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Ruthenium attenuated phase-shifting structure fabrication for contact-hole applications

Authors :
Weilun Chao
Dong-Seok Nam
Sharon Oh
Sarath Samdurala
Eric Gullikson
Farhad Salmassi
Anthony Yen
Patrick Naulleau
Source :
International Conference on Extreme Ultraviolet Lithography 2022.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
International Conference on Extreme Ultraviolet Lithography 2022
Accession number :
edsair.doi...........d310ce3df37f969b92ad61637214b4f1
Full Text :
https://doi.org/10.1117/12.2645263
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