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1. X-ray emission from layered media irradiated by an x-ray free-electron laser

Author

K. Le Guen, Olivier Peyrusse, Philippe Jonnard, Jean-Michel André, Physique des interactions ioniques et moléculaires (PIIM), Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.PHYS.PHYS-ATOM-PH]Physics [physics]/Physics [physics]/Atomic Physics [physics.atom-ph], X-ray, Free-electron laser, Bragg's law, Context (language use), Photoionization, 01 natural sciences, 010305 fluids & plasmas, Perfect crystal, [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph], 0103 physical sciences, Irradiation, Atomic physics, 010306 general physics, Refractive index
Abstract

International audience; This article presents a computational study of the x-ray fluorescence induced by the irradiation of thin layered media by intense, short x-ray pulses. The treatment is based on a numerical solution of the Helmholtz wave-equation both for the pump and for the fluorescence signal. Consistently with a possible heating of the medium during the x-ray pulse, complex refractive indices are calculated at each time step from the results of an underlying treatment of atomic physics. In the context of an important core-hole production as a result of photoionization, we discuss the peculiarities of the resulting amplified fluorescence grazing emission and of the Bragg diffraction which can be realized at some angles inside a multilayer material or even in a perfect crystal. * Electronic address: olivier.peyrusse@univ-amu.fr

Published
2020

2. Characterization of Pd/Y multilayers with B

Author

M Y, Wu, Q S, Huang, K, Le Guen, V, Ilakovac, B X, Li, Z S, Wang, A, Giglia, J P, Rueff, and P, Jonnard

Abstract

Pd/Y multilayers are high-reflectance mirrors designed to work in the 7.5-11 nm wavelength range. Samples, prepared by magnetron sputtering, are deposited with or without B

Published
2018

3. Characterization of Pd/Y multilayers with B4C barrier layers using GIXR and X-ray standing wave enhanced HAXPES

Author

Vita Ilakovac, B. X. Li, Zhenhua Wang, Philippe Jonnard, Angelo Giglia, Qiushi Huang, Meiyi Wu, K. Le Guen, Jean-Pascal Rueff, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Tongji University, Université de Cergy Pontoise (UCP), Université Paris-Seine, Northwestern Polytechnical University [Xi'an] (NPU), CNR Istituto Officina dei Materiali (IOM), Consiglio Nazionale delle Ricerche [Roma] (CNR), Synchrotron SOLEIL (SSOLEIL), and Centre National de la Recherche Scientifique (CNRS)

Subjects
Nuclear and High Energy Physics, Materials science, Photoemission spectroscopy, Enthalpy, FOS: Physical sciences, Applied Physics (physics.app-ph), 02 engineering and technology, Photon energy, 01 natural sciences, Molecular physics, 010309 optics, Standing wave, Pd/Y, hard x-ray photoemission spectroscopy, x-ray standing waves, 0103 physical sciences, [CHIM]Chemical Sciences, Reflectometry, nanometric multilayers, Instrumentation, Radiation, X-ray standing waves, X-ray, Physics - Applied Physics, Sputter deposition, 021001 nanoscience & nanotechnology, 0210 nano-technology
Abstract

Pd/Y multilayers are high reflectance mirrors designed to work in the 7.5-11 nm wavelength range. Samples, prepared by magnetron sputtering, are deposited with or without B4C barrier layers located at the interfaces of Pd and Y layers to reduce interdiffusion, which is expected by calculating mixing enthalpy of Pd and Y. Grazing incident x-ray reflectometry is used to characterize these multilayers. B4C barrier layers are found effective on reducing the Pd-Y interdiffusion. Details of the composition of the multilayers are revealed by hard x-ray photoemission spectroscopy under x-ray standing waves effect. It consists in measuring the photoemission intensity from samples that perform an angular scan in the region corresponding to the multilayer period and the incident photon energy according to the Bragg law. The experimental result indicates that Pd does not chemically react with B nor C at the Pd-B4C interfaces while Y does at the Y-B4C interfaces. The formation of Y-B or Y-C chemical compound can be the reason why the interfaces are stabilized. By comparing the experimentally obtained angular variation of the characteristic photoemission with the theoretical calculation, the depth distribution of each component element can be interpreted., 13 pages, 8 figures, 1 tables, 19 references

Published
2018

4. Cr/Sc multilayer radiator for parametric EUV radiation in 'water-window' spectral range

Author

J.-M. André, Ph Jonnard, F. Delmotte, V.V. Kaplin, A. S. Kubankin, S. de Rossi, S. R. Uglov, K. Le Guen, Evgueni Meltchakov, Tomsk Polytechnic University [Russie] (UPT), Belgorod State University, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), and Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)

Subjects
History, Photon, Materials science, Extreme ultraviolet lithography, радиаторы, энергия, Physics::Optics, Electron, Radiation, Photon energy, 01 natural sciences, Electromagnetic radiation, Education, Optics, 0103 physical sciences, 010306 general physics, ComputingMilieux_MISCELLANEOUS, Parametric statistics, 010302 applied physics, Water window, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], спектральные диапазоны, business.industry, излучения, фотоны, Computer Science Applications, угловые распределения, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], business, многослойные структуры
Abstract

The results of experimental investigation of parametric radiation generated by 5.7 MeV electrons in a multilayer structure consisting of 100 Cr/Sc bi-layers deposited on a Si[3]N[4] membrane are presented. The multilayer structure was specially created for generation of parametric radiation with photon energy in "water-window" spectral range. First test measurements of angular distributions of radiation have been done and discussed.

Published
2016

5. An etched multilayer as a dispersive element in a curved-crystal spectrometer: implementation and performance

Author

N. Isac, K. Le Guen, Philippe Jonnard, Jean-René Coudevylle, and Jean-Michel André

Subjects
010302 applied physics, Diffraction, Materials science, Fabrication, Spectrometer, business.industry, Physics::Optics, Grating, 01 natural sciences, 010309 optics, Chemical state, Wavelength, Optics, 0103 physical sciences, Emission spectrum, Spectral resolution, business, Spectroscopy
Abstract

Etched multilayers obtained by forming a laminar grating pattern within interferential multilayer mirrors are used in the soft X-ray range to improve the spectral resolution of wavelength dispersive spectrometers equipped with periodic multilayers. We describe the fabrication process of such an etched multilayer dispersive element, its characterization through reflectivity measurement and simulations, and its implementation in a high-resolution Johann-type spectrometer. The specially designed patterning of a Mo/B4C multilayer is found fruitful in the range of the C K emission as the diffraction pattern narrows by a factor 4 with respect to the non-etched structure. This dispersive element with an improved spectral resolution was successfully implemented for electronic structure study with an improved spectral resolution by X-ray emission spectroscopy. As first results, we present the distinction between the chemical states of carbon atoms in various compounds, such as graphite, SiC and B4C, by the different shape of their C K emission band. Copyright © 2012 John Wiley & Sons, Ltd.

Published
2012

6. DUVEX: An X-ray counting system based on YAG:Ce scintillator

Author

Philippe Jonnard, K. Le Guen, Jean-Michel André, Yves Ménesguen, Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire National Henri Becquerel ( LNHB ), Département Métrologie Instrumentation & Information ( DM2I ), Laboratoire d'Intégration des Systèmes et des Technologies ( LIST ), Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay-Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies ( LIST ), Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay-Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ) -Université Paris-Saclay, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Institut de Chimie du CNRS (INC)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Laboratoire National Henri Becquerel (LNHB), Département Métrologie Instrumentation & Information (DM2I), Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay, Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Département d'instrumentation Numérique (DIN (CEA-LIST)), and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)

Subjects
Nuclear and High Energy Physics, Photomultiplier, Physics::Instrumentation and Detectors, Astrophysics::High Energy Astrophysical Phenomena, Nuclear instrumentation, 02 engineering and technology, [PHYS.NEXP]Physics [physics]/Nuclear Experiment [nucl-ex], Scintillator, plastic scintillator, Noise (electronics), Spectral line, 030218 nuclear medicine & medical imaging, Counting system, 03 medical and health sciences, 0302 clinical medicine, Optics, sensor, ultraviolet, X-rays, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], [ PHYS.PHYS.PHYS-INS-DET ] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Instrumentation, Physics, detector, Electronic architecture, Spectrometry, business.industry, Soft-x-ray, Detector, X-ray, Soft X-rays, 021001 nanoscience & nanotechnology, radioactivity, Extreme ultraviolet, Yield (chemistry), Optoelectronics, Extreme-UV, ionizing radiation, 0210 nano-technology, business
Abstract

10 pages; International audience; A detector system, called DUVEX, has been developed for the soft-x-ray and extreme ultraviolet domain. It consists of a YAG:Ce scintillator coupled to a photomultiplier module working under vacuum in counting mode. The design and the performances of this detector in terms of yield, absolute efficiency, response and noise are reported. Spectra in the soft x-ray range of different elements (W, Ag, Al, Mg, Cu, N, C and B) obtained in WDS mode using this detector are presented. DUVEX appears as a competitive detection tool in terms of cost and easiness of implementation.

Published
2011

7. Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers

Author

Philippe Jonnard, Hélène Maury, Christophe Hecquet, Zhipeng Wang, Jingtao Zhu, Zhen Zhang, Stefano Nannarone, Franck Delmotte, Jean-Michel André, Françoise Bridou, Nicola Mahne, Angela Giglia, K. Le Guen, Jia Dong, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Laboratorio Nazionale TASC (TASC), Consiglio Nazionale delle Ricerche (CNR), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Annealing (metallurgy), multilayers, Activation energy, Magnesium silicide, law.invention, chemistry.chemical_compound, Optics, law, x-ray emission, 68.65.Ac, 61.05.cm, 78.70.En, 73.90.+f, 66.30.Ny, 68.35.Fx, Silicon carbide, Crystallization, Thin film, Composite material, business.industry, Chemistry, [CHIM.MATE]Chemical Sciences/Material chemistry, Sputter deposition, Condensed Matter Physics, interface physics, Electronic, Optical and Magnetic Materials, X-ray reflectivity, mutilayer, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], x-ray reflectivity, interface, annealing, business
Abstract

16 pages; International audience; The interplay between optical performance and the thermally activated interface chemistry of periodic Mg/SiC multilayers designed for application at 30.4 nm are investigated by optical (hard x-ray, soft x-ray and ultraviolet ranges, i.e. from 0.154 to 30.4 nm) reflectivity and x-ray emission spectroscopy. The multilayers are prepared by magnetron sputtering and then annealed up to a temperature of 500°C. Two clear changes take place in the multilayer upon annealing. At first, between 200 and 300°C a strong decrease of the reflectivity is observed, due to the development of interfacial roughness following the crystallization of the Mg layers. No interfacial compound is detected. Then, between 350 and 400°C there is formation of the Mg2Si magnesium silicide at the interfaces following the reaction between the Mg and SiC layers. This also leads to the almost total loss of reflectivity of the multilayer. Thus, this kind of multilayer is thermally stable only for application requiring no heating above 200°C.

Published
2008

8. Kossel diffraction and photonic modes in one-dimensional photonic crystal

Author

Philippe Jonnard, Jean-Michel André, F. Bridou, K. Le Guen, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Diffraction, FOS: Physical sciences, Physics::Optics, One-dimensional photonic crystal, Standing wave, symbols.namesake, Fermi's golden rule, PACS numbers :78.67.Pt, 78-70.En,42.70 Qs, 61-05 C, Mathematical Physics, Photonic crystal, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Condensed matter physics, business.industry, density of photonic modes, reciprocity theorem, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Kossel diffraction, symbols, standing-wave, Photonics, business, Excitation, Optics (physics.optics), Physics - Optics
Abstract

International audience; Kossel diffraction under standing-wave excitation in a one-dimensional photonic crystal is investigated. It is shown that by combining the reciprocity theorem, the Fermi golden rule and the concept of density of photonic modes, it is possible to predict the behaviour of the Kossel diffraction in such a system.

Published
2015

9. Spontaneous soft x-ray fluorescence from a superlattice under Kossel diffraction conditions

Author

K. Le Guen, Zhenhua Wang, Jean-Michel André, Philippe Jonnard, Yanyan Yuan, Jingtao Zhu, F. Bridou, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), ANR-10-INTB-0902,COBMUL,Nouveaux matériaux multicouches à base de cobalt pour applications optiques dans l'extrême ultra-violet(2010), European Project, Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Institute of Precision Optical Engineering. ( IPOE ), Laboratoire Charles Fabry / XUV, Laboratoire Charles Fabry ( LCF ), Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ), and Work was done in the framework of the international ANR-NSFC COBMUL project (ANR #10-INTB-902-01 and NSFC #11061130549),Work was done in the framework of the international ANR-NSFC COBMUL project (ANR #10-INTB-902-01 and NSFC #11061130549)

Subjects
Diffraction, Superlattice, Astrophysics::High Energy Astrophysical Phenomena, 01 natural sciences, 010305 fluids & plasmas, law.invention, Optics, law, 0103 physical sciences, Spontaneous emission, Stimulated emission, 010306 general physics, spontaneous emission, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], business.industry, multilayer, Free-electron laser, superlattice, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, Kossel diffraction, Optical cavity, fluorescence, Atomic physics, business, Excitation
Abstract

International audience; The present study gives the proof of principle of a technique that is an extension of Kossel diffraction both from crystals to superlattices and toward the soft x-ray region, allowing the characterization of the interfaces within a periodic structure. We measure the intensity of the Co Lα and Mg Kα characteristic fluorescence emissions from a Mg/Co superlattice upon soft x-ray excitation. The observation is made so that the angle between the sample surface and the detection direction is scanned around the first and second Bragg peaks of the fluorescence emissions. Clear modulations of the emitted intensities are observed and well reproduced by simulations based on the reciprocity theorem and assuming a perfect stack. The present work gives evidence that such a superlattice plays the role of an optical cavity for the spontaneous emission generated within the stack. This should also be the case for stimulated emission, which when combined with pumping free electron laser, will open the road to innovative x-ray distributed feedback lasers.

Published
2014

10. Analysis by Coupled-Mode Theory of X-ray Multilayer Gratings

Author

J.-M. André, K. Le Guen, and P. Jonnard

Subjects
Polychromator, Optics, Band-pass filter, Beamline, Computer science, business.industry, X-ray, Electrical engineering, Coupled mode theory, business
Abstract

Multilayer gratings developed since the end of the ninethies are now used for various purposes in x-uv optics: polychromator, narrow bandpass monochromators…We have implemented the Coupled-Mode Theory (CMT) to calculate the performances of these devices (efficiencies, bandwidths…) especially for quasi-lamellar gratings with different shapes of the multilayer pitch. We have fabricated such gratings and compared CMT calculations with measurements obtained at the BEAR beamline of ELETTRA.

Published
2013

11. Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications

Author

Haochuan Li, Angela Giglia, Nicola Mahne, S.-K. Zhou, Michael Walls, Jean-Michel André, K. Le Guen, Philippe Jonnard, Jie Zhu, M.-H. Hu, Zhanshan Wang, Imène Esteve, Stefano Nannarone, Christian Meny, Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Institute of Precision Optical Engineering. ( IPOE ), Tongji University, Institut de Physique et Chimie des Matériaux de Strasbourg ( IPCMS ), Université de Strasbourg ( UNISTRA ) -Centre National de la Recherche Scientifique ( CNRS ) -Matériaux et nanosciences d'Alsace, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Réseau nanophotonique et optique, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ), CNR - Istituto Officina dei Materiali ( IOM ), Consiglio Nazionale delle Ricerche [Roma] ( CNR ), Institut de minéralogie et de physique des milieux condensés ( IMPMC ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -IPG PARIS-Université Paris Diderot - Paris 7 ( UPD7 ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Physique des Solides ( LPS ), Université Paris-Sud - Paris 11 ( UP11 ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), CNR Istituto Officina dei Materiali (IOM), National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR), Institut de minéralogie et de physique des milieux condensés (IMPMC), Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris Diderot - Paris 7 (UPD7)-Institut de Physique du Globe de Paris (IPG Paris)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Physique des Solides (LPS), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université Pierre et Marie Curie - Paris 6 (UPMC), Université de Strasbourg (UNISTRA)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Consiglio Nazionale delle Ricerche [Roma] (CNR), Université Pierre et Marie Curie - Paris 6 (UPMC)-IPG PARIS-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS), and Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)

Subjects
Materials science, Annealing (metallurgy), Scanning electron microscope, Extreme ultraviolet lithography, Mg, Analytical chemistry, FOS: Physical sciences, 02 engineering and technology, 01 natural sciences, Co, 0103 physical sciences, Scanning transmission electron microscopy, General Materials Science, Thermal stability, Emission spectrum, 010302 applied physics, Condensed Matter - Materials Science, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], electron energy loss spectroscopy, [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], multilayer, Electron energy loss spectroscopy, Materials Science (cond-mat.mtrl-sci), General Chemistry, x-ray emission spectroscopy, [ PHYS.COND.CM-GEN ] Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], EUV reflectivity, 021001 nanoscience & nanotechnology, 3. Good health, nuclear magnetism resonance spectroscopy, Condensed Matter - Other Condensed Matter, Chemical state, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], scanning transmission electron microscopy, interface, annealing, 0210 nano-technology, scanning electron microscopy, Physics - Optics, Other Condensed Matter (cond-mat.other), Optics (physics.optics)
Abstract

We present the results of the characterization of Mg/Co periodic multilayers and their thermal stability for the EUV range. The annealing study is performed up to a temperature of 400\degree C. Images obtained by scanning transmission electron microscopy and electron energy loss spectroscopy clearly show the good quality of the multilayer structure. The measurements of the EUV reflectivity around 25 nm (~49 eV) indicate that the reflectivity decreases when the annealing temperature increases above 300\degreeC. X-ray emission spectroscopy is performed to determine the chemical state of the Mg atoms within the Mg/Co multilayer. Nuclear magnetic resonance used to determine the chemical state of the Co atoms and scanning electron microscopy images of cross sections of the Mg/Co multilayers reveal changes in the morphology of the stack from an annealing temperature of 305\degreee;C. This explains the observed reflectivity loss., Comment: Published in Applied Physics A: Materials Science \& Processing Published at http://www.springerlink.com.chimie.gate.inist.fr/content/6v396j6m56771r61/ 21 pages

Published
2011

12. Characterization of EUV periodic multilayers

Author

Evgueni Meltchakov, Jean-Michel André, Philippe Jonnard, Franck Delmotte, K. Le Guen, Anouk Galtayries, Zhanshan Wang, M.-H. Hu, Christophe Hecquet, Jingtao Zhu, Christian Meny, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Laboratoire de Physico-Chimie des Surfaces (LPCS), Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS), and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
010302 applied physics, extreme UV, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, multilayers, Analytical chemistry, 02 engineering and technology, [CHIM.MATE]Chemical Sciences/Material chemistry, Sputter deposition, 021001 nanoscience & nanotechnology, 01 natural sciences, Spectral line, Ion, NMR spectra database, Chemical state, x-ray, Extreme ultraviolet, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], 0103 physical sciences, interdiffusion, Emission spectrum, 0210 nano-technology, Spectroscopy, roughness
Abstract

13 pages; International audience; Nanometric Co/Mg, Co/Mg/B4C, Al/SiC and Al/Mo/SiC periodic multilayers deposited by magnetron sputtering are studied in order to correlate their optical performances in the extreme ultraviolet (EUV) range to their structural quality. To that purpose, our recently developed methodology based on high resolution x-ray emission spectroscopy (XES) and x-ray and EUV reflectometry is now extended to nuclear magnetic resonance (NMR) spectroscopy and time-of-flight secondary ions mass spectrometry (ToF-SIMS). The analysis of the Co Lalpha,beta and Mg Kbeta emission spectra shows that the Co and Mg atoms within the multilayers are in a chemical state equivalent to that of the atoms in the pure Co and Mg references respectively. But NMR spectra give evidence for a reaction between Co atoms and B and/or C atoms from B4C. The Al and Si Kbeta emission spectra do not reveal the formation of an interfacial compound in Al/SiC and Al/Mo/SiC. Only the roughness limits the optical quality of Al/SiC. The comparative analysis of the ToF-SIMS spectra of Al/SiC and Al/Mo/SiC indicates that the structural quality is enhanced when Mo is introduced within the stack.

Published
2011

13. Optical, chemical, depth, and magnetic characterization of Mg/Co-based nanometric periodic multilayers

Author

Imène Esteve, Z. S. Wang, Jingtao Zhu, Christian Meny, S. Nannarone, Nicola Mahne, Adriano Verna, K. Le Guen, Philippe Jonnard, M.-H. Hu, H. Ch. Li, S.-K. Zhou, Michael Walls, Jean-Michel André, Anouk Galtayries, A. Giglia, AA. VV., Lequime M, Macleod H A, Ristau D, Jonnard, P., Le Guen, K., Hu, M. H., André, J. M., Zhou, S. K., Li, H. C. h., Zhu, J. T., Wang, Z. S., Mahne, N., Giglia, A., Nannarone, S., Verna, Adriano, Meny, C., Galtayries, A., Estève, I., and Walls, M.

Subjects
Secondary ion mass spectrometry, X-ray reflectivity, ultraviolet optical elements, multilayer systems, Magnetization, Materials science, Absorption edge, Scanning electron microscope, Magnetism, Annealing (metallurgy), Analytical chemistry, Emission spectrum
Abstract

We have developed and elaborated a series of Mg/Co-based periodic multilayers to build efficient mirrors for the extreme ultraviolet (EUV) range. For s-polarized light and at 45° of grazing incidence, the reflectivity of as-deposited Mg/Co is 42.6% at 25.1 nm. X-ray emission spectroscopy and nuclear magnetic resonance measurements do not indicate any noticeable interdiffusion at the interfaces between layers. Scanning transmission electronic microscopy images attest the high structural quality of the stack. X-ray reflectivity (XRR) curves in the hard x-ray and EUV domains confirm this description and estimate a weak interfacial roughness (~ 0.5 nm). Taking advantage of the magnetic character of Co, we have performed resonant magnetic reflectivity measurements by scanning the photon energy around the Co L absorption edge for opposite circular polarizations. The magnetization profile of the Co layers within Co/Mg determined with an expected depth resolution of one monolayer confirms the interface abruptness. Scanning electron microscopy images and XRR curves give evidence of the thermal stability of Mg/Co up to 300 °C. From that value, a strong change in the sample morphology due to the delamination of the multilayer from the substrate occurs. This should account for the drastic reflectivity drop observed above this temperature. Starting from Mg/Co, we have inserted a Zr layer at one or at the other interface or at both interfaces to estimate the effect of the introduction of a third material within the period. We have found that Mg/Co/Zr is more efficient (50% of reflectivity) than Mg/Zr/Co and Mg/Zr/Co/Zr (~ 40%). Through time-of-flight secondary ion mass spectrometry depth profiling and NMR measurements, we have assigned this difference to an intermixing process when Co layers are deposited onto Zr layers.

Published
2011

14. Development and Interfacial Characterization of Co/Mg Periodic Multilayers for the EUV Range

Author

Jean-Michel André, H. Ch. Li, Z.-S. Wang, S.-K. Zhou, K. Le Guen, Philippe Jonnard, Jingtao Zhu, M.-H. Hu, Christian Meny, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Extreme ultraviolet lithography, Mg, Analytical chemistry, 02 engineering and technology, Surface finish, Boron carbide, Photon energy, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Co, chemistry.chemical_compound, 0103 physical sciences, x-ray emission, Emission spectrum, Physical and Theoretical Chemistry, 010302 applied physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], multilayer, EUV reflectivity, 021001 nanoscience & nanotechnology, NMR, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, X-ray reflectivity, Wavelength, Chemical state, Crystallography, General Energy, chemistry, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], x-ray reflectivity, interface, 0210 nano-technology
Abstract

Reprinted with permission from (J. Phys. Chem. C, 2010, 114 (14), pp 6484-6490). Copyright (2010) American Chemical Society.; International audience; We propose a new system, namely the periodic Co/Mg multilayer system, for optics applications in the EUV range. Close to the Mg L edge, i.e., around a wavelength of 25 nm or a photon energy of 50 eV, a reflectivity of about 43% is measured at 45° for s-polarized radiation. Moreover, it appears that this system is stable over a period of time of three months. The introduction of thin boron carbide interfacial layers proves disastrous contrary to simulations that show this could be beneficial. We combine X-ray reflectivity in the hard X-ray range, X-ray emission spectroscopy, and nuclear magnetic resonance to determine the thickness and roughness of the Co and Mg layers as well as the chemical state of the Co and Mg atoms at the interfaces. This reveals that in the Co/Mg system the interfaces are abrupt and there is no interdiffusion between the Co and Mg layers. Then the difference between the experimental and simulated reflectivities is ascribed to the interfacial roughness of the order of 0.4 nm. In the Co/Mg/B4C system, evidence of a large mixing of the Co and B4C layers is presented and explains the poor reflectance of this system.

Published
2010

15. Thermal properties, optical and interface characterization of Mg/Co multilayers for the EUV range

Author

H. Ch. Li, Jean-Michel André, Jingtao Zhu, Nicola Mahne, Z. S. Wang, Philippe Jonnard, M.-H. Hu, S.-K. Zhou, K. Le Guen, A. Giglia, and Stefano Nannarone

Subjects
interfaces, X-ray reflectivity, Chemical species, Chemical state, Materials science, Scanning electron microscope, Annealing (metallurgy), multilayers, Extreme ultraviolet lithography, Analytical chemistry, Thermal stability, Emission spectrum
Abstract

We present the results of the thermal stability of Mg/Co multilayers in the EUV range. The annealing study is performed up to a temperature of 400°C. The X-ray reflectivity at 0.154 nm is used in order to determine the structural parameters (thickness, roughness and density) of the layers. The measurements of the EUV reflectivity around 25 nm show that the reflectivity decreases when the annealing temperature increases above 300°C. X-ray emission spectroscopy is performed to determine the chemical state of the Mg atoms within the Mg/Co multilayer. The results show a small oxidation after annealing at 305°C, which increases greatly at 400°C. Scanning electron microscopy images of cross sections of the multilayer show a change of the surface morphology above 305°C. This large change of morphology and the oxidation explain the large reflectivity loss.

Published
2010

16. Introduction of Zr in nanometric periodic Mg/Co multilayers

Author

Philippe Jonnard, Angela Giglia, Jean-Michel André, Jie Zhu, S.-K. Zhou, S. Nannarone, Z.-S. Wang, K. Le Guen, M.-H. Hu, N. Mahne, Haochuan Li, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, CNR Istituto Officina dei Materiali (IOM), Consiglio Nazionale delle Ricerche [Roma] (CNR), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
Materials science, Annealing (metallurgy), Extreme ultraviolet lithography, multilayers, Mg, Analytical chemistry, chemistry.chemical_element, FOS: Physical sciences, 02 engineering and technology, 01 natural sciences, Spectral line, 010309 optics, Co, Transition metal, 0103 physical sciences, General Materials Science, material order, x-ray and EUV reflectivity, Alkaline earth metal, Zirconium, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Condensed Matter - Materials Science, Zr, multilayer, Materials Science (cond-mat.mtrl-sci), General Chemistry, Atmospheric temperature range, 021001 nanoscience & nanotechnology, Condensed Matter - Other Condensed Matter, chemistry, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], X-ray crystallography, 0210 nano-technology, Physics - Optics, Other Condensed Matter (cond-mat.other), Optics (physics.optics)
Abstract

We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45deg of grazing incidence and reaches 51.3% upon annealing at 200deg C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out., Comment: 19 pages

Published
2010

17. On the Kramers-Kronig transform with logarithmic kernel for the reflection phase in the Drude model

Author

N. Mahne, S. Nannarone, Philippe Jonnard, K. Le Guen, Jean-Michel André, Angela Giglia, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratorio Nazionale TASC (TASC), Consiglio Nazionale delle Ricerche (CNR), and National Research Council of Italy | Consiglio Nazionale delle Ricerche (CNR)

Subjects
optical properties, Karush–Kuhn–Tucker conditions, Kramers–Kronig relations, Logarithm, reflectance, Synchrotron radiation, FOS: Physical sciences, Physics::Optics, 02 engineering and technology, Dielectric, 01 natural sciences, 0103 physical sciences, Kramers-Kronig analysis, 010306 general physics, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Drude model, Mathematical analysis, 16. Peace & justice, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, Kernel (image processing), thin films, 0210 nano-technology, Refractive index, Physics - Optics, Optics (physics.optics)
Abstract

We use the Kramers-Kronig transform (KKT) with logarithmic kernel to obtain the reflection phase and, subsequently, the complex refractive index of a bulk mirror from reflectance. However, there remains some confusion regarding the formulation for this analysis. Assuming the damped Drude model for the dielectric constant and the oblique incidence case, we calculate the additional terms: phase at zero frequency and Blashke factor and we propose a reformulated KKT within this model. Absolute reflectance in the s-polarization case of a gold film is measured between 40 and 350 eV for various glancing angles using synchrotron radiation and its complex refractive index is deduced using the reformulated KKT that we propose. The results are discussed with respect to the data available in the literature., Comment: 18 pages, piblished in j. Mod. Opt. 57, 1504 (2010)

Published
2010
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18. Spectroscopic study of interfaces in Al/Ni periodic multilayers

Author

G. Gamblin, B. Rouvellou, M. Salou, K. Le Guen, Stéphane Rioual, Philippe Jonnard, J. Ben Youssef, Polytech'Paris-UPMC, Université Pierre et Marie Curie - Paris 6 (UPMC), Laboratoire de magnétisme de Bretagne (LMB), Université de Brest (UBO)-Institut Brestois du Numérique et des Mathématiques (IBNM), Université de Brest (UBO)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
010302 applied physics, Diffraction, Condensed Matter - Materials Science, Valence (chemistry), Chemistry, Annealing (metallurgy), Intermetallic, Analytical chemistry, Materials Science (cond-mat.mtrl-sci), FOS: Physical sciences, 02 engineering and technology, Metals and alloys, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Electronic, Optical and Magnetic Materials, Multilayers, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], 0103 physical sciences, X-ray emission spectra and fluorescence, Physical Sciences, Emission spectrum, 0210 nano-technology, Instrumentation
Abstract

Using electron-induced X-ray emission spectroscopy (XES), we have studied two Al/Ni periodic multilayers that differ only by their annealing temperature: as-deposited and annealed at 115C. Our aim is to show that XES can provide further details about the chemistry at the metal-metal interface, in addition to what is obtained by X-ray diffraction. The distribution of valence states exhibiting Al 3p and Ni 3d character is determined from the analysis of the Al Kbeta and Ni Lalpha emission bands respectively. The multilayer emission bands are compared to those of reference materials: pure Al and Ni metals as well as Al3Ni, Al3Ni2 and AlNi intermetallics. We provide evidence that, for temperatures up to 115C, Al3Ni is the major component of the multilayer., Comment: 5 pages. Can also be found at : http://www.epjap.org/action/displayAbstract?fromPage=online\&aid=8011580

Published
2009

19. Analysis of periodic Mo/Si multilayers: influence of the Mo thickness

Author

F. Delmotte, Nicola Mahne, Hélène Maury, Jean-Michel André, Angelo Giglia, Stefano Nannarone, K. Le Guen, Françoise Bridou, Philippe Jonnard, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Istituto Nazionale per la Fisica della Materia (INFM), Università del Salento [Lecce], Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), European Project, Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), CNR - Istituto Officina dei Materiali ( IOM ), Consiglio Nazionale delle Ricerche [Roma] ( CNR ), Laboratoire Charles Fabry de l'Institut d'Optique ( LCFIO ), Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratorio Nazionale TASC ( TASC ), Consiglio Nazionale delle Ricerche ( CNR ), Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS), Laboratorio Nazionale TASC (TASC), and Consiglio Nazionale delle Ricerche (CNR)

Subjects
Materials science, Superlattices, multilayers, Analytical chemistry, [ PHYS.COND.CM-MS ] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], FOS: Physical sciences, 02 engineering and technology, Surface finish, 01 natural sciences, x-ray reflection, molybdenum, 0103 physical sciences, x-ray emission, Materials Chemistry, x-ray scattering, Emission spectrum, ComputingMilieux_MISCELLANEOUS, roughness, 010302 applied physics, Condensed Matter - Materials Science, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], multilayer, Materials Science (cond-mat.mtrl-sci), silicon, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Reflectivity, optics, Surfaces, Coatings and Films, Amorphous solid, X-ray reflectivity, Crystallography, Wavelength, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Crystallite, 0210 nano-technology, Refractive index, Crystalline-amorphous interfaces
Abstract

International audience; A set of Mo/Si periodic multilayers is studied by non destructive analysis methods. The thickness of the Si layers is 5 nm while the thickness of the Mo layers changes from one multilayer to another, from 2 to 4 nm. This enables us to probe the effect of the transition between the amorphous to crystalline state of the Mo layers near the interfaces with Si on the optical performances of the multilayers. This transition results in the variation of the refractive index (density variation) of the Mo layers, as observed by x-ray reflectivity (XRR) at a wavelength of 0.154 nm. Combining x-ray emission spectroscopy and XRR, the parameters (composition, thickness and roughness) of the interfacial layers formed by the interaction between the Mo and Si layers are determined. However, these parameters do not evolve significantly as a function of the Mo thickness. It is observed by diffuse scattering at 1.33 nm that the lateral correlation length of the roughness strongly decreases when the Mo thickness goes from 2 to 3 nm. This is due to the development of Mo crystallites parallel to the multilayer surface.

Published
2008

20. X-ray spectroscopic application of Cr/Sc periodic multilayers

Author

Marie-Françoise Ravet-Krill, Philippe Jonnard, F. Delmotte, K. Le Guen, A. Hardouin, Hélène Maury, J.-M. André, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Charles Fabry de l'Institut d'Optique ( LCFIO ), Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ), and Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)

Subjects
Water window, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, Microscope, [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], Physics and Astronomy (miscellaneous), Spectrometer, X-ray, Analytical chemistry, chemistry.chemical_element, Physics::Optics, 02 engineering and technology, 021001 nanoscience & nanotechnology, Mass spectrometry, 01 natural sciences, law.invention, 010309 optics, Wavelength, Chemical state, chemistry, law, 0103 physical sciences, Scandium, 0210 nano-technology
Abstract

International audience; The use of Cr/Sc multilayer interferential mirrors (MIMs) in optical systems such as x-ray microscopes or telescopes have been reported for the water window (between C K- and O K-absorption edges). However, their possibilities in spectroscopic application have never been described in the literature. The purpose of the paper is to report for the first time on the performances of Cr/Sc MIMs as Bragg dispersive devices for the analysis in wavelength dispersive spectrometry of samples containing N or Sc atoms. The possibility to distinguish the chemical state of the emitting N or Sc atoms is evidenced by using Johan-type and double-crystal spectrometers.

Published
2007

22. Nondipolar Electron Angular Distributions from Fixed-in-Space Molecules

Author

Denis Céolin, Oliver Hemmers, Renaud Guillemin, C. Miron, N. Leclercq, Mario Simon, Eiji Shigemasa, Pascal Morin, P. W. Langhoff, K. Le Guen, Dennis W. Lindle, Department of Chemistry, University of Nevada [Reno], Synchrotron SOLEIL (SSOLEIL), Centre National de la Recherche Scientifique (CNRS), Laboratoire pour l'utilisation du rayonnement électromagnétique (LURE), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-MENRT-Centre National de la Recherche Scientifique (CNRS), Laboratoire Francis PERRIN (LFP - URA 2453), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), and Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Physics, Photon, PACS: 33.60.Fy, 33.80.Eh, General Physics and Astronomy, Electron, Space (mathematics), 01 natural sciences, 010305 fluids & plasmas, Azimuth, Momentum, [CHIM.THEO]Chemical Sciences/Theoretical and/or physical chemistry, Total angular momentum quantum number, 0103 physical sciences, Angular momentum coupling, Molecule, Physics::Atomic Physics, Atomic physics, 010306 general physics
Abstract

4 pages; The first indication of nondipole effects in the azimuthal dependence of photoelectron angular distributions emitted from fixed-in-space molecules is demonstrated in N 2. Comparison of the results with angular distributions observed for randomly oriented molecules and theoretical derivations for the nondipole correction first order in photon momentum suggests that higher orders will be needed to describe distributions measured in the molecular frame.

Published
2002

23. The TPLUS project : a table-top tunable parametric UV radiation source

Author

F. Delmotte, G Turk, Philippe Jonnard, Arnaud Jérôme, A L Coutrot, Jean-Michel André, K. Le Guen, S. de Rossi, Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry / Scop, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Charles Fabry ( LCF ), Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ), and Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
History, Radiation, medicine.disease_cause, Table (information), 01 natural sciences, 010305 fluids & plasmas, Education, Optics, 0103 physical sciences, medicine, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], 010306 general physics, [ PHYS.PHYS.PHYS-INS-DET ] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Parametric radiation, Electron gun, Parametric statistics, Physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], EUV source, multilayer, business.industry, tunable source, Computer Science Applications, Extreme ultraviolet, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, Optoelectronics, [ SPI.OPTI ] Engineering Sciences [physics]/Optics / Photonic, x-ray source, business, Energy (signal processing), Ultraviolet
Abstract

5 pages; International audience; We present the project of a parametric radiation source, the Tunable Parametric Laboratory Ultraviolet Source (TPLUS). We aim at building a prototype of such a source with an electron gun of moderate energy, 100 keV, interacting with a periodic multilayer within a high vacuum experiment chamber. The objective of this table-top facility is to provide users with a cost-effective, simple-handling mean to provide a tunable and intense radiation source in the extreme UV and soft x-ray ranges.

Published
2012

24. Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers

Author

S.-K. Zhou, Christian Meny, M.-H. Hu, Jean-Michel André, H. Ch. Li, Philippe Jonnard, K. Le Guen, Jingtao Zhu, Anouk Galtayries, Z. S. Wang, Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Institute of Precision Optical Engineering ( IPOE ), Institut de Physique et Chimie des Matériaux de Strasbourg ( IPCMS ), Université de Strasbourg ( UNISTRA ) -Centre National de la Recherche Scientifique ( CNRS ) -Matériaux et nanosciences d'Alsace, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Institut National de la Santé et de la Recherche Médicale ( INSERM ) -Centre National de la Recherche Scientifique ( CNRS ) -Réseau nanophotonique et optique, Université de Strasbourg ( UNISTRA ) -Université de Haute-Alsace (UHA) Mulhouse - Colmar ( Université de Haute-Alsace (UHA) ) -Centre National de la Recherche Scientifique ( CNRS ) -Université de Strasbourg ( UNISTRA ), Laboratoire de Physico-Chimie des Surfaces ( LPCS ), Centre National de la Recherche Scientifique ( CNRS ), Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Institute of Precision Optical Engineering [Shangai] (IPOE), Tongji University, Institut de Physique et Chimie des Matériaux de Strasbourg (IPCMS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Laboratoire de Physico-Chimie des Surfaces (LPCS), Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL (ENSCP), Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Réseau nanophotonique et optique, and Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Materials science, Physics and Astronomy (miscellaneous), Period (periodic table), Optical contrast, Superlattice, Aucun, Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, 010309 optics, 0103 physical sciences, Zirconium, multilayer, Magnesium, [CHIM.MATE]Chemical Sciences/Material chemistry, [ PHYS.COND.CM-GEN ] Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], 021001 nanoscience & nanotechnology, Reflectivity, Secondary ion mass spectrometry, Crystallography, chemistry, [PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other], [ CHIM.MATE ] Chemical Sciences/Material chemistry, interface, 0210 nano-technology, Cobalt
Abstract

We have developed Mg/Co, Mg/Zr/Co, Mg/Co/Zr, and Mg/Zr/Co/Zr periodic multilayers and measured at 25.1 nm a reflectivity (R) highly sensitive to the material order within the period. To understand why Mg/Co/Zr is a more efficient mirror (R=50%) than Mg/Zr/Co and Mg/Zr/Co/Zr (similar to 40%), we have probed the interface quality through time-of-flight secondary ion mass spectrometry and nuclear magnetic resonance measurements. The Zr-on-Co interface is found quite sharp while a strong intermixing process is evidenced between the upper Co and lower Zr layers, responsible for the decrease in optical contrast and subsequent R loss. (C) 2011 American Institute of Physics. [doi:10.1063/1.3601859]

Published
2011

26. Characterization of Pd/Y multilayers with B 4 C barrier layers using GIXR and X-ray standing wave enhanced HAXPES.

Author

Wu MY, Huang QS, Le Guen K, Ilakovac V, Li BX, Wang ZS, Giglia A, Rueff JP, and Jonnard P

Abstract

Pd/Y multilayers are high-reflectance mirrors designed to work in the 7.5-11 nm wavelength range. Samples, prepared by magnetron sputtering, are deposited with or without B 4 C barrier layers located at the interfaces of the Pd and Y layers to reduce interdiffusion, which is expected from calculating the mixing enthalpy of Pd and Y. Grazing-incident X-ray reflectometry is used to characterize these multilayers. B 4 C barrier layers are found to be effective in reducing Pd-Y interdiffusion. Details of the composition of the multilayers are revealed by hard X-ray photoemission spectroscopy with X-ray standing wave effects. This consists of measuring the photoemission intensity from the samples by performing an angular scan in the region corresponding to the multilayer period and an incident photon energy according to Bragg's law. The experimental results indicate that Pd does not chemically react with B nor C at the Pd-B 4 C interface while Y does react at the Y-B 4 C interface. The formation of Y-B or Y-C chemical compounds could be the reason why the interfaces are stabilized. By comparing the experimentally obtained angular variation of the characteristic photoemission with theoretical calculations, the depth distribution of each component element can be interpreted.

Published
2018
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27. EUV stimulated emission from MgO pumped by FEL pulses.

Author

Jonnard P, André JM, Le Guen K, Wu M, Principi E, Simoncig A, Gessini A, Mincigrucci R, Masciovecchio C, and Peyrusse O

Abstract

Stimulated emission is a fundamental process in nature that deserves to be investigated and understood in the extreme ultra-violet (EUV) and x-ray regimes. Today, this is definitely possible through high energy density free electron laser (FEL) beams. In this context, we give evidence for soft-x-ray stimulated emission from a magnesium oxide solid target pumped by EUV FEL pulses formed in the regime of travelling-wave amplified spontaneous emission in backward geometry. Our results combine two effects separately reported in previous works: emission in a privileged direction and existence of a material-dependent threshold for the stimulated emission. We develop a novel theoretical framework, based on coupled rate and transport equations taking into account the solid-density plasma state of the target. Our model accounts for both observed mechanisms that are the privileged direction for the stimulated emission of the Mg L 2,3 characteristic emission and the pumping threshold.

Published
2017
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28. X-ray fluorescence induced by standing waves in the grazing-incidence and grazing-exit modes: study of the Mg-Co-Zr system.

Author

Tu Y, Yuan Y, Le Guen K, André JM, Zhu J, Wang Z, Bridou F, Giglia A, and Jonnard P

Abstract

The characterization of Mg-Co-Zr tri-layer stacks using X-ray fluorescence induced by X-ray standing waves, in both the grazing-incidence (GI) and the grazing-exit (GE) modes, is presented. The introduction of a slit in the direction of the detector improves the angular resolution by a factor of two and significantly improves the sensitivity of the technique for the chemical characterization of the buried interfaces. By observing the intensity variations of the Mg Kα and Co Lα characteristic emissions as a function of the incident (GI mode) or detection (GE mode) angle, it is shown that the interfaces of the Si/[Mg/Co/Zr] × 30 multilayer are abrupt, whereas in the Si/[Mg/Zr/Co] × 30 multilayer a strong intermixing occurs at the Co-on-Zr interfaces. An explanation of this opposite behavior of the Co-on-Zr and Zr-on-Co interfaces is given by the calculation of the mixing enthalpies of the Co-Mg, Co-Zr and Mg-Zr systems, which shows that the Co-Zr system presents a negative value and the other two systems present positive values. Together with the difference of the surface free energies of Zr and Co, this leads to the Mg/Zr/Co system being considered as a Mg/CoxZry bi-layer stack, with x/y estimated around 3.5.

Published
2015
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29. Enhancement of the reflectivity of Al/Zr multilayers by a novel structure.

Author

Zhong Q, Zhang Z, Qi R, Li J, Wang Z, Le Guen K, André JM, and Jonnard P

Subjects
Light, Materials Testing, Scattering, Radiation, Aluminum chemistry, Photometry methods, Refractometry methods, Silicon chemistry, Zirconium chemistry
Abstract

The reflectivity of Al/Zr multilayers is enhanced by the use of a novel structure. The Al layers are divided by insertion of Si layers. In addition, Si barrier layers are inserted at the Al/Zr interfaces (Zr-on-Al and Al-on-Zr). As a result, crystallization of the Al layer is inhibited and that of Zr is enhanced. In grazing incidence x-ray reflectometry, x-ray diffraction, and extreme ultraviolet measurements, the novel multilayers exhibit lower interfacial roughness compared with traditional multilayer structures, and their reflectivity is increased from 48.2% to 50.0% at a 5° angle of incidence. These novel multilayers also have potential applications in other multilayer systems and the semiconductor industry.

Published
2013
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30. Optical and structural performance of the Al(1%wtSi)/Zr reflection multilayers in the 17-19nm region.

Author

Zhong Q, Li W, Zhang Z, Zhu J, Huang Q, Li H, Wang Z, Jonnard P, Le Guen K, André JM, Zhou H, and Huo T

Subjects
Crystallization methods, Equipment Design, Magnetics, Materials Testing, Microscopy, Atomic Force methods, Microscopy, Electron, Transmission methods, Surface Properties, X-Ray Diffraction, X-Rays, Aluminum chemistry, Optics and Photonics, Zirconium chemistry
Abstract

Two kinds of Al/Zr (Al(1%wtSi)/Zr and Al(Pure)/Zr) multilayers for extreme ultraviolet (EUV) optics were deposited on fluorine doped tin oxide coated glass by using direct-current magnetron sputtering technology. The comparison of the two systems shows that the Al(1%wtSi)/Zr multilayers have the lowest interfacial roughness and highest reflectivity. Based on the X-ray diffraction, the performance of the two systems is determined by the crystallization of Al layer. To fully understand the Al(1%wtSi)/Zr multilayer, we built up a two-layer model to fit situation of the AFM images, and simulate the grazing incident x-ray reflection-measurements of multilayers with various periods (N = 10, 40, 60, 80). Below 40 periods, the roughness components are lowered. After 40 periods, both surface and interfacial roughness increase with the period number, and decrease the reflectance. According to transmission electron microscope images, the model can represent the variable structure of the system.

Published
2012
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31. Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers.

Author

Zhu J, Zhou S, Li H, Wang Z, Jonnard P, Le Guen K, Hu MH, André JM, Zhou H, and Huo T

Abstract

The efficiency of B(4)C, Mo and Zr barrier layers to improve thermal stability of Mg/Co multilayer up to 400 °C is investigated. Multilayers were deposited by direct current magnetron sputtering and characterized using X-ray and extreme ultraviolet reflection. The results suggest that B(4)C barrier layer is not effective due to drastic diffusion at Mg-B(4)C interface. Although introducing Mo barriers improves the thermal stability from 200 to 300 °C, it increases the interface roughness and thus degrades the optical performances. On the contrary, Zr barriers can significantly increase the thermal stability of Mg/Co up to 400 °C without optical performance degradation. Thus, Mg/Zr/Co/Zr is suitable for EUV applications requiring both optimal optical performances and heat resistance., (© 2011 Optical Society of America)

Published
2011
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32. Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light.

Author

Hu MH, Le Guen K, André JM, Jonnard P, Meltchakov E, Delmotte F, and Galtayries A

Subjects
Equipment Design, Equipment Failure Analysis, Materials Testing, Ultraviolet Rays, Aluminum chemistry, Carbon Compounds, Inorganic chemistry, Lenses, Membranes, Artificial, Molybdenum chemistry, Photometry instrumentation, Refractometry instrumentation, Silicon Compounds chemistry
Abstract

We present the results of an optical and chemical, depth and surface study of Al/Mo/SiC periodic multilayers, designed as high reflectivity coatings for the extreme ultra-violet (EUV) range. In comparison to the previously studied Al/SiC system, the introduction of Mo as a third material in the multilayer structure allows us to decrease In comparison to the previously studied Al/SiC system with a reflectance of 37% at near normal incidence around 17 nm, the introduction of Mo as a third material in the multilayer structure allows us to decrease the interfacial roughness and achieve an EUV reflectivity of 53.4%, measured with synchrotron radiation. This is the first report of a reflectivity higher than 50% around 17 nm. Time-of-flight secondary ion mass spectrometry (ToF-SIMS) and x-ray photoelectron spectroscopy (XPS) measurements are performed on the Al/Mo/SiC system in order to analyze the individual layers within the stack. ToF-SIMS and XPS results give evidence that the first SiC layer is partially oxidized, but the O atoms do not reach the first Mo and Al layers. We use these results to properly describe the multilayer stack and discuss the possible reasons for the difference between the measured and simulated EUV reflectivity values.

Published
2010
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33. Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength.

Author

Zhu J, Zhou S, Li H, Huang Q, Wang Z, Le Guen K, Hu MH, André JM, and Jonnard P

Abstract

Mg-based multilayers, including SiC/Mg, Co/Mg, B(4)C/Mg, and Si/Mg, are investigated for solar imaging and a He II calibration lamp at a 30.4 nm wavelength. These multilayers were fabricated by a magnetron sputtering method and characterized by x-ray reflection. The reflectivities of these multilayers were measured by synchrotron radiation. Near-normal-incidence reflectivities of Co/Mg and SiC/Mg multilayer mirrors are as high as 40.3% and 44.6%, respectively, while those of B(4)C/Mg and Si/Mg mirrors are too low for application. The measured results suggest that SiC/Mg, Co/Mg multilayers are promising for a 30.4 nm wavelength.

Published
2010
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34. Characterization of Al and Mg alloys from their X-ray emission bands.

Author

Jonnard P, Le Guen K, Gauvin R, and Le Berre JF

Abstract

The valence states of Mg-Al alloys are compared to those of reference materials (pure Mg and Al metals, and intermetallics). Two methods based on X-ray emission spectroscopy are proposed to determine the phases and their proportion: first, by analyzing the Al valence spectra of the Mg-rich alloys and the Mg valence spectra of the Al-rich alloys; second, by fitting with a linear combination of the reference spectra the Al spectra of the Al-rich alloys and the Mg spectra of the Mg-rich alloys. This enables us to determine that Al and Al3Mg2 are present in the 0-43.9 wt% Al composition range and Mg and Al12Mg17 are present in the 62.5-100 wt% Al composition range. In the 43.9-62.5% Al range, the alloy is single phase and an underestimation of the Al content of the alloy can be estimated from the comparison of the bandwidth of the alloy spectrum to the bandwidths of the reference spectra.

Published
2009
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35. Surface reactions of 3-butenenitrile on the Si(001)-2 x 1 surface at room temperature.

Author

Rangan S, Bournel F, Gallet JJ, Kubsky S, Le Guen K, Dufour G, Rochet F, Sirotti F, Piaszenski G, Funke R, Kneppe M, and Köhler U

Abstract

Using a combination of local -- scanning tunneling microscopy -- and spatially integrated, but chemically sensitive probes -- X-ray photoelectron spectroscopy and near edge X-ray absorption fine structure spectroscopy -- we have examined how 3-butenenitrile reacts with the Si(001)-2 x 1 surface at room temperature. Electron spectroscopies indicate three different nitrogen chemical bonds: a Si-C=N-Si bond, a C=C=N cumulative double bond, and a CN moiety datively bonded to a silicon atom. All molecular imprints detected by scanning tunneling microscopy (STM) involve two adjacent silicon dimers in the same row. The three geometries we propose -- a double di-sigma bonding via the CN and the C=C, a cumulative double bond formation associated with alphaC-H bond dissociation, and a di-sigma vinyl bonding plus a CN datively bonded to a silicon atom -- are all compatible with electron spectroscopies and data. Real-time Auger yield kinetic measurements show that the double di-sigma bonding geometry is unstable when exposed to a continuous flux of 3-butenenitrile molecules, as the Si-C=N-Si unit transforms into a CN moiety. A model is proposed to explain this observation.

Published
2005
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