1. Multilevel 3-D Device Simulation Approach Applied to Deeply Scaled Nanowire Field Effect Transistors.
- Author
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Seoane, Natalia, Kalna, Karol, Cartoixa, Xavier, and Garcia-Loureiro, Antonio
- Subjects
- *
FIELD-effect transistors , *SILICON nanowires , *NANOWIRES , *QUANTUM gates , *SEMICONDUCTOR devices , *COMPUTER-aided design - Abstract
Three silicon nanowire (SiNW) field effect transistors (FETs) with 15-, 12.5- and 10.6-nm gate lengths are simulated using hierarchical multilevel quantum and semiclassical models verified against experimental ${I}_{D}$ – ${V}_{G}$ characteristics. The tight-binding (TB) formalism is employed to obtain the band structure in $\mathit {k}$ -space of ellipsoidal NWs to extract electron effective masses. The masses are transferred into quantum-corrected 3-D finite element (FE) drift-diffusion (DD) and ensemble Monte Carlo (MC) simulations, which accurately capture the quantum-mechanical confinement of the ellipsoidal NW cross sections. We demonstrate that the accurate parameterization of the bandstructure and the quantum-mechanical confinement has a profound impact on the computed ${I}_{D}$ – ${V}_{G}$ characteristics of nanoscaled devices. Finally, we devise a step-by-step technology computer-aided design (TCAD) methodology of simple parameterization for efficient DD device simulations. [ABSTRACT FROM AUTHOR]
- Published
- 2022
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