Author: "Eric, Gullikson" / Publisher: spie - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Eric, Gullikson"' showing total 5 results

Start Over Author "Eric, Gullikson" Publisher spie

5 results on '"Eric, Gullikson"'

1. EUV refractive index measurements with improved accuracy and their impact in component modeling

Author: Franck Delmotte, Regina Soufli, Catherine Burcklen, Irene Papagiannouli, Farhad Salmassi, and Eric Gullikson
Published: 2023
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2. Ruthenium attenuated phase-shifting structure fabrication for contact-hole applications

Author: Weilun Chao, Dong-Seok Nam, Sharon Oh, Sarath Samdurala, Eric Gullikson, Farhad Salmassi, Anthony Yen, and Patrick Naulleau
Published: 2022
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3. Flight-like critical-angle transmission grating x-ray performance for Arcus

Author: Ralf K. Heilmann, Alexander Bruccoleri, Vadim Burwitz, Peter Cheimets, Casey DeRoo, Alan Garner, Eric Gullikson, Hans M. Guenther, Gisela Hartner, Edward Hertz, Andreas Langmeier, Thomas Mueller, Surangkhana Rukdee, Thomas Schmidt, Randall K. Smith, and Mark L. Schattenburg
Published: 2022
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4. Development of a standalone zoneplate based EUV mask defect review tool

Author: Chami Perera, Gi Sung Yoon, Ryan Carlson, Baorui Yang, Mike Hermes, Dave Houser, Alexander Khodarev, Chuck Murray, Travis Grodt, Arnaud Allézy, Weilun Chao, Farhad Salmassi, Eric Gullikson, and Patrick Naulleau
Published: 2022
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5. EUV phase scatterometry with linearized rigorous scattering

Author: Stuart Sherwin, Ryan Miyakawa, Eric Gullikson, Laura Waller, Andrew Neureuther, and Patrick Naulleau
Published: 2022
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