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Characterization of EUV periodic multilayers
- Source :
- X-Ray Spectrometry, X-Ray Spectrometry, Wiley, 2011, 40, pp.338. ⟨10.1002/xrs.1350⟩, X-Ray Spectrometry, 2011, 40, pp.338. ⟨10.1002/xrs.1350⟩
- Publication Year :
- 2011
- Publisher :
- HAL CCSD, 2011.
-
Abstract
- 13 pages; International audience; Nanometric Co/Mg, Co/Mg/B4C, Al/SiC and Al/Mo/SiC periodic multilayers deposited by magnetron sputtering are studied in order to correlate their optical performances in the extreme ultraviolet (EUV) range to their structural quality. To that purpose, our recently developed methodology based on high resolution x-ray emission spectroscopy (XES) and x-ray and EUV reflectometry is now extended to nuclear magnetic resonance (NMR) spectroscopy and time-of-flight secondary ions mass spectrometry (ToF-SIMS). The analysis of the Co Lalpha,beta and Mg Kbeta emission spectra shows that the Co and Mg atoms within the multilayers are in a chemical state equivalent to that of the atoms in the pure Co and Mg references respectively. But NMR spectra give evidence for a reaction between Co atoms and B and/or C atoms from B4C. The Al and Si Kbeta emission spectra do not reveal the formation of an interfacial compound in Al/SiC and Al/Mo/SiC. Only the roughness limits the optical quality of Al/SiC. The comparative analysis of the ToF-SIMS spectra of Al/SiC and Al/Mo/SiC indicates that the structural quality is enhanced when Mo is introduced within the stack.
- Subjects :
- 010302 applied physics
extreme UV
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Materials science
multilayers
Analytical chemistry
02 engineering and technology
[CHIM.MATE]Chemical Sciences/Material chemistry
Sputter deposition
021001 nanoscience & nanotechnology
01 natural sciences
Spectral line
Ion
NMR spectra database
Chemical state
x-ray
Extreme ultraviolet
[PHYS.COND.CM-GEN]Physics [physics]/Condensed Matter [cond-mat]/Other [cond-mat.other]
0103 physical sciences
interdiffusion
Emission spectrum
0210 nano-technology
Spectroscopy
roughness
Subjects
Details
- Language :
- English
- ISSN :
- 00498246 and 10974539
- Database :
- OpenAIRE
- Journal :
- X-Ray Spectrometry, X-Ray Spectrometry, Wiley, 2011, 40, pp.338. ⟨10.1002/xrs.1350⟩, X-Ray Spectrometry, 2011, 40, pp.338. ⟨10.1002/xrs.1350⟩
- Accession number :
- edsair.doi.dedup.....1b166b80aca388f1b9ec61407bb1d3ad