry, Process Chemistry and Technology, General Engineering, 021001 nanoscience & nanotechnology, Laser, Chip, [SPI.TRON]Engineering Sciences [physics]/Electronics, Computer Science Applications, Lens (optics), Interferometry, Resist, technology, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, integrated microoptics, 0210 nano-technology, business
Abstract

Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 &micro, m &times, 200 &micro, 150 &micro, m). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.

Published
2019
Full Text
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10. Optical Feedback Interferometry Based Microfluidic Sensing: Impact of Multi-Parameters on Doppler Spectral Properties

Author

Julien Perchoux, Yu Zhao, Véronique Bardinal, Thierry Camps, Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
medicine.medical_specialty, VCSELs, Materials science, microfluidics, spectral imaging, 01 natural sciences, 7. Clean energy, Signal, lcsh:Technology, optical feedback interferometry, Light scattering, 010309 optics, lcsh:Chemistry, symbols.namesake, Optics, 0103 physical sciences, medicine, General Materials Science, sensing mechanisms, Instrumentation, lcsh:QH301-705.5, Microscale chemistry, Fluid Flow and Transfer Processes, Computer simulation, business.industry, lcsh:T, Process Chemistry and Technology, 010401 analytical chemistry, General Engineering, lcsh:QC1-999, 0104 chemical sciences, Computer Science Applications, Spectral imaging, optical simulation, Interferometry, lcsh:Biology (General), lcsh:QD1-999, 13. Climate action, lcsh:TA1-2040, symbols, Reflection (physics), [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, business, lcsh:Engineering (General). Civil engineering (General), Doppler effect, lcsh:Physics
Abstract

As a compact and simple sensing technique, optical feedback interferometry (OFI) can be a promising flowmetry method in various microfluidic applications. In this paper, OFI-based flowmetry sensor performance in a microscale flow scheme is studied theoretically and experimentally. An innovating model and different numerical methods are investigated, where the scattering light angle distribution is involved to predict the Doppler frequency distribution. For the first time, our model describes the influences of multiple OFI sensor system characteristics, such as flowing particle size, concentration, channel interface reflectivity and channel dimension, on the OFI signal spectral performances. In particular, a significant OFI signal level enhancement was achieved by deposing a high reflectivity gold layer on the rear channel interface due to the increased forward scattered light reflection. The consistent experimental validation associated with the simulations verifies this numerical simulation method&rsquo, s reliability. The numerical methods presented here provide a new tool to design novel microfluidic reactors and sensors.

Published
2019

11. InP-based devices integrating liquid crystals microcells for a tunable laser emission or a wavelength selective photodetection

Author

B. Sadani, Laurent Dupont, Sophie Bouchoule, Cyril Paranthoen, Thierry Camps, Mehdi Alouini, Benjamin Boisnard, Christophe Levallois, Véronique Bardinal, S. Pes, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Centre de Nanosciences et Nanotechnologies (C2N (UMR_9001)), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Département Optique (IMT Atlantique - OPT), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), and IMT Atlantique (IMT Atlantique)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Optical communication, Photodetection, 7. Clean energy, Vertical-cavity surface-emitting laser, Photodiode, law.invention, Wavelength, law, Liquid crystal, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, Photonics, business, Tunable laser
Abstract

International audience; Photonic devices with wavelength tuning capabilities are investigated with the use of liquid crystal microcells monolithically integrated onto the surfaces of photodiodes or VCSEL fabricated on InP based materials. For these two devices, we demonstrated that the detected or emitted wavelength can be selected on a tuning range of more than 70 nm in the case of the photodiode, and of more than 20 nm in the case of VCSEL.

Published
2019

12. Liquid crystal-based tunable photodetector operating in the telecom C-band

Author

Mehdi Alouini, Benjamin Boisnard, Christophe Levallois, Laurent Dupont, Sophie Bouchoule, Benattou Sadani, Véronique Bardinal, Salvatore Pes, Cyril Paranthoen, Thierry Camps, Jean-Baptiste Doucet, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), ANR-14-ASTR-0007-01, Agence Nationale de la Recherche, ARED-VELOCE 8917, Conseil Régional de Bretagne, Direction Générale de l’Armement, ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)

Subjects
Photocurrent, Amplified spontaneous emission, Materials science, business.industry, Photodetector, 02 engineering and technology, LC circuit, 01 natural sciences, Atomic and Molecular Physics, and Optics, Photodiode, law.invention, 010309 optics, Laser linewidth, 020210 optoelectronics & photonics, Optics, Liquid crystal, law, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business, Tunable laser
Abstract

International audience; Liquid crystal (LC) microcells monolithically integrated on the surface of InGaAs based photodiodes (PDs) are demonstrated. These LC microcells acting as tunable Fabry-Perot filters exhibit a wavelength tunability of more than 100 nm around 1550 nm with less than 10V applied voltage. Using a tunable laser operating in the S and C bands, photocurrent measurements are performed. On a 70 nm tuning range covered with a driving voltage lower than 7V, the average sensitivity for the PD is 0.4 A/W and the spectral linewidth of the LC filter remains constant, showing a FWHM of 1.5 nm. Finally, the emission spectrum from an Er-doped fiber is acquired by using this tunable PD as a micro-spectrometer.

Published
2018

13. Liquid crystal based tunable PIN-photodiodes for detection around 1.55-µm

Author

Laurent Dupont, Véronique Bardinal, Benattou Sadani, Benjamin Boisnard, Christophe Levallois, Jean-Baptiste Doucet, Mehdi Alouini, Thierry Camps, Sophie Bouchoule, Cyril Paranthoen, Salvatore Pes, Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), DGA-MRIS and Région Bretagne (grant ARED-VELOCE 8917), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, and IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique)

Subjects
Materials science, Photodetector, 02 engineering and technology, Photodetection, 01 natural sciences, law.invention, 010309 optics, 020210 optoelectronics & photonics, WDM, law, Liquid crystal, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Photodiodes, business.industry, Optical communications, Photodetectors, Integrated optics, Laser, Photodiode, Full width at half maximum, Wavelength, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Liquid-crystal, business, Tunable laser
Abstract

International audience; In this work, we report InGaAs based photodiodes integrating liquid crystal (LC) microcells resonant microcavity on their surface. The LC microcavities monolithically integrated on the photodiodes act as a wavelength selective filter for the device. Photodetection measurements performed with a tunable laser operating in the telecom S and C bands demonstrated a wavelength sweep for the photodiode from 1480 nm to 1560 nm limited by the tuning range of the laser. This spectral window is covered with a LC driving voltage of 7V only, corresponding to extremely low power consumption. The average sensitivity over the whole spectral range is 0.4 A/W, slightly lower than 0.6 A/W for similar photodiodes that do not integrate such a LC tunable filter. The quality of the filter integrated onto the surfaces of the photodiodes is constant over a large tuning range (70 nm), showing a FWHM of 1.5 nm.

Published
2018

14. Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices

Author

Jean-Baptiste Doucet, Laurent Dupont, Christophe Levallois, B. Sadani, Emmanuelle Daran, Véronique Bardinal, Cyril Paranthoen, Sophie Bouchoule, B. Boisnard, X. Lafosse, Thierry Camps, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Centre de Nanosciences et de Nanotechnologies [Marcoussis] (C2N), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Institut des Fonctions Optiques pour les Technologies de l'informatiON (Institut FOTON), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS), IMT Atlantique (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT), Département Optique (IMT Atlantique - OPT), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), ANR-15-CE19-0012 DOCT VCSEL, Agence Nationale de la Recherche, ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Centre National de la Recherche Scientifique (CNRS)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-IMT Atlantique Bretagne-Pays de la Loire (IMT Atlantique), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS)-Université de Rennes 1 (UR1), and Université de Rennes (UNIV-RENNES)

Subjects
dry thick resist, Materials science, Fabrication, 02 engineering and technology, Grating, nanoimprint, film, 01 natural sciences, VCSEL, Vertical-cavity surface-emitting laser, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, 020210 optoelectronics & photonics, grating, law, 0103 physical sciences, soft transfer, 0202 electrical engineering, electronic engineering, information engineering, Wafer, liquid crystal devices, Electrical and Electronic Engineering, tunable optical filter, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, business.industry, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Resist, Optical cavity, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, wafer-scale fabrication, Photonics, business
Abstract

A simple technology is demonstrated for the wafer-scale fabrication of liquid-crystal (LC) microcells that can be integrated in active optoelectronic devices. Fabrication of 1.55- $\mu \text{m}$ tunable Fabry–Perot optical micro-filter arrays is achieved owing to the insertion of a single nanoimprinted polymer grating dedicated to LC alignment and to the soft thermal transfer of a dry thick resist film between two highly reflective mirrors. The filter exhibits a spectral tuning range of 102 nm with only 18 V applied, as well as negligible internal loss, which makes it suitable for being inserted in a laser cavity. This constitutes a key step toward the large-scale integration of widely tunable photonic devices such as vertical-cavity surface-emitting lasers using LC technology.

Published
2018

15. Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

Author

Thierry Camps, Jean-Baptiste Doucet, Benjamin Boisnard, Benjamin Reig, Emmanuelle Daran, Laurène Salvi, Sami Abada, Rémi Courson, Véronique Bardinal, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), RENATECH, ANR-15-CE19-0012,DOCT-VCSEL,Tomographie par Cohérence Optique portable à source accordable MEMS-VCSEL pour l'analyse de la peau(2015), ANR-14-ASTR-0007,HYPOCAMP,Lasers à cavités verticales accordables hybrides , contrôlées en polarisation et entièrement monolithiques pour la conception systèmes optiques et micro-ondes embarqués et compacts.(2014), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
0209 industrial biotechnology, VCSELs, Fabrication, Materials science, dynamic beam shaping, Nanotechnology, 02 engineering and technology, Photoresist, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, 020901 industrial engineering & automation, Planar, Microfluidic channel, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Laser beams, Microlens, chemistry.chemical_classification, business.industry, 010401 analytical chemistry, Polymer, 0104 chemical sciences, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, MOEMS, micro-optics, Resist, chemistry, dry thick resist film, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, wafer-scale fabrication, business
Abstract

International audience; This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sizedsamples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.

Published
2017

16. Optical Feedback Interferometry Flowmetry Sensor in Microfluidics Chip

Author

Véronique Bardinal, Julien Perchoux, Yu Zhao, Thierry Camps, Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Équipe MICrosystèmes d'Analyse (LAAS-MICA), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
Physics, Scattering, business.industry, Microfluidics, Flow (psychology), microfluidics, lcsh:A, Chip, optical feedback interferometry, Signal, laser sensors, Volumetric flow rate, Interferometry, ray tracing simulation, Optics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, lcsh:General Works, business, Microscale chemistry
Abstract

International audience; Optical feedback interferometry (OFI) applied to microscale flow sensing is studied theoretically and experimentally. A new model is investigated that predicts the OFI signal. This model is based on the Lang-Kobayashi equations and highlights the importance of the laser beam propagation and the laser-particle scattering performances. For the first time, the angle distribution of the scattered light is involved in the model. The model evaluates the impact on the OFI signal of the light propagation in the micro-scale channel geometry. The flow rate measurement shows good agreement with the model.

Published
2017

17. Optical feedback interferometry for microscale-flow sensing study: numerical simulation and experimental validation

Author

Lucie Campagnolo, Thierry Camps, Julien Perchoux, Yu Zhao, Reza Atashkhooei, Véronique Bardinal, Équipe Optoélectronique pour les Systèmes Embarqués (LAAS-OSE), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Universitat Politècnica de Catalunya [Barcelona] (UPC), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Physics, [PHYS.PHYS.PHYS-FLU-DYN]Physics [physics]/Physics [physics]/Fluid Dynamics [physics.flu-dyn], Computer simulation, Forward scatter, business.industry, 02 engineering and technology, 01 natural sciences, Signal, Atomic and Molecular Physics, and Optics, Flow measurement, Volumetric flow rate, 010309 optics, Interferometry, OCIS codes: (2803340) Laser Doppler velocimetry, (2507260) Vertical cavity surface emitting lasers, (2803420) Laser sensors (2802490) Flow diagnostics, 020210 optoelectronics & photonics, Optics, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, Reflection (physics), business, Microscale chemistry
Abstract

International audience; Optical feedback interferometry (OFI) performance for microscale-flow sensing is studied theoretically and experimentally. A new numerical modeling approach for OFI flow meter spectrum reproduction is presented in this work to study the optical effect on the signal due to the micro-scale channel geometry. Two well-defined frequency peaks are found in the OFI spectrum, this phenomenon can be attributed to the reflection of the forward scattered light on the channel rear interface. The flow rate measurement shows good accuracy over a range of fluid velocities from 16.8 mm/s to 168 mm/s, thus providing a promising tool to study and to optimize the OFI microfluidic sensor system.

Published
2016

18. Management of the electrical injection uniformity in broad-area top-emitting VCSELs

Author

Jean-Baptiste Doucet, Ludovic Salvagnac, Véronique Bardinal, M. Condé, E. Havard, Thierry Camps, Guilhem Almuneau, Sébastien Pinaud, and Chantal Fontaine

Subjects
Physics, Optics, business.industry, Optical physics, Nonlinear optics, Plasma, business, Layer (electronics), Atomic and Molecular Physics, and Optics, Power (physics)
Abstract

The electrical properties of broad-area 850 nm top emitting VCSELs have been investigated in order to improve carrier injection uniformity in their active zone. First, we have demonstrated using an electrical simulation tool that a multi-point localized injection design associated with a spreading layer at the top of the device (ITO) can lead to a significant improvement of carrier injection and on its spatial distribution. Secondly, the electrical contrast achievable by applying this method with localized etchings has been experimentally measured. Finally, stripe-shaped devices with output power up to 50 mW in a continuous-wave operation at room temperature have been demonstrated.

Published
2010

19. Lateral Waveguiding Properties of VCSELs for Integrated Optical Monitoring

Author

C. Amat, Chantal Fontaine, Guilhem Almuneau, Véronique Bardinal, Emmanuelle Daran, Charlotte Bringer, Thierry Camps, and M. Suleiman

Subjects
Materials science, business.industry, Physics::Optics, Optical power, Laser, Waveguide (optics), Signal, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, Optics, Transmission (telecommunications), law, Optoelectronics, Spontaneous emission, Electrical and Electronic Engineering, business
Abstract

We have investigated experimentally the optical behaviour of a Vertical-Cavity Surface-Emitting Lasers (VCSEL) when it is used as a lateral waveguide. This provides a better understanding of the mechanisms involved in VCSEL optical power monitoring by integrated lateral detection. The lateral optical spectra as well as the waveguide transmission spectrum have been measured. Their analysis and comparison demonstrate that the lateral signal is mostly coming from the spontaneous emission escaping laterally from the VCSEL and that light is filtered during the propagation and detection processes. This allows us to explain previous results obtained in two different configurations of lateral detection. These results are useful to optimize the lateral detection performances for concrete applications in monitoring or telemetry systems.

Published
2006

20. Matrix of 10×10 addressed solid propellant microthrusters: Review of the technologies

Author

Phuong Quyên Pham, Carole Rossi, Thierry Camps, Nicolaas F. de Rooij, Danick Briand, and Maxime Dumonteuil

Subjects
Microelectromechanical systems, Propellant, Engineering, Fabrication, business.industry, Nozzle, Metals and Alloys, Electrical engineering, Condensed Matter Physics, Combustion, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Ignition system, Matrix (mathematics), law, Electrical and Electronic Engineering, Aerospace engineering, business, Instrumentation, Microfabrication
Abstract

An EC funded MicroPyros project has permitted to develop the technologies to fabricate, assemble and command solid propellant microthrusters arrays for thrusts of a few of milli Newtons The prototype built for space application has 100 individually addressed ∅ 1.5 mm × 1.5 mm thrusters on 576 mm2. Nozzles’ throats are 250 μm and 500 μm. This paper reviews the prototype structure and details the final processes for the fabrication and assembling. This paper presents also a new addressing technology based on polysilicon threshold elements used for the addressing and heating of each thruster in the array. With polysilicon threshold element, ignition success is of 100% with an input power of 250 mW using a zirconium perchlorate potassium (ZPP) material. Then, the combustion of a glycidyle azide polymer (GAP) is sustained in the chamber and generate thrusts in the range of 0.3–2.3 mN depending of the micronozzle dimension.

Published
2006

21. Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping

Author

Jean-Baptiste Doucet, Sami Abada, Véronique Bardinal, Benjamin Reig, Thierry Camps, Emmanuelle Daran, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), RENATECH (French Network of Major Technology Centers) within LAAS-CNRS for technological support and Region Midi-Pyrénées (FIAB SU-8 project), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)

Subjects
Fabrication, Materials science, polymer, 02 engineering and technology, VCSEL, law.invention, Vertical-cavity surface-emitting laser, [SPI.MAT]Engineering Sciences [physics]/Materials, 020210 optoelectronics & photonics, collective fabrication, law, Microsystem, self-alignment, 0202 electrical engineering, electronic engineering, information engineering, Micro-Opto-Electro-Mechanical Systems, Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, microlens fabrication, Microelectromechanical systems, Multi-mode optical fiber, business.industry, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, SU-8, [SPI.TRON]Engineering Sciences [physics]/Electronics, Lens (optics), MOEMS, MEMS, microoptics, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, electro-thermal actuation
Abstract

In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III–V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.

Published
2014

22. Uniform fabrication of thick SU-8 patterns on small-sized wafers for micro-optics applications

Author

Jean-Baptiste Doucet, Benjamin Reig, Stéphane Charlot, Thierry Camps, Emmanuelle Daran, Véronique Bardinal, and Sami Abada

Subjects
Fabrication, Materials science, business.industry, engineering.material, Nanoimprint lithography, law.invention, Optics, Coating, Resist, law, Thermal, engineering, Wafer, Photolithography, Air gap (plumbing), business
Abstract

This paper reports on an alternative method for precise and uniform fabrication of 100μm-thick SU-8 microstructures on small-sized or non-circular samples. Standard spin-coating of high-viscosity resists is indeed known to induce large edge beads, leading to an air gap between the mask and the SU-8 photo-resist surface during UV photolithography. This results in a non uniform thickness deposition and in a poor pattern definition. This problem becomes highly critical in the case of small-sized samples. To overcome it, we have developed a soft thermal imprint method based on the use of a nano-imprint equipment and applicable whatever sample fragility, shape and size (from 2cm to 6 inches). After final photolithography, the SU8 pattern thickness variation profile is measured. Thickness uniformity is improved from 30% to 5% with a 5μm maximal deviation to the target value over 2cm-long samples.

Published
2014

23. 3D optimization of a polymer MOEMS for active focusing of VCSEL beam

Author

Jean-Baptiste Doucet, Thierry Camps, Emmanuelle Daran, Benjamin Reig, S. Abada, and Véronique Bardinal

Subjects
Microlens, Optics, Materials science, Thermal conductivity, business.industry, Multiphysics, Joule effect, Optoelectronics, Vertical displacement, business, Actuator, Beam (structure), Vertical-cavity surface-emitting laser
Abstract

We report on the optimized design of a polymer-based actuator that can be directly integrated on a VCSEL for vertical beam scanning. Its operation principle is based on the vertical displacement of a SU-8 membrane including a polymer microlens. Under an applied thermal gradient, the membrane is shifted vertically due to thermal expansion in the actuation arms induced by Joule effect. This leads to a modification of microlens position and thus to a vertical scan of the laser beam. Membrane vertical displacements as high as 8μm for only 3V applied were recently experimentally obtained. To explain these performances, we developed a comprehensive tri-dimensional thermo-mechanical model that takes into account SU-8 material properties and precise MOEMS geometry. Out-of-plane mechanical coefficients and thermal conductivity were thus integrated in our 3D model (COMSOL Multiphysics). Vertical displacements extracted from these data for different actuation powers were successfully compared to experimental values, validating this modelling tool. Thereby, it was exploited to increase MOEMS electrothermal performance by a factor higher than 5.

Published
2014

24. AZO electrodes deposited by atomic layer deposition for OLED fabrication

Author

Marc Ternisien, Thierry Camps, Jean Baptiste Doucet, Benoit Dugrenil, Y.-S. Chiu, Yu-Cheng Lin, Eléna Bedel-Pereira, Ludovic Salvagnac, Véronique Bardinal, Isabelle Séguy, Ching-Ting Lee, Hsin Ying Lee, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), National Cheng Kung University (NCKU), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN), Lumière et Matière (LAPLACE-LM), LAboratoire PLasma et Conversion d'Energie (LAPLACE), Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3)

Subjects
Materials science, 02 engineering and technology, 7. Clean energy, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Atomic layer deposition, Organic Light Emitting Diodes, Transparent Conductive Oxide, 0103 physical sciences, aluminium-doped Zinc Oxide, OLED, Indium Tin Oxide, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Sheet resistance, Transparent conducting film, 010302 applied physics, Organic electronics, business.industry, 021001 nanoscience & nanotechnology, Indium tin oxide, Anode, [SPI.TRON]Engineering Sciences [physics]/Electronics, Atomic Layer Deposition, Electrode, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business
Abstract

International audience; In this work, we present a comparative study of optimized AZO electrodes deposited by Atomic Layer Deposition (ALD) with commercial ITO in terms of electrical, optical and structural properties. Despite a lower figure of merit mainly due to a higher sheet resistance, AZO-based OLEDs are shown to present a current density five times higher than ITO-based ones for the same applied voltage. These AZO electrodes fabricated by ALD could thus be promising substitutes for conventional ITO anodes in organic electronic devices.

Published
2014

25. Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

Author

Aurélien Bruyant, M. Renault, Anna Rumyantseva, Thierry Camps, David Barat, Ihab Dika, Emmanuelle Daran, Véronique Bardinal, Jean-Baptiste Doucet, Benjamin Reig, Olivier Soppera, Jean-Pierre Malval, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse 1 Capitole (UT1)-Université Toulouse - Jean Jaurès (UT2J), Institut de Science des Matériaux de Mulhouse (IS2M), Matériaux et nanosciences d'Alsace, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Équipe Nano Ingénierie et Intégration des Systèmes (LAAS-N2IS), Université Toulouse Capitole (UT Capitole), Institut National des Sciences Appliquées (INSA)-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse Capitole (UT Capitole), Université Fédérale Toulouse Midi-Pyrénées, Équipe Photonique (LAAS-PHOTO), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), Bardinal, Véronique, Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)

Subjects
Fabrication, Materials science, [SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Physics::Optics, 02 engineering and technology, [SPI.MAT] Engineering Sciences [physics]/Materials, Micro-optics, 01 natural sciences, law.invention, [SPI.MAT]Engineering Sciences [physics]/Materials, Optics, law, 0103 physical sciences, Sensitivity (control systems), Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Diode, 010302 applied physics, Microlens, Quenching, business.industry, Laser writing, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, [SPI.TRON] Engineering Sciences [physics]/Electronics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Semiconductor, Polymerization, Photo-polymerization, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Maskless fabrication, 0210 nano-technology, business, Optical probing
Abstract

International audience; We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.

Published
2013

26. Spontaneous emission and lateral photo-detection in 'vertical' micro-cavities

Author

Thierry Camps, Emmanuelle Daran, Véronique Bardinal, and Yann G. Boucher

Subjects
Physics, business.industry, Physics::Optics, General Physics and Astronomy, Micro cavities, Laser, law.invention, Vertical-cavity surface-emitting laser, Transverse plane, law, Optoelectronics, Spontaneous emission, Atomic physics, business
Abstract

Transverse guiding mechanisms enable one to monitor the laser behaviour of a VCSEL by measuring the photo-current in the neighbouring cavity. They are described by extended (3 x 3) transfer matrices including sources of spontaneous emission.

Published
2007

27. Three-dimensional modeling of the heat flow into a GaAs substrate. Influence of thermal phenomena on the RF behavior of power HBTs and technological optimization

Author

A. Cazarré, J.P. Bailbe, M.S. Faleh, J. Tasselli, P. Souverain, A. Marty, and Thierry Camps

Subjects
Materials science, business.industry, Thermal resistance, Heterojunction bipolar transistor, Bipolar junction transistor, RF power amplifier, Electrical engineering, Diamond, engineering.material, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Thermal conductivity, engineering, Optoelectronics, Power semiconductor device, Electrical and Electronic Engineering, Safety, Risk, Reliability and Quality, business, Power density
Abstract

Using three-dimensional modeling of the heat flow into the substrate, and taking into account the variation of thermal conductivity with temperature, we study the sensitivity of the thermal resistance RTH to parameters such as the substrate thickness, its nature (GaAs, Si, AlN or diamond), the topology of the power source (length and width) or even the power density. Thus, we show that the transfer of active GaAs layers onto a host substrate with a higher thermal conductivity such as Si, AlN or diamond is of greater interest than the thinning of the substrate. We developed an accurate electrothermal model for the AlGaAs/GaAs heterojunction bipolar transistor (HBT) allowing prediction of the static and mainly dynamic (RF) behavior at a high signal operating mode. We show that if the HBT layers are transferred onto a diamond substrate, a 50% gain in RF power can be expected at 10 GHz. Finally, we present the technological solutions investigated for the transfer and the heteroassembly of HBT active layers on substrates better suited for thermal dissipation.

Published
1998

28. The frequency response of a fractal photolithographic structure

Author

G. Ablart, Thierry Camps, and T.C. Haba

Subjects
Physics, Frequency response, Self-similarity, business.industry, Phase angle, Mathematical analysis, Phase (waves), Fractal dimension, Optics, Fractal, Electrical and Electronic Engineering, Constant (mathematics), business, Electrical impedance
Abstract

The interest in fractal materials structure in recent years paved the way for the study of the electrical behavior of metallic samples having 'fractal tree' patterns. The unique characteristics of these structures, such as the self-similarity and the fractional dimension D/sub f/, endow these materials with specific physical properties. The simulations and the measurements performed give evidence for the impedance of such a structure, a frequency response closely correlated with the sample structure itself and the so-called constant phase angle behavior of its phase. Indeed, during the characterization of the fractal sample in frequency, it is found that the real and the imaginary parts of the impedance obey the same law of variation beyond a certain frequency. This factor leads us to the relation (Z/sub e/)/(Z/sub e/)=tan (/spl theta/)=constant.

Published
1997

29. Preliminary experimental study on the electrical impedance analysis for in-situ monitoring of the curing of carbon/epoxy composite material for aeronautical and aerospace structures

Author

Thierry Camps, Philippe Olivier, Philippe Marguerès, Mathieu Viargues, Institut Clément Ader (ICA), Institut Supérieur de l'Aéronautique et de l'Espace (ISAE-SUPAERO)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-IMT École nationale supérieure des Mines d'Albi-Carmaux (IMT Mines Albi), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-IMT École nationale supérieure des Mines d'Albi-Carmaux (IMT Mines Albi), Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-Institut Supérieur de l'Aéronautique et de l'Espace (ISAE-SUPAERO), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université Fédérale Toulouse Midi-Pyrénées

Subjects
Materials science, Automatic control, Composite number, 02 engineering and technology, [SPI.MECA.MSMECA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Materials and structures in mechanics [physics.class-ph], 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, 010309 optics, 0103 physical sciences, [SPI.MECA.MEMA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Mechanics of materials [physics.class-ph], Composite material, Aerospace, Instrumentation, Engineering (miscellaneous), Electrical impedance, Dimensioning, Curing (chemistry), business.industry, Applied Mathematics, Epoxy, 021001 nanoscience & nanotechnology, visual_art, Electrode, visual_art.visual_art_medium, 0210 nano-technology, business
Abstract

International audience; This paper concerns the electrical characterization of T700/M21 unidirectional composite materials using sensors developed specifically for this study. It proposes a reliable and reproducible protocol for the characterization of the material during curing. Prior to the characterization, an analysis was carried out to assess the impact of parasitic access elements (resistance of the electrode/fibre interface or of the feed wire), which was reduced to a minimum by appropriate dimensioning of the electrodes. A study of the electrical conduction in relation to the direction of the fibres made it possible to establish a suitable approach to homogenized measurement of the material. Thermo-electric coupling by self-heating was also evaluated, with a view to obtaining measurements that were not influenced by this phenomenon. Finally, the use of electrical impedance spectral analysis allowed in-situ monitoring of the curing process. The results obtained are compared with those of a rheological analysis of the same material. These results highlight the value of the proposed protocol and demonstrate that, with the aid of these sensors, complete automation of the manufacturing process of composite structures is feasible (optimization of the cure cycle by real-time automatic control).

Published
2013

30. Polymer optical MEMS integrated on VCSELs for biosensing

Author

Jean-Baptiste Doucet, Sami Abada, Emmanuelle Daran, Véronique Bardinal, Benjamin Reig, and Thierry Camps

Subjects
Microelectromechanical systems, chemistry.chemical_classification, Fabrication, Materials science, business.industry, Optical engineering, Physics::Optics, Polymer, Computer Science::Other, chemistry, Optoelectronics, business, Biosensor, Beam (structure), Laser beams, Microfabrication
Abstract

We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.

Published
2013

31. Theory and experiment of the temperature dependence of GaAlAs/GaAs HBTs characteristics for power amplifier applications

Author

J. Tasselli, J.P. Bailbe, A. Cazarre, L. Andrieux, Thierry Camps, A. Marty, and H. Granier

Subjects
Power gain, Materials science, business.industry, Amplifier, Thermal resistance, Bipolar junction transistor, Condensed Matter Physics, Temperature measurement, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, chemistry, Ternary compound, Thermal, Materials Chemistry, Electronic engineering, Optoelectronics, Power semiconductor device, Electrical and Electronic Engineering, business
Abstract

Modelling of thermal effects of GaAlAs/GaAs HBTs d.c. and r.f. characteristics is presented. The thermal resistance value is determined experimentally and introduced in a model. Good agreement between measured results and those from modelling is demonstrated. The r.f. performance shows a good stability at high temperature (fmax is reduced by about 12% due to temperature rise). For the high signal mode, the simulation of a power amplifier at 3 GHz is also carried out with and without temperature effects.

Published
1995

32. Miniaturized Scanning Near-Field Microscope Sensor Based on Optical Feedback Inside a Single-Mode Oxide-Confined Vertical-Cavity Surface-Emitting Laser

Author

Thierry Camps, P. Dubreuil, Jean-Baptiste Doucet, Christophe Gorecki, Charlotte Bringer, Chantal Fontaine, Véronique Bardinal, and Dominique Heinis

Subjects
Optical amplifier, Distributed feedback laser, Materials science, Microscope, Physics and Astronomy (miscellaneous), business.industry, General Engineering, Single-mode optical fiber, Physics::Optics, General Physics and Astronomy, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optical cavity, Optoelectronics, Near-field scanning optical microscope, business
Abstract

We propose and demonstrate an original concept of a near-field sensor using the optical feedback properties of a vertical cavity surface-emitting laser (VCSEL) as the detection principle. This is based on the monitoring perturbation induced in the laser cavity by the backscattered light coming from the specimen. Test images confirm the efficiency of the proposed scanning near-field optical microscopy (SNOM) and a solution for the integration of the proposed architecture is given.

Published
2003

33. A miniaturized VCSEL-based system for optical sensing in a microfluidic channel

Author

Véronique Bardinal, Emmanuelle Daran, Benjamin Reig, Jean-Baptiste Doucet, and Thierry Camps

Subjects
Microlens, Fabrication, Materials science, business.industry, Microfluidics, Laser, law.invention, Vertical-cavity surface-emitting laser, Optics, law, Optoelectronics, Micro-Opto-Electro-Mechanical Systems, business, Biosensor, Microfabrication
Abstract

We report on design and fabrication of a VCSEL-based Micro-Optical-Electrical-Mechanical-System (MOEMS) suited for portable optical biosensors. It is based on a tunable polymer microlens directly integrated on the surface of the VCSEL laser device. We demonstrate that this method leads to a VCSEL focusing at a working distance of ∼300μm suitable for optical analysis in a microfluidic channel. Moreover, as the microlens can be vertically moved up to 8μm with an applied power of only 43 mW (3V), a dynamic scan of the laser spot is possible over 100μm. This integrated approach opens new insights for the use of VCSEL arrays in miniaturized optical sensors.

Published
2012

34. Photo-chemical study and optical properties of microtips self- written on vertical laser diodes using NIR photo-polymerization

Author

Olivier Soppera, Thierry Camps, Ihab Dika, D. Barat, Jean-Baptiste Doucet, Jean-Pierre Malval, Aurélien Bruyant, Pierluigi Debernardi, M. Renault, Emmanuelle Daran, Véronique Bardinal, Beatriu Reig, Anna Rumyantseva, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Institute of Electronics, Computer and Telecommunication Engineering (IEIIT-CNR), Politecnico di Torino = Polytechnic of Turin (Polito)-Consiglio Nazionale delle Ricerche [Torino] (CNR), Laboratoire de Nanotechnologie et d'Instrumentation Optique (LNIO), Institut Charles Delaunay (ICD), Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS)-Université de Technologie de Troyes (UTT)-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), CNR Institute of Electronics, Computer and Telecommunication Engineering [Torino] (CNR | IEIIT), CNR Istituto di elettronica e di ingegneria dell'informazione e delle telecomunicazioni (CNR | IEIIT), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)-National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Fabrication, Materials science, Optical fiber, Infrared Rays, Polymers, Surface Properties, High numerical aperture optics, Physics::Optics, Context (language use), 02 engineering and technology, 01 natural sciences, law.invention, Vertical-cavity surface-emitting laser, Molecular Imprinting, Optics, law, 0103 physical sciences, Vertical cavity surface emitting lasers, Wafer, Optical feedback, Diode, 010302 applied physics, business.industry, Single-mode optical fiber, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Refractometry, Scanning probe microscopy, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Lasers, Semiconductor, 0210 nano-technology, business, Scanning electron microscopy, Diode lasers
Abstract

International audience; Near infra-red (NIR) self-guided photo-polymerization is investigated in the context of micro-optics photo-fabrication on VCSELs (Vertical-Cavity Surface Emitting Lasers). We present the optimized process we have developed to allow for a collective fabrication on III-V devices wafers under real-time optical monitoring. The influence of photo-chemical parameters on final micro-elements dimensions is studied for two types of single mode 760nm VCSELs. The difference of the resulting tip shape between the two lasers is due to the strong differences of their emissions, as they are nicely reproduced by the computed near-field profiles. The tip shapes are also compared to those produced by the light emitted by an optical fiber and differences with VCSEL tips are discussed. Also the VCSEL characteristics with fabricated tips are discussed and found in good agreement with optical modeling.

Published
2012

35. Polymer tunable microlens arrays suitable for VCSEL beam control

Author

Thierry Camps, Christophe Levallois, Véronique Bardinal, Jean-Baptiste Doucet, Jérôme Launay, Emmanuelle Daran, Benjamin Reig, David Bourrier, Yann G. Boucher, Équipe MICrosystèmes d'Analyse (LAAS-MICA), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS), Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT), Université de Rennes (UR)-Université européenne de Bretagne - European University of Brittany (UEB)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Fabrication, polymer, 02 engineering and technology, 01 natural sciences, VCSEL, law.invention, Vertical-cavity surface-emitting laser, Optics, ABCD formalism, law, 0103 physical sciences, tunable lens, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 010302 applied physics, Ray transfer matrix analysis, Microlens, business.industry, 021001 nanoscience & nanotechnology, Laser, SU-8, Lens (optics), micro-optics, MOEMS, Resist, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, 0210 nano-technology, business, wafer-scale integration, Refractive index
Abstract

We report on a simple method for the collective fabrication of polymer tunable microlens arrays suitable for VCSEL active beam shaping. Its principle is based on a SU-8 suspended membrane, surmounted by a polymer microlens, and thermally actuated to achieve a vertical displacement of lens plane. SU-8 resist presents many advantages for MOEMS fabrication, as this resist allows for high aspect ratio patterns and high transparency. In addition, it exhibits a thermal expansion coefficient suitable for thermal actuation. Moreover, this kind of polymer MOEMS can be fabricated on VCSEL arrays with footprints as low as 5 00x500µm² enabling a rapid, low co st and wafer-scale integration technology. We have successfully fabricated this MOEMS on a glass substrate by means of a SU-8 double exposure method and we report on a vertical di splacement of 8µm under an applied power of 43mW (3V). A good agreement with the theoretical thermo-mechanical behavi or is found. Moreover, optical measurem ents of microlens focus displacement under actuation are presented. We evaluate analytically the focus properties of the system under coherent laser illumination, using the classical ABCD matrix formalism of Gaussian transformation optics. The same approach enables one to assess its tolerance to opto-geometrical parameters, such as refractive index or dioptre curvature. As a wide range of initial gaps between the membrane and the substrate can be chosen, this MOEMS technology opens new insights for dynamic control of VCSEL beam or for tunable VCSELs fabrication. Keywords: VCSEL, micro-optics, tunable lens, polymer, SU-8, MOEMS, wafer-scale integration, ABCD formalism

Published
2012

36. VCSEL beam control with collective and self-aligned polymer technologies

Author

Thierry Camps, Emmanuelle Daran, Jean-Baptiste Doucet, Benjamin Reig, Olivier Soppera, Véronique Bardinal, Pierluigi Debernardi, and D. Barat

Subjects
Microelectromechanical systems, Microlens, Fabrication, Materials science, business.industry, Single-mode optical fiber, Laser, law.invention, Vertical-cavity surface-emitting laser, Lens (optics), Optics, law, Optical cavity, Optoelectronics, business
Abstract

We present recent results on the integration of polymer microlenses on single mode Vertical-Cavity Surface-Emitting Lasers (VCSELs) to achieve output beam control. We describe in particular low cost and collective fabrication methods developed to allow for a self-alignment of the lens with the laser source. These approaches are based either on surface tension effects or on a self-writing process using novel Near Infra-Red (NIR) photopolymers. Results on beam collimation at 850nm are presented and compared to a fully vectorial and three-dimensional optical model that takes into account the complete geometry of laser resonator is used. Results on short distance focusing using self-aligned microtips are presented. Considerations to achieve an active beam control by means of polymer-based MEMS (Micro-electro-mechanical System) are also discussed. Potential applications may concern the improvement of VCSEL insertion in optical interconnects or sensing systems, as well as the fabrication of optical micro-probes for near-field microscopy.

Published
2012

37. Emitter excess resistance in GaAlAs/GaAs heterojunction bipolar transistors

Author

Thierry Camps, A. Cazarré, J.P. Bailbe, A. Marty, and J. Tasselli

Subjects
Materials science, Access resistance, Heterostructure-emitter bipolar transistor, business.industry, Bipolar junction transistor, Contact resistance, Electrical engineering, Heterojunction, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Inductance, chemistry.chemical_compound, chemistry, Ternary compound, Materials Chemistry, Physics::Accelerator Physics, Optoelectronics, Electrical and Electronic Engineering, business, Common emitter
Abstract

Numerous studies have shown the influence of parasitic elements, particularly emitter access resistance and inductance, on HBTs DC and dynamic performances. Instead the achievement of low specific contact resistances, the apparent emitter resistance presents high values. To explain this discrepancy the longitudinal distribution of the emitter current has been investigated by using a distributed DC-model, taking into account the metal layers resistance of the different contacts. Thus it is shown that only the emitter contact parameters act on the non equipotentiality along the structure.

Published
1994

38. Polymer MEMS for the active control of VCSEL beam

Author

Thierry Camps, Jean-Baptiste Doucet, Véronique Bardinal, Emmanuelle Daran, Beatriu Reig, and D. Barat

Subjects
Microlens, Microelectromechanical systems, Materials science, business.industry, Physics::Optics, Laser, Semiconductor laser theory, Vertical-cavity surface-emitting laser, law.invention, Optics, law, Physics::Accelerator Physics, Optoelectronics, Vertical displacement, business, Actuator, Beam (structure)
Abstract

Beam control of VCSELs (Vertical Cavity Surface Emitting Lasers) is a key topic to integrate these laser diodes in microsystems for instrumentation or biomedical application [1]. We report here on a simple method to control dynamically the beam shape of VCSELs devices. Our approach is based on an electro-thermal actuator including a polymer membrane, a heating electrode and a polymer microlens (fig.1 a). The operation principle is the following: the laser beam waist position can be tune thanks to the membrane vertical displacement induced by varying the applied current. Optical and thermo-mechanical optimizations of membrane geometry have been carried out. These studies point out that a vertical deflection of 2µm should be obtained with a thermal gradient of 100°C [2], leading to a corresponding waist displacement of few hundred microns.

Published
2011

39. Spotted Custom Lenses to Tailor the Divergence of Vertical-Cavity Surface-Emitting Lasers

Author

Christophe Levallois, Véronique Bardinal, Thierry Leichle, Guilhem Almuneau, Emmanuelle Daran, Corinne Vergnenègre, Thierry Camps, Benjamin Reig, Jean-Baptiste Doucet, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Fonctions Optiques pour les Technologies de l'informatiON (FOTON), Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Centre National de la Recherche Scientifique (CNRS)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), and Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-École Nationale Supérieure des Sciences Appliquées et de Technologie (ENSSAT)-Télécom Bretagne-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Cantilever, Fabrication, lens, polymer, Physics::Optics, 02 engineering and technology, Collimated light, law.invention, Semiconductor laser theory, 020210 optoelectronics & photonics, Optics, law, 0202 electrical engineering, electronic engineering, information engineering, vertical-cavity surface-emitting laser (VCSEL), Electrical and Electronic Engineering, business.industry, collimation, 021001 nanoscience & nanotechnology, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, SU-8, Lens (optics), micro-optics, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Optoelectronics, 0210 nano-technology, business, Lasing threshold, Beam divergence
Abstract

International audience; We demonstrate the output beam collimation of GaAs-based vertical-cavity surface-emitting lasers by means of self-aligned polymer microlenses deposited on SU-8 pedestals using a cantilever-based spotter. We show that this fabrication technique ensures a reproducible lens shape because the contact angle and the deposited volume are constant for a given surface. Device properties are presented and compared to optical beam propagation modeling results. We demonstrate that the final beam divergence is only controlled by pedestal design parameters and can be reduced with this method by a factor 10 (to 1.2° for single-mode devices) with no significant lasing performance modification.

Published
2010

40. Design of active lens for VCSEL collimation

Author

David Bourrier, Corinne Vergnenègre, Emmanuelle Daran, Thierry Camps, B. Reig, and Véronique Bardinal

Subjects
Microlens, Materials science, business.industry, Physics::Optics, Collimated light, Displacement (vector), Vertical-cavity surface-emitting laser, Semiconductor laser theory, law.invention, Lens (optics), Optics, law, Optoelectronics, Actuator, business, Beam (structure)
Abstract

Active control of VCSELs beam properties is a key issue to improve their integration in microsystems. We have designed a micro-optical system that allows for a dynamic displacement of the VCSEL beam. It consists of a polymer microlens associated to a SU-8 membrane vertically moved by means of a thermal actuator. This approach is suitable with laser sources arrays. We present results on optical design demonstrating that a small deflection of the membrane (2μm) could lead to a large displacement of the beam waist vertical position (in the millimetric range). Thermomechanical modelling is performed to evaluate the maximum membrane displacement achievable with this system. Finally, first feasibility results are presented.

Published
2010

41. Micro-optics on VCSELs using NIR photopolymers

Author

Thierry Camps, Colette Turck, Emmanuelle Daran, Véronique Bardinal, D. Barat, Jean-Pierre Malval, Daniel Lougnot, Benjamin Reig, Jean-Baptiste Doucet, Olivier Soppera, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), Institut d’Electronique et des Systèmes (IES), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Composants à Nanostructure pour le moyen infrarouge (NANOMIR), Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS)-Université de Montpellier (UM)-Centre National de la Recherche Scientifique (CNRS), Institut de Science des Matériaux de Mulhouse (IS2M), Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Photomatériaux pour l'Optique et les Nanotechnologies (PHOTON LRC 7228), and Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))

Subjects
Materials science, Fabrication, business.industry, Optical communication, Physics::Optics, [CHIM.MATE]Chemical Sciences/Material chemistry, Laser, law.invention, Vertical-cavity surface-emitting laser, Semiconductor laser theory, Lens (optics), Optics, [CHIM.POLY]Chemical Sciences/Polymers, law, Optoelectronics, Photolithography, Photonics, business, ComputingMilieux_MISCELLANEOUS
Abstract

Laser beam shaping is a key issue for the photonic integration of VCSEL sources. Most of the techniques proposed to integrate micro-optics elements onto VCSEL devices imply either a hybrid assembly or a photolithography step, whose precision limits the accuracy of lens alignment relatively to the VCSEL source. We present here a new method for self-fabrication of microtips on Vertical-Cavity Surface-Emitting Lasers (VCSELs) by means of Near Infra- Red (NIR) photo-polymerization. This approach is based on a single fabrication step, implementing novel photopolymers sensitive at the lasing wavelength. Consequently the process is triggered by the laser source itself and can be applied easily to VCSEL devices during their electro-optic characterization. The method we have developed for tips fabrication is detailed as well as corresponding optical properties. The applications of this new and simple method concern laser light focusing and collimation for integrated micro-systems, coupling to fibers for optical communications as well as novel micro-probes fabrication for near-field optical microscopy.

Published
2010

42. Study, simulation and manufacturing of new Geiger-APD for applications in astrophysics and biology

Author

Daniel Esteve, K. Jradi, A. Le Padellec, A.R. Bazer-Bachi, Thierry Camps, and Denis Pellion

Subjects
Physics, Photomultiplier, Photon, business.industry, Dark count rate, Avalanche photodiode, law.invention, Luminous flux, Optics, law, Geiger counter, Optoelectronics, Photonics, business, Image resolution
Abstract

Nowadays, there are two types of sensors to detect the low luminous flux, PMT (PhotoMultiplier Tube) and Geiger-APD (Geiger Avalanche PhotoDiode). The Geiger-APD is a component on Silicon that was developed in the early 90s to detect very low light flux, as is currently the PMT. The main advantages of these devices on the PMT are a very high sensitivity to light (single photon), a very high time resolution (

Published
2010

43. New polysilicon sensor and actuator technology for the development of a thermal platform

Author

B. Marty, Thierry Camps, D. Lagrange, J. Tasselli, and Alain Marty

Subjects
Fabrication, Materials science, Temperature control, CMOS, business.industry, Microfluidics, Electronic engineering, Optoelectronics, Wafer, Actuator, business, Temperature measurement, Diode
Abstract

This paper reports on a generic approach for the development of polysilicon diodes on glass wafers for thermal sensing and control applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated on glass wafers with good thermal sensitivities about 40mV/oC. A simple experimental set-up has been developed to evaluate the potentialities of these devices in microfluidics operating conditions. First encouraging results of temperature detection are presented.

Published
2009

44. VCSEL collimation using self-aligned integrated polymer microlenses

Author

Thierry Leichle, Emmanuelle Daran, Thierry Camps, Christophe Levallois, Corinne Vergnenègre, Jean-Baptiste Doucet, Véronique Bardinal, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), and Université de Toulouse (UT)

Subjects
Materials science, Fabrication, semiconductor laser arrays, optical design techniques, 02 engineering and technology, optical fabrication, Photoresist, 01 natural sciences, surface topography measurement, law.invention, Semiconductor laser theory, Vertical-cavity surface-emitting laser, 010309 optics, surface emitting lasers, 020210 optoelectronics & photonics, Optics, microlenses, law, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, laser cavity resonators, optical collimators, micromechanical devices, Microlens, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], optical polymers, business.industry, laser beams, Laser, Lens (optics), integrated optics, photoresists, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, Photolithography, business
Abstract

International audience; We report on the design and fabrication of polymer microlenses fabricated on patterned SU-8 layers in view of integrating microlenses on VCSEL arrays for laser beam shaping. For a standard top-emitting VCSEL, the lens has to be fabricated on a thick intermediate layer (pedestal) whose optimal thickness can be modelled as a function of the initial and of the aimed optical properties of the VCSEL beam. In this work, pedestals are fabricated with SU-8, which is a negative-tone photoresist transparent at the lasing wavelength. Lens deposition is realized using a robotized silicon microcantilever spotter technique after a simple SU-8 photolithography step in order to define high aspect ratio cylindrical pedestals with wide range diameters [30-140 μm]. The effect of pedestal diameter on the final contact angle and curvature radius has been investigated using non contact optical profilometry and scanning electron microscopy. We show that this technique leads to a complete delimitation of the polymer droplets and to a better control of the final lens size. Moreover, lens positioning is fully ensured by the self-alignment of the droplet with the pillar center and consequently with the VCSEL source, and allows for meeting the stringent requirements on alignments.

Published
2008

45. Fabrication and characterization of microlens arrays using a cantilever-based spotter

Author

Heidi Ottevaere, Véronique Bardinal, Christophe Levallois, Hugo Thienpont, Corinne Vergnenègre, Emmanuelle Daran, Thierry Camps, Thierry Leichle, Jean-Baptiste Doucet, Véronique Conédéra, Franck Carcenac, Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Department of Applied Physics and Photonics [Brussels] (TONA), Vrije Universiteit Brussel (VUB), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT), and Applied Physics and Photonics

Subjects
Fabrication, Cantilever, Materials science, Scanning electron microscope, 02 engineering and technology, OCIS: 160.5470, 220.3630, 220.4000, 350.3950, Micro-optics, Optical polymers and other organic optical materials, 01 natural sciences, law.invention, 010309 optics, Optics, Optical microscope, law, 0103 physical sciences, Surface roughness, Focal length, Micro-optical devices and technology, Lenses, Microlens, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, Integrated optics, Optical Design and Fabrication, 021001 nanoscience & nanotechnology, MICROSYSTEM, LENSES, GLASS, Atomic and Molecular Physics, and Optics, Interferometry, Polymer reactions and polymerization, Optical materials, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, 0210 nano-technology, business
Abstract

We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25-130 mu m] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181 mu m] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than lambda/14. (C) 2007 Optical Society of America.

Published
2007

46. High-power and linearity performances of a four-emitter finger AlGaAs/GaAs HBT inS-band

Author

Thierry Camps, J. Tasselli, Alain Marty, J.P. Bailbe, A. Cazarre, and L. Andrieux

Subjects
Engineering, business.industry, Heterojunction bipolar transistor, Electrical engineering, Linearity, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Power (physics), Algaas gaas, Optoelectronics, S band, Electrical and Electronic Engineering, business, Common emitter
Published
1998

47. Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever based microsystem

Author

Yvan Segui, Véronique Conédéra, Emmanuelle Daran, Léonard Gavin-Djidina, Jean-Bernard Pourciel, Thierry Camps, Thierry Leichle, Mathieu Guirardel, Corinne Vergnenègre, and Véronique Bardinal

Subjects
Microelectromechanical systems, Microlens, Fabrication, Materials science, Cantilever, business.industry, law.invention, Vertical-cavity surface-emitting laser, Lens (optics), Optics, law, Microsystem, Optoelectronics, Deposition (phase transition), business
Abstract

We report on the design and the fabrication of refractive microlenses using a polymer droplet deposition microsystem. The principle of this original technique consists in monomer droplets deposition using a robotized silicon-microcantilevers array. The advantages of this technique rely on the control of droplets dimensions and the positioning accuracy. Microlenses have been first modelled to optimize their geometrical parameters for VCSEL collimation. Results of lens optimization as well as the influence of the fabrication parameters fluctuations on the final divergence are detailed. First results on droplets deposition are presented, demonstrating the technique feasibility. Finally, the possibility of the modification of the surface energy to obtain the most suited contact angle before deposition is also discussed.

Published
2006

48. Integrated lateral detection in VCSELs for optical system monitoring

Author

Véronique Bardinal, Charlotte Bringer, C. Amat, Emmanuelle Daran, Guilhem Almuneau, Chantal Fontaine, and Thierry Camps

Subjects
Materials science, Optics, business.industry, Schottky barrier, Process (computing), Optoelectronics, Detection theory, Stimulated emission, System monitoring, business, Signal, Tunable laser, Vertical-cavity surface-emitting laser
Abstract

A new VCSEL design is proposed to combine emission and detection, based on a standard mesa process. Lateral guided optical signal is detected through a Schottky contact. Temperature, time-response and geometry-dependent characterizations are presented.

Published
2006

49. Electrical spin injection into p-doped quantum dots through a tunnel barrier

Author

H. Jaffrès, Xavier Marie, Pascal Gallo, Cyrile Deranlot, Thierry Camps, Thierry Amand, P. H. Binh, Richard Mattana, Laurent Lombez, Hélène Carrère, J. L. Gauffier, Alexandre Arnoult, P. F. Braun, Chantal Fontaine, Pierre Renucci, Bernhard Urbaszek, and J.-M. George

Subjects
Photoluminescence, Materials science, Physics and Astronomy (miscellaneous), business.industry, Condensed Matter::Other, Physics::Optics, FOS: Physical sciences, Electron, Electroluminescence, Polarization (waves), Condensed Matter::Mesoscopic Systems and Quantum Hall Effect, law.invention, Magnetic field, Condensed Matter - Other Condensed Matter, Condensed Matter::Materials Science, law, Quantum dot, Condensed Matter::Superconductivity, Optoelectronics, business, Circular polarization, Light-emitting diode, Other Condensed Matter (cond-mat.other)
Abstract

We have demonstrated by electroluminescence the injection of spin polarized electrons through Co/Al2O3/GaAs tunnel barrier into p-doped InAs/GaAs quantum dots embedded in a PIN GaAs light emitting diode. The spin relaxation processes in the p-doped quantum dots are characterized independently by optical measurements (time and polarization resolved photoluminescence). The measured electroluminescence circular polarization is about 15 % at low temperature in a 2T magnetic field, leading to an estimation of the electrical spin injection yield of 35%. Moreover, this electroluminescence circular polarization is stable up to 70 K., Comment: 6 pages, 4 figures

Published
2006
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50. Integrated optical detection subsystem for functional genomic analysis biosensor

Author

Charlotte Bringer, Corinne Vergnenègre, Chantal Fontaine, Véronique Bardinal, Thierry Camps, and A. Muñoz-Yagüe

Subjects
Cantilever, Fabrication, Materials science, genetic structures, business.industry, Surface stress, Nanotechnology, Laser, eye diseases, law.invention, law, Deflection (engineering), Microsystem, Nucleic acid, Optoelectronics, sense organs, business, Biosensor
Abstract

We present an optical microsystem aimed to be integrated into a nanomechanical biosensor for functional genomic analysis. The operation principle is based on a sub-nanometer resolution optical measurement of a cantilever deflection caused by a surface stress when the target nucleic acid sample hybridises to the nucleic acid probe on the active side of the cantilever. The resulting deflection, of the order of nanometers, is measured by an optical system, in which a laser beam reflects off the back of the cantilever to a position sensitive photo-detector. We report in this paper on the design, fabrication and test of the optical head associated with an optical coupling system which enables detection of the presence of target nucleic acid on the cantilever by amplifying the deflection caused by the stress.

Published
2005

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