1. Characterization of Integrated Nano Materials
- Author
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Amal Chabli, Peter Cherns, Nicolas Chevalier, David Cooper, Dominique Lafond, François Bertin, Henri Blanc, Ariel Brenac, Philippe Andreucci, Jean-Christophe Gabriel, Erik M. Secula, David G. Seiler, Rajinder P. Khosla, Dan Herr, C. Michael Garner, Robert McDonald, Alain C. Diebold, Minatec Grenoble (CEA/ INP Grenoble), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), This work was supported by the French National Research Agency (ANR) through the Carnot fundingand the Basic Technological Research Program., David G. Seiler, Alain C. Diebold, Robert McDonald, C. Michael Garner, Dan Herr, Rajinder P. Khosla, Erik M. Secula, ANR-06-CARN-0011-01,Carnot LETI, and ANR-06-CARN-0011-01,LETI,LETI(2006)
- Subjects
Materials science ,Dynamic properties ,Nanowire ,Nanotechnology ,02 engineering and technology ,Carbon nanotube ,01 natural sciences ,law.invention ,Scanning probe microscopy ,[SPI]Engineering Sciences [physics] ,Beyond CMOS ,law ,0103 physical sciences ,[CHIM]Chemical Sciences ,Tomography ,010302 applied physics ,Protocol (science) ,Nanoelectromechanical systems ,Microscopy ,Nanotubes ,021001 nanoscience & nanotechnology ,Characterization (materials science) ,CMOS ,3D characterization ,0210 nano-technology ,PACS: 68.37.-d ,81.07.-b ,Nanowires NWs ,Nanoneedle - Abstract
International audience; Depending on the level of the technological developments, the characterization techniques are mature tosupport them or still require protocol definition and relevance demonstration for the issues addressed. For BeyondCMOS and Extreme CMOS devices, the integration of nano-objects like nanowires and carbon nanotubes, brings aboutanalysis requirements that are at the frontier of the state-of-the-art characterization techniques. The specific limitationsof the use of the existing physical and chemical characterization techniques for integrated nanomaterials are highlighted.In the case of Scanning Probe Microscopy, in-situ localization and positioning are specifically challenging and dataanalysis is mainly statistical. It is also shown how specific sample preparation may serve the extraction of the required3D information in particular for Electron Microscopy. The measurement developments related to NEMS technologiesguided by the need for dynamic characterization of these components are covered too.
- Published
- 2009