1. A Time-of-Flight Range Image Sensor With Background Canceling Lock-in Pixels Based on Lateral Electric Field Charge Modulation
- Author
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Sang-Man Han, Taishi Takasawa, Keita Yasutomi, Satoshi Aoyama, Keiichiro Kagawa, and Shoji Kawahito
- Subjects
CMOS image sensor ,depth image ,pinned pho-todiode ,Time-of-Flight (ToF) ,lateral electric field charge modu-lator (LEFM) ,Electrical engineering. Electronics. Nuclear engineering ,TK1-9971 - Abstract
This paper presents a CMOS time-of-flight (ToF) range image sensor using high-speed lock-in pixels with background light canceling capability. The proposed lock-in pixel uses MOS gate-induced lateral electric field control of depleted potential of pinned photodiode for implementing a multiple-tap charge modulator while achieving a high-speed charge transfer for high-time resolution. A TOF image sensor with 320 x 240 effective pixels is implemented using a 0.11-μm CMOS image sensor process. The TOF sensor has a range resolution of less than 12 mm without background light and 20 mm under background line for the range from 0.8 to 1.8 m and integration time of 50 ms. The effectiveness of in-pixel background light canceling with a three-tap output pixel is demonstrated.
- Published
- 2015
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